TW202338495A - Pellicle package, and pellicle container - Google Patents

Abstract

Provided are a pellicle package and a pellicle housing, configured so that the total amount of outgas from volatile organic components under conditions of heating for 30 minutes at 100 DEG C is 90 ppm or less.

Description

Protective film packaging body and protective film container

This disclosure relates to a protective film packaging body and a protective film container.

In a technology (photolithography) that forms a pattern by applying a photosensitive substance to the surface of objects such as electronic components, printed circuit boards, and display panels and exposing it to a pattern, a single-sided surface called a mask is used. Patterned transparent substrate. In these manufacturing steps, the photosensitive layer and the like are patterned by irradiating light through a mask (also called an exposure original plate or reticle). At this time, if a foreign object adheres to the mask, the light will be absorbed by the foreign object, or the light will be reflected and bent on the surface of the foreign object. As a result, the following problems arise: the formed pattern is deformed or has rough edges, thereby impairing the size, quality, appearance, etc. after patterning. In order to eliminate this problem, a method is adopted in which a protective film including a light-transmitting protective film is installed on the surface of the mask to suppress the adhesion of foreign matter.

In recent years, as electronic components have become more sophisticated and circuit widths have become smaller, protective films have become more susceptible to trace amounts of outgassing or fine particles than before. In order to reduce the outgassing from adhering to the surface of the component and causing the surface to become blurred or deteriorated, for example, in Japanese Patent Application Laid-Open No. 2007-12793, in order to reduce the amount of volatile organic gas generated from the container containing the protective film, the container is The container was made into a specification containing polycarbonate resin and conductive carbon black.

[Problem to be solved by the invention] The inventors of the present invention have conducted diligent research, and as a result have newly discovered that the outgassing of volatile organic components generated from the packaging body in which the protective film is packaged adheres to the packaged protective film, and is related to the outgases originating from the materials constituting the protective film itself. The outgassing of volatile components is separated, and the self-protective film is generated as outgassing, which becomes one of the factors causing pollution of the protective film.

An object to be solved by one embodiment of the present disclosure is to provide a pellicle packaging body that can reduce the amount of outgassing from the pellicle film caused by the adhesion of outgassing of volatile organic components generated from the pellicle film packaging body. Another object of the present disclosure is to provide a pellicle container that can reduce the amount of outgassing from the pellicle film caused by the adhesion of outgassing of volatile organic components generated from the pellicle film package. [Means to solve the problem]

Specific means for solving the above problems include the following aspects. <1> A pellicle packaging body in which the total amount of outgassing of volatile organic components under heating conditions of 100°C and 30 minutes is 90 ppm or less. <2> The pellicle packaging body according to <1>, including at least two layers: a sealant layer and a base material layer. <3> The pellicle packaging body according to <2>, wherein the sealant layer has a thickness of 40 μm or less. <4> The pellicle packaging body according to <2> or <3>, which has an adhesive layer between the sealant layer and the base material layer. <5> The pellicle packaging body according to any one of <2> to <4>, wherein the sealant layer contains an ethylene-vinyl alcohol copolymer. <6> The pellicle packaging body according to any one of <1> to <5>, wherein the breaking strength is 5 N or more and 50 N or less. <7> The pellicle packaging body according to any one of <1> to <6>, which is a packaging body for a pellicle film having an adhesive for the original plate, wherein the adhesive for the original plate contains styrene Butadiene based adhesive. <8> A protective film container, including: protective film; A protective film storage container for storing the protective film; and The pellicle packaging body according to any one of <1> to <7>, wherein the pellicle container is packaged. <9> The pellicle storage body according to <8>, wherein the pellicle contains an adhesive for the original plate, The adhesive for the original plate is a styrene-butadiene adhesive. [Effects of the invention]

According to one embodiment of the present disclosure, it is possible to provide a pellicle packaging body that can reduce the amount of outgassing from the pellicle film caused by the adhesion of outgassing of volatile organic components generated from the pellicle film packaging body. According to another embodiment of the present disclosure, it is possible to provide a pellicle container that can reduce the amount of outgassing from the pellicle film caused by the adhesion of outgassing of volatile organic components generated from the pellicle film package.

