Classifications

• • G—PHYSICS
  • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
  • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
  • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
  • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
  • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
  • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
  • B65D85/38—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for delicate optical, measuring, calculating or control apparatus
• • G—PHYSICS
  • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
  • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
  • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
  • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Definitions

• the present disclosure relates to a pellicle package and a pellicle container.
• patterning is performed by irradiating a photosensitive layer or the like with light through a mask (also referred to as an exposure original plate or reticle).
• a mask also referred to as an exposure original plate or reticle.
• the light may be absorbed by the foreign matter, or the light may be reflected and bent by the surface of the foreign matter.
• the formed pattern may be deformed or its edges may become rough, resulting in problems such as poor dimensions, quality, appearance, etc. after patterning.
• a method has been adopted in which a pellicle having a pellicle film that transmits light is attached to the surface of the mask to suppress the adhesion of foreign matter.
• the container is made of polycarbonate resin and conductive carbon black.
• outgas is generated from the pellicle in addition to outgas, and that this is one of the causes of pellicle contamination.
• a problem to be solved by an embodiment of the present disclosure is to provide a pellicle package in which the amount of outgas from the pellicle, which is caused by the attachment of outgas of volatile organic components generated from the pellicle package, is reduced.
• the problem to be solved by another embodiment of the present disclosure is to provide a pellicle container in which the amount of outgas from the pellicle, which is caused by the attachment of outgas of volatile organic components generated from the pellicle package, is reduced. It is.
• the pellicle package according to ⁇ 1> which includes at least two layers: a sealant layer and a base material layer.
• ⁇ 5> The pellicle package according to any one of ⁇ 2> to ⁇ 4>, wherein the sealant layer contains an ethylene-vinyl alcohol copolymer.
• ⁇ 6> The pellicle package according to any one of ⁇ 1> to ⁇ 5>, which has a breaking strength of 5 N or more and 50 N or less.
• ⁇ 7> The pellicle package according to any one of ⁇ 1> to ⁇ 6>, wherein the original adhesive includes a styrene-butadiene adhesive. body.
• ⁇ 8> Pericle and a pellicle container housing the pellicle;
• a pellicle container comprising: ⁇ 9>
• the pellicle includes an adhesive for the original plate,
• a pellicle package in which the amount of outgas from the pellicle, which is caused by the attachment of outgas of volatile organic components generated from the pellicle package, is reduced.
• a pellicle container in which the amount of outgas from the pellicle due to attachment of outgas of volatile organic components generated from the pellicle package is reduced.
• FIG. 1 is a schematic cross-sectional view showing an example of a pellicle.
• a numerical range indicated using “ ⁇ ” means a range that includes the numerical values listed before and after " ⁇ " as the minimum and maximum values, respectively.
• the upper limit or lower limit described in a certain numerical range may be replaced with the upper limit or lower limit of another numerical range described step by step.
• the upper limit or lower limit described in a certain numerical range may be replaced with the value shown in the Examples.
• a combination of two or more preferred embodiments is a more preferred embodiment.
• the amount of each component means the total amount of the multiple types of substances, unless otherwise specified.
• the term "process” is used not only to refer to an independent process, but also to a process that cannot be clearly distinguished from other processes, as long as the intended purpose of the process is achieved. included.
• the pellicle package of the present disclosure has a total amount of outgas of volatile organic components of 90 ppm or less under heating conditions of 100° C. for 30 minutes. According to the pellicle package of the present disclosure, the amount of outgas from the pellicle due to attachment of outgas of volatile organic components generated from the pellicle package is reduced.
• a pellicle package refers to a packaging member that packages a pellicle.
• the volatile organic component refers to a component whose vapor pressure at 25° C. is 0.01 KPa or more.
• volatile organic components include hydrocarbon compounds such as aromatic hydrocarbon compounds and aliphatic hydrocarbon compounds.
• Outgas refers to gas generated from the material constituting the pellicle package, such as resin.
