CN115433580A - 一种光电行业蚀刻液的生产方法 - Google Patents
一种光电行业蚀刻液的生产方法 Download PDFInfo
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- CN115433580A CN115433580A CN202211324398.5A CN202211324398A CN115433580A CN 115433580 A CN115433580 A CN 115433580A CN 202211324398 A CN202211324398 A CN 202211324398A CN 115433580 A CN115433580 A CN 115433580A
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- hydrofluoric acid
- etching solution
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- 238000005530 etching Methods 0.000 title claims abstract description 47
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 24
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims abstract description 107
- 239000000243 solution Substances 0.000 claims abstract description 94
- PUZPDOWCWNUUKD-UHFFFAOYSA-M sodium fluoride Chemical compound [F-].[Na+] PUZPDOWCWNUUKD-UHFFFAOYSA-M 0.000 claims abstract description 32
- 239000012535 impurity Substances 0.000 claims abstract description 27
- 239000002253 acid Substances 0.000 claims abstract description 23
- 238000009835 boiling Methods 0.000 claims abstract description 22
- 239000000706 filtrate Substances 0.000 claims abstract description 22
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims abstract description 17
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 17
- 229910052708 sodium Inorganic materials 0.000 claims abstract description 17
- 239000011734 sodium Substances 0.000 claims abstract description 17
- 239000011775 sodium fluoride Substances 0.000 claims abstract description 16
- 235000013024 sodium fluoride Nutrition 0.000 claims abstract description 16
- 238000001914 filtration Methods 0.000 claims abstract description 13
- 239000002002 slurry Substances 0.000 claims abstract description 13
- 239000012266 salt solution Substances 0.000 claims abstract description 9
- 238000002156 mixing Methods 0.000 claims abstract description 5
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 claims description 30
- NUJOXMJBOLGQSY-UHFFFAOYSA-N manganese dioxide Chemical compound O=[Mn]=O NUJOXMJBOLGQSY-UHFFFAOYSA-N 0.000 claims description 28
- 238000005374 membrane filtration Methods 0.000 claims description 14
- 238000010612 desalination reaction Methods 0.000 claims description 10
- 239000012286 potassium permanganate Substances 0.000 claims description 9
- 239000012528 membrane Substances 0.000 claims description 5
- 238000006243 chemical reaction Methods 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 3
- 230000035484 reaction time Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 10
- 238000001728 nano-filtration Methods 0.000 abstract description 3
- 239000000047 product Substances 0.000 abstract description 3
- 239000000126 substance Substances 0.000 abstract description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 abstract description 2
- 229910052731 fluorine Inorganic materials 0.000 abstract description 2
- 239000011737 fluorine Substances 0.000 abstract description 2
- 239000007788 liquid Substances 0.000 description 12
- OQVYMXCRDHDTTH-UHFFFAOYSA-N 4-(diethoxyphosphorylmethyl)-2-[4-(diethoxyphosphorylmethyl)pyridin-2-yl]pyridine Chemical compound CCOP(=O)(OCC)CC1=CC=NC(C=2N=CC=C(CP(=O)(OCC)OCC)C=2)=C1 OQVYMXCRDHDTTH-UHFFFAOYSA-N 0.000 description 3
- 238000005119 centrifugation Methods 0.000 description 2
- 238000011221 initial treatment Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000000746 purification Methods 0.000 description 2
- 238000011282 treatment Methods 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000002674 ointment Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K13/00—Etching, surface-brightening or pickling compositions
- C09K13/04—Etching, surface-brightening or pickling compositions containing an inorganic acid
- C09K13/08—Etching, surface-brightening or pickling compositions containing an inorganic acid containing a fluorine compound
Abstract
Description
蚀刻液的质量(g) | 精馏塔内压力(KPa) | 蚀刻液收率(%) |
107.06 | -45 | 90 |
107.82 | -50 | 92 |
130.52 | -40 | 89 |
130.63 | -55 | 90 |
Claims (9)
Priority Applications (1)
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CN202211324398.5A CN115433580B (zh) | 2022-10-27 | 2022-10-27 | 一种光电行业蚀刻液的生产方法 |
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CN202211324398.5A CN115433580B (zh) | 2022-10-27 | 2022-10-27 | 一种光电行业蚀刻液的生产方法 |