The numerical range represented by "～" in this disclosure refers to the range including the numerical values described before and after "～" as the minimum value and the maximum value respectively. In the numerical ranges described in stages in this disclosure, the upper limit or lower limit described in a certain numerical range may be replaced by the upper limit or lower limit of other numerical ranges described in stages. In addition, in the numerical range described in this disclosure, the upper limit value or the lower limit value described in a certain numerical range may be replaced with the value shown in the Example. In this disclosure, a combination of two or more better aspects is a better aspect. In this disclosure, when there are multiple substances corresponding to each component, the amount of each component refers to the total amount of the multiple substances unless otherwise specified. In this specification, the term "step" not only includes independent steps, but also includes those that cannot be clearly distinguished from other steps, as long as the desired purpose of the step is achieved.

＜Protective film packaging＞ The total amount of outgassing of volatile organic components in the protective film package of the present disclosure is 90 ppm or less under heating conditions of 100° C. and 30 minutes. With the pellicle film package of the present disclosure, the amount of outgassing from the pellicle film caused by the adhesion of outgassing of volatile organic components generated from the pellicle film package can be reduced.

The so-called protective film packaging body refers to the packaging member for packaging the protective film.

Volatile organic components refer to components with a vapor pressure of 0.01 KPa or more at 25°C. Examples of volatile organic components include hydrocarbon compounds such as aromatic hydrocarbon compounds and aliphatic hydrocarbon compounds. Outgassing refers to gases generated from materials constituting the protective film packaging body, such as resin.

The total amount of outgassing of volatile organic components of the protective film package under heating conditions of 100°C and 30 minutes is 90 ppm or less, preferably 30 ppm or less, more preferably 15 ppm or less, and even more preferably 10 ppm or less. , the best value is below 5 ppm. That is, the total amount of outgassing of volatile organic components of the pellicle packaging body under heating conditions of 100° C. and 30 minutes is better as close to 0 ppm, and more preferably below the detection limit or 0 ppm. If the total amount of the outgassing of the volatile organic components in the pellicle packaging body is within the above range, it is possible to further reduce the risk of damage caused by the adhesion of the outgassing of the volatile organic components generated from the pellicle film packaging body. The amount of outgassing of the protective film.

The outgassing amount of the volatile organic component is measured as follows. The protective film package was cut into 10 mg pieces and used as test pieces. The test piece was placed in a two-port glass insert with a lid. Next, while He gas as a carrier gas was flowed in at 3.0 mL/min, it was heated at 100°C for 30 minutes, and the volatilized volatile organic components were captured using a -20°C cold trap. The amount of captured volatile organic components (in terms of n-decane) was measured using a gas chromatograph mass spectrometer (hereinafter also referred to as GCMS) and was used as the amount of outgassing generated. The measurement conditions of GCMS are as follows. Measuring device name: QP2010plus Pipe string: DB-1 (inner diameter: 0.32 mm, length: 60 m, thickness: 1.00 μm) Scanning range: 35 m/Z～450 m/Z Ionization: 0.78 kV Measuring method: Calculate the amount of gas generated at 100°C in 30 minutes by converting to n-decane.

The specific method of setting the outgassing amount of the volatile organic component within the above range is not particularly limited, and examples include a method of adjusting the material forming the pellicle packaging body. For example, there is a method of preparing the pellicle packaging body as a laminate including at least two layers, a sealant layer and a base material layer, and adjusting the material of the sealant layer or the thickness of the sealant layer.

From the viewpoint of strength in use, the rupture strength of the pellicle packaging body is preferably 5 N or more and 50 N or less, more preferably 7 N or more and 45 N or less, and still more preferably 10 N or more and 40 N or less.

