WO2023182314A1 - Pellicle package and pellicle housing - Google Patents

Pellicle package and pellicle housing Download PDF

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Publication number
WO2023182314A1
WO2023182314A1 PCT/JP2023/011023 JP2023011023W WO2023182314A1 WO 2023182314 A1 WO2023182314 A1 WO 2023182314A1 JP 2023011023 W JP2023011023 W JP 2023011023W WO 2023182314 A1 WO2023182314 A1 WO 2023182314A1
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Prior art keywords
pellicle
package
outgas
adhesive
layer
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PCT/JP2023/011023
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French (fr)
Japanese (ja)
Inventor
健 伊藤
大樹 種市
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三井化学株式会社
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Publication of WO2023182314A1 publication Critical patent/WO2023182314A1/en

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Definitions

  • the present disclosure relates to a pellicle package and a pellicle container.
  • patterning is performed by irradiating a photosensitive layer or the like with light through a mask (also referred to as an exposure original plate or reticle).
  • a mask also referred to as an exposure original plate or reticle.
  • the light may be absorbed by the foreign matter, or the light may be reflected and bent by the surface of the foreign matter.
  • the formed pattern may be deformed or its edges may become rough, resulting in problems such as poor dimensions, quality, appearance, etc. after patterning.
  • a method has been adopted in which a pellicle having a pellicle film that transmits light is attached to the surface of the mask to suppress the adhesion of foreign matter.
  • the container is made of polycarbonate resin and conductive carbon black.
  • outgas is generated from the pellicle in addition to outgas, and that this is one of the causes of pellicle contamination.
  • a problem to be solved by an embodiment of the present disclosure is to provide a pellicle package in which the amount of outgas from the pellicle, which is caused by the attachment of outgas of volatile organic components generated from the pellicle package, is reduced.
  • the problem to be solved by another embodiment of the present disclosure is to provide a pellicle container in which the amount of outgas from the pellicle, which is caused by the attachment of outgas of volatile organic components generated from the pellicle package, is reduced. It is.
  • the pellicle package according to ⁇ 1> which includes at least two layers: a sealant layer and a base material layer.
  • ⁇ 5> The pellicle package according to any one of ⁇ 2> to ⁇ 4>, wherein the sealant layer contains an ethylene-vinyl alcohol copolymer.
  • ⁇ 6> The pellicle package according to any one of ⁇ 1> to ⁇ 5>, which has a breaking strength of 5 N or more and 50 N or less.
  • ⁇ 7> The pellicle package according to any one of ⁇ 1> to ⁇ 6>, wherein the original adhesive includes a styrene-butadiene adhesive. body.
  • ⁇ 8> Pericle and a pellicle container housing the pellicle;
  • a pellicle container comprising: ⁇ 9>
  • the pellicle includes an adhesive for the original plate,
  • a pellicle package in which the amount of outgas from the pellicle, which is caused by the attachment of outgas of volatile organic components generated from the pellicle package, is reduced.
  • a pellicle container in which the amount of outgas from the pellicle due to attachment of outgas of volatile organic components generated from the pellicle package is reduced.
  • FIG. 1 is a schematic cross-sectional view showing an example of a pellicle.
  • a numerical range indicated using “ ⁇ ” means a range that includes the numerical values listed before and after " ⁇ " as the minimum and maximum values, respectively.
  • the upper limit or lower limit described in a certain numerical range may be replaced with the upper limit or lower limit of another numerical range described step by step.
  • the upper limit or lower limit described in a certain numerical range may be replaced with the value shown in the Examples.
  • a combination of two or more preferred embodiments is a more preferred embodiment.
  • the amount of each component means the total amount of the multiple types of substances, unless otherwise specified.
  • the term "process” is used not only to refer to an independent process, but also to a process that cannot be clearly distinguished from other processes, as long as the intended purpose of the process is achieved. included.
  • the pellicle package of the present disclosure has a total amount of outgas of volatile organic components of 90 ppm or less under heating conditions of 100° C. for 30 minutes. According to the pellicle package of the present disclosure, the amount of outgas from the pellicle due to attachment of outgas of volatile organic components generated from the pellicle package is reduced.
  • a pellicle package refers to a packaging member that packages a pellicle.
  • the volatile organic component refers to a component whose vapor pressure at 25° C. is 0.01 KPa or more.
  • volatile organic components include hydrocarbon compounds such as aromatic hydrocarbon compounds and aliphatic hydrocarbon compounds.
  • Outgas refers to gas generated from the material constituting the pellicle package, such as resin.
  • the pellicle package has a total amount of outgas of volatile organic components under heating conditions of 100° C. and 30 minutes of 90 ppm or less, preferably 30 ppm or less, more preferably 15 ppm or less, and 10 ppm or less. It is more preferable that it is, and it is especially preferable that it is 5 ppm or less. That is, in the pellicle package, the total amount of outgas of volatile organic components under heating conditions of 100° C. for 30 minutes is preferably close to 0 ppm, and more preferably below the detection limit or 0 ppm. When the total amount of outgas from the volatile organic components in the pellicle package is within the above range, the amount of outgas from the pellicle due to the attachment of outgas from the volatile organic components generated from the pellicle package is further reduced. .
  • the amount of outgas of the volatile organic component is measured as follows.
  • the pellicle package is cut to a size of 10 mg and used as a test piece.
  • the test piece was placed in a glass insert with two caps.
  • He gas as a carrier gas at a rate of 3.0 mL/min, it was heated at 100°C for 30 minutes, and the volatile organic components were collected in a -20°C cold trap.
  • the amount of the collected volatile organic components is measured (in terms of n-decane) using a gas chromatograph mass spectrometer (hereinafter also referred to as GCMS), and is defined as the amount of outgas generated.
  • GCMS gas chromatograph mass spectrometer
  • a specific method for adjusting the amount of outgassing of the volatile organic component within the above range is not particularly limited, but examples include a method of adjusting the material forming the pellicle package.
  • the pellicle package is a laminate including at least two layers, a sealant layer and a base material layer, and the material of the sealant layer and the thickness of the sealant layer are adjusted.
  • the pellicle package preferably has a breaking strength of 5 N or more and 50 N or less, more preferably 7 N or more and 45 N or less, and even more preferably 10 N or more and 40 N or less.
  • JIS-K7127-5 (1999) (corresponding to ISO527-3:1995)). Both ends of JIS-K7127 test piece type 5 (dumbbell shape with total length 115 mm, width of parallel part 6 mm, distance between gauge lines 25 mm, and width of grip part 25 mm) are pulled to measure the breaking strength.
  • a specific method for bringing the breaking strength within the above range is not particularly limited, but examples include a method of adjusting the material and thickness of the base layer.
  • the pellicle package preferably includes at least two layers, a sealant layer and a base layer, and more preferably a sealant layer, an adhesive layer, and a base layer in this order.
  • the pellicle package is a laminate including at least two layers, a sealant layer and a base layer, or when the pellicle package includes a sealant layer, an adhesive layer, and a base layer in this order.
  • the outermost surface on the pellicle side may be the sealant layer, and the outermost surface on the outer peripheral surface side may be the base material layer.
  • the pellicle package includes at least two layers, a sealant layer and a base layer, or the pellicle package includes a sealant layer, an adhesive layer, and a base layer in this order.
  • the pellicle package includes a sealant layer, an adhesive layer, and a base layer in this order.
  • the outermost surface on the pellicle side is a sealant layer, the outgas of volatile organic components generated from the pellicle package will adhere to it significantly.
  • the pellicle package of the present disclosure has the above-described configuration, the amount of outgas from the pellicle due to the attachment of outgas of volatile organic components generated from the pellicle package can be easily maintained at a low level.
  • the sealant layer may be a single layer or a laminate consisting of two or more layers.
  • the material for the sealant layer is not particularly limited, and any known resin-containing composition may be used.
  • the resin include polyethylene (PE) (including high density polyethylene (HDPE), medium density polyethylene (MDPE), low density polyethylene (LDPE), linear low density polyethylene (LLDPE), etc.), polypropylene ( Polyolefin resins that are homopolymers such as PP), polybutene, and polymethylpentene; copolymers of two or more selected from the group consisting of olefins such as ethylene, propylene, butene, and methylpentene; polyethylene terephthalate (PET); Polyester resins such as polybutylene terephthalate (PBT) and polyethylene naphthalate; polyamide resins such as nylon-6, nylon-6,6, metaxylene diamine-adipic acid condensation polymers, and polymethylmethacrylimide; ethylene-PE (HDPE
  • materials for the sealant layer include polyester resin, polyamide resin, and ethylene-vinyl resin, from the viewpoint of further reducing the amount of outgas from the pellicle caused by the adhesion of outgas of volatile organic components generated from the pellicle package. It preferably contains at least one selected from the group consisting of alcohol copolymers, more preferably at least one selected from the group consisting of polyester resins and ethylene-vinyl alcohol copolymers, and ethylene-vinyl alcohol copolymers. More preferably, it contains an alcohol copolymer.
  • the sealant layer preferably has a thickness (total thickness in the case of a laminated structure consisting of two or more layers) of 500 ⁇ m or less, more preferably 100 ⁇ m or less, even more preferably 50 ⁇ m or less, and 40 ⁇ m or less. The following is particularly preferable.
  • the thickness of the sealant layer is within the above range, the amount of outgas from the pellicle due to adhesion of outgas of volatile organic components generated from the pellicle package is further reduced.
  • the thickness of the sealant layer may be 3 ⁇ m or more, 5 ⁇ m or more, or 15 ⁇ m or more from the viewpoint of sealing performance. It's okay. From the above viewpoint, the sealant layer may have a thickness (total thickness in the case of a laminated structure consisting of two or more layers) of 3 ⁇ m or more and 500 ⁇ m or less, or 3 ⁇ m or more and 40 ⁇ m or less.