• the pellicle package has a total amount of outgas of volatile organic components under heating conditions of 100° C. and 30 minutes of 90 ppm or less, preferably 30 ppm or less, more preferably 15 ppm or less, and 10 ppm or less. It is more preferable that it is, and it is especially preferable that it is 5 ppm or less. That is, in the pellicle package, the total amount of outgas of volatile organic components under heating conditions of 100° C. for 30 minutes is preferably close to 0 ppm, and more preferably below the detection limit or 0 ppm. When the total amount of outgas from the volatile organic components in the pellicle package is within the above range, the amount of outgas from the pellicle due to the attachment of outgas from the volatile organic components generated from the pellicle package is further reduced. .
• the amount of outgas of the volatile organic component is measured as follows.
• the pellicle package is cut to a size of 10 mg and used as a test piece.
• the test piece was placed in a glass insert with two caps.
• He gas as a carrier gas at a rate of 3.0 mL/min, it was heated at 100°C for 30 minutes, and the volatile organic components were collected in a -20°C cold trap.
• the amount of the collected volatile organic components is measured (in terms of n-decane) using a gas chromatograph mass spectrometer (hereinafter also referred to as GCMS), and is defined as the amount of outgas generated.
• GCMS gas chromatograph mass spectrometer
• a specific method for adjusting the amount of outgassing of the volatile organic component within the above range is not particularly limited, but examples include a method of adjusting the material forming the pellicle package.
• the pellicle package is a laminate including at least two layers, a sealant layer and a base material layer, and the material of the sealant layer and the thickness of the sealant layer are adjusted.
• the pellicle package preferably has a breaking strength of 5 N or more and 50 N or less, more preferably 7 N or more and 45 N or less, and even more preferably 10 N or more and 40 N or less.
• JIS-K7127-5 (1999) (corresponding to ISO527-3:1995)). Both ends of JIS-K7127 test piece type 5 (dumbbell shape with total length 115 mm, width of parallel part 6 mm, distance between gauge lines 25 mm, and width of grip part 25 mm) are pulled to measure the breaking strength.
• a specific method for bringing the breaking strength within the above range is not particularly limited, but examples include a method of adjusting the material and thickness of the base layer.
• the pellicle package preferably includes at least two layers, a sealant layer and a base layer, and more preferably a sealant layer, an adhesive layer, and a base layer in this order.
• the pellicle package is a laminate including at least two layers, a sealant layer and a base layer, or when the pellicle package includes a sealant layer, an adhesive layer, and a base layer in this order.
• the outermost surface on the pellicle side may be the sealant layer, and the outermost surface on the outer peripheral surface side may be the base material layer.
• the pellicle package includes at least two layers, a sealant layer and a base layer, or the pellicle package includes a sealant layer, an adhesive layer, and a base layer in this order.
• the pellicle package includes a sealant layer, an adhesive layer, and a base layer in this order.
• the outermost surface on the pellicle side is a sealant layer, the outgas of volatile organic components generated from the pellicle package will adhere to it significantly.
• the pellicle package of the present disclosure has the above-described configuration, the amount of outgas from the pellicle due to the attachment of outgas of volatile organic components generated from the pellicle package can be easily maintained at a low level.
• the sealant layer may be a single layer or a laminate consisting of two or more layers.
• the material for the sealant layer is not particularly limited, and any known resin-containing composition may be used.
• the resin include polyethylene (PE) (including high density polyethylene (HDPE), medium density polyethylene (MDPE), low density polyethylene (LDPE), linear low density polyethylene (LLDPE), etc.), polypropylene ( Polyolefin resins that are homopolymers such as PP), polybutene, and polymethylpentene; copolymers of two or more selected from the group consisting of olefins such as ethylene, propylene, butene, and methylpentene; polyethylene terephthalate (PET); Polyester resins such as polybutylene terephthalate (PBT) and polyethylene naphthalate; polyamide resins such as nylon-6, nylon-6,6, metaxylene diamine-adipic acid condensation polymers, and polymethylmethacrylimide; ethylene-PE (HDPE