The measurement of the breaking strength is in accordance with Japanese Industrial Standards (JIS)-K7127-5 (1999) (corresponding to ISO527-3:1995). The both ends of the JIS-K7127 test piece type 5 (dumbbell shape with a total length of 115 mm, a width of the parallel part 6 mm, a distance between the marking lines 25 mm, and a width of the grip part 25 mm) were stretched, and the breaking strength was measured.

The specific method of setting the breaking strength within the above range is not particularly limited, and examples thereof include methods of adjusting the material or thickness of the base material layer.

The protective film package preferably includes at least two layers: a sealant layer and a base material layer, and more preferably includes a sealant layer, an adhesive layer, and a base material layer in this order. When the pellicle film package is a laminated body including at least two layers of a sealant layer and a base material layer, or when the pellicle film package is a laminated body including a sealant layer, an adhesive layer, and a base material layer in this order In this case, the outermost surface on the pellicle side may be the sealant layer, and the outermost surface on the outer peripheral surface side may be the base material layer. When the pellicle film package is composed of at least two layers: a sealant layer and a base material layer, or when the pellicle film package is a laminate including a sealant layer, an adhesive layer, and a base material layer in this order , it is believed that outgassing of volatile organic components in the protective film packaging body is likely to occur from the sealant layer. Therefore, if the outermost surface on the pellicle side is the sealant layer, the adhesion of outgassing of volatile organic components generated from the pellicle package will also become significant. On the other hand, by having the structure described above, the pellicle film package of the present disclosure can easily maintain low the amount of outgassing from the pellicle film caused by the adhesion of outgassing of volatile organic components generated from the pellicle film package.

(Sealant layer) The sealant layer may be a single layer or a laminated body including two or more layers. The material of the sealant layer is not particularly limited, and a composition containing a known resin can be used. Examples of the resin include polyethylene (PE) (including high-density polyethylene (HDPE), medium-density polyethylene (MDPE), low-density polyethylene (LDPE), and linear low-density polyethylene (LLDPE)). etc.), polypropylene (PP), polybutene, polymethylpentene and other homopolymers are polyolefin resins; two selected from the group consisting of olefins such as ethylene, propylene, butylene, methylpentene, etc. Copolymers of more than one kind; polyester resins such as polyethylene terephthalate (PET), polybutylene terephthalate (PBT), polyethylene naphthalate; nylon-6, nylon-6, 6. Polyamide resins such as m-xylylenediamine-adipic acid condensation polymer, polymethyl methacrylate imide; ethylene-vinyl alcohol copolymer, etc. One type of resin may be used alone, or two or more types may be used in combination.

Among the above, from the viewpoint of further reducing the amount of outgassing from the pellicle film caused by the adhesion of outgassing of volatile organic components generated from the pellicle film package, the material of the sealant layer preferably includes At least one selected from the group consisting of polyester resin, polyamide resin and ethylene-vinyl alcohol copolymer, more preferably including a group selected from the group consisting of polyester resin and ethylene-vinyl alcohol copolymer At least one of them preferably includes an ethylene-vinyl alcohol copolymer.

The thickness of the sealant layer (total thickness in the case of a laminated structure including two or more layers) is preferably 500 μm or less, more preferably 100 μm or less, further preferably 50 μm or less, and particularly preferably 40 μm or less. If the thickness of the sealant layer is equal to or less than the above range, the amount of outgassing from the pellicle film caused by the adhesion of outgassing of volatile organic components generated from the pellicle film package can be further reduced.

From the viewpoint of sealing properties, the thickness of the sealant layer (total thickness in the case of a laminated structure including two or more layers) may be 3 μm or more, 5 μm or more, or 15 μm or more. From this viewpoint, the thickness of the sealant layer (total thickness in the case of a laminated structure including two or more layers) may be 3 μm or more and 500 μm or less, or may be 3 μm or more and 40 μm or less.

