CN116457072A - 臭氧供给装置及臭氧供给方法 - Google Patents
臭氧供给装置及臭氧供给方法 Download PDFInfo
- Publication number
- CN116457072A CN116457072A CN202080107434.5A CN202080107434A CN116457072A CN 116457072 A CN116457072 A CN 116457072A CN 202080107434 A CN202080107434 A CN 202080107434A CN 116457072 A CN116457072 A CN 116457072A
- Authority
- CN
- China
- Prior art keywords
- nitrogen
- gas
- ozone
- unit
- concentration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 title claims abstract description 420
- 238000000034 method Methods 0.000 title claims abstract description 31
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 890
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 445
- 239000007789 gas Substances 0.000 claims abstract description 429
- 238000002336 sorption--desorption measurement Methods 0.000 claims abstract description 88
- 239000002994 raw material Substances 0.000 claims abstract description 78
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 40
- 239000001301 oxygen Substances 0.000 claims abstract description 40
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 40
- 230000007423 decrease Effects 0.000 claims abstract description 32
- 238000007599 discharging Methods 0.000 claims abstract description 6
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 claims description 222
- 238000001179 sorption measurement Methods 0.000 claims description 37
- 238000001514 detection method Methods 0.000 claims description 8
- 238000004020 luminiscence type Methods 0.000 claims 1
- 239000003463 adsorbent Substances 0.000 description 48
- 238000010586 diagram Methods 0.000 description 20
- 230000004048 modification Effects 0.000 description 13
- 238000012986 modification Methods 0.000 description 13
- 230000008569 process Effects 0.000 description 11
- 238000010926 purge Methods 0.000 description 8
- 230000003247 decreasing effect Effects 0.000 description 7
- 238000003795 desorption Methods 0.000 description 6
- 230000007704 transition Effects 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 230000015556 catabolic process Effects 0.000 description 3
- 238000006731 degradation reaction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000741 silica gel Substances 0.000 description 2
- 229910002027 silica gel Inorganic materials 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 238000000859 sublimation Methods 0.000 description 2
- 230000008022 sublimation Effects 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000295 emission spectrum Methods 0.000 description 1
- -1 for example Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 231100000572 poisoning Toxicity 0.000 description 1
- 230000000607 poisoning effect Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000036962 time dependent Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/10—Preparation of ozone
- C01B13/11—Preparation of ozone by electric discharge
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
- Separation Of Gases By Adsorption (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2020/046773 WO2022130506A1 (ja) | 2020-12-15 | 2020-12-15 | オゾン供給装置及びオゾン供給方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116457072A true CN116457072A (zh) | 2023-07-18 |
Family
ID=81124379
