CN114213117B - 一种压电陶瓷的干压成型烧结方法 - Google Patents

一种压电陶瓷的干压成型烧结方法 Download PDF

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CN114213117B
CN114213117B CN202111655606.5A CN202111655606A CN114213117B CN 114213117 B CN114213117 B CN 114213117B CN 202111655606 A CN202111655606 A CN 202111655606A CN 114213117 B CN114213117 B CN 114213117B
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张晓云
方豪杰
贺亦文
刘建平
曾超
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Hunan Jialixin Ceramic Technology Co ltd
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Abstract

本发明涉及电子陶瓷材料领域，具体为一种压电陶瓷的干压成型烧结方法，将(Ba0.85Ca0.15)(Zr0.1Ti0.9‑aAa)O3、(K0.5Na0.5)(Nb0.5Ta0.5)O3、CuAlO2、LiBiO2、MnO球磨烘干后，电场下预烧，再次球磨并烘干，与聚乙烯醇、石蜡混合均匀造粒干压成型，还原气体氛围下，升温至550‑650℃保温排胶，再升温至1100‑1150℃保温烧结2‑4h，再降温至800‑850℃保温退火1‑2h，炉冷至室温即可，利用本发明方法所制备的压电陶瓷烧结温度低，而且具有较高的致密度和良好的压电性能，具有广阔的应用前景。

Description

一种压电陶瓷的干压成型烧结方法
技术领域
本发明涉及电子陶瓷材料领域，具体涉及一种压电陶瓷的干压成型烧结方法。
背景技术
压电陶瓷是一种具备了压电、介电以及弹性三种性能的各向异性材料。作为当今使用率最高的功能性材料之一，压电陶瓷的应用范围日益广泛，这是因为其具有化学稳定性高、制备工艺方便、成本低以及压电性能较好等诸多优点。压电陶瓷在日常生活中发挥着重要的作用，不仅广泛应用在日常生活中，在军用器件中也起到了必不可少的作用。
干压成型烧结法以其成本低，技术简单等优点成为目前运用最成熟、最广泛的一种传统的粉体合成方法，也是目前压电陶瓷主要的合成方法，但此方法也存在一些致命的缺点，如原料难以混合均匀，晶粒粗而分散，烧结温度高等，还需要对其进行一定的改进。
发明内容
发明目的：针对现有技术的缺陷或改进需求，本发明提供了一种压电陶瓷的干压成型烧结方法。
本发明所采用的技术方案如下：
一种压电陶瓷的干压成型烧结方法，具体如下：
将(Ba0.85Ca0.15)(Zr0.1Ti0.9-aAa)O3、(K0.5Na0.5)(Nb0.5Ta0.5)O3、CuAlO2、LiBiO2、MnO混合球磨10-15h，得到混合粉体，将其烘干后，置于预烧电场下750-800℃预烧2-4h，恢复室温后再次球磨10-15h并烘干，与聚乙烯醇、石蜡混合均匀造粒于50-60MPa下干压成型，得到陶瓷坯体，还原气体氛围下，将陶瓷坯体一次升温至550-650℃保温排胶2-4h，再二次升温至1100-1150℃保温烧结2-4h，烧结时，对陶瓷坯体施加烧结电场，再降温至800-850℃保温退火1-2h，烧结电场强度随着温度降低随之降低，最后炉冷至室温即可获得所述压电陶瓷，所述压电陶瓷由以下化学式表示：
x(Ba0.85Ca0.15)(Zr0.1Ti0.9-aAa)O3-(1-x)(K0.5Na0.5)(Nb0.5Ta0.5)O3-αCuAlO2-βLiBiO2-γMnO