The thickness of the sealant layer (total thickness in the case of a laminated structure including two or more layers) may be 40 μm or more, 70 μm or more, or 90 μm or more. As described above, when the pellicle packaging body is composed of at least two layers, the sealant layer and the base material layer, it is considered that the outgassing of the volatile organic components in the pellicle film packaging body is likely to occur from the sealant layer. Therefore, as the thickness of the sealant layer increases, the adhesion of outgassing of volatile organic components generated from the protective film packaging body becomes more likely to become significant. In contrast, by having the structure described above, the pellicle film package of the present disclosure can easily adhere to the outgassing of volatile organic components generated from the self-protection film package even if the thickness of the sealant layer is within the range. The amount of outgassing caused by the protective film is kept low.

(Substrate layer) The base material layer may be a single layer or a laminated body including two or more layers.

The material of the base layer is not particularly limited, and a composition containing a known resin can be used. Examples of the resin include polyethylene (including high-density polyethylene (HDPE), medium-density polyethylene (MDPE), low-density polyethylene (LDPE), linear low-density polyethylene (LLDPE), etc.), Ethylene-propylene copolymer, ethylene-butylene copolymer, ethylene-hexene copolymer, ethylene-octene copolymer, polypropylene (PP), ethylene-vinyl acetate copolymer, ethylene-methyl methacrylate copolymer Polyolefin resins such as polymers and ionomer resins; polyester resins such as polyethylene terephthalate (PET), polybutylene terephthalate (PBT), and polyethylene naphthalate; nylon -6. Nylon-6,6, m-xylylenediamine-adipic acid condensation polymer, amide resins such as polymethyl methacrylate amide imide; acrylic resins such as polymethyl methacrylate; polystyrene , styrene-acrylonitrile copolymer, styrene-acrylonitrile-butadiene copolymer, polyacrylonitrile and other styrene-acrylonitrile resins; hydrophobized cellulose resins such as cellulose triacetate and cellulose diacetate; Halogen-containing resins such as polyvinyl chloride, polyvinylidene chloride, polyvinylidene fluoride, and Teflon (registered trademark); polyvinyl alcohol, ethylene-vinyl alcohol copolymers, cellulose derivatives, etc. Hydrogen bonding resin; engineering plastic resins such as polycarbonate resin, polystyrene resin, polyether styrene resin, polyether ether ketone resin, polyphenylene ether resin, polyoxymethylene resin, liquid crystal resin, etc. One type of resin may be used alone, or two or more types may be used in combination.

Among the above, from the viewpoint of preventing dust and other dust from adhering to the surface of the pellicle packaging body, the material of the base layer is preferably a material that does not easily generate static electricity (preferably, it contains a resin that has been subjected to antistatic treatment. , more preferably a resin containing any one of polyethylene terephthalate and polyethylene naphthalate), etc.

The thickness of the base material layer (the total thickness in the case of a laminated structure including two or more layers) is not particularly limited, but for example, it is preferably 0.1 μm or more and 500 μm or less, more preferably 1 μm or more and 100 μm or less. More preferably, it is 5 μm or more and 30 μm or less.

(then layer) The protective film package of the present disclosure may have an adhesive layer between the sealant layer and the base material layer if necessary. The subsequent layer may be a single layer or a laminated body including two or more layers.

The material of the subsequent layer is not particularly limited, and a composition containing a known resin can be applied. Examples of the resin include polyurethane resin, polyester resin, polyether resin, and mixtures thereof.

The thickness of the adhesive layer is not particularly limited. For example, from the viewpoint of adhesive strength, it is preferably 1 μm or more, and more preferably 2 μm or more. The thickness of the adhesive layer is not particularly limited. For example, from the viewpoint of shortening the time of the hardening reaction during formation of the adhesive layer and reducing the proportion of unreacted matter or residual solvent during the effective reaction, it is preferably 5 μm or less. More preferably, it is 4 μm or less.