  • the sealant layer may have a thickness (total thickness in the case of a laminated structure consisting of two or more layers) of 40 ⁇ m or more, 70 ⁇ m or more, or 90 ⁇ m or more.
  • a thickness total thickness in the case of a laminated structure consisting of two or more layers
  • 70 ⁇ m or more or 90 ⁇ m or more.
  • the pellicle package of the present disclosure has the above-described configuration, so that even if the thickness of the sealant layer is within the above range, the pellicle package of the present disclosure has the above-mentioned structure. , the amount of outgas from the pellicle can be easily maintained at a low level.
  • the base material layer may be a single layer or a laminate consisting of two or more layers.
  • the material for the base layer is not particularly limited, and any known resin-containing composition may be used.
  • the resin include polyethylene (including high-density polyethylene (HDPE), medium-density polyethylene (MDPE), low-density polyethylene (LDPE), linear low-density polyethylene (LLDPE), etc.), ethylene-propylene copolymer Polyolefins such as ethylene-butene copolymer, ethylene-hexene copolymer, ethylene-octene copolymer, polypropylene (PP), ethylene-vinyl acetate copolymer, ethylene-methyl methacrylate copolymer, ionomer resin, etc.
  • HDPE high-density polyethylene
  • MDPE medium-density polyethylene
  • LDPE low-density polyethylene
  • LLDPE linear low-density polyethylene
  • Polyolefins such as ethylene-butene copolymer, ethylene-hexene copoly
  • Polyester resins such as polyethylene terephthalate (PET), polybutylene terephthalate (PBT), and polyethylene naphthalate; Amide resin; Acrylic resin such as polymethyl methacrylate; Styrene-acrylonitrile resin such as polystyrene, styrene-acrylonitrile copolymer, styrene-acrylonitrile-butadiene copolymer, polyacrylonitrile; Cellulose triacetate, cellulose diacetate, etc.
  • Hydrophobized cellulose resin halogen-containing resin such as polyvinyl chloride, polyvinylidene chloride, polyvinylidene fluoride, Teflon (registered trademark); high hydrogen bonding resin such as polyvinyl alcohol, ethylene-vinyl alcohol copolymer, cellulose derivative;
  • halogen-containing resin such as polyvinyl chloride, polyvinylidene chloride, polyvinylidene fluoride, Teflon (registered trademark); high hydrogen bonding resin such as polyvinyl alcohol, ethylene-vinyl alcohol copolymer, cellulose derivative
  • engineering plastic resins such as polycarbonate resin, polysulfone resin, polyethersulfone resin, polyetheretherketone resin, polyphenylene oxide resin, polymethylene oxide resin, and liquid crystal resin.
  • the resins may be used alone or in combination of two or more.
  • the material for the base layer should be a material that does not easily generate static electricity (preferably a resin that has been treated with antistatic treatment). (more preferably a resin containing either polyethylene terephthalate or polyethylene naphthalate).
  • the thickness of the base material layer (the total thickness in the case of a laminated structure consisting of two or more layers) is not particularly limited, but for example, it is preferably 0.1 ⁇ m or more and 500 ⁇ m or less, and preferably 1 ⁇ m or more and 100 ⁇ m or less. More preferably, it is 5 ⁇ m or more and 30 ⁇ m or less.
  • the pellicle package of the present disclosure may have an adhesive layer between the sealant layer and the base layer, if necessary.
  • the adhesive layer may be a single layer or a laminate consisting of two or more layers.
  • the material for the adhesive layer is not particularly limited, and any known resin-containing composition may be used.
  • the resin include polyurethane resin, polyester resin, polyether resin, and mixtures thereof.
  • the thickness of the adhesive layer is not particularly limited, but for example, from the viewpoint of adhesive strength, it is preferably 1 ⁇ m or more, more preferably 2 ⁇ m or more.
  • the thickness of the adhesive layer is not particularly limited, but for example, from the viewpoint of shortening the curing reaction time when forming the adhesive layer and from the viewpoint of reducing the proportion of unreacted substances and residual solvent during the effect reaction, It is preferably 5 ⁇ m or less, more preferably 4 ⁇ m or less.
  • the shape of the pellicle package is not particularly limited. Examples of the shape of the pellicle package include a sheet, a bag, a pack, and a box.
  • the pellicle package may be made of packaging members whose total amount of outgas of volatile organic components exceeds 90 ppm under heating conditions of 100° C. for 30 minutes, if necessary, within the range where the effects of the present disclosure can be obtained. may be included in a part of the .
  • the proportion of packaging members in which the total amount of outgas exceeds 90 ppm in the pellicle package is preferably 20% by mass or less, more preferably 10% by mass or less, and 5% by mass or less of the entire pellicle package. % or less is more preferable.
  • the pellicle package does not include packaging members in which the total amount of outgas exceeds 90 ppm.
  • the volume of the pellicle package is not particularly limited, and can be appropriately set depending on the size of the pellicle and the packaging form.
  • the volume of the package is, for example, preferably 2000 cm 3 to 70000 cm 3 , more preferably 4000 cm 3 to 30000 cm 3 , and even more preferably 5000 cm 3 to 10000 cm 3 .
  • the volume of the pellicle package is within the above range, the balance between the volume of the pellicle or pellicle case packaged in the pellicle package and the surface area of the pellicle package can be easily optimized. Therefore, the proportion of outgas of volatile organic components generated from the pellicle package is further reduced, and the amount of outgas from the pellicle due to adhesion of outgas derived from the pellicle package is also further reduced.
  • the pellicle package of the present disclosure may be a package for a pellicle having an adhesive for an original including a styrene-butadiene adhesive.
  • the pellicle container of the present disclosure includes a pellicle, a pellicle container that accommodates the pellicle, and a pellicle package of the present disclosure that packages the pellicle container. According to the pellicle container of the present disclosure, the amount of outgas from the pellicle due to attachment of outgas of volatile organic components generated from the pellicle package is reduced.
  • a pellicle housing body refers to a structure in which a housing housing a pellicle is wrapped with a pellicle packaging body of the present disclosure.
  • a known pellicle can be used as the pellicle.
  • the pellicle includes, for example, a pellicle membrane and a support frame that supports the pellicle membrane.
  • the shape of the pellicle container is not particularly limited, but may be box-shaped, for example.
  • FIG. 1 is a schematic cross-sectional view showing a pellicle 10.
  • a pellicle membrane 12 and a support frame 14 are bonded together via a membrane adhesive layer 13.
  • a ventilation hole 16 is formed in the support frame 14, and an adhesive layer 15 for the original plate is formed thereon.
  • a release sheet for example, a separator
  • the support frame 14 may not have the ventilation hole 16 formed therein, and the support frame 14 may have a structure in which a plurality of layers are laminated.
  • Pellicle membrane 12 is supported by support frame 14 .
  • the material for the pellicle film 12 include silica glass, transparent materials such as fluororesin, cellulose acetate, and carbon nanotubes.
  • the material for the support frame 14 include an alumite-treated aluminum frame, a titanium frame, a silicon frame, and the like.
  • the support frame 14 is preferably black from the viewpoint of preventing reflection of exposure light and facilitating inspection for the presence of attached foreign matter.
  • the membrane adhesive layer 13 adheres the support frame and the pellicle membrane.
  • the material for the membrane adhesive layer 13 is not particularly limited, and examples thereof include fluoropolymers such as acrylic resin adhesives, epoxy resin adhesives, silicone resin adhesives, and fluorine-containing silicone adhesives.
  • the original adhesive layer 15 can be formed by applying a known adhesive and drying it.
  • the material for the original plate adhesive layer 15 (hereinafter also referred to as original plate adhesive) is not particularly limited, and examples thereof include acrylic, silicone, styrene-butadiene, urethane, and olefin adhesives. .
  • the pellicle may include an adhesive for an original, and the adhesive for the original may be a styrene-butadiene adhesive.
  • a styrene-butadiene adhesive is preferable as a material for the original adhesive layer 15 that bonds the support frame 14 and the original, since it can easily suppress distortion of the original.
  • the styrene-butadiene adhesive is more likely to be generated as outgas from the pellicle after the outgas from volatile organic components generated from the pellicle package adheres to the pellicle. Since the pellicle package according to the present disclosure has the above-described configuration, even when a styrene-butadiene adhesive is used as the material for the original adhesive layer 15, outgas of volatile organic components generated from the pellicle package can be obtained. The amount of outgassing from the pellicle due to adhesion of is reduced.
  • adheresive is a concept that includes adhesives and adhesives.
  • adhesive layer is a concept that includes an adhesive layer and an adhesive layer.
  • the material for the release sheet examples include polyethylene terephthalate film, polypropylene film, and the like.
  • the support frame and the pellicle membrane may be bonded together without the membrane adhesive layer 13 interposed therebetween.
  • a known pellicle container can be used as the pellicle container.
  • the material for the pellicle container include resins such as polycarbonate, conductive materials such as carbon nanotubes, conductive carbon black, and inorganic particles.
  • Preferred embodiments of the pellicle package in the pellicle container of the present disclosure are the same as the preferred embodiments listed for the pellicle package of the present disclosure.
  • Example 1 Pellicle packages each comprising a base material layer and a sealant layer having the materials and thicknesses shown in the table were produced. The total amount of outgas of volatile organic components under heating conditions of 100°C and 30 minutes was measured using the above-mentioned measuring method for each example of the pellicle package obtained. The results are shown in Table 1. Furthermore, the breaking strength values of the pellicle packages of each example measured by the above-mentioned measuring method were all within the range of 10N or more and 40N or less.
