KR20240148395A - 펠리클 포장체 및 펠리클 수용체 - Google Patents

펠리클 포장체 및 펠리클 수용체 Download PDF

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Publication number
KR20240148395A
KR20240148395A KR1020247029992A KR20247029992A KR20240148395A KR 20240148395 A KR20240148395 A KR 20240148395A KR 1020247029992 A KR1020247029992 A KR 1020247029992A KR 20247029992 A KR20247029992 A KR 20247029992A KR 20240148395 A KR20240148395 A KR 20240148395A
Authority
KR
South Korea
Prior art keywords
pellicle
packaging body
adhesive
outgassing
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020247029992A
Other languages
English (en)
Korean (ko)
Inventor
켄 이토
다이키 다네이치
Original Assignee
미쯔이가가꾸가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 미쯔이가가꾸가부시끼가이샤 filed Critical 미쯔이가가꾸가부시끼가이샤
Publication of KR20240148395A publication Critical patent/KR20240148395A/ko
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/38—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for delicate optical, measuring, calculating or control apparatus
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
KR1020247029992A 2022-03-22 2023-03-20 펠리클 포장체 및 펠리클 수용체 Pending KR20240148395A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2022-045759 2022-03-22
JP2022045759 2022-03-22
PCT/JP2023/011023 WO2023182314A1 (ja) 2022-03-22 2023-03-20 ペリクル包装体及びペリクル収容体

Publications (1)

Publication Number Publication Date
KR20240148395A true KR20240148395A (ko) 2024-10-11

Family

ID=88101092

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020247029992A Pending KR20240148395A (ko) 2022-03-22 2023-03-20 펠리클 포장체 및 펠리클 수용체

Country Status (5)

Country Link
JP (1) JP7701554B2 (enrdf_load_stackoverflow)
KR (1) KR20240148395A (enrdf_load_stackoverflow)
CN (1) CN118901043A (enrdf_load_stackoverflow)
TW (1) TW202338495A (enrdf_load_stackoverflow)
WO (1) WO2023182314A1 (enrdf_load_stackoverflow)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61203383A (ja) * 1985-02-26 1986-09-09 ホ−ヤ株式会社 基板保持構造
JPH0624837Y2 (ja) * 1988-04-06 1994-06-29 ダイセル化学工業株式会社 ペリクル収納容器
JP2005321532A (ja) * 2004-05-07 2005-11-17 Shin Etsu Chem Co Ltd 基板収納ケース
JP4324944B2 (ja) 2005-06-29 2009-09-02 信越ポリマー株式会社 精密部材収納容器
JP5209423B2 (ja) 2008-09-11 2013-06-12 旭化成イーマテリアルズ株式会社 ペリクル梱包構造体
JP5767730B2 (ja) * 2014-03-20 2015-08-19 旭化成イーマテリアルズ株式会社 収納容器からの大型ペリクルの取出し方法

Also Published As

Publication number Publication date
CN118901043A (zh) 2024-11-05
JPWO2023182314A1 (enrdf_load_stackoverflow) 2023-09-28
JP7701554B2 (ja) 2025-07-01
WO2023182314A1 (ja) 2023-09-28
TW202338495A (zh) 2023-10-01

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Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20240906

Patent event code: PA01051R01D

Comment text: International Patent Application

PA0201 Request for examination
PG1501 Laying open of application