• materials for the sealant layer include polyester resin, polyamide resin, and ethylene-vinyl resin, from the viewpoint of further reducing the amount of outgas from the pellicle caused by the adhesion of outgas of volatile organic components generated from the pellicle package. It preferably contains at least one selected from the group consisting of alcohol copolymers, more preferably at least one selected from the group consisting of polyester resins and ethylene-vinyl alcohol copolymers, and ethylene-vinyl alcohol copolymers. More preferably, it contains an alcohol copolymer.
• the sealant layer preferably has a thickness (total thickness in the case of a laminated structure consisting of two or more layers) of 500 ⁇ m or less, more preferably 100 ⁇ m or less, even more preferably 50 ⁇ m or less, and 40 ⁇ m or less. The following is particularly preferable.
• the thickness of the sealant layer is within the above range, the amount of outgas from the pellicle due to adhesion of outgas of volatile organic components generated from the pellicle package is further reduced.
• the thickness of the sealant layer may be 3 ⁇ m or more, 5 ⁇ m or more, or 15 ⁇ m or more from the viewpoint of sealing performance. It's okay. From the above viewpoint, the sealant layer may have a thickness (total thickness in the case of a laminated structure consisting of two or more layers) of 3 ⁇ m or more and 500 ⁇ m or less, or 3 ⁇ m or more and 40 ⁇ m or less.
• the sealant layer may have a thickness (total thickness in the case of a laminated structure consisting of two or more layers) of 40 ⁇ m or more, 70 ⁇ m or more, or 90 ⁇ m or more.
• a thickness total thickness in the case of a laminated structure consisting of two or more layers
• 70 ⁇ m or more or 90 ⁇ m or more.
• the pellicle package of the present disclosure has the above-described configuration, so that even if the thickness of the sealant layer is within the above range, the pellicle package of the present disclosure has the above-mentioned structure. , the amount of outgas from the pellicle can be easily maintained at a low level.
• the base material layer may be a single layer or a laminate consisting of two or more layers.
• the material for the base layer is not particularly limited, and any known resin-containing composition may be used.
• the resin include polyethylene (including high-density polyethylene (HDPE), medium-density polyethylene (MDPE), low-density polyethylene (LDPE), linear low-density polyethylene (LLDPE), etc.), ethylene-propylene copolymer Polyolefins such as ethylene-butene copolymer, ethylene-hexene copolymer, ethylene-octene copolymer, polypropylene (PP), ethylene-vinyl acetate copolymer, ethylene-methyl methacrylate copolymer, ionomer resin, etc.
• HDPE high-density polyethylene
• MDPE medium-density polyethylene
• LDPE low-density polyethylene
• LLDPE linear low-density polyethylene
• Polyolefins such as ethylene-butene copolymer, ethylene-hexene copoly
• Polyester resins such as polyethylene terephthalate (PET), polybutylene terephthalate (PBT), and polyethylene naphthalate; Amide resin; Acrylic resin such as polymethyl methacrylate; Styrene-acrylonitrile resin such as polystyrene, styrene-acrylonitrile copolymer, styrene-acrylonitrile-butadiene copolymer, polyacrylonitrile; Cellulose triacetate, cellulose diacetate, etc.
• Hydrophobized cellulose resin halogen-containing resin such as polyvinyl chloride, polyvinylidene chloride, polyvinylidene fluoride, Teflon (registered trademark); high hydrogen bonding resin such as polyvinyl alcohol, ethylene-vinyl alcohol copolymer, cellulose derivative;
• halogen-containing resin such as polyvinyl chloride, polyvinylidene chloride, polyvinylidene fluoride, Teflon (registered trademark); high hydrogen bonding resin such as polyvinyl alcohol, ethylene-vinyl alcohol copolymer, cellulose derivative
• engineering plastic resins such as polycarbonate resin, polysulfone resin, polyethersulfone resin, polyetheretherketone resin, polyphenylene oxide resin, polymethylene oxide resin, and liquid crystal resin.
• the resins may be used alone or in combination of two or more.
• the material for the base layer should be a material that does not easily generate static electricity (preferably a resin that has been treated with antistatic treatment). (more preferably a resin containing either polyethylene terephthalate or polyethylene naphthalate).
• the thickness of the base material layer (the total thickness in the case of a laminated structure consisting of two or more layers) is not particularly limited, but for example, it is preferably 0.1 ⁇ m or more and 500 ⁇ m or less, and preferably 1 ⁇ m or more and 100 ⁇ m or less. More preferably, it is 5 ⁇ m or more and 30 ⁇ m or less.
• the pellicle package of the present disclosure may have an adhesive layer between the sealant layer and the base layer, if necessary.
• the adhesive layer may be a single layer or a laminate consisting of two or more layers.
• the material for the adhesive layer is not particularly limited, and any known resin-containing composition may be used.
• the resin include polyurethane resin, polyester resin, polyether resin, and mixtures thereof.
• the thickness of the adhesive layer is not particularly limited, but for example, from the viewpoint of adhesive strength, it is preferably 1 ⁇ m or more, more preferably 2 ⁇ m or more.