  • ⁇ Tackifying resin (B) Hydrogenated alicyclic petroleum resin: C9 hydrogenated petroleum resin (trade name "Alcon P-100” (manufactured by Arakawa Chemical Co., Ltd.), softening point: 100 ⁇ 5°C, number average molecular weight (Mn): 610 ) Rosin ester resin (trade name "Pine Crystal KE-311” (manufactured by Arakawa Chemical Co., Ltd.), softening point: 100 ⁇ 5°C)
  • an anodized aluminum support frame 14 (external dimensions: 148.77 mm x 114.9 mm, frame height H: 2.5 mm, frame width W: 2 mm) as shown in FIG. 1 was prepared.
  • a molten mask adhesive extruded from a needle tip communicating with a heating tank was applied onto one end surface of the support frame 14 to form an original adhesive layer 15.
  • the thickness of the formed original adhesive layer 15 was 0.6 mm.
  • a separator was placed on the surface of the original adhesive layer 15.
  • a pellicle membrane is placed on the other end surface of the support frame 14 (that is, the end surface on which the original adhesive layer 15 is not formed) via the membrane adhesive layer 13 (fluoropolymer (AGC, CYTOP A type)). 12 was attached to obtain a pellicle 10.
  • the pellicles of each example were placed in a clean oven under an atmospheric atmosphere and heated within the range of 70° C. to 80° C. for 20 hours to degas them.
  • a pellicle was packaged using the pellicle packaging body of each example, and this was stored at 23° C. for one week. After storage, the pellicle was removed from the pellicle package and placed in an oven. Then, the outgas generated under the heating conditions of 50° C. for 4 hours was adsorbed on Tenax (trademark, manufactured by GL Sciences, Inc.), which is a powdered adsorbent.
  • polyethylene is expressed as PE
  • polyethylene terephthalate is expressed as PET
  • the pellicle package of the example has a reduced amount of outgas from the pellicle due to the attachment of outgas of volatile organic components generated from the pellicle package, compared to the pellicle package of the comparative example. I found out that it will be done.

Abstract

Provided are a pellicle package and a pellicle housing, configured so that the total amount of outgas from volatile organic components under conditions of heating for 30 minutes at 100°C is 90 ppm or less.

Description

ペリクル包装体及びペリクル収容体Pellicle package and pellicle container
　本開示は、ペリクル包装体及びペリクル収容体に関する。 The present disclosure relates to a pellicle package and a pellicle container.
　電子部品、プリント基板、ディスプレイパネル等の物体の表面に感光性の物質を塗布し、パターン状に露光してパターンを形成する技術（フォトリソグラフィー）では、マスクと呼ばれる片面にパターンが形成された透明基板が使用されている。これらの製造工程では、マスク（露光原板、レチクルともいう）を介して感光層等に光を照射することによってパターニングを行う。その際、マスクに異物が付着していると、光が異物に吸収されたり、異物表面で光が反射されて屈曲したりする。その結果、形成されるパターンが変形したり、エッジががさついたりして、パターニング後の寸法、品質、および外観等が損なわれてしまうといった問題が生じる。このような問題を解消すべく、マスクの表面に、光を透過するペリクル膜を備えるペリクルを装着し、異物の付着を抑制する方法が採用されている。 In photolithography, a technology in which a photosensitive substance is applied to the surface of an object such as an electronic component, printed circuit board, or display panel, and then exposed to light to form a pattern, a transparent material with a pattern formed on one side called a mask is used. board is used. In these manufacturing steps, patterning is performed by irradiating a photosensitive layer or the like with light through a mask (also referred to as an exposure original plate or reticle). At this time, if foreign matter is attached to the mask, the light may be absorbed by the foreign matter, or the light may be reflected and bent by the surface of the foreign matter. As a result, the formed pattern may be deformed or its edges may become rough, resulting in problems such as poor dimensions, quality, appearance, etc. after patterning. In order to solve this problem, a method has been adopted in which a pellicle having a pellicle film that transmits light is attached to the surface of the mask to suppress the adhesion of foreign matter.
　近年、電子部品の高性能化、回線幅の微細化に伴い、ペリクルについても、従来以上に微量のアウトガスや微細なパーティクルの影響を受けやすくなってきている。アウトガスが部材表面に付着して表面の曇りや、変質を低減するため、例えば、特開２００７－１２７９３号公報では、ペリクルを収容する収容容器から発生する揮発性有機ガスの量を低減するために、収容容器をポリカーボネート樹脂と導電性カーボンブラックとを含む仕様としている。 In recent years, as electronic components have improved in performance and line widths have become smaller, pellicles have become more susceptible to the effects of minute amounts of outgas and fine particles than before. In order to reduce clouding and deterioration of the surface due to outgas adhering to the surface of the member, for example, in Japanese Patent Application Laid-Open No. 2007-12793, in order to reduce the amount of volatile organic gas generated from the container housing the pellicle, The container is made of polycarbonate resin and conductive carbon black.
　本発明者らは、鋭意検討の結果、ペリクルを包装する包装体から発生する揮発性有機成分のアウトガスが、包装されたペリクルへと付着し、ペリクルを構成する材料自身に由来する揮発性成分のアウトガスとは別に、ペリクルからアウトガスとして発生し、これがペリクル汚染の要因の一つとなることを新たに見出した。 As a result of extensive studies, the present inventors have found that outgas of volatile organic components generated from the packaging body that packages the pellicle adheres to the packaged pellicle, and that volatile components originating from the material that makes up the pellicle itself are removed. We have newly discovered that outgas is generated from the pellicle in addition to outgas, and that this is one of the causes of pellicle contamination.
　本開示の一実施形態が解決しようとする課題は、ペリクル包装体から発生する揮発性有機成分のアウトガスの付着に起因する、ペリクルからのアウトガス量が低減されたペリクル包装体を提供することである。
　本開示の他の一実施形態が解決しようとする課題は、ペリクル包装体から発生する揮発性有機成分のアウトガスの付着に起因する、ペリクルからのアウトガス量が低減されたペリクル収容体を提供することである。 A problem to be solved by an embodiment of the present disclosure is to provide a pellicle package in which the amount of outgas from the pellicle, which is caused by the attachment of outgas of volatile organic components generated from the pellicle package, is reduced. .
The problem to be solved by another embodiment of the present disclosure is to provide a pellicle container in which the amount of outgas from the pellicle, which is caused by the attachment of outgas of volatile organic components generated from the pellicle package, is reduced. It is.
　上記課題を解決するための具体的手段は以下の態様を含む。
＜１＞　１００℃、３０分の加熱条件下での揮発性有機成分のアウトガスの合計量が９０ｐｐｍ以下である、ペリクル包装体。
＜２＞　シーラント層と、基材層と、の少なくとも２層を含む、前記＜１＞に記載のペリクル包装体。
＜３＞　前記シーラント層は、厚みが４０μｍ以下である、前記＜２＞に記載のペリクル包装体。
＜４＞　前記シーラント層と前記基材層との間に接着層を有する、前記＜２＞又は＜３＞に記載のペリクル包装体。
＜５＞　前記シーラント層は、エチレン－ビニルアルコール共重合体を含む、前記＜２＞～＜４＞のいずれか１つに記載のペリクル包装体。
＜６＞　破壊強度が５Ｎ以上５０Ｎ以下である、前記＜１＞～＜５＞のいずれか１つに記載のペリクル包装体。
＜７＞　原版用接着剤を有するペリクル用の包装体であって、前記原版用接着剤がスチレンブタジエン系接着剤を含む、前記＜１＞～＜６＞のいずれか１つに記載のペリクル包装体。
＜８＞　ペリクルと、
　前記ペリクルを収容するペリクル収容器と、
　前記ペリクル収容器を包装する前記＜１＞～＜７＞のいずれか１つに記載のペリクル包装体と、
　を備えるペリクル収容体。
＜９＞　前記ペリクルが原版用接着剤を含み、
　前記原版用接着剤がスチレンブタジエン系接着剤である、前記＜８＞に記載のペリクル収容体。 Specific means for solving the above problems include the following aspects.
<1> A pellicle package in which the total amount of outgas of volatile organic components under heating conditions of 100° C. and 30 minutes is 90 ppm or less.
<2> The pellicle package according to <1>, which includes at least two layers: a sealant layer and a base material layer.
<3> The pellicle package according to <2>, wherein the sealant layer has a thickness of 40 μm or less.
<4> The pellicle package according to <2> or <3>, which has an adhesive layer between the sealant layer and the base layer.
<5> The pellicle package according to any one of <2> to <4>, wherein the sealant layer contains an ethylene-vinyl alcohol copolymer.
<6> The pellicle package according to any one of <1> to <5>, which has a breaking strength of 5 N or more and 50 N or less.
<7> The pellicle package according to any one of <1> to <6>, wherein the original adhesive includes a styrene-butadiene adhesive. body.
<8> Pericle and
a pellicle container housing the pellicle;
The pellicle package according to any one of <1> to <7>, which packages the pellicle container;
A pellicle container comprising:
<9> The pellicle includes an adhesive for the original plate,
The pellicle container according to <8> above, wherein the original adhesive is a styrene-butadiene adhesive.
　本開示の一実施形態によれば、ペリクル包装体から発生する揮発性有機成分のアウトガスの付着に起因する、ペリクルからのアウトガス量が低減されたペリクル包装体を提供することができる。
　本開示の他の一実施形態によれば、ペリクル包装体から発生する揮発性有機成分のアウトガスの付着に起因する、ペリクルからのアウトガス量が低減されるペリクル収容体を提供することができる。 According to an embodiment of the present disclosure, it is possible to provide a pellicle package in which the amount of outgas from the pellicle, which is caused by the attachment of outgas of volatile organic components generated from the pellicle package, is reduced.