其中，a表示原子百分比，A为Nb、Mn或Sn中的任意一种，x表示(Ba0.85Ca0.15)(Zr0.1Ti0.9-aAa)O3
占x(Ba0.85Ca0.15)(Zr0.1Ti0.9-aAa)O3-(1-x)(K0.5Na0.5)(Nb0.5Ta0.5)O3的摩尔百分比，
α、β、γ分别表示CuAlO2、LiBiO2、MnO占x(Ba0.85Ca0.15)(Zr0.1Ti0.9-aAa)O3-(1-x)(K0.5Na0.5)(Nb0.5Ta0.5)O3的质量百分比，x为0.6-0.9，a为0.02-0.1，α为0.1-0.5％，β为0.1-0.5％，γ为0.01-0.02％。
进一步地，A为Sn。
进一步地，x为0.8。
进一步地，a为0.05。
进一步地，α为0.1％，β为0.2％，γ为0.01％。
进一步地，(Ba0.85Ca0.15)(Zr0.1Ti0.9-aAa)O3的制备方法如下：
将BaCO3、CaCO3、TiO2、ZrO2、A氧化物加入熔盐水溶液中，混合均匀得到悬浮液，继续搅拌1-3h后80-90℃烘干，球磨10-15h后升温至650-700℃预烧2-4h，恢复室温后去离子水清洗除去熔盐后烘干即可。
进一步地，(K0.5Na0.5)(Nb0.5Ta0.5)O3的制备方法如下：
将K2CO3、Na2CO3、Nb2O5、Ta2O5加入熔盐水溶液中，混合均匀得到悬浮液，继续搅拌1-3h后80-90℃烘干，球磨10-15h后升温至650-700℃预烧2-4h，恢复室温后去离子水清洗除去熔盐后烘干即可。
CuAlO2和LiBiO2可以直接购买，也可以参考(Ba0.85Ca0.15)(Zr0.1Ti0.9-aSna)O3、(K0.5Na0.5)(Nb0.5Ta0.5)O3的制备方法自行制备，制备时将原料替换为CuO、Al2O3或Li2O、Bi2O3即可。
还原气体可以是纯氢气、或氢气与空气、氢气与氮气、氢气与氦气，综合考虑，优选为氢气与氮气，氢气的比例也大于等于50％。
进一步地，所述熔盐水溶液为NaCl、KCl按质量比1:1组成的熔盐水溶液。
进一步地，一次升温速度为1-2℃/min，二次升温速度为4-6℃/min，降温速度为10-15℃/min。
进一步地，预烧电场强度为200-400V/cm，烧结电场强度为600-800V/cm，保温退火时烧结电场强度降低至400-500V/cm。
本发明的有益效果：
本发明提供了一种压电陶瓷的干压成型烧结方法，分别对BCZT和KNN压电陶瓷进行预掺杂后再复合，形成了单一钙钛矿结构的固溶体，并在晶界处发生偏析，具有明显弛豫现象，CuAlO2和LiBiO2的加入能明显降低烧结温度，提升致密度，通过实施例1、对比例1-2对比可知，CuAlO2和LiBiO2的加入能提升致密度，减少孔隙并细化晶粒，电场下烧结也可以降低烧结温度，烧结时施加电场会产生晶体缺陷发生雪崩效应，加速了质量传递和电导率的作用，产生的高浓度缺陷增强了原子扩散动力学，促进晶核生长、提升压电陶瓷的致密度，发明人进一步在预烧和退火时，同样施加电场，发现可以进一步提升压电陶瓷的压电性能，还原气体氛围下烧结，能诱导R/T相界中出现更高含量的R相，并诱导了更小尺寸的电畴出现，提高了压电性能，利用本发明方法所制备的压电陶瓷烧结温度低，而且具有较高的致密度和良好的压电性能，密度≥5.63g/cm3，压电常数≥615pC/N，平面机电耦合系数≥0.63，介电损耗≤0.015％，性能优于绝大多数的压电陶瓷，具有广阔的应用前景。
附图说明
图1为本发明实施例1所制备压电陶瓷的SEM图；
图2为本发明对比例1所制备压电陶瓷的SEM图；
图3为本发明对比例2所制备压电陶瓷的SEM图；
由图1、图2、图3对比可知，本发明方法所制备的压电陶瓷致密度更高，孔隙更少，晶粒细度高。
具体实施方式
实施例中未注明具体条件者，按照常规条件或制造商建议的条件进行。所用试剂或仪器未注明生产厂商者，均为可以通过市售购买获得的常规产品。
实施例1：
一种压电陶瓷的干压成型烧结方法：
