CN112930241A - 加工系统以及加工方法 - Google Patents

加工系统以及加工方法 Download PDF

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Publication number
CN112930241A
CN112930241A CN201980070423.1A CN201980070423A CN112930241A CN 112930241 A CN112930241 A CN 112930241A CN 201980070423 A CN201980070423 A CN 201980070423A CN 112930241 A CN112930241 A CN 112930241A
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CN
China
Prior art keywords
processing
measurement
machining
workpiece
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201980070423.1A
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English (en)
Chinese (zh)
Inventor
江上茂树
立崎阳介
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to CN202410540060.6A priority Critical patent/CN118237728A/zh
Priority to CN202410540065.9A priority patent/CN118237729A/zh
Priority to CN202610306907.3A priority patent/CN121988868A/zh
Publication of CN112930241A publication Critical patent/CN112930241A/zh
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B51/00—Arrangements for automatic control of a series of individual steps in grinding a workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special environment or atmosphere, e.g. in an enclosure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special environment or atmosphere, e.g. in an enclosure
    • B23K26/127—Working by laser beam, e.g. welding, cutting or boring in a special environment or atmosphere, e.g. in an enclosure in an enclosure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K37/00—Auxiliary devices or processes, not specially adapted for a procedure covered by only one of the other main groups of this subclass
    • B23K37/04—Auxiliary devices or processes, not specially adapted for a procedure covered by only one of the other main groups of this subclass for holding or positioning work
    • B23K37/047—Auxiliary devices or processes, not specially adapted for a procedure covered by only one of the other main groups of this subclass for holding or positioning work moving work to adjust its position between soldering, welding or cutting steps

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Laser Beam Processing (AREA)
CN201980070423.1A 2018-10-31 2019-10-31 加工系统以及加工方法 Pending CN112930241A (zh)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN202410540060.6A CN118237728A (zh) 2018-10-31 2019-10-31 加工装置以及加工系统
CN202410540065.9A CN118237729A (zh) 2018-10-31 2019-10-31 加工系统以及加工方法
CN202610306907.3A CN121988868A (zh) 2018-10-31 2019-10-31 加工系统以及加工方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
PCT/JP2018/040625 WO2020090074A1 (ja) 2018-10-31 2018-10-31 加工システム、及び、加工方法
JPPCT/JP2018/040625 2018-10-31
PCT/JP2019/042734 WO2020090961A1 (ja) 2018-10-31 2019-10-31 加工システム、及び、加工方法

Related Child Applications (3)

Application Number Title Priority Date Filing Date
CN202610306907.3A Division CN121988868A (zh) 2018-10-31 2019-10-31 加工系统以及加工方法
CN202410540060.6A Division CN118237728A (zh) 2018-10-31 2019-10-31 加工装置以及加工系统
CN202410540065.9A Division CN118237729A (zh) 2018-10-31 2019-10-31 加工系统以及加工方法

Publications (1)

Publication Number Publication Date
CN112930241A true CN112930241A (zh) 2021-06-08

Family

ID=70461831

Family Applications (4)

Application Number Title Priority Date Filing Date
CN201980070423.1A Pending CN112930241A (zh) 2018-10-31 2019-10-31 加工系统以及加工方法
CN202610306907.3A Pending CN121988868A (zh) 2018-10-31 2019-10-31 加工系统以及加工方法
CN202410540065.9A Pending CN118237729A (zh) 2018-10-31 2019-10-31 加工系统以及加工方法
CN202410540060.6A Pending CN118237728A (zh) 2018-10-31 2019-10-31 加工装置以及加工系统

Family Applications After (3)

Application Number Title Priority Date Filing Date
CN202610306907.3A Pending CN121988868A (zh) 2018-10-31 2019-10-31 加工系统以及加工方法
CN202410540065.9A Pending CN118237729A (zh) 2018-10-31 2019-10-31 加工系统以及加工方法
CN202410540060.6A Pending CN118237728A (zh) 2018-10-31 2019-10-31 加工装置以及加工系统

Country Status (6)

Country Link
US (1) US20210339359A1 (enExample)
EP (1) EP3875206B1 (enExample)
JP (5) JP7310829B2 (enExample)
CN (4) CN112930241A (enExample)
TW (1) TW202035047A (enExample)
WO (2) WO2020090074A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113319424A (zh) * 2021-05-31 2021-08-31 中国科学院西安光学精密机械研究所 一种三维形貌精确控制加工系统及加工方法

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TWI755030B (zh) * 2020-08-18 2022-02-11 財團法人工業技術研究院 用於整形工件的整形設備與整形方法、及可執行整形方法的電腦可讀取非暫態媒體
JP2022185291A (ja) * 2021-06-02 2022-12-14 株式会社ニコン 造形装置及び造形方法、並びに、加工装置及び加工方法
CN119855675A (zh) * 2022-09-15 2025-04-18 株式会社 尼康 加工系统、数据结构以及加工方法
WO2024189767A1 (ja) * 2023-03-14 2024-09-19 株式会社ニコン 加工システム及び加工方法
JPWO2025094320A1 (enExample) * 2023-11-01 2025-05-08
EP4663333A1 (en) 2024-06-11 2025-12-17 United Machining Mill SA Laser machining method and laser machine tool for machining a texture or a cavity on a workpiece

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Cited By (2)

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Publication number Priority date Publication date Assignee Title
CN113319424A (zh) * 2021-05-31 2021-08-31 中国科学院西安光学精密机械研究所 一种三维形貌精确控制加工系统及加工方法
CN113319424B (zh) * 2021-05-31 2022-07-08 中国科学院西安光学精密机械研究所 一种三维形貌精确控制加工系统及加工方法

Also Published As

Publication number Publication date
EP3875206A1 (en) 2021-09-08
CN118237729A (zh) 2024-06-25
JP7775949B2 (ja) 2025-11-26
JPWO2020090961A1 (ja) 2021-09-30
JPWO2020090074A1 (ja) 2021-09-24
JP7310829B2 (ja) 2023-07-19
JP2024152899A (ja) 2024-10-25
JP2024133403A (ja) 2024-10-01
JP2023126943A (ja) 2023-09-12
TW202035047A (zh) 2020-10-01
EP3875206B1 (en) 2025-12-03
CN118237728A (zh) 2024-06-25
CN121988868A (zh) 2026-05-08
WO2020090074A1 (ja) 2020-05-07
JP7533712B2 (ja) 2024-08-14
EP3875206A4 (en) 2022-08-17
WO2020090961A1 (ja) 2020-05-07
US20210339359A1 (en) 2021-11-04

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