According to another embodiment of the present disclosure, it is possible to provide a pellicle container in which the amount of outgas from the pellicle due to attachment of outgas of volatile organic components generated from the pellicle package is reduced.
図１は、ペリクルの一例を示す概略断面図である。FIG. 1 is a schematic cross-sectional view showing an example of a pellicle.
　本開示において「～」を用いて示された数値範囲は、「～」の前後に記載される数値をそれぞれ最小値及び最大値として含む範囲を意味する。
　本開示に段階的に記載されている数値範囲において、ある数値範囲で記載された上限値又は下限値は、他の段階的な記載の数値範囲の上限値又は下限値に置き換えてもよい。また、本開示に記載されている数値範囲において、ある数値範囲で記載された上限値又は下限値は、実施例に示されている値に置き換えてもよい。
　本開示において、２以上の好ましい態様の組み合わせは、より好ましい態様である。
　本開示において、各成分の量は、各成分に該当する物質が複数種存在する場合には、特に断らない限り、複数種の物質の合計量を意味する。
　本明細書において、「工程」との用語は、独立した工程だけではなく、他の工程と明確に区別できない場合であっても、その工程の所期の目的が達成されれば、本用語に含まれる。 In the present disclosure, a numerical range indicated using "~" means a range that includes the numerical values listed before and after "~" as the minimum and maximum values, respectively.
In the numerical ranges described step by step in the present disclosure, the upper limit or lower limit described in a certain numerical range may be replaced with the upper limit or lower limit of another numerical range described step by step. Furthermore, in the numerical ranges described in this disclosure, the upper limit or lower limit described in a certain numerical range may be replaced with the value shown in the Examples.
In the present disclosure, a combination of two or more preferred embodiments is a more preferred embodiment.
In the present disclosure, if there are multiple types of substances corresponding to each component, the amount of each component means the total amount of the multiple types of substances, unless otherwise specified.
In this specification, the term "process" is used not only to refer to an independent process, but also to a process that cannot be clearly distinguished from other processes, as long as the intended purpose of the process is achieved. included.
＜ペリクル包装体＞
　本開示のペリクル包装体は、１００℃、３０分の加熱条件下での揮発性有機成分のアウトガスの合計量が９０ｐｐｍ以下である。
　本開示のペリクル包装体によれば、ペリクル包装体から発生する揮発性有機成分のアウトガスの付着に起因する、ペリクルからのアウトガス量が低減される。 <Pellicle package>
The pellicle package of the present disclosure has a total amount of outgas of volatile organic components of 90 ppm or less under heating conditions of 100° C. for 30 minutes.
According to the pellicle package of the present disclosure, the amount of outgas from the pellicle due to attachment of outgas of volatile organic components generated from the pellicle package is reduced.
　ペリクル包装体とは、ペリクルを包装する包装部材のことをいう。 A pellicle package refers to a packaging member that packages a pellicle.
　揮発性有機成分とは、２５℃での蒸気圧が０．０１ＫＰａ以上である成分をいう。
　揮発性有機成分とは、例えば、芳香族炭化水素化合物、脂肪族炭化水素化合物等の炭化水素化合物が挙げられる。
　アウトガスは、樹脂等のペリクル包装体を構成する材料から発生するガスを意味する。 The volatile organic component refers to a component whose vapor pressure at 25° C. is 0.01 KPa or more.
Examples of volatile organic components include hydrocarbon compounds such as aromatic hydrocarbon compounds and aliphatic hydrocarbon compounds.
Outgas refers to gas generated from the material constituting the pellicle package, such as resin.
　ペリクル包装体は、１００℃、３０分の加熱条件下での揮発性有機成分のアウトガスの合計量が９０ｐｐｍ以下であり、３０ｐｐｍ以下であることが好ましく、１５ｐｐｍ以下であることがより好ましく、１０ｐｐｍ以下であることがさらに好ましく、５ｐｐｍ以下であることが特に好ましい。つまり、ペリクル包装体は、１００℃、３０分の加熱条件下での揮発性有機成分のアウトガスの合計量が０ｐｐｍに近いほど好ましく、検出限界以下又は０ｐｐｍであることがより好ましい。
　ペリクル包装体における上記揮発性有機成分のアウトガスの合計量が上記範囲内であると、ペリクル包装体から発生する揮発性有機成分のアウトガスの付着に起因する、ペリクルからのアウトガス量がより低減される。 The pellicle package has a total amount of outgas of volatile organic components under heating conditions of 100° C. and 30 minutes of 90 ppm or less, preferably 30 ppm or less, more preferably 15 ppm or less, and 10 ppm or less. It is more preferable that it is, and it is especially preferable that it is 5 ppm or less. That is, in the pellicle package, the total amount of outgas of volatile organic components under heating conditions of 100° C. for 30 minutes is preferably close to 0 ppm, and more preferably below the detection limit or 0 ppm.
When the total amount of outgas from the volatile organic components in the pellicle package is within the above range, the amount of outgas from the pellicle due to the attachment of outgas from the volatile organic components generated from the pellicle package is further reduced. .
　上記揮発性有機成分のアウトガス量は、下記のようにして測定する。
　ペリクル包装体を、１０ｍｇになるように切り取り、これを試験片とする。前記試験片を、２口のキャップが付いたガラスインサートにセットした。次に、キャリアガスとしてＨｅガスを３．０ｍＬ／毎分で流し込みながら、１００℃で３０分加熱し、揮発した揮発性有機成分を、－２０℃のコールドトラップで捕集する。捕集した揮発性有機成分の量を、ガスクロマトグラフ質量分析計（以下、ＧＣＭＳとも称す。）を用いて測定（ｎ－デカン換算）し、アウトガスの発生量とする。ＧＣＭＳの測定条件は以下の通りである。
測定装置名　：ＱＰ２０１０ｐｌｕｓ
カラム　　　：ＤＢ－１（内径：０．３２ｍｍ、長さ：６０ｍ、厚み：１．００μｍ）
スキャン範囲：３５～４５０ｍ／Ｚ
イオン化　　：０．７８ｋＶ
測定方法　　：１００℃、３０分で発生したガス量をデカン換算で算出。 The amount of outgas of the volatile organic component is measured as follows.
The pellicle package is cut to a size of 10 mg and used as a test piece. The test piece was placed in a glass insert with two caps. Next, while flowing He gas as a carrier gas at a rate of 3.0 mL/min, it was heated at 100°C for 30 minutes, and the volatile organic components were collected in a -20°C cold trap. The amount of the collected volatile organic components is measured (in terms of n-decane) using a gas chromatograph mass spectrometer (hereinafter also referred to as GCMS), and is defined as the amount of outgas generated. The measurement conditions for GCMS are as follows.
Measuring device name: QP2010plus
Column: DB-1 (inner diameter: 0.32mm, length: 60m, thickness: 1.00μm)
Scan range: 35-450m/Z
Ionization: 0.78kV
Measurement method: Calculate the amount of gas generated in 30 minutes at 100°C in terms of decane.
　上記揮発性有機成分のアウトガス量を上記範囲とする具体的な手法は特に制限されないが、ペリクル包装体を形成する材料を調整する方法等が挙げられる。例えば、ペリクル包装体をシーラント層と基材層との少なくとも２層を含む積層体とし、前記シーラント層の材料やシーラント層の厚さを調整する方法等が挙げられる。 A specific method for adjusting the amount of outgassing of the volatile organic component within the above range is not particularly limited, but examples include a method of adjusting the material forming the pellicle package. For example, there is a method in which the pellicle package is a laminate including at least two layers, a sealant layer and a base material layer, and the material of the sealant layer and the thickness of the sealant layer are adjusted.
　ペリクル包装体は、使用上の強度の観点から、破壊強度が５Ｎ以上５０Ｎ以下であることが好ましく、７Ｎ以上４５Ｎ以下であることがより好ましく、１０Ｎ以上４０Ｎ以下であることがさらに好ましい。 From the viewpoint of strength in use, the pellicle package preferably has a breaking strength of 5 N or more and 50 N or less, more preferably 7 N or more and 45 N or less, and even more preferably 10 N or more and 40 N or less.
　上記破壊強度の測定は、ＪＩＳ－Ｋ７１２７－５（１９９９年）（（ＩＳＯ５２７－３：１９９５に対応））に準じる。ＪＩＳ－Ｋ７１２７の試験片タイプ５(全長１１５ｍｍ、並行部分の幅６ｍｍ、標線間距離２５ｍｍ、つかみ部の幅２５ｍｍのダンベル形状)の両端を引っ張り、破壊強度を測定する。 The measurement of the breaking strength is in accordance with JIS-K7127-5 (1999) ((corresponding to ISO527-3:1995)). Both ends of JIS-K7127 test piece type 5 (dumbbell shape with total length 115 mm, width of parallel part 6 mm, distance between gauge lines 25 mm, and width of grip part 25 mm) are pulled to measure the breaking strength.
　上記破壊強度を上記範囲とする具体的な手法は特に制限されないが、例えば、基材層の材料や厚さを調整する方法などが挙げられる。 A specific method for bringing the breaking strength within the above range is not particularly limited, but examples include a method of adjusting the material and thickness of the base layer.