Publications (2)
Publication Number | Publication Date |
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CN115433580A true CN115433580A (zh) | 2022-12-06 |
CN115433580B CN115433580B (zh) | 2023-08-18 |
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CN202211324398.5A Active CN115433580B (zh) | 2022-10-27 | 2022-10-27 | 一种光电行业蚀刻液的生产方法 |
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Citations (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3166379A (en) * | 1962-06-04 | 1965-01-19 | Union Carbide Corp | Purification of hydrofluoric acid |
GB1174382A (en) * | 1967-12-14 | 1969-12-17 | Maxim Ivanovich Kafyrov | A Method for Purifying Hydrofluoric Acid. |
US4584886A (en) * | 1983-09-26 | 1986-04-29 | Kabushiki Kaisha Toshiba | Resolution device for semiconductor thin films |
JP2002115083A (ja) * | 2000-07-31 | 2002-04-19 | Mitsubishi Chemicals Corp | エッチング液およびその製造方法ならびにエッチング方法および半導体装置の製造方法 |
CN101570318A (zh) * | 2008-04-28 | 2009-11-04 | 多氟多化工股份有限公司 | 一种生产电子级氢氟酸的方法 |
CN101597032A (zh) * | 2009-05-15 | 2009-12-09 | 广东光华化学厂有限公司 | 电子级高纯氢氟酸的制备方法 |
CN102774858A (zh) * | 2012-08-21 | 2012-11-14 | 天津市风船化学试剂科技有限公司 | 一种超纯度氟化铵侵蚀剂的制备方法 |
CN103466642A (zh) * | 2013-09-17 | 2013-12-25 | 云天化集团有限责任公司 | 一种由有机碱处理氟硅酸制备氟化氢和白炭黑的方法 |
CN106241834A (zh) * | 2016-08-30 | 2016-12-21 | 云南磷化集团有限公司 | 采用磷化工副产物氟硅酸制备氟化氢钠技术 |
CN106865500A (zh) * | 2017-04-05 | 2017-06-20 | 张旭 | 一种用氟硅酸制备氟化氢的循环生产工艺 |
KR20170078238A (ko) * | 2015-12-29 | 2017-07-07 | 솔브레인 주식회사 | 식각액의 정제 방법 |
CN108439340A (zh) * | 2018-06-07 | 2018-08-24 | 山东鲁北企业集团总公司 | 一种无水氢氟酸的制备方法 |
CN110127616A (zh) * | 2019-04-17 | 2019-08-16 | 苏州汉谱埃文材料科技有限公司 | 一种超纯酸液的纯化工艺 |
CN111908425A (zh) * | 2020-08-05 | 2020-11-10 | 福建瓮福蓝天氟化工有限公司 | 一种氟硅酸法制备无水氟化氢过程砷的脱除工艺 |
CN114369462A (zh) * | 2021-12-16 | 2022-04-19 | 湖北兴福电子材料有限公司 | 一种选择性蚀刻氮化钛及钨的蚀刻液 |
-
2022
- 2022-10-27 CN CN202211324398.5A patent/CN115433580B/zh active Active
Patent Citations (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3166379A (en) * | 1962-06-04 | 1965-01-19 | Union Carbide Corp | Purification of hydrofluoric acid |
GB1174382A (en) * | 1967-12-14 | 1969-12-17 | Maxim Ivanovich Kafyrov | A Method for Purifying Hydrofluoric Acid. |
US4584886A (en) * | 1983-09-26 | 1986-04-29 | Kabushiki Kaisha Toshiba | Resolution device for semiconductor thin films |
JP2002115083A (ja) * | 2000-07-31 | 2002-04-19 | Mitsubishi Chemicals Corp | エッチング液およびその製造方法ならびにエッチング方法および半導体装置の製造方法 |
CN101570318A (zh) * | 2008-04-28 | 2009-11-04 | 多氟多化工股份有限公司 | 一种生产电子级氢氟酸的方法 |
CN101597032A (zh) * | 2009-05-15 | 2009-12-09 | 广东光华化学厂有限公司 | 电子级高纯氢氟酸的制备方法 |
CN102774858A (zh) * | 2012-08-21 | 2012-11-14 | 天津市风船化学试剂科技有限公司 | 一种超纯度氟化铵侵蚀剂的制备方法 |
CN103466642A (zh) * | 2013-09-17 | 2013-12-25 | 云天化集团有限责任公司 | 一种由有机碱处理氟硅酸制备氟化氢和白炭黑的方法 |
KR20170078238A (ko) * | 2015-12-29 | 2017-07-07 | 솔브레인 주식회사 | 식각액의 정제 방법 |
CN106241834A (zh) * | 2016-08-30 | 2016-12-21 | 云南磷化集团有限公司 | 采用磷化工副产物氟硅酸制备氟化氢钠技术 |
CN106865500A (zh) * | 2017-04-05 | 2017-06-20 | 张旭 | 一种用氟硅酸制备氟化氢的循环生产工艺 |
CN108439340A (zh) * | 2018-06-07 | 2018-08-24 | 山东鲁北企业集团总公司 | 一种无水氢氟酸的制备方法 |
CN110127616A (zh) * | 2019-04-17 | 2019-08-16 | 苏州汉谱埃文材料科技有限公司 | 一种超纯酸液的纯化工艺 |
CN111908425A (zh) * | 2020-08-05 | 2020-11-10 | 福建瓮福蓝天氟化工有限公司 | 一种氟硅酸法制备无水氟化氢过程砷的脱除工艺 |
CN114369462A (zh) * | 2021-12-16 | 2022-04-19 | 湖北兴福电子材料有限公司 | 一种选择性蚀刻氮化钛及钨的蚀刻液 |
Non-Patent Citations (3)
Title |
---|
刘飞等: "电子级氢氟酸的纯化技术及其发展现状", 《硫磷设计与粉体工程》, no. 1, pages 154 - 48 * |
赵陈;肖飞彪;王志昆;: "氟硅酸制取氢氟酸研究进展", 有机氟工业, no. 03, pages 36 - 42 * |
黄江生;刘飞;李子艳;刘松林;朱静;: "氟化氢的制备及纯化方法概述", 无机盐工业, no. 10, pages 15 - 18 * |
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Effective date of registration: 20240207 Address after: No. 102, Building E14, Phase III, Optics Valley United Science and Technology City, No. 19, Xingang Avenue, Huangzhou District, Huanggang City, Hubei Province, 438000 Patentee after: Hubei jiuning Chemical Technology Co.,Ltd. Country or region after: China Patentee after: HUBEI HONGYUAN PHARMACEUTICAL TECHNOLOGY Co.,Ltd. Address before: No. 102, Building E14, Phase III, Optics Valley United Science and Technology City, No. 19, Xingang Avenue, Huangzhou District, Huanggang City, Hubei Province, 438000 Patentee before: Hubei jiuning Chemical Technology Co.,Ltd. Country or region before: China |