CN115023816A - 半导体装置和半导体装置的制造方法 - Google Patents

半导体装置和半导体装置的制造方法 Download PDF

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CN115023816A
CN115023816A CN202180011241.4A CN202180011241A CN115023816A CN 115023816 A CN115023816 A CN 115023816A CN 202180011241 A CN202180011241 A CN 202180011241A CN 115023816 A CN115023816 A CN 115023816A
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semiconductor
semiconductor device
layer
film
crystal
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大岛孝仁
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Flosfia Inc
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Flosfia Inc
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    • C23C16/4486—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by producing an aerosol and subsequent evaporation of the droplets or particles
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  • Crystallography & Structural Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
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  • Bipolar Transistors (AREA)
CN202180011241.4A 2020-01-27 2021-01-27 半导体装置和半导体装置的制造方法 Pending CN115023816A (zh)

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
JP2020010927 2020-01-27
JP2020-010926 2020-01-27
JP2020010924 2020-01-27
JP2020-010927 2020-01-27
JP2020-010924 2020-01-27
JP2020010926 2020-01-27
JP2020010925 2020-01-27
JP2020-010925 2020-01-27
PCT/JP2021/002822 WO2021153609A1 (ja) 2020-01-27 2021-01-27 半導体装置および半導体装置の製造方法

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US (1) US12432947B2 (https=)
EP (1) EP4098781A4 (https=)
JP (1) JPWO2021153609A1 (https=)
KR (1) KR102777027B1 (https=)
CN (1) CN115023816A (https=)
TW (1) TW202147455A (https=)
WO (1) WO2021153609A1 (https=)

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CN119140997A (zh) * 2024-09-14 2024-12-17 吉林大学 一种基于激光表面处理的异种材料高质量搭接焊方法

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WO2023048150A1 (ja) * 2021-09-22 2023-03-30 株式会社Flosfia 結晶膜の製造方法および結晶膜
WO2024048710A1 (ja) * 2022-08-31 2024-03-07 株式会社Flosfia 結晶膜および結晶膜の製造方法
KR102853825B1 (ko) 2023-07-19 2025-09-02 주식회사 인터포 이미지 코드 기반의 통합 여행 서비스 제공 방법, 프로그램 및 장치

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