压电陶瓷由以下化学式表示：
0.8(Ba0.85Ca0.15)(Zr0.1Ti0.85Sn0.05)O3-0.2(K0.5Na0.5)(Nb0.5Ta0.5)O3-0.1％CuAlO2-0.2％LiBiO2-0.01％MnO
以化学式中的计量比将(Ba0.85Ca0.15)(Zr0.1Ti0.9-aAa)O3、(K0.5Na0.5)(Nb0.5Ta0.5)O3、CuAlO2、LiBiO2、MnO混合球磨15h，得到混合粉体，将其烘干后，置于400V/cm预烧电场下800℃预烧4h，恢复室温后再次球磨15h并烘干，与聚乙烯醇、石蜡混合均匀造粒于60MPa下干压成型，得到陶瓷坯体，氢气与氮气按体积比1:1组成的还原气体氛围下，以2℃/min的速度将陶瓷坯体一次升温至600℃保温排胶2h，再以5℃/min的速度二次升温至1150℃保温烧结2h，烧结时，对陶瓷坯体施加800V/cm的烧结电场，再以10℃/min的速度降温至850℃保温退火2h，烧结电场强度随着温度降低随之降低，保温退火时烧结电场强度为400V/cm，最后炉冷至室温即可获得所述压电陶瓷。
其中，(Ba0.85Ca0.15)(Zr0.1Ti0.9-aSna)O3的制备方法如下：
以化学式中的计量比将BaCO3、CaCO3、TiO2、ZrO2、SnO2加入熔盐水溶液中，熔盐水溶液为NaCl、KCl按质量比1:1组成熔盐的水溶液，混合均匀得到悬浮液，继续搅拌3h后90℃烘干，球磨15h后升温至700℃预烧2h，恢复室温后去离子水清洗除去熔盐后烘干即可。
(K0.5Na0.5)(Nb0.5Ta0.5)O3的制备方法如下：
以化学式中的计量比将K2CO3、Na2CO3、Nb2O5、Ta2O5加入熔盐水溶液中，熔盐水溶液为NaCl、KCl按质量比1:1组成熔盐的水溶液，混合均匀得到悬浮液，继续搅拌3h后90℃烘干，球磨15h后升温至700℃预烧2h，恢复室温后去离子水清洗除去熔盐后烘干即可。
实施例2：
一种压电陶瓷的干压成型烧结方法：
压电陶瓷由以下化学式表示：
0.8(Ba0.85Ca0.15)(Zr0.1Ti0.85Sn0.05)O3-0.2(K0.5Na0.5)(Nb0.5Ta0.5)O3-0.1％CuAlO2-0.2％LiBiO2-0.01％MnO
以化学式中的计量比将(Ba0.85Ca0.15)(Zr0.1Ti0.9-aAa)O3、(K0.5Na0.5)(Nb0.5Ta0.5)O3、CuAlO2、LiBiO2、MnO混合球磨10h，得到混合粉体，将其烘干后，置于200V/cm预烧电场下750℃预烧2h，恢复室温后再次球磨10h并烘干，与聚乙烯醇、石蜡混合均匀造粒于50MPa下干压成型，得到陶瓷坯体，氢气与氮气按体积比1:1组成的还原气体氛围下，以1℃/min的速度将陶瓷坯体一次升温至550℃保温排胶2h，再以4℃/min的速度二次升温至1100℃保温烧结2h，烧结时，对陶瓷坯体施加600V/cm的烧结电场，再以10℃/min的速度降温至800℃保温退火1h，烧结电场强度随着温度降低随之降低，保温退火时烧结电场强度为400V/cm，最后炉冷至室温即可获得所述压电陶瓷，
其中，(Ba0.85Ca0.15)(Zr0.1Ti0.9-aSna)O3的制备方法如下：
以化学式中的计量比将BaCO3、CaCO3、TiO2、ZrO2、SnO2加入熔盐水溶液中，熔盐水溶液为NaCl、KCl按质量比1:1组成熔盐的水溶液，混合均匀得到悬浮液，继续搅拌1h后85℃烘干，球磨10h后升温至700℃预烧2h，恢复室温后去离子水清洗除去熔盐后烘干即可。
(K0.5Na0.5)(Nb0.5Ta0.5)O3的制备方法如下：
以化学式中的计量比将K2CO3、Na2CO3、Nb2O5、Ta2O5加入熔盐水溶液中，熔盐水溶液为NaCl、KCl按质量比1:1组成熔盐的水溶液，混合均匀得到悬浮液，继续搅拌1h后85℃烘干，球磨10h后升温至700℃预烧2h，恢复室温后去离子水清洗除去熔盐后烘干即可。
实施例3：
一种压电陶瓷的干压成型烧结方法：