(Shape or nature of protective film packaging) The shape of the protective film packaging body is not particularly limited. Examples of the shape of the pellicle packaging body include sheet-like, bag-like, bag-like, box-like, and the like. The protective film package can be configured so that the total amount of outgassing of volatile organic components contained in a part of the package under heating conditions of 100° C. and 30 minutes exceeds 100°C, if necessary, within the range in which the effects of the present disclosure can be obtained. 90 ppm packaging components. On the other hand, the proportion of packaging components in the pellicle packaging body in which the total amount of outgassing exceeds 90 ppm is preferably 20 mass% or less of the entire pellicle film packaging body, more preferably 10 mass% or less, and still more preferably 5% by mass or less. The protective film packaging body is preferably a packaging member in which the total amount of outgassing does not exceed 90 ppm.

The volume of the protective film packaging body is not particularly limited and can be appropriately set according to the size of the protective film or the packaging form. The volume of the packaging body is, for example, preferably 2000 cm ³ to 70000 cm ³ , more preferably 4000 cm ³ to 30000 cm ³ , and still more preferably 5000 cm ³ to 10000 cm ³ .

If the volume of the pellicle package is within the above range, the balance between the volume of the pellicle or pellicle case packaged in the pellicle package and the surface area of the pellicle package can be easily optimized. Therefore, the proportion of outgassing of volatile organic components generated from the self-protective film packaging body becomes smaller, and the amount of outgassing from the protective film caused by the adhesion of the outgassing derived from the self-protective film packaging body is further reduced.

As one aspect, the pellicle packaging body of the present disclosure may be a packaging body for a pellicle film having an adhesive for a master plate containing a styrene butadiene-based adhesive.

"Protective Film Container" The protective film container of the present disclosure includes: a protective film; a protective film container for storing the protective film; and a protective film packaging body of the present disclosure for packaging the protective film container. With the pellicle containing body of the present disclosure, the amount of outgassing from the pellicle film caused by the adhesion of outgassing of volatile organic components generated from the pellicle film package can be reduced.

The protective film container refers to a structure that uses the protective film packaging body of the present disclosure to package a container containing a protective film.

As the protective film, a known protective film can be used. The pellicle includes, for example, a pellicle and a support frame that supports the pellicle. The shape of the pellicle container is not particularly limited, and examples include a box shape.

Hereinafter, one aspect of the protective film will be described with reference to the drawings. FIG. 1 is a schematic cross-sectional view showing the pellicle 10 . In the pellicle 10 , the pellicle 12 and the support frame 14 are bonded via a film adhesive layer 13 . A ventilation hole 16 is formed in the support frame 14, and an adhesive layer 15 for the original plate is formed. Although not shown in the figure, a release sheet (for example, a spacer) for protecting the adhesive layer 15 for the original plate may be further disposed on the surface of the adhesive layer 15 for the original plate. The ventilation holes 16 may not be formed on the support frame 14 , and the support frame 14 may have a structure in which a plurality of layers are laminated.

The protective film 12 is supported by a support frame 14 . Examples of the material of the protective film 12 include transparent materials such as quartz glass, fluorine-based resin, cellulose acetate, and carbon nanotubes. Examples of the material of the support frame 14 include: an aluminum frame treated with acid-proof aluminum, a titanium frame, a silicon frame, etc. The support frame 14 is preferably black from the viewpoint of preventing reflection of exposure light and making it easy to check whether there are attached foreign matters or the like. The film adhesive layer 13 adheres the support frame and the protective film. The material of the film adhesive layer 13 is not particularly limited, and examples thereof include fluoropolymers such as acrylic resin adhesives, epoxy resin adhesives, silicone resin adhesives, and fluorine-containing silicone adhesives. The adhesive layer 15 for the original plate can be formed by applying a known adhesive and drying it. The material of the adhesive layer 15 for the original plate (hereinafter also referred to as the adhesive for the original plate) is not particularly limited, and examples thereof include: acrylic-based, silicone-based, styrene-butadiene-based, and urethane-based. , olefin adhesives, etc.

That is, in the pellicle container of the present disclosure, the pellicle may include an adhesive for the original plate, and the adhesive for the original plate is a styrene butadiene-based adhesive.