　ペリクル包装体は、シーラント層と、基材層と、の少なくとも２層を含むことが好ましく、シーラント層と、接着層と、基材層と、をこの順で含むことがより好ましい。
　ペリクル包装体が、シーラント層と、基材層と、の少なくとも２層を含む積層体である場合、又は、ペリクル包装体が、シーラント層と、接着層と、基材層と、をこの順で含む積層体である場合、ペリクル側の最表面がシーラント層であり、外周面側の最表面が基材層であってもよい。
　ペリクル包装体がシーラント層と、基材層と、の２層を少なくとも含んで構成される場合、又は、ペリクル包装体が、シーラント層と、接着層と、基材層と、をこの順で含む積層体である場合、ペリクル包装体における揮発性有機成分のアウトガスは、シーラント層から発生しやすいと考えられる。そのため、ペリクル側の最表面がシーラント層であると、ペリクル包装体から発生する揮発性有機成分のアウトガスの付着も顕著になる。これに対し、本開示のペリクル包装体は、先述の構成を有することにより、ペリクル包装体から発生する揮発性有機成分のアウトガスの付着に起因する、ペリクルからのアウトガス量が低く維持されやすくなる。 The pellicle package preferably includes at least two layers, a sealant layer and a base layer, and more preferably a sealant layer, an adhesive layer, and a base layer in this order.
When the pellicle package is a laminate including at least two layers, a sealant layer and a base layer, or when the pellicle package includes a sealant layer, an adhesive layer, and a base layer in this order. In the case of a laminate including a laminate, the outermost surface on the pellicle side may be the sealant layer, and the outermost surface on the outer peripheral surface side may be the base material layer.
When the pellicle package includes at least two layers, a sealant layer and a base layer, or the pellicle package includes a sealant layer, an adhesive layer, and a base layer in this order. In the case of a laminate, it is considered that outgassing of volatile organic components in the pellicle package is likely to occur from the sealant layer. Therefore, if the outermost surface on the pellicle side is a sealant layer, the outgas of volatile organic components generated from the pellicle package will adhere to it significantly. On the other hand, since the pellicle package of the present disclosure has the above-described configuration, the amount of outgas from the pellicle due to the attachment of outgas of volatile organic components generated from the pellicle package can be easily maintained at a low level.
（シーラント層）
　シーラント層は、単層体であってもよいし、２層以上からなる積層体であってもよい。
　シーラント層の材料は、特に制限されず、公知の樹脂を含む組成物が適用できる。
　前記樹脂としては、例えば、ポリエチレン（ＰＥ）（高密度ポリエチレン（ＨＤＰＥ）、中密度ポリエチレン（ＭＤＰＥ）、低密度ポリエチレン（ＬＤＰＥ）、直鎖状低密度ポリエチレン（ＬＬＤＰＥ）等を含む。）、ポリプロピレン（ＰＰ）、ポリブテン、ポリメチルペンテン等の単独重合体であるポリオレフィン樹脂；エチレン、プロピレン、ブテン、メチルペンテン等のオレフィンからなる群より選択される２種以上の共重合体；ポリエチレンテレフタレート（ＰＥＴ）、ポリブチレンテレフタレート（ＰＢＴ）、ポリエチレンナフタレート等のポリエステル樹脂；ナイロン－６、ナイロン－６，６、メタキシレンジアミン－アジピン酸縮重合体、ポリメチルメタクリルイミド等のポリアミド樹脂；エチレン－ビニルアルコール共重合体；などが挙げられる。樹脂は、１種単独であっても２種以上の併用であってもよい。 (Sealant layer)
The sealant layer may be a single layer or a laminate consisting of two or more layers.
The material for the sealant layer is not particularly limited, and any known resin-containing composition may be used.
Examples of the resin include polyethylene (PE) (including high density polyethylene (HDPE), medium density polyethylene (MDPE), low density polyethylene (LDPE), linear low density polyethylene (LLDPE), etc.), polypropylene ( Polyolefin resins that are homopolymers such as PP), polybutene, and polymethylpentene; copolymers of two or more selected from the group consisting of olefins such as ethylene, propylene, butene, and methylpentene; polyethylene terephthalate (PET); Polyester resins such as polybutylene terephthalate (PBT) and polyethylene naphthalate; polyamide resins such as nylon-6, nylon-6,6, metaxylene diamine-adipic acid condensation polymers, and polymethylmethacrylimide; ethylene-vinyl alcohol copolymer Union; etc. The resins may be used alone or in combination of two or more.
　上記の中でも、シーラント層の材料としては、ペリクル包装体から発生する揮発性有機成分のアウトガスの付着に起因する、ペリクルからのアウトガス量をより低減する観点から、ポリエステル樹脂、ポリアミド樹脂及びエチレン－ビニルアルコール共重合体からなる群より選択される少なくとも１種を含むことが好ましく、ポリエステル樹脂及びエチレン－ビニルアルコール共重合体からなる群より選択される少なくとも１種を含むことがより好ましく、エチレン－ビニルアルコール共重合体を含むことがさらに好ましい。 Among the above, materials for the sealant layer include polyester resin, polyamide resin, and ethylene-vinyl resin, from the viewpoint of further reducing the amount of outgas from the pellicle caused by the adhesion of outgas of volatile organic components generated from the pellicle package. It preferably contains at least one selected from the group consisting of alcohol copolymers, more preferably at least one selected from the group consisting of polyester resins and ethylene-vinyl alcohol copolymers, and ethylene-vinyl alcohol copolymers. More preferably, it contains an alcohol copolymer.
　シーラント層は、厚み（２層以上からなる積層構造である場合には総厚）が、５００μｍ以下であることが好ましく、１００μｍ以下であることがより好ましく、５０μｍ以下であることがさらに好ましく、４０μｍ以下であることが特に好ましい。
　シーラント層の厚みが上記範囲以下であると、ペリクル包装体から発生する揮発性有機成分のアウトガスの付着に起因する、ペリクルからのアウトガス量がより低減される。 The sealant layer preferably has a thickness (total thickness in the case of a laminated structure consisting of two or more layers) of 500 μm or less, more preferably 100 μm or less, even more preferably 50 μm or less, and 40 μm or less. The following is particularly preferable.
When the thickness of the sealant layer is within the above range, the amount of outgas from the pellicle due to adhesion of outgas of volatile organic components generated from the pellicle package is further reduced.
　シーラント層は、厚み（２層以上からなる積層構造である場合には総厚）が、シール性の観点からは、３μｍ以上であってもよく、５μｍ以上であってもよく、１５μｍ以上であってもよい。
　上記観点から、シーラント層は、厚み（２層以上からなる積層構造である場合には総厚）が３μｍ以上５００μｍ以下であってもよく、３μｍ以上４０μｍ以下であってもよい。 The thickness of the sealant layer (total thickness in the case of a laminated structure consisting of two or more layers) may be 3 μm or more, 5 μm or more, or 15 μm or more from the viewpoint of sealing performance. It's okay.
From the above viewpoint, the sealant layer may have a thickness (total thickness in the case of a laminated structure consisting of two or more layers) of 3 μm or more and 500 μm or less, or 3 μm or more and 40 μm or less.
　シーラント層は、厚み（２層以上からなる積層構造である場合には総厚）が４０μｍ以上であってもよく、７０μｍ以上であってもよく、９０μｍ以上であってもよい。
　先述の通り、ペリクル包装体がシーラント層と基材層との２層を少なくとも含んで構成される場合、ペリクル包装体における揮発性有機成分のアウトガスは、シーラント層から発生しやすいと考えられる。そのため、シーラント層の厚みが大きくなるに伴い、ペリクル包装体から発生する揮発性有機成分のアウトガスの付着も顕著になりやすい。これに対し、本開示のペリクル包装体は、先述の構成を有することにより、シーラント層の厚みが上記範囲内であっても、ペリクル包装体から発生する揮発性有機成分のアウトガスの付着に起因する、ペリクルからのアウトガス量が低く維持されやすくなる。 The sealant layer may have a thickness (total thickness in the case of a laminated structure consisting of two or more layers) of 40 μm or more, 70 μm or more, or 90 μm or more.
As mentioned above, when the pellicle package includes at least two layers, a sealant layer and a base material layer, it is considered that outgas of volatile organic components in the pellicle package is likely to be generated from the sealant layer. Therefore, as the thickness of the sealant layer increases, the outgassing of volatile organic components generated from the pellicle package tends to become more prominent. On the other hand, the pellicle package of the present disclosure has the above-described configuration, so that even if the thickness of the sealant layer is within the above range, the pellicle package of the present disclosure has the above-mentioned structure. , the amount of outgas from the pellicle can be easily maintained at a low level.
（基材層）
　基材層は、単層体であってもよいし、２層以上からなる積層体であってもよい。 (Base material layer)
The base material layer may be a single layer or a laminate consisting of two or more layers.
　基材層の材料は、特に制限されず、公知の樹脂を含む組成物が適用できる。
　前記樹脂としては、例えば、ポリエチレン（高密度ポリエチレン（ＨＤＰＥ）、中密度ポリエチレン（ＭＤＰＥ）、低密度ポリエチレン（ＬＤＰＥ）、直鎖状低密度ポリエチレン（ＬＬＤＰＥ）等を含む。）、エチレン－プロピレン共重合体、エチレン－ブテン共重合体、エチレン－ヘキセン共重合体、エチレン－オクテン共重合体、ポリプロピレン（ＰＰ）、エチレン－酢酸ビニル共重合体、エチレン－メチルメタクリレート共重合体、アイオノマー樹脂等のポリオレフィン系樹脂；ポリエチレンテレフタレート（ＰＥＴ）、ポリブチレンテレフタレート（ＰＢＴ）、ポリエチレンナフタレート等のポリエステル系樹脂；ナイロン－６、ナイロン－６，６、メタキシレンジアミン－アジピン酸縮重合体、ポリメチルメタクリルイミド等のアミド系樹脂；ポリメチルメタクリレート等のアクリル系樹脂；ポリスチレン、スチレン－アクリロニトリル共重合体、スチレン－アクリロニトリル－ブタジエン共重合体、ポリアクリロニトリル等のスチレン－アクリロニトリル系樹脂；トリ酢酸セルロース、ジ酢酸セルロース等の疎水化セルロース系樹脂；ポリ塩化ビニル、ポリ塩化ビニリデン、ポリフッ化ビニリデン、テフロン（登録商標）等のハロゲン含有樹脂；ポリビニルアルコール、エチレン－ビニルアルコール共重合体、セルロース誘導体等の高水素結合性樹脂；ポリカーボネート樹脂、ポリサルホン樹脂、ポリエーテルサルホン樹脂、ポリエーテルエーテルケトン樹脂、ポリフェニレンオキシド樹脂、ポリメチレンオキシド樹脂、液晶樹脂等のエンジニアリングプラスチック系樹脂；などが挙げられる。樹脂は、１種単独であっても２種以上の併用であってもよい。 The material for the base layer is not particularly limited, and any known resin-containing composition may be used.