压电陶瓷由以下化学式表示：
0.8(Ba0.85Ca0.15)(Zr0.1Ti0.85Sn0.05)O3-0.2(K0.5Na0.5)(Nb0.5Ta0.5)O3-0.1％CuAlO2-0.2％LiBiO2-0.01％MnO
以化学式中的计量比将(Ba0.85Ca0.15)(Zr0.1Ti0.9-aAa)O3、(K0.5Na0.5)(Nb0.5Ta0.5)O3、CuAlO2、LiBiO2、MnO混合球磨15h，得到混合粉体，将其烘干后，置于300V/cm预烧电场下750℃预烧2h，恢复室温后再次球磨15h并烘干，与聚乙烯醇、石蜡混合均匀造粒于50MPa下干压成型，得到陶瓷坯体，氢气与氮气按体积比1:1组成的还原气体氛围下，以1℃/min的速度将陶瓷坯体一次升温至600℃保温排胶2h，再以6℃/min的速度二次升温至1150℃保温烧结2h，烧结时，对陶瓷坯体施加800V/cm的烧结电场，再以10℃/min的速度降温至800℃保温退火2h，烧结电场强度随着温度降低随之降低，保温退火时烧结电场强度为400V/cm，最后炉冷至室温即可获得所述压电陶瓷，
其中，(Ba0.85Ca0.15)(Zr0.1Ti0.9-aSna)O3的制备方法如下：
以化学式中的计量比将BaCO3、CaCO3、TiO2、ZrO2、SnO2加入熔盐水溶液中，熔盐水溶液为NaCl、KCl按质量比1:1组成熔盐的水溶液，混合均匀得到悬浮液，继续搅拌1h后80℃烘干，球磨10h后升温至650℃预烧2h，恢复室温后去离子水清洗除去熔盐后烘干即可。
(K0.5Na0.5)(Nb0.5Ta0.5)O3的制备方法如下：
以化学式中的计量比将K2CO3、Na2CO3、Nb2O5、Ta2O5加入熔盐水溶液中，熔盐水溶液为NaCl、KCl按质量比1:1组成熔盐的水溶液，混合均匀得到悬浮液，继续搅拌1h后80℃烘干，球磨10h后升温至650℃预烧2h，恢复室温后去离子水清洗除去熔盐后烘干即可。
实施例4：
一种压电陶瓷的干压成型烧结方法：
压电陶瓷由以下化学式表示：
0.8(Ba0.85Ca0.15)(Zr0.1Ti0.85Sn0.05)O3-0.2(K0.5Na0.5)(Nb0.5Ta0.5)O3-0.1％CuAlO2-0.2％LiBiO2-0.01％MnO
以化学式中的计量比将(Ba0.85Ca0.15)(Zr0.1Ti0.9-aAa)O3、(K0.5Na0.5)(Nb0.5Ta0.5)O3、CuAlO2、LiBiO2、MnO混合球磨10h，得到混合粉体，将其烘干后，置于300V/cm预烧电场下800℃预烧2h，恢复室温后再次球磨10h并烘干，与聚乙烯醇、石蜡混合均匀造粒于50MPa下干压成型，得到陶瓷坯体，氢气与氮气按体积比1:1组成的还原气体氛围下，以2℃/min的速度将陶瓷坯体一次升温至650℃保温排胶4h，再以5℃/min的速度二次升温至1150℃保温烧结2h，烧结时，对陶瓷坯体施加600V/cm的烧结电场，再以10℃/min的速度降温至800℃保温退火2h，烧结电场强度随着温度降低随之降低，保温退火时烧结电场强度为400V/cm，最后炉冷至室温即可获得所述压电陶瓷，
其中，(Ba0.85Ca0.15)(Zr0.1Ti0.9-aSna)O3的制备方法如下：
以化学式中的计量比将BaCO3、CaCO3、TiO2、ZrO2、SnO2加入熔盐水溶液中，熔盐水溶液为NaCl、KCl按质量比1:1组成熔盐的水溶液，混合均匀得到悬浮液，继续搅拌2h后90℃烘干，球磨10h后升温至650℃预烧2h，恢复室温后去离子水清洗除去熔盐后烘干即可。
(K0.5Na0.5)(Nb0.5Ta0.5)O3的制备方法如下：
以化学式中的计量比将K2CO3、Na2CO3、Nb2O5、Ta2O5加入熔盐水溶液中，熔盐水溶液为NaCl、KCl按质量比1:1组成熔盐的水溶液，混合均匀得到悬浮液，继续搅拌2h后90℃烘干，球磨10h后升温至650℃预烧2h，恢复室温后去离子水清洗除去熔盐后烘干即可。
