CN118901043A - 防护膜组件包装体和防护膜组件收容体 - Google Patents

防护膜组件包装体和防护膜组件收容体 Download PDF

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Publication number
CN118901043A
CN118901043A CN202380028794.XA CN202380028794A CN118901043A CN 118901043 A CN118901043 A CN 118901043A CN 202380028794 A CN202380028794 A CN 202380028794A CN 118901043 A CN118901043 A CN 118901043A
Authority
CN
China
Prior art keywords
pellicle
package
outgassing
adhesive
assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202380028794.XA
Other languages
English (en)
Chinese (zh)
Inventor
伊藤健
种市大树
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Chemicals Inc
Original Assignee
Mitsui Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Chemicals Inc filed Critical Mitsui Chemicals Inc
Publication of CN118901043A publication Critical patent/CN118901043A/zh
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/38—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for delicate optical, measuring, calculating or control apparatus
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
CN202380028794.XA 2022-03-22 2023-03-20 防护膜组件包装体和防护膜组件收容体 Pending CN118901043A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022045759 2022-03-22
JP2022-045759 2022-03-22
PCT/JP2023/011023 WO2023182314A1 (ja) 2022-03-22 2023-03-20 ペリクル包装体及びペリクル収容体

Publications (1)

Publication Number Publication Date
CN118901043A true CN118901043A (zh) 2024-11-05

Family

ID=88101092

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202380028794.XA Pending CN118901043A (zh) 2022-03-22 2023-03-20 防护膜组件包装体和防护膜组件收容体

Country Status (5)

Country Link
JP (1) JP7701554B2 (enrdf_load_stackoverflow)
KR (1) KR20240148395A (enrdf_load_stackoverflow)
CN (1) CN118901043A (enrdf_load_stackoverflow)
TW (1) TW202338495A (enrdf_load_stackoverflow)
WO (1) WO2023182314A1 (enrdf_load_stackoverflow)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61203383A (ja) * 1985-02-26 1986-09-09 ホ−ヤ株式会社 基板保持構造
JPH0624837Y2 (ja) * 1988-04-06 1994-06-29 ダイセル化学工業株式会社 ペリクル収納容器
JP2005321532A (ja) * 2004-05-07 2005-11-17 Shin Etsu Chem Co Ltd 基板収納ケース
JP4324944B2 (ja) 2005-06-29 2009-09-02 信越ポリマー株式会社 精密部材収納容器
JP5209423B2 (ja) 2008-09-11 2013-06-12 旭化成イーマテリアルズ株式会社 ペリクル梱包構造体
JP5767730B2 (ja) * 2014-03-20 2015-08-19 旭化成イーマテリアルズ株式会社 収納容器からの大型ペリクルの取出し方法

Also Published As

Publication number Publication date
JPWO2023182314A1 (enrdf_load_stackoverflow) 2023-09-28
KR20240148395A (ko) 2024-10-11
JP7701554B2 (ja) 2025-07-01
WO2023182314A1 (ja) 2023-09-28
TW202338495A (zh) 2023-10-01

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