Examples of the resin include polyethylene (including high-density polyethylene (HDPE), medium-density polyethylene (MDPE), low-density polyethylene (LDPE), linear low-density polyethylene (LLDPE), etc.), ethylene-propylene copolymer Polyolefins such as ethylene-butene copolymer, ethylene-hexene copolymer, ethylene-octene copolymer, polypropylene (PP), ethylene-vinyl acetate copolymer, ethylene-methyl methacrylate copolymer, ionomer resin, etc. Resin; Polyester resins such as polyethylene terephthalate (PET), polybutylene terephthalate (PBT), and polyethylene naphthalate; Amide resin; Acrylic resin such as polymethyl methacrylate; Styrene-acrylonitrile resin such as polystyrene, styrene-acrylonitrile copolymer, styrene-acrylonitrile-butadiene copolymer, polyacrylonitrile; Cellulose triacetate, cellulose diacetate, etc. Hydrophobized cellulose resin; halogen-containing resin such as polyvinyl chloride, polyvinylidene chloride, polyvinylidene fluoride, Teflon (registered trademark); high hydrogen bonding resin such as polyvinyl alcohol, ethylene-vinyl alcohol copolymer, cellulose derivative; Examples include engineering plastic resins such as polycarbonate resin, polysulfone resin, polyethersulfone resin, polyetheretherketone resin, polyphenylene oxide resin, polymethylene oxide resin, and liquid crystal resin. The resins may be used alone or in combination of two or more.
　上記の中でも、基材層の材料としては、ペリクル包装体の表面にホコリ等のごみが付着することを防止する観点からは、静電気の生じ難い材料（好ましくは静電防止処理をされた樹脂を含む、より好ましくはポリエチレンテレフタレート及びポリエチレンナフタレートのいずれか一方を含む樹脂）などが好ましい。 Among the above materials, from the viewpoint of preventing dust and other debris from adhering to the surface of the pellicle package, the material for the base layer should be a material that does not easily generate static electricity (preferably a resin that has been treated with antistatic treatment). (more preferably a resin containing either polyethylene terephthalate or polyethylene naphthalate).
　基材層の厚み（２層以上からなる積層構造である場合には総厚）は、特に制限されないが、例えば、０．１μｍ以上５００μｍ以下であることが好ましく、１μｍ以上１００μｍ以下であることがより好ましく、５μｍ以上３０μｍ以下であることがさらに好ましい。 The thickness of the base material layer (the total thickness in the case of a laminated structure consisting of two or more layers) is not particularly limited, but for example, it is preferably 0.1 μm or more and 500 μm or less, and preferably 1 μm or more and 100 μm or less. More preferably, it is 5 μm or more and 30 μm or less.
（接着層）
　本開示のペリクル包装体は、必要に応じて、シーラント層と基材層との間に接着層を有していてもよい。
　接着層は、単層体であってもよいし、２層以上からなる積層体であってもよい。 (Adhesive layer)
The pellicle package of the present disclosure may have an adhesive layer between the sealant layer and the base layer, if necessary.
The adhesive layer may be a single layer or a laminate consisting of two or more layers.
　接着層の材料は、特に制限されず、公知の樹脂を含む組成物が適用できる。
　前記樹脂としては、例えば、ポリウレタン樹脂、ポリエステル樹脂、ポリエーテル樹脂及びこれらの混合物等が挙げられる。 The material for the adhesive layer is not particularly limited, and any known resin-containing composition may be used.
Examples of the resin include polyurethane resin, polyester resin, polyether resin, and mixtures thereof.
　接着層の厚みは、特に制限されないが、例えば、接着強度の観点からは、１μｍ以上であることが好ましく、２μｍ以上であることがより好ましい。
　接着層の厚みは、特に制限されないが、例えば、接着層形成の際の硬化反応の時間を短縮する観点、及び、効果反応の際の未反応物や残留溶剤の割合を低減する観点からは、５μｍ以下であることが好ましく、４μｍ以下であることがより好ましい。 The thickness of the adhesive layer is not particularly limited, but for example, from the viewpoint of adhesive strength, it is preferably 1 μm or more, more preferably 2 μm or more.
The thickness of the adhesive layer is not particularly limited, but for example, from the viewpoint of shortening the curing reaction time when forming the adhesive layer and from the viewpoint of reducing the proportion of unreacted substances and residual solvent during the effect reaction, It is preferably 5 μm or less, more preferably 4 μm or less.
（ペリクル包装体の形状や性質）
　ペリクル包装体の形状は、特に制限されない。
　ペリクル包装体の形状は、例えば、シート状、袋状、パック状、箱状等が挙げられる。
　ペリクル包装体は、本開示の効果が得られる範囲において、必要に応じ、１００℃、３０分の加熱条件下での揮発性有機成分のアウトガスの合計量が９０ｐｐｍ超えである包装部材を、包装体の一部に含んで構成されていてもよい。一方、ペリクル包装体における前記アウトガスの合計量が９０ｐｐｍ超えである包装部材の割合は、ペリクル包装体全体の２０質量％以下であることが好ましく、１０質量％以下であることがより好ましく、５質量％以下であることがさらに好ましい。ペリクル包装体は、前記アウトガスの合計量が９０ｐｐｍ超えである包装部材を含まないことが好ましい。 (Shape and properties of pellicle package)
The shape of the pellicle package is not particularly limited.
Examples of the shape of the pellicle package include a sheet, a bag, a pack, and a box.
The pellicle package may be made of packaging members whose total amount of outgas of volatile organic components exceeds 90 ppm under heating conditions of 100° C. for 30 minutes, if necessary, within the range where the effects of the present disclosure can be obtained. may be included in a part of the . On the other hand, the proportion of packaging members in which the total amount of outgas exceeds 90 ppm in the pellicle package is preferably 20% by mass or less, more preferably 10% by mass or less, and 5% by mass or less of the entire pellicle package. % or less is more preferable. Preferably, the pellicle package does not include packaging members in which the total amount of outgas exceeds 90 ppm.
　ペリクル包装体の容積は、特に制限されず、ペリクルのサイズや包装形態によって適宜設定できる。包装体の容積は、例えば、２０００ｃｍ３～７００００ｃｍ３であることが好ましく、４０００ｃｍ３～３００００ｃｍ３であることがより好ましく、５０００ｃｍ３～１００００ｃｍ３であることがより好ましい。 The volume of the pellicle package is not particularly limited, and can be appropriately set depending on the size of the pellicle and the packaging form. The volume of the package is, for example, preferably 2000 cm 3 to 70000 cm 3 , more preferably 4000 cm 3 to 30000 cm 3 , and even more preferably 5000 cm 3 to 10000 cm 3 .
　ペリクル包装体の容積が上記範囲内であると、ペリクル包装体に包装されるペリクル又はペリクルケースの体積と、ペリクル包装体の表面積とバランスが最適化されやすい。そのため、ペリクル包装体から発生する揮発性有機成分のアウトガスの割合がより少なくなり、ペリクル包装体から派生するアウトガスの付着に起因する、ペリクルからのアウトガス量もより低減される。 When the volume of the pellicle package is within the above range, the balance between the volume of the pellicle or pellicle case packaged in the pellicle package and the surface area of the pellicle package can be easily optimized. Therefore, the proportion of outgas of volatile organic components generated from the pellicle package is further reduced, and the amount of outgas from the pellicle due to adhesion of outgas derived from the pellicle package is also further reduced.
　一態様として、本開示のペリクル包装体は、スチレンブタジエン系接着剤を含む原版用接着剤を有するペリクル用の包装体であってもよい。 As one embodiment, the pellicle package of the present disclosure may be a package for a pellicle having an adhesive for an original including a styrene-butadiene adhesive.
≪ペリクル収容体≫
　本開示のペリクル収容体は、ペリクルと、前記ペリクルを収容するペリクル収容器と、前記ペリクル収容器を包装する本開示のペリクル包装体と、を備える。
　本開示のペリクル収容体によれば、ペリクル包装体から発生する揮発性有機成分のアウトガスの付着に起因する、ペリクルからのアウトガス量が低減される。 <<Pellicle container>>
The pellicle container of the present disclosure includes a pellicle, a pellicle container that accommodates the pellicle, and a pellicle package of the present disclosure that packages the pellicle container.
According to the pellicle container of the present disclosure, the amount of outgas from the pellicle due to attachment of outgas of volatile organic components generated from the pellicle package is reduced.
　ペリクル収容体は、ペリクルを収容した収容器を本開示のペリクル包装体で包装した構造体のことをいう。 A pellicle housing body refers to a structure in which a housing housing a pellicle is wrapped with a pellicle packaging body of the present disclosure.
　ペリクルは、公知のペリクルが適用できる。ペリクルは、例えば、ペリクル膜と、前記ペリクル膜を支持する支持枠と、を含んで構成される。
　ペリクル収容器の形状は、特に制限されないが、例えば、箱状等が挙げられる。 A known pellicle can be used as the pellicle. The pellicle includes, for example, a pellicle membrane and a support frame that supports the pellicle membrane.