• the thickness of the adhesive layer is not particularly limited, but for example, from the viewpoint of shortening the curing reaction time when forming the adhesive layer and from the viewpoint of reducing the proportion of unreacted substances and residual solvent during the effect reaction, It is preferably 5 ⁇ m or less, more preferably 4 ⁇ m or less.
• the shape of the pellicle package is not particularly limited. Examples of the shape of the pellicle package include a sheet, a bag, a pack, and a box.
• the pellicle package may be made of packaging members whose total amount of outgas of volatile organic components exceeds 90 ppm under heating conditions of 100° C. for 30 minutes, if necessary, within the range where the effects of the present disclosure can be obtained. may be included in a part of the .
• the proportion of packaging members in which the total amount of outgas exceeds 90 ppm in the pellicle package is preferably 20% by mass or less, more preferably 10% by mass or less, and 5% by mass or less of the entire pellicle package. % or less is more preferable.
• the pellicle package does not include packaging members in which the total amount of outgas exceeds 90 ppm.
• the volume of the pellicle package is not particularly limited, and can be appropriately set depending on the size of the pellicle and the packaging form.
• the volume of the package is, for example, preferably 2000 cm 3 to 70000 cm 3 , more preferably 4000 cm 3 to 30000 cm 3 , and even more preferably 5000 cm 3 to 10000 cm 3 .
• the volume of the pellicle package is within the above range, the balance between the volume of the pellicle or pellicle case packaged in the pellicle package and the surface area of the pellicle package can be easily optimized. Therefore, the proportion of outgas of volatile organic components generated from the pellicle package is further reduced, and the amount of outgas from the pellicle due to adhesion of outgas derived from the pellicle package is also further reduced.
• the pellicle package of the present disclosure may be a package for a pellicle having an adhesive for an original including a styrene-butadiene adhesive.
• the pellicle container of the present disclosure includes a pellicle, a pellicle container that accommodates the pellicle, and a pellicle package of the present disclosure that packages the pellicle container. According to the pellicle container of the present disclosure, the amount of outgas from the pellicle due to attachment of outgas of volatile organic components generated from the pellicle package is reduced.
• a pellicle housing body refers to a structure in which a housing housing a pellicle is wrapped with a pellicle packaging body of the present disclosure.
• a known pellicle can be used as the pellicle.
• the pellicle includes, for example, a pellicle membrane and a support frame that supports the pellicle membrane.
• the shape of the pellicle container is not particularly limited, but may be box-shaped, for example.
• FIG. 1 is a schematic cross-sectional view showing a pellicle 10.
• a pellicle membrane 12 and a support frame 14 are bonded together via a membrane adhesive layer 13.
• a ventilation hole 16 is formed in the support frame 14, and an adhesive layer 15 for the original plate is formed thereon.
• a release sheet for example, a separator
• the support frame 14 may not have the ventilation hole 16 formed therein, and the support frame 14 may have a structure in which a plurality of layers are laminated.
• Pellicle membrane 12 is supported by support frame 14 .
• the material for the pellicle film 12 include silica glass, transparent materials such as fluororesin, cellulose acetate, and carbon nanotubes.
• the material for the support frame 14 include an alumite-treated aluminum frame, a titanium frame, a silicon frame, and the like.
• the support frame 14 is preferably black from the viewpoint of preventing reflection of exposure light and facilitating inspection for the presence of attached foreign matter.
• the membrane adhesive layer 13 adheres the support frame and the pellicle membrane.
• the material for the membrane adhesive layer 13 is not particularly limited, and examples thereof include fluoropolymers such as acrylic resin adhesives, epoxy resin adhesives, silicone resin adhesives, and fluorine-containing silicone adhesives.
• the original adhesive layer 15 can be formed by applying a known adhesive and drying it.
• the material for the original plate adhesive layer 15 (hereinafter also referred to as original plate adhesive) is not particularly limited, and examples thereof include acrylic, silicone, styrene-butadiene, urethane, and olefin adhesives. .
• the pellicle may include an adhesive for an original, and the adhesive for the original may be a styrene-butadiene adhesive.
• a styrene-butadiene adhesive is preferable as a material for the original adhesive layer 15 that bonds the support frame 14 and the original, since it can easily suppress distortion of the original.