In order to easily suppress the deformation of the original plate, a styrene butadiene-based adhesive is preferably used as the material for the adhesive layer 15 for the original plate that bonds the support frame 14 and the original plate. When the styrene-butadiene-based adhesive adheres to the protective film, the outgases of volatile organic components generated by the self-protective film packaging are more likely to be generated as outgases generated by the self-protective film. By having the structure described above, the pellicle packaging body of the present disclosure can reduce the risk of damage caused by the self-protection film packaging body even when a styrene butadiene-based adhesive is used as the material of the adhesive layer 15 for the original plate. The amount of outgassing from the protective film caused by the adhesion of outgassing of volatile organic components.

In this disclosure, "adhesive" is a concept that includes adhesives and adhesives. In this disclosure, "adhesive layer" is a concept that includes an adhesive layer and an adhesive layer.

Examples of the material of the release sheet include polyethylene terephthalate film, polypropylene film, and the like. Depending on the materials of the protective film 12 and the support frame 14 , the support frame and the protective film may be bonded without passing through the film adhesive layer 13 .

As the pellicle container, a known pellicle container can be used. Examples of materials for the pellicle container include resins such as polycarbonate, conductive materials such as carbon nanotubes, conductive carbon black, and inorganic particles.

The preferred aspects of the pellicle packaging body in the pellicle container of the disclosure are the same as the preferred aspects listed in the pellicle packaging body of the disclosure. [Example]

Hereinafter, the present disclosure will be described in more detail through examples and the like, but the invention of the present disclosure is not limited to these examples.

<Example 1 to Example 3 and Comparative Example 1> Prepare a protective film package including a base material layer and a sealant layer with the materials and film thicknesses shown in the table. For the pellicle packages obtained in each example, the total amount of outgassing of volatile organic components under heating conditions of 100° C. and 30 minutes measured by the above-described measuring method (in the table, referred to as The results of "Total amount of outgassing from the protective film package" are shown in Table 1. In addition, for the pellicle packaging bodies of each example, the value of the breaking strength measured by the above-mentioned measuring method was in the range of 10 N or more and 40 N or less.

<Evaluation of the total amount of outgassing from the protective film> (1) Preparation of various ingredients as raw materials for mask adhesive ·Thermoplastic elastomer (A) Styrene-hydrogenated isoprene-styrene block copolymer (trade name "HYBRAR 7125" (manufactured by Kuraray Co., Ltd.), tan delta peak temperature: -5°C, styrene Content ratio: 20% by mass)

·Tackiness-imparting resin (B) Hydrogenated product of alicyclic petroleum resin: C9 hydrogenated petroleum resin (trade name "Alcon P-100" (manufactured by Arakawa Chemical Industry Co., Ltd.), softening point: 100℃±5℃, number average molecular weight (Mn): 610) Rosin ester resin (trade name "Pinecrystal KE-311" (manufactured by Arakawa Chemical Industry Co., Ltd.), softening point: 100℃±5℃)

·Softener Polybutene (trade name "Nissan Polybutene 30N" (manufactured by NOF Corporation))

·Wax Polypropylene thermal decomposition wax (trade name "Hi-wax NP055" (manufactured by Mitsui Chemicals Co., Ltd.))

(2) Manufacturing of protective film 100 parts by mass of the thermoplastic elastomer (A), 100 parts by mass of the tackifier resin (B), and 200 parts by mass of the softener were mixed so that the total amount became 48 g, thereby obtaining a raw material mixture. The obtained raw material mixture was put into a Labo plastomill (manufactured by Toyo Seiki Seisakusho Co., Ltd., internal capacity: 60 mL) and sealed. Knead at 200°C and 100 rpm for 20 minutes to obtain a block mask adhesive. Put about 10 g of mask adhesive into the heating tank (temperature in the tank: 200°C) and let it melt. On the other hand, an anodized aluminum support frame 14 as shown in FIG. 1 is prepared (outer dimensions: 148.77 mm×114.9 mm, frame height H: 2.5 mm, frame width W: 2 mm). The mask adhesive in a molten state extruded from the needle tip connected to the heating tank is applied to one end surface of the support frame 14 to form the adhesive layer 15 for the master plate. The thickness of the adhesive layer 15 for the original plate formed was 0.6 mm. In addition, a spacer is disposed on the surface of the original adhesive layer 15 . The protective film 12 is attached to the other end surface of the support frame 14 (that is, the end surface on the side where the adhesive layer 15 for the original plate is not formed) through the adhesive layer 13 for the separator (fluoropolymer (AGC company, CYTOP A type)). Thus, the protective film 10 is obtained.