The shape of the pellicle container is not particularly limited, but may be box-shaped, for example.
　以下、図面を参照しながら、ペリクルの一態様について説明する。図１は、ペリクル１０を示す概略断面図である。ペリクル１０において、膜用接着剤層１３を介してペリクル膜１２と支持枠１４とが接着されている。支持枠１４には、通気孔１６が形成され、かつ、原版用接着剤層１５が形成されている。図示はしないが、原版用接着剤層１５の表面には、原版用接着剤層１５を保護するための離型シート（例えばセパレータ）が更に配置されてもよい。支持枠１４には、通気孔１６が形成されていなくてもよく、支持枠１４が複数の層から積層される構造であってもよい。 Hereinafter, one aspect of the pellicle will be described with reference to the drawings. FIG. 1 is a schematic cross-sectional view showing a pellicle 10. As shown in FIG. In the pellicle 10, a pellicle membrane 12 and a support frame 14 are bonded together via a membrane adhesive layer 13. A ventilation hole 16 is formed in the support frame 14, and an adhesive layer 15 for the original plate is formed thereon. Although not shown, a release sheet (for example, a separator) for protecting the original adhesive layer 15 may be further disposed on the surface of the original adhesive layer 15. The support frame 14 may not have the ventilation hole 16 formed therein, and the support frame 14 may have a structure in which a plurality of layers are laminated.
　ペリクル膜１２は、支持枠１４によって支持されている。
　ペリクル膜１２の材料としては、石英ガラスや、フッ素系樹脂や酢酸セルロース、カーボンナノチューブ等の透明性を有する材料が挙げられる。
　支持枠１４の材料としては、アルマイト処理されたアルミニウムフレーム、チタンフレーム、シリコンフレーム等が挙げられる。支持枠１４は、露光光の反射を防ぐとともに、付着した異物等の有無を検査し易くする観点から、黒色であることが好ましい。
　膜用接着剤層１３は、支持枠とペリクル膜とを接着する。
　膜用接着剤層１３の材料としては、特に限定されないが、例えば、アクリル樹脂接着剤、エポキシ樹脂接着剤、シリコーン樹脂接着剤、含フッ素シリコーン接着剤等のフッ素ポリマー等が挙げられる。
　原版用接着剤層１５は、公知の接着剤を塗布し乾燥する等で形成することができる。
　原版用接着剤層１５の材料（以下、原版用接着剤とも称す。）としては、特に限定されないが、例えば、アクリル系、シリコーン系、スチレンブタジエン系、ウレタン系、オレフィン系接着剤等が挙げられる。 Pellicle membrane 12 is supported by support frame 14 .
Examples of the material for the pellicle film 12 include silica glass, transparent materials such as fluororesin, cellulose acetate, and carbon nanotubes.
Examples of the material for the support frame 14 include an alumite-treated aluminum frame, a titanium frame, a silicon frame, and the like. The support frame 14 is preferably black from the viewpoint of preventing reflection of exposure light and facilitating inspection for the presence of attached foreign matter.
The membrane adhesive layer 13 adheres the support frame and the pellicle membrane.
The material for the membrane adhesive layer 13 is not particularly limited, and examples thereof include fluoropolymers such as acrylic resin adhesives, epoxy resin adhesives, silicone resin adhesives, and fluorine-containing silicone adhesives.
The original adhesive layer 15 can be formed by applying a known adhesive and drying it.
The material for the original plate adhesive layer 15 (hereinafter also referred to as original plate adhesive) is not particularly limited, and examples thereof include acrylic, silicone, styrene-butadiene, urethane, and olefin adhesives. .
　つまり、本開示のペリクル収容体は、ペリクルが原版用接着剤を含み、前記原版用接着剤がスチレンブタジエン系接着剤であってもよい。 That is, in the pellicle container of the present disclosure, the pellicle may include an adhesive for an original, and the adhesive for the original may be a styrene-butadiene adhesive.
　スチレンブタジエン系接着剤は、原版の歪みを抑制しやすくするため、支持枠１４と原版とを接着する原版用接着剤層１５の材料として好ましい。
　スチレンブタジエン系接着剤は、ペリクル包装体から発生する揮発性有機成分のアウトガスがペリクルに付着した後、ペリクルから発生するアウトガスとしてより生じやすい。本開示に係るペリクル包装体は、先述の構成を有することにより、原版用接着剤層１５の材料としてスチレンブタジエン系接着剤を用いた場合にも、ペリクル包装体から発生する揮発性有機成分のアウトガスの付着に起因する、ペリクルからのアウトガス量が低減される。 A styrene-butadiene adhesive is preferable as a material for the original adhesive layer 15 that bonds the support frame 14 and the original, since it can easily suppress distortion of the original.
The styrene-butadiene adhesive is more likely to be generated as outgas from the pellicle after the outgas from volatile organic components generated from the pellicle package adheres to the pellicle. Since the pellicle package according to the present disclosure has the above-described configuration, even when a styrene-butadiene adhesive is used as the material for the original adhesive layer 15, outgas of volatile organic components generated from the pellicle package can be obtained. The amount of outgassing from the pellicle due to adhesion of is reduced.
　本開示において、「接着剤」は、接着剤及び粘着剤を包含する概念である。
　本開示において、「接着層」は、接着層及び粘着層を包含する概念である。 In the present disclosure, "adhesive" is a concept that includes adhesives and adhesives.
In the present disclosure, the "adhesive layer" is a concept that includes an adhesive layer and an adhesive layer.
　離型シートの材料としては、ポリエチレンテレフタレートフィルム、ポリプロピレンフィルム等が挙げられる。
　ペリクル膜１２と支持枠１４の材料によっては、膜用接着剤層１３を介さずに、支持枠とペリクル膜とが接着されていてもよい。 Examples of the material for the release sheet include polyethylene terephthalate film, polypropylene film, and the like.
Depending on the materials of the pellicle membrane 12 and the support frame 14, the support frame and the pellicle membrane may be bonded together without the membrane adhesive layer 13 interposed therebetween.
　ペリクル収容器は、公知のペリクル収容器が適用できる。
　ペリクル収容器の材料としては、例えば、ポリカーボネート等の樹脂、カーボンナノチューブ、導電性カーボンブラック、無機粒子等の導電性材料が挙げられる。 A known pellicle container can be used as the pellicle container.
Examples of the material for the pellicle container include resins such as polycarbonate, conductive materials such as carbon nanotubes, conductive carbon black, and inorganic particles.
　本開示のペリクル収容体におけるペリクル包装体の好ましい態様は、本開示のペリクル包装体で挙げる好ましい態様と同様である。 Preferred embodiments of the pellicle package in the pellicle container of the present disclosure are the same as the preferred embodiments listed for the pellicle package of the present disclosure.
　以下、実施例等により本開示をさらに詳細に説明するが、本開示の発明がこれら実施例のみに限定されるものではない。 Hereinafter, the present disclosure will be explained in more detail with reference to Examples, but the invention of the present disclosure is not limited to these Examples.
＜実験例１～実施例３及び比較例１＞
　表に示す材料と膜厚の基材層とシーラント層とを備えるペリクル包装体をそれぞれ作製した。得られた各例のペリクル包装体について、先述の測定方法により測定した、１００℃、３０分の加熱条件下での揮発性有機成分のアウトガスの合計量（表中、「ペリクル包装体のアウトガスの合計量」と称す。）の結果をそれぞれ表１に示す。また、各例のペリクル包装体について、先述の測定方法により測定された破壊強度の値は、いずれも１０Ｎ以上４０Ｎ以下の範囲内であった。 <Experimental Examples 1 to 3 and Comparative Example 1>
Pellicle packages each comprising a base material layer and a sealant layer having the materials and thicknesses shown in the table were produced. The total amount of outgas of volatile organic components under heating conditions of 100°C and 30 minutes was measured using the above-mentioned measuring method for each example of the pellicle package obtained. The results are shown in Table 1. Furthermore, the breaking strength values of the pellicle packages of each example measured by the above-mentioned measuring method were all within the range of 10N or more and 40N or less.