实施例5：
一种压电陶瓷的干压成型烧结方法：
压电陶瓷由以下化学式表示：
0.8(Ba0.85Ca0.15)(Zr0.1Ti0.85Sn0.05)O3-0.2(K0.5Na0.5)(Nb0.5Ta0.5)O3-0.1％CuAlO2-0.2％LiBiO2-0.01％MnO
以化学式中的计量比将(Ba0.85Ca0.15)(Zr0.1Ti0.9-aAa)O3、(K0.5Na0.5)(Nb0.5Ta0.5)O3、CuAlO2、LiBiO2、MnO混合球磨15h，得到混合粉体，将其烘干后，置于400V/cm预烧电场下800℃预烧4h，恢复室温后再次球磨15h并烘干，与聚乙烯醇、石蜡混合均匀造粒于60MPa下干压成型，得到陶瓷坯体，氢气与氮气按体积比1:1组成的还原气体氛围下，以2℃/min的速度将陶瓷坯体一次升温至650℃保温排胶4h，再以6℃/min的速度二次升温至1150℃保温烧结4h，烧结时，对陶瓷坯体施加800V/cm的烧结电场，再以15℃/min的速度降温至850℃保温退火2h，烧结电场强度随着温度降低随之降低，保温退火时烧结电场强度为500V/cm，最后炉冷至室温即可获得所述压电陶瓷，
其中，(Ba0.85Ca0.15)(Zr0.1Ti0.9-aSna)O3的制备方法如下：
以化学式中的计量比将BaCO3、CaCO3、TiO2、ZrO2、SnO2加入熔盐水溶液中，熔盐水溶液为NaCl、KCl按质量比1:1组成熔盐的水溶液，混合均匀得到悬浮液，继续搅拌3h后90℃烘干，球磨15h后升温至700℃预烧4h，恢复室温后去离子水清洗除去熔盐后烘干即可。
(K0.5Na0.5)(Nb0.5Ta0.5)O3的制备方法如下：
以化学式中的计量比将K2CO3、Na2CO3、Nb2O5、Ta2O5加入熔盐水溶液中，熔盐水溶液为NaCl、KCl按质量比1:1组成熔盐的水溶液，混合均匀得到悬浮液，继续搅拌3h后90℃烘干，球磨15h后升温至700℃预烧4h，恢复室温后去离子水清洗除去熔盐后烘干即可。
对比例1
对比例1与实施例1基本相同，区别在于，不加入CuAlO2。
对比例2
对比例2与实施例1基本相同，区别在于，不加入LiBiO2。
对比例3
对比例3与实施例1基本相同，区别在于，不加入MnO。
对比例4
对比例4与实施例1基本相同，区别在于，预烧时不施加电场。
对比例5
对比例5与实施例1基本相同，区别在于，烧结时不施加预烧电场。
对比例6
对比例6与实施例1基本相同，区别在于，退火时不施加电场。
对比例7
对比例7与实施例1基本相同，区别在于，用氮气代替氢气与氮气按体积比1:1组成的还原气体氛围。
性能测试：
分别将本发明实施例1-5及对比例1-7制备的压电陶瓷打磨抛光，清洗干净烘干后用毛笔均匀地将银浆刷在压电陶瓷的两面，再放入马弗炉中加热至600℃，保温10min，炉冷至室温，再将已被银的压电陶瓷材料放置于硅油中，接通4kV/cm的直流电场，极化时间30min，极化结束放置24h后，进行性能测试。
压电常数是表征压电材料性能特有的一种参数，它反映压电体将机械能转换为电能(正压电效应)或将电能转换为机械能(逆压电效应)的转换能力。压电常数越大，表明材料将机械能与电能互相转换的能力越强，耦合效果越好，用ZJ-3型准静态d33测量仪测量样品的压电常数；
用阻抗分析仪测试室温下样品的谐振、反谐振频率，以及1kHz时的等效电阻、等效电容等参数，计算样品的平面机电耦合系数Kp、介电损耗tanδ。
对本发明实施例1-5及对比例1-7制备的压电陶瓷进行性能测试，测试结果如下表1所示：
表1
Figure BDA0003448214310000101
Figure BDA0003448214310000111
由上表1可知，利用本发明方法所制备的压电陶瓷烧结温度低，而且具有较高的致密度和良好的压电性能，密度≥5.63g/cm3，压电常数≥615pC/N，平面机电耦合系数≥0.63，介电损耗≤0.015％，性能优于绝大多数的压电陶瓷，具有广阔的应用前景。
