JP7701554B2 - ペリクル包装体及びペリクル収容体 - Google Patents

ペリクル包装体及びペリクル収容体 Download PDF

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Publication number
JP7701554B2
JP7701554B2 JP2024510198A JP2024510198A JP7701554B2 JP 7701554 B2 JP7701554 B2 JP 7701554B2 JP 2024510198 A JP2024510198 A JP 2024510198A JP 2024510198 A JP2024510198 A JP 2024510198A JP 7701554 B2 JP7701554 B2 JP 7701554B2
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JP
Japan
Prior art keywords
pellicle
outgassing
packaging
adhesive
package
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2024510198A
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English (en)
Japanese (ja)
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JPWO2023182314A1 (enrdf_load_stackoverflow
Inventor
健 伊藤
大樹 種市
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Chemicals Inc
Original Assignee
Mitsui Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Mitsui Chemicals Inc filed Critical Mitsui Chemicals Inc
Publication of JPWO2023182314A1 publication Critical patent/JPWO2023182314A1/ja
Application granted granted Critical
Publication of JP7701554B2 publication Critical patent/JP7701554B2/ja
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/38—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for delicate optical, measuring, calculating or control apparatus
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP2024510198A 2022-03-22 2023-03-20 ペリクル包装体及びペリクル収容体 Active JP7701554B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022045759 2022-03-22
JP2022045759 2022-03-22
PCT/JP2023/011023 WO2023182314A1 (ja) 2022-03-22 2023-03-20 ペリクル包装体及びペリクル収容体

Publications (2)

Publication Number Publication Date
JPWO2023182314A1 JPWO2023182314A1 (enrdf_load_stackoverflow) 2023-09-28
JP7701554B2 true JP7701554B2 (ja) 2025-07-01

Family

ID=88101092

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024510198A Active JP7701554B2 (ja) 2022-03-22 2023-03-20 ペリクル包装体及びペリクル収容体

Country Status (5)

Country Link
JP (1) JP7701554B2 (enrdf_load_stackoverflow)
KR (1) KR20240148395A (enrdf_load_stackoverflow)
CN (1) CN118901043A (enrdf_load_stackoverflow)
TW (1) TW202338495A (enrdf_load_stackoverflow)
WO (1) WO2023182314A1 (enrdf_load_stackoverflow)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005321532A (ja) 2004-05-07 2005-11-17 Shin Etsu Chem Co Ltd 基板収納ケース
JP2007012793A (ja) 2005-06-29 2007-01-18 Shin Etsu Polymer Co Ltd 精密部材収納容器
JP2010064775A (ja) 2008-09-11 2010-03-25 Asahi Kasei E-Materials Corp ペリクル梱包構造体
JP2014167627A (ja) 2014-03-20 2014-09-11 Asahi Kasei E-Materials Corp 収納容器からの大型ペリクルの取出し方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61203383A (ja) * 1985-02-26 1986-09-09 ホ−ヤ株式会社 基板保持構造
JPH0624837Y2 (ja) * 1988-04-06 1994-06-29 ダイセル化学工業株式会社 ペリクル収納容器

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005321532A (ja) 2004-05-07 2005-11-17 Shin Etsu Chem Co Ltd 基板収納ケース
JP2007012793A (ja) 2005-06-29 2007-01-18 Shin Etsu Polymer Co Ltd 精密部材収納容器
JP2010064775A (ja) 2008-09-11 2010-03-25 Asahi Kasei E-Materials Corp ペリクル梱包構造体
JP2014167627A (ja) 2014-03-20 2014-09-11 Asahi Kasei E-Materials Corp 収納容器からの大型ペリクルの取出し方法

Also Published As

Publication number Publication date
CN118901043A (zh) 2024-11-05
JPWO2023182314A1 (enrdf_load_stackoverflow) 2023-09-28
KR20240148395A (ko) 2024-10-11
WO2023182314A1 (ja) 2023-09-28
TW202338495A (zh) 2023-10-01

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