＜ペリクルのアウトガスの合計量の評価＞
（１）マスク接着剤の原料である各種成分の準備
・熱可塑性エラストマー（Ａ）
　スチレン－水素添加イソプレン－スチレンブロック共重合体（商品名「ハイブラー７１２５」（株式会社クラレ製）、ｔａｎδピーク温度：－５℃、スチレン含有割合：２０質量％） <Evaluation of total amount of pellicle outgas>
(1) Preparation of various components that are raw materials for mask adhesive - Thermoplastic elastomer (A)
Styrene-hydrogenated isoprene-styrene block copolymer (trade name "HYBRAR 7125" (manufactured by Kuraray Co., Ltd.), tan δ peak temperature: -5°C, styrene content: 20% by mass)
・粘着付与樹脂（Ｂ）
脂環族系石油樹脂の水素化物：Ｃ９系水素添加石油樹脂（商品名「アルコンＰ－１００」（荒川化学工業株式会社製）、軟化点：１００±５℃、数平均分子量（Ｍｎ）：６１０）ロジンエステル樹脂（商品名「パインクリスタルＫＥ－３１１」（荒川化学工業株式会社製）、軟化点：１００±５℃） ・Tackifying resin (B)
Hydrogenated alicyclic petroleum resin: C9 hydrogenated petroleum resin (trade name "Alcon P-100" (manufactured by Arakawa Chemical Co., Ltd.), softening point: 100±5°C, number average molecular weight (Mn): 610 ) Rosin ester resin (trade name "Pine Crystal KE-311" (manufactured by Arakawa Chemical Co., Ltd.), softening point: 100±5℃)
・軟化剤
ポリブテン（商品名「ニッサンポリブテン３０Ｎ」（日油社製）） ・Softener polybutene (product name: "Nissan Polybutene 30N" (manufactured by NOF Corporation))
・ワックス
ポリプロピレン熱分解型ワックス（商品名「ハイワックスＮＰ０５５」（三井化学社製）） ・Wax polypropylene pyrolyzable wax (product name "Hiwax NP055" (manufactured by Mitsui Chemicals))
（２）ペリクルの製造
　熱可塑性エラストマー（Ａ）１００質量部、粘着付与樹脂（Ｂ）１００質量部、及び軟化剤２００質量部を全体で４８ｇとなるように混合して原料混合物を得た。得られた原料混合物をラボプラストミル（東洋精機製作所社製、内容量：６０ｍＬ）に投入した後、密閉した。２００℃、１００ｒｐｍで２０分間混練して、塊状のマスク接着剤を得た。約１０ｇのマスク接着剤を加熱タンク（タンク内温度：２００℃）に投入して溶融させた。一方、図１に示すような、陽極酸化処理したアルミニウム製の支持枠１４（外寸：１４８．７７ｍｍ×１１４．９ｍｍ、枠高さＨ：２．５ｍｍ、枠幅Ｗ：２ｍｍ）を用意した。加熱タンクに連通する針先から押し出した溶融状態のマスク接着剤を、支持枠１４の一方の端面上に塗布して原版用接着剤層１５を形成した。形成された原版用接着剤層１５の厚さは０．６ｍｍであった。また、原版用接着剤層１５の表面にセパレータを配置した。支持枠１４の他方の端面（つまり原版用接着剤層１５が形成されていない側の端面）上に、膜用接着剤層１３（フッ素ポリマー（AGC社、CYTOP Aタイプ））を介してペリクル膜１２を貼付してペリクル１０を得た。 (2) Manufacture of pellicle 100 parts by mass of thermoplastic elastomer (A), 100 parts by mass of tackifier resin (B), and 200 parts by mass of softener were mixed to give a total of 48 g to obtain a raw material mixture. The obtained raw material mixture was put into a Laboplasto Mill (manufactured by Toyo Seiki Seisakusho Co., Ltd., content: 60 mL), and then sealed. The mixture was kneaded at 200° C. and 100 rpm for 20 minutes to obtain a block of mask adhesive. Approximately 10 g of mask adhesive was placed in a heating tank (temperature inside the tank: 200° C.) and melted. On the other hand, an anodized aluminum support frame 14 (external dimensions: 148.77 mm x 114.9 mm, frame height H: 2.5 mm, frame width W: 2 mm) as shown in FIG. 1 was prepared. A molten mask adhesive extruded from a needle tip communicating with a heating tank was applied onto one end surface of the support frame 14 to form an original adhesive layer 15. The thickness of the formed original adhesive layer 15 was 0.6 mm. Furthermore, a separator was placed on the surface of the original adhesive layer 15. A pellicle membrane is placed on the other end surface of the support frame 14 (that is, the end surface on which the original adhesive layer 15 is not formed) via the membrane adhesive layer 13 (fluoropolymer (AGC, CYTOP A type)). 12 was attached to obtain a pellicle 10.
（アウトガス合計量の評価）
　各例のペリクルを、大気雰囲気下のクリーンオーブンに設置し、７０℃～８０℃の範囲内で２０時間加熱して脱ガス処理したものを準備した。
　各例のペリクル包装体を用いてペリクルを包装し、これを２３℃下で１週間保管した。保管後、ペリクルを、ペリクル包装体から取り出し、オーブン内にセットした。そして、５０℃、４時間の加熱条件下で発生したアウトガスを、粉状の吸着材であるＴｅｎａｘ（商標、ジーエルサイエンス株式会社製）に吸着させた。その後、Ｔｅｎａｘを、ＧＣＭＳにセットし、２８０℃、１０分の加熱条件下で、ペリクルから発生した揮発性有機成分のアウトガスガスの合計量（μg）を測定（ｎ－デカン換算）し、これを「ペリクルのアウトガスの合計量（μg/ペリクル）」とした。結果を表１に示す。 (Evaluation of total amount of outgas)
The pellicles of each example were placed in a clean oven under an atmospheric atmosphere and heated within the range of 70° C. to 80° C. for 20 hours to degas them.
A pellicle was packaged using the pellicle packaging body of each example, and this was stored at 23° C. for one week. After storage, the pellicle was removed from the pellicle package and placed in an oven. Then, the outgas generated under the heating conditions of 50° C. for 4 hours was adsorbed on Tenax (trademark, manufactured by GL Sciences, Inc.), which is a powdered adsorbent. After that, Tenax was set in GCMS, and the total amount (μg) of outgas gas of volatile organic components generated from the pellicle was measured (in terms of n-decane) under heating conditions at 280°C for 10 minutes. It was defined as "total amount of pellicle outgas (μg/pellicle)". The results are shown in Table 1.
　表１中、ポリエチレンをＰＥ、ポリエチレンテレフタレートをＰＥＴとそれぞれ表記する。 In Table 1, polyethylene is expressed as PE, and polyethylene terephthalate is expressed as PET.
　表１に示すように、実施例のペリクル包装体は、比較例のペリクル包装体に比べて、ペ
リクル包装体から発生する揮発性有機成分のアウトガスの付着に起因する、ペリクルからのアウトガス量が低減されることがわかった。 As shown in Table 1, the pellicle package of the example has a reduced amount of outgas from the pellicle due to the attachment of outgas of volatile organic components generated from the pellicle package, compared to the pellicle package of the comparative example. I found out that it will be done.
　２０２２年３月２２日に出願された日本国特許出願２０２２－０４５７５９号の開示はその全体が参照により本明細書に取り込まれる。
　本明細書に記載された全ての文献、特許出願、及び技術規格は、個々の文献、特許出願、及び技術規格が参照により取り込まれることが具体的かつ個々に記された場合と同程度に、本明細書中に参照により取り込まれる。 The disclosure of Japanese Patent Application No. 2022-045759 filed on March 22, 2022 is incorporated herein by reference in its entirety.
All documents, patent applications, and technical standards mentioned herein are incorporated by reference to the same extent as if each individual document, patent application, and technical standard was specifically and individually indicated to be incorporated by reference. Incorporated herein by reference.

Claims (9)

  1. 　１００℃、３０分の加熱条件下での揮発性有機成分のアウトガスの合計量が９０ｐｐｍ以下である、ペリクル包装体。 A pellicle package in which the total amount of outgas of volatile organic components under heating conditions of 100° C. for 30 minutes is 90 ppm or less.
  2. 　シーラント層と、基材層と、の少なくとも２層を含む、請求項１に記載のペリクル包装体。 The pellicle package according to claim 1, comprising at least two layers: a sealant layer and a base material layer.
  3. 　前記シーラント層は、厚みが４０μｍ以下である、請求項２に記載のペリクル包装体。 The pellicle package according to claim 2, wherein the sealant layer has a thickness of 40 μm or less.
  4. 　前記シーラント層と前記基材層との間に接着層を有する、請求項２に記載のペリクル包装体。 The pellicle package according to claim 2, further comprising an adhesive layer between the sealant layer and the base layer.
  5. 　前記シーラント層は、エチレン－ビニルアルコール共重合体を含む、請求項２～請求項４のいずれか１項に記載のペリクル包装体。 The pellicle package according to any one of claims 2 to 4, wherein the sealant layer contains an ethylene-vinyl alcohol copolymer.
  6. 　破壊強度が５Ｎ以上５０Ｎ以下である、請求項１～請求項４のいずれか１項に記載のペリクル包装体。 The pellicle package according to any one of claims 1 to 4, having a breaking strength of 5N or more and 50N or less.
  7. 　原版用接着剤を有するペリクル用の包装体であって、前記原版用接着剤がスチレンブタジエン系接着剤を含む、請求項１～請求項４のいずれか１項に記載のペリクル包装体。 The pellicle package according to any one of claims 1 to 4, which is a pellicle package having an adhesive for original plates, wherein the adhesive for original plates includes a styrene-butadiene adhesive.
  8. 　ペリクルと、
    　前記ペリクルを収容するペリクル収容器と、
    　前記ペリクル収容器を包装する請求項１～請求項４のいずれか１項に記載のペリクル包装体と、
    　を備えるペリクル収容体。     pellicle and
    a pellicle container housing the pellicle;
    The pellicle package according to any one of claims 1 to 4, which packages the pellicle container;
    A pellicle container comprising:
  9. 　前記ペリクルが原版用接着剤を含み、
    　前記原版用接着剤がスチレンブタジエン系接着剤である、請求項８に記載のペリクル収容体。     The pellicle includes an adhesive for the original plate,
    The pellicle container according to claim 8, wherein the original adhesive is a styrene-butadiene adhesive.
PCT/JP2023/011023 2022-03-22 2023-03-20 Pellicle package and pellicle housing WO2023182314A1 (en)

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JP2022-045759 2022-03-22

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61203383A (en) * 1985-02-26 1986-09-09 ホ−ヤ株式会社 Substrate conservative structure
JP2005321532A (en) * 2004-05-07 2005-11-17 Shin Etsu Chem Co Ltd Circuit board case
JP2014167627A (en) * 2014-03-20 2014-09-11 Asahi Kasei E-Materials Corp Method of taking out large-sized pellicle from storage container

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61203383A (en) * 1985-02-26 1986-09-09 ホ−ヤ株式会社 Substrate conservative structure
JP2005321532A (en) * 2004-05-07 2005-11-17 Shin Etsu Chem Co Ltd Circuit board case
JP2014167627A (en) * 2014-03-20 2014-09-11 Asahi Kasei E-Materials Corp Method of taking out large-sized pellicle from storage container

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