以上实施例仅用以说明本发明的技术方案，而非对其限制；尽管参照前述实施例对本发明进行了详细的说明，本领域的普通技术人员应当理解：其依然可以对前述各实施例所记载的技术方案进行修改，或者对其中部分技术特征进行等同替换；而这些修改或者替换，并不使相应技术方案的本质脱离本发明各实施例技术方案的精神和范围。

Claims (10)

1.一种压电陶瓷的干压成型烧结方法，其特征在于，具体如下：
将(Ba0.85Ca0.15)(Zr0.1Ti0.9-aAa)O3、(K0.5Na0.5)(Nb0.5Ta0.5)O3、CuAlO2、LiBiO2、MnO混合球磨10-15h，得到混合粉体，将其烘干后，置于预烧电场下750-800℃预烧2-4h，恢复室温后再次球磨10-15h并烘干，与聚乙烯醇、石蜡混合均匀造粒于50-60MPa下干压成型，得到陶瓷坯体，还原气体氛围下，将陶瓷坯体一次升温至550-650℃保温排胶2-4h，再二次升温至1100-1150℃保温烧结2-4h，烧结时，对陶瓷坯体施加烧结电场，再降温至800-850℃保温退火1-2h，烧结电场强度随着温度降低随之降低，最后炉冷至室温即可获得所述压电陶瓷，所述压电陶瓷由以下化学式表示：
x(Ba0.85Ca0.15)(Zr0.1Ti0.9-aAa)O3-(1-x)(K0.5Na0.5)(Nb0.5Ta0.5)O3-αCuAlO2-βLiBiO2-γMnO
其中，a表示原子百分比，A为Nb、Mn或Sn中的任意一种，x表示(Ba0.85Ca0.15)(Zr0.1Ti0.9- aAa)O3
占x(Ba0.85Ca0.15)(Zr0.1Ti0.9-aAa)O3-(1-x)(K0.5Na0.5)(Nb0.5Ta0.5)O3的摩尔百分比，
α、β、γ分别表示CuAlO2、LiBiO2、MnO占x(Ba0.85Ca0.15)(Zr0.1Ti0.9-aAa)O3-(1-x)(K0.5Na0.5)(Nb0.5Ta0.5)O3的质量百分比，x为0.6-0.9，a为0.02-0.1，α为0.1-0.5％，β为0.1-0.5％，γ为0.01-0.02％。
2.如权利要求1所述的压电陶瓷的干压成型烧结方法，其特征在于，A为Sn。
3.如权利要求1所述的压电陶瓷的干压成型烧结方法，其特征在于，x为0.8。
4.如权利要求1所述的压电陶瓷的干压成型烧结方法，其特征在于，a为0.05。
5.如权利要求1所述的压电陶瓷的干压成型烧结方法，其特征在于，α为0.1％，β为0.2％，γ为0.01％。
6.如权利要求1所述的压电陶瓷的干压成型烧结方法，其特征在于，所述(Ba0.85Ca0.15)(Zr0.1Ti0.9-aAa)O3的制备方法如下：
将BaCO3、CaCO3、TiO2、ZrO2、A氧化物加入熔盐水溶液中，混合均匀得到悬浮液，继续搅拌1-3h后80-90℃烘干，球磨10-15h后升温至650-700℃预烧2-4h，恢复室温后去离子水清洗除去熔盐后烘干即可。
7.如权利要求1所述的压电陶瓷的干压成型烧结方法，其特征在于，所述(K0.5Na0.5)(Nb0.5Ta0.5)O3的制备方法如下：
将K2CO3、Na2CO3、Nb2O5、Ta2O5加入熔盐水溶液中，混合均匀得到悬浮液，继续搅拌1-3h后80-90℃烘干，球磨10-15h后升温至650-700℃预烧2-4h，恢复室温后去离子水清洗除去熔盐后烘干即可。
8.如权利要求6或7所述的压电陶瓷的干压成型烧结方法，其特征在于，所述熔盐水溶液为NaCl、KCl按质量比1:1组成的熔盐水溶液。
9.如权利要求1所述的压电陶瓷的干压成型烧结方法，其特征在于，一次升温速度为1-2℃/min，二次升温速度为4-6℃/min，降温速度为10-15℃/min。
10.如权利要求1所述的压电陶瓷的干压成型烧结方法，其特征在于，预烧电场强度为200-400V/cm，烧结电场强度为600-800V/cm。
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