• the styrene-butadiene adhesive is more likely to be generated as outgas from the pellicle after the outgas from volatile organic components generated from the pellicle package adheres to the pellicle. Since the pellicle package according to the present disclosure has the above-described configuration, even when a styrene-butadiene adhesive is used as the material for the original adhesive layer 15, outgas of volatile organic components generated from the pellicle package can be obtained. The amount of outgassing from the pellicle due to adhesion of is reduced.
• adheresive is a concept that includes adhesives and adhesives.
• adhesive layer is a concept that includes an adhesive layer and an adhesive layer.
• the material for the release sheet examples include polyethylene terephthalate film, polypropylene film, and the like.
• the support frame and the pellicle membrane may be bonded together without the membrane adhesive layer 13 interposed therebetween.
• a known pellicle container can be used as the pellicle container.
• the material for the pellicle container include resins such as polycarbonate, conductive materials such as carbon nanotubes, conductive carbon black, and inorganic particles.
• Preferred embodiments of the pellicle package in the pellicle container of the present disclosure are the same as the preferred embodiments listed for the pellicle package of the present disclosure.
• Example 1 Pellicle packages each comprising a base material layer and a sealant layer having the materials and thicknesses shown in the table were produced. The total amount of outgas of volatile organic components under heating conditions of 100°C and 30 minutes was measured using the above-mentioned measuring method for each example of the pellicle package obtained. The results are shown in Table 1. Furthermore, the breaking strength values of the pellicle packages of each example measured by the above-mentioned measuring method were all within the range of 10N or more and 40N or less.
• ⁇ Tackifying resin (B) Hydrogenated alicyclic petroleum resin: C9 hydrogenated petroleum resin (trade name "Alcon P-100” (manufactured by Arakawa Chemical Co., Ltd.), softening point: 100 ⁇ 5°C, number average molecular weight (Mn): 610 ) Rosin ester resin (trade name "Pine Crystal KE-311” (manufactured by Arakawa Chemical Co., Ltd.), softening point: 100 ⁇ 5°C)
• an anodized aluminum support frame 14 (external dimensions: 148.77 mm x 114.9 mm, frame height H: 2.5 mm, frame width W: 2 mm) as shown in FIG. 1 was prepared.
• a molten mask adhesive extruded from a needle tip communicating with a heating tank was applied onto one end surface of the support frame 14 to form an original adhesive layer 15.
• the thickness of the formed original adhesive layer 15 was 0.6 mm.
• a separator was placed on the surface of the original adhesive layer 15.
• a pellicle membrane is placed on the other end surface of the support frame 14 (that is, the end surface on which the original adhesive layer 15 is not formed) via the membrane adhesive layer 13 (fluoropolymer (AGC, CYTOP A type)). 12 was attached to obtain a pellicle 10.
• the pellicles of each example were placed in a clean oven under an atmospheric atmosphere and heated within the range of 70° C. to 80° C. for 20 hours to degas them.
• a pellicle was packaged using the pellicle packaging body of each example, and this was stored at 23° C. for one week. After storage, the pellicle was removed from the pellicle package and placed in an oven. Then, the outgas generated under the heating conditions of 50° C. for 4 hours was adsorbed on Tenax (trademark, manufactured by GL Sciences, Inc.), which is a powdered adsorbent.
• polyethylene is expressed as PE
• polyethylene terephthalate is expressed as PET
• the pellicle package of the example has a reduced amount of outgas from the pellicle due to the attachment of outgas of volatile organic components generated from the pellicle package, compared to the pellicle package of the comparative example. I found out that it will be done.

Landscapes

• Physics & Mathematics (AREA)
• General Physics & Mathematics (AREA)
• Engineering & Computer Science (AREA)
• Mechanical Engineering (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• Manufacturing & Machinery (AREA)
• Computer Hardware Design (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Power Engineering (AREA)
• Packaging Frangible Articles (AREA)
• Preparing Plates And Mask In Photomechanical Process (AREA)

Priority Applications (3)

Applications Claiming Priority (2)

Publications (1)

Family

ID=88101092

Family Applications (1)

Country Status (5)

Citations (3)

Family Cites Families (3)

• 2023
  • 2023-03-20 WO PCT/JP2023/011023 patent/WO2023182314A1/ja active Application Filing
  • 2023-03-20 KR KR1020247029992A patent/KR20240148395A/ko active Pending
  • 2023-03-20 JP JP2024510198A patent/JP7701554B2/ja active Active
  • 2023-03-20 CN CN202380028794.XA patent/CN118901043A/zh active Pending
  • 2023-03-21 TW TW112110488A patent/TW202338495A/zh unknown

Patent Citations (3)

Also Published As

Similar Documents

Legal Events