CN116097104A - 探针卡 - Google Patents

探针卡 Download PDF

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Publication number
CN116097104A
CN116097104A CN202080103394.7A CN202080103394A CN116097104A CN 116097104 A CN116097104 A CN 116097104A CN 202080103394 A CN202080103394 A CN 202080103394A CN 116097104 A CN116097104 A CN 116097104A
Authority
CN
China
Prior art keywords
probe
guide plate
offset
probes
locking portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202080103394.7A
Other languages
English (en)
Chinese (zh)
Inventor
森亲臣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Electronic Materials Corp
Original Assignee
Japan Electronic Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Electronic Materials Corp filed Critical Japan Electronic Materials Corp
Priority to CN202610060267.2A priority Critical patent/CN121831221A/zh
Publication of CN116097104A publication Critical patent/CN116097104A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07371—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate card or back card with apertures through which the probes pass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
    • G01R1/07328—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support for testing printed circuit boards
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2889—Interfaces, e.g. between probe and tester
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Geometry (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
CN202080103394.7A 2020-09-15 2020-09-15 探针卡 Pending CN116097104A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202610060267.2A CN121831221A (zh) 2020-09-15 2020-09-15 探针卡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/034931 WO2022059070A1 (ja) 2020-09-15 2020-09-15 プローブカード

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN202610060267.2A Division CN121831221A (zh) 2020-09-15 2020-09-15 探针卡

Publications (1)

Publication Number Publication Date
CN116097104A true CN116097104A (zh) 2023-05-09

Family

ID=80777301

Family Applications (2)

Application Number Title Priority Date Filing Date
CN202080103394.7A Pending CN116097104A (zh) 2020-09-15 2020-09-15 探针卡
CN202610060267.2A Pending CN121831221A (zh) 2020-09-15 2020-09-15 探针卡

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN202610060267.2A Pending CN121831221A (zh) 2020-09-15 2020-09-15 探针卡

Country Status (6)

Country Link
US (1) US12332278B2 (https=)
JP (3) JPWO2022059070A1 (https=)
KR (1) KR102870178B1 (https=)
CN (2) CN116097104A (https=)
TW (1) TWI899329B (https=)
WO (1) WO2022059070A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115684677B (zh) * 2021-07-29 2025-08-01 芯卓科技(浙江)有限公司 探针及探针卡装置

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008224677A (ja) * 2008-04-21 2008-09-25 Tokyo Electron Ltd プローブカード
JP2013205098A (ja) * 2012-03-27 2013-10-07 Micronics Japan Co Ltd プローブ及びプローブカード
TW201740114A (zh) * 2016-02-23 2017-11-16 日本電子材料股份有限公司 探針導件、探針卡及探針導件之製造方法
US20180003767A1 (en) * 2015-03-13 2018-01-04 Technoprobe S.P.A. Testing head comprising vertical probes
JP2018044912A (ja) * 2016-09-16 2018-03-22 日本電子材料株式会社 プローブカード
CN109564241A (zh) * 2016-08-11 2019-04-02 泰克诺探头公司 用于测试电子器件的装置的接触探针和相应测试头
WO2020012799A1 (ja) * 2018-07-13 2020-01-16 日本電産リード株式会社 検査治具、及び検査装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8222912B2 (en) * 2009-03-12 2012-07-17 Sv Probe Pte. Ltd. Probe head structure for probe test cards
US9702904B2 (en) * 2011-03-21 2017-07-11 Formfactor, Inc. Non-linear vertical leaf spring
US10006938B2 (en) * 2012-01-04 2018-06-26 Formfactor, Inc. Probes with programmable motion
WO2014087906A1 (ja) * 2012-12-04 2014-06-12 日本電子材料株式会社 電気的接触子
JP2015072182A (ja) * 2013-10-03 2015-04-16 日本電子材料株式会社 プローブカード
SG11201704433TA (en) * 2014-12-30 2017-07-28 Technoprobe Spa Contact probe for testing head
CN111403937A (zh) * 2020-03-24 2020-07-10 东莞立德精密工业有限公司 金属端子及其制作方法
CN113721051B (zh) * 2020-05-26 2023-12-01 旺矽科技股份有限公司 具有线型探针的探针头
CN115248338B (zh) * 2021-04-27 2025-09-23 芯卓科技(浙江)有限公司 探针结构及其探针卡装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008224677A (ja) * 2008-04-21 2008-09-25 Tokyo Electron Ltd プローブカード
JP2013205098A (ja) * 2012-03-27 2013-10-07 Micronics Japan Co Ltd プローブ及びプローブカード
US20180003767A1 (en) * 2015-03-13 2018-01-04 Technoprobe S.P.A. Testing head comprising vertical probes
TW201740114A (zh) * 2016-02-23 2017-11-16 日本電子材料股份有限公司 探針導件、探針卡及探針導件之製造方法
CN109564241A (zh) * 2016-08-11 2019-04-02 泰克诺探头公司 用于测试电子器件的装置的接触探针和相应测试头
JP2018044912A (ja) * 2016-09-16 2018-03-22 日本電子材料株式会社 プローブカード
WO2020012799A1 (ja) * 2018-07-13 2020-01-16 日本電産リード株式会社 検査治具、及び検査装置

Also Published As

Publication number Publication date
US12332278B2 (en) 2025-06-17
TW202215058A (zh) 2022-04-16
US20230266365A1 (en) 2023-08-24
TWI899329B (zh) 2025-10-01
JP2024174199A (ja) 2024-12-13
WO2022059070A1 (ja) 2022-03-24
JP2026063332A (ja) 2026-04-10
KR20230038795A (ko) 2023-03-21
CN121831221A (zh) 2026-04-10
KR102870178B1 (ko) 2025-10-14
JPWO2022059070A1 (https=) 2022-03-24

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