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202080107434.5A Pending CN116457072A (zh) | 2020-12-15 | 2020-12-15 | 臭氧供给装置及臭氧供给方法 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP7024916B1 (ja) |
| CN (1) | CN116457072A (ja) |
| WO (1) | WO2022130506A1 (ja) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06127906A (ja) * | 1992-10-15 | 1994-05-10 | Mitsubishi Electric Corp | オゾン発生設備及びオゾン発生装置用酸素／窒素混合気体 |
| JP2005126280A (ja) * | 2003-10-23 | 2005-05-19 | Sumitomo Precision Prod Co Ltd | オゾン発生装置及びオゾン発生方法 |
| JP2011213498A (ja) * | 2010-03-31 | 2011-10-27 | Kurita Water Ind Ltd | オゾンガス発生システム及びオゾンガス発生方法 |
| CN103007678A (zh) * | 2011-09-27 | 2013-04-03 | 上海弘中实业有限公司 | 臭氧消毒制氧机 |
| JP2014065620A (ja) * | 2012-09-25 | 2014-04-17 | Mitsubishi Electric Corp | オゾン供給システムおよび排水処理システム |
| CN108473306A (zh) * | 2016-01-28 | 2018-08-31 | 三菱电机株式会社 | 臭氧供给装置以及臭氧供给方法 |
| WO2019234882A1 (ja) * | 2018-06-07 | 2019-12-12 | 三菱電機株式会社 | オゾン供給装置およびオゾン供給方法 |
-
2020
- 2020-12-15 WO PCT/JP2020/046773 patent/WO2022130506A1/ja active Application Filing
- 2020-12-15 JP JP2021525852A patent/JP7024916B1/ja active Active
- 2020-12-15 CN CN202080107434.5A patent/CN116457072A/zh active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06127906A (ja) * | 1992-10-15 | 1994-05-10 | Mitsubishi Electric Corp | オゾン発生設備及びオゾン発生装置用酸素／窒素混合気体 |
| JP2005126280A (ja) * | 2003-10-23 | 2005-05-19 | Sumitomo Precision Prod Co Ltd | オゾン発生装置及びオゾン発生方法 |
| JP2011213498A (ja) * | 2010-03-31 | 2011-10-27 | Kurita Water Ind Ltd | オゾンガス発生システム及びオゾンガス発生方法 |
| CN103007678A (zh) * | 2011-09-27 | 2013-04-03 | 上海弘中实业有限公司 | 臭氧消毒制氧机 |
| JP2014065620A (ja) * | 2012-09-25 | 2014-04-17 | Mitsubishi Electric Corp | オゾン供給システムおよび排水処理システム |
| CN108473306A (zh) * | 2016-01-28 | 2018-08-31 | 三菱电机株式会社 | 臭氧供给装置以及臭氧供给方法 |
| WO2019234882A1 (ja) * | 2018-06-07 | 2019-12-12 | 三菱電機株式会社 | オゾン供給装置およびオゾン供給方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2022130506A1 (ja) | 2022-06-23 |
| WO2022130506A1 (ja) | 2022-06-23 |
| JP7024916B1 (ja) | 2022-02-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US20220161187A1 (en) | Smart dehumidification apparatus and dehumidification method of flow rate-dependent switching method | |
| AU2017395075B2 (en) | Carbon dioxide recovery method and recovery apparatus | |
| CN113614027B (zh) | 氢制造装置的运转方法及氢制造装置 | |
| JP2007105657A (ja) | ガス処理装置 | |
| JP2006247595A (ja) | 吸着濃縮装置 | |
| US10179306B2 (en) | Methods of operating pressure swing adsorption purifiers with electrochemical hydrogen compressors | |
| WO2011093246A1 (ja) | 可燃性ガス濃縮装置 | |
| CN112203974B (zh) | 臭氧供给装置及臭氧供给方法 | |
| JP5427412B2 (ja) | オゾンガス濃縮方法及びその装置 | |
| JP5101540B2 (ja) | アルゴン精製方法およびアルゴン精製装置 | |
| CN116457072A (zh) | 臭氧供给装置及臭氧供给方法 | |
| TWI720164B (zh) | 臭氧氣體的濃縮方法、以及臭氧氣體的濃縮裝置 | |
| JP2009269805A (ja) | 炭酸ガス回収方法およびその装置 | |
| CN113874317B (zh) | 臭氧供给装置及臭氧供给方法 | |
| JP2007260605A (ja) | ガス処理装置 | |
| JP7292554B1 (ja) | オゾン供給装置およびオゾン供給方法 | |
| JP2006272187A (ja) | 排ガス処理装置 | |
| JPH09142808A (ja) | オゾン発生装置の制御方法 | |
| JP2000290004A (ja) | オゾン供給装置及び方法 | |
| CN113614031A (zh) | 臭氧供给装置以及臭氧供给方法 | |
| KR102571184B1 (ko) | 대기 오염물질 저감 장치 | |
| WO2007049691A1 (ja) | 燃料電池システム | |
| JP2010076971A (ja) | 循環式オゾン発生方法およびその装置 | |
| JP4126766B2 (ja) | オゾン吸脱着装置 | |
| CN117580632A (zh) | 气体分离设备及气体分离方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |