CN113498546B - 等离子处理装置以及等离子处理方法 - Google Patents

等离子处理装置以及等离子处理方法 Download PDF

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Publication number
CN113498546B
CN113498546B CN202080004147.1A CN202080004147A CN113498546B CN 113498546 B CN113498546 B CN 113498546B CN 202080004147 A CN202080004147 A CN 202080004147A CN 113498546 B CN113498546 B CN 113498546B
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China
Prior art keywords
plasma
temperature
plasma processing
frequency power
substrate
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CN202080004147.1A
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English (en)
Chinese (zh)
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CN113498546A (zh
Inventor
玉利南菜子
广田侯然
角屋诚浩
长谷征洋
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Hitachi High Tech Corp
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Hitachi High Technologies Corp
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Publication of CN113498546A publication Critical patent/CN113498546A/zh
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H01J37/32522—Temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32137—Radio frequency generated discharge controlling of the discharge by modulation of energy
    • H01J37/32146—Amplitude modulation, includes pulsing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/24—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials
    • H10P50/242—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials of Group IV materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/334—Etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/334—Etching
    • H01J2237/3341—Reactive etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32201—Generating means

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • Plasma Technology (AREA)
  • Measuring Oxygen Concentration In Cells (AREA)
  • Treatment Of Fiber Materials (AREA)
CN202080004147.1A 2020-02-03 2020-02-03 等离子处理装置以及等离子处理方法 Active CN113498546B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/003894 WO2021156906A1 (ja) 2020-02-03 2020-02-03 プラズマ処理装置およびプラズマ処理方法

Publications (2)

Publication Number Publication Date
CN113498546A CN113498546A (zh) 2021-10-12
CN113498546B true CN113498546B (zh) 2024-04-12

Family

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CN202080004147.1A Active CN113498546B (zh) 2020-02-03 2020-02-03 等离子处理装置以及等离子处理方法

Country Status (6)

Country Link
US (2) US12154765B2 (https=)
JP (1) JP7013618B2 (https=)
KR (1) KR102614972B1 (https=)
CN (1) CN113498546B (https=)
TW (1) TWI818230B (https=)
WO (1) WO2021156906A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12014898B2 (en) * 2021-09-27 2024-06-18 Applied Materials, Inc. Active temperature control for RF window in immersed antenna source

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001085405A (ja) * 1999-09-13 2001-03-30 Hitachi Ltd プラズマ処理装置およびプラズマ処理方法
JP2006210948A (ja) * 2006-04-20 2006-08-10 Hitachi High-Technologies Corp プラズマ処理装置
JP2010219198A (ja) * 2009-03-16 2010-09-30 Hitachi High-Technologies Corp プラズマ処理装置
CN104103486A (zh) * 2013-04-09 2014-10-15 株式会社日立高新技术 等离子体处理方法以及等离子体处理装置
JP2017022136A (ja) * 2016-10-06 2017-01-26 株式会社日立ハイテクノロジーズ プラズマ処理方法およびプラズマ処理装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH088232A (ja) * 1994-06-22 1996-01-12 Sony Corp プラズマ処理方法
US5925212A (en) 1995-09-05 1999-07-20 Applied Materials, Inc. Apparatus and method for attaining repeatable temperature versus time profiles for plasma heated interactive parts used in mass production plasma processing
JPH10130872A (ja) 1996-10-29 1998-05-19 Sumitomo Metal Ind Ltd プラズマ処理方法
JP3708031B2 (ja) 2001-06-29 2005-10-19 株式会社日立製作所 プラズマ処理装置および処理方法
JP4490704B2 (ja) 2004-02-27 2010-06-30 株式会社日立ハイテクノロジーズ プラズマ処理方法
JP5220447B2 (ja) 2008-03-17 2013-06-26 東京エレクトロン株式会社 基板処理システムの洗浄方法、記憶媒体及び基板処理システム
JP2009277889A (ja) * 2008-05-15 2009-11-26 Hitachi High-Technologies Corp プラズマ処理装置及びプラズマ処理装置の制御方法
JP5279627B2 (ja) 2009-06-18 2013-09-04 東京エレクトロン株式会社 基板処理方法及び記憶媒体
JP5334787B2 (ja) 2009-10-09 2013-11-06 株式会社日立ハイテクノロジーズ プラズマ処理装置
JP5530794B2 (ja) 2010-04-28 2014-06-25 株式会社日立ハイテクノロジーズ 真空処理装置及びプラズマ処理方法
JP5813389B2 (ja) 2011-06-24 2015-11-17 東京エレクトロン株式会社 基板処理時間設定方法及び記憶媒体
KR102102003B1 (ko) 2012-05-25 2020-04-20 도쿄엘렉트론가부시키가이샤 플라즈마 처리 장치, 및 플라즈마 처리 방법
JP5753866B2 (ja) 2013-03-11 2015-07-22 株式会社日立ハイテクノロジーズ プラズマ処理方法
JP2016103496A (ja) 2014-11-27 2016-06-02 株式会社日立ハイテクノロジーズ プラズマ処理装置
JP6539113B2 (ja) * 2015-05-28 2019-07-03 株式会社日立ハイテクノロジーズ プラズマ処理装置およびプラズマ処理方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001085405A (ja) * 1999-09-13 2001-03-30 Hitachi Ltd プラズマ処理装置およびプラズマ処理方法
JP2006210948A (ja) * 2006-04-20 2006-08-10 Hitachi High-Technologies Corp プラズマ処理装置
JP2010219198A (ja) * 2009-03-16 2010-09-30 Hitachi High-Technologies Corp プラズマ処理装置
CN104103486A (zh) * 2013-04-09 2014-10-15 株式会社日立高新技术 等离子体处理方法以及等离子体处理装置
JP2017022136A (ja) * 2016-10-06 2017-01-26 株式会社日立ハイテクノロジーズ プラズマ処理方法およびプラズマ処理装置

Also Published As

Publication number Publication date
TW202131763A (zh) 2021-08-16
JPWO2021156906A1 (https=) 2021-08-12
JP7013618B2 (ja) 2022-01-31
US20250046580A1 (en) 2025-02-06
KR102614972B1 (ko) 2023-12-19
US12154765B2 (en) 2024-11-26
WO2021156906A1 (ja) 2021-08-12
KR20210102179A (ko) 2021-08-19
TWI818230B (zh) 2023-10-11
CN113498546A (zh) 2021-10-12
US20220359166A1 (en) 2022-11-10

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