(Evaluation of the total amount of outgassing) The following preparations were made: the protective films of each example were placed in a clean oven in an atmospheric environment, heated in the range of 70°C to 80°C for 20 hours, and degassed. The protective film was packaged using the protective film packaging body of each example, and stored at 23° C. for one week. After storage, the protective film is taken out from the protective film packaging body and placed in an oven. Then, the outgas generated under heating conditions of 50° C. for 4 hours was adsorbed on Tenax (trademark, manufactured by GL Science Co., Ltd.) which is a powdery adsorbent material. After that, the Tenax was set on the GCMS, and the total amount (μg) of outgassing of volatile organic components generated from the self-protective film was measured under heating conditions of 280°C for 10 minutes (n-decane conversion), and it was determined as " The total amount of outgassing from the protective film (μg/protective film).” The results are shown in Table 1.

In Table 1, polyethylene is labeled as PE and polyethylene terephthalate is labeled as PET.

[Table 1] base material layer sealant layer Total amount of outgassing from protective film packaging (ppm) The total amount of outgassing from the protective film (μg/protective film) Material Material Film thickness (μm) Example 1 PET Ethylene-vinyl alcohol copolymer 25 2.5 0.1 Example 2 PET PET 30 6.8 0.2 Example 3 PET Nylon (registered trademark) 120 20.0 3.1 Comparative example 1 PET PE 40 91.0 4.1

As shown in Table 1, it can be seen that the pellicle packaging bodies of the Examples can reduce the risk of outgassing from the pellicle film caused by the adhesion of outgassing of volatile organic components generated from the pellicle film packaging bodies, compared with the pellicle film packaging bodies of Comparative Examples. The amount of outgassing.

The entire disclosure of Japanese Patent Application No. 2022-045759 filed on March 22, 2022 is incorporated into this specification by reference. All documents, patent applications, and technical specifications described in this specification are hereby incorporated by reference to the same extent as if each individual document, patent application, or technical specification was specifically and individually stated to be incorporated by reference. incorporated into this manual.

10:Protective film 12:Protective film 13: Adhesive layer for membrane 14:Support frame 15: Adhesive layer for original version 16:Vent hole

FIG. 1 is a schematic cross-sectional view showing an example of a protective film.

10:Protective film

12:Protective film

13: Adhesive layer for membrane

14:Support frame

15: Adhesive layer for original version

16:Vent hole

Claims (9)

A protective film packaging body in which the total amount of outgassing of volatile organic components under heating conditions of 100°C and 30 minutes is 90 ppm or less. The protective film packaging body according to claim 1 includes at least two layers: a sealant layer and a base material layer. The protective film packaging body according to claim 2, wherein the thickness of the sealant layer is 40 μm or less. The protective film packaging body according to claim 2, wherein there is an adhesive layer between the sealant layer and the base material layer. The protective film package according to any one of claims 2 to 4, wherein the sealant layer contains an ethylene-vinyl alcohol copolymer. The protective film package according to any one of claims 1 to 4, wherein the breaking strength is 5 N or more and 50 N or less. The pellicle film package according to any one of claims 1 to 4 is a package for a pellicle film having an adhesive for the original plate, wherein the adhesive for the original plate contains a styrene butadiene-based adhesive. A protective film container, including: protective film; A protective film storage container for storing the protective film; and The protective film packaging body according to any one of claims 1 to 7, wherein the protective film container is packaged. The protective film container according to claim 8, wherein the protective film contains an adhesive for the original plate, The adhesive for the original plate is a styrene-butadiene adhesive.