CN112533878A - 石英玻璃坩埚 - Google Patents

石英玻璃坩埚 Download PDF

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Publication number
CN112533878A
CN112533878A CN201980050978.XA CN201980050978A CN112533878A CN 112533878 A CN112533878 A CN 112533878A CN 201980050978 A CN201980050978 A CN 201980050978A CN 112533878 A CN112533878 A CN 112533878A
Authority
CN
China
Prior art keywords
layer
devitrification
quartz glass
glass crucible
crucible
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201980050978.XA
Other languages
English (en)
Chinese (zh)
Inventor
马场裕二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Quartz Products Co Ltd
Original Assignee
Shin Etsu Quartz Products Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Quartz Products Co Ltd filed Critical Shin Etsu Quartz Products Co Ltd
Publication of CN112533878A publication Critical patent/CN112533878A/zh
Pending legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
    • C03B19/095—Other methods of shaping glass by fusing powdered glass in a shaping mould by centrifuging, e.g. arc discharge in rotating mould
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
    • C30B35/002—Crucibles or containers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Glass Compositions (AREA)
CN201980050978.XA 2018-08-09 2019-06-04 石英玻璃坩埚 Pending CN112533878A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2018-150790 2018-08-09
JP2018150790A JP7349779B2 (ja) 2018-08-09 2018-08-09 石英ガラスるつぼ
PCT/JP2019/022168 WO2020031481A1 (ja) 2018-08-09 2019-06-04 石英ガラスるつぼ

Publications (1)

Publication Number Publication Date
CN112533878A true CN112533878A (zh) 2021-03-19

Family

ID=69415494

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201980050978.XA Pending CN112533878A (zh) 2018-08-09 2019-06-04 石英玻璃坩埚

Country Status (8)

Country Link
US (1) US11821103B2 (https=)
EP (1) EP3835270B1 (https=)
JP (1) JP7349779B2 (https=)
KR (1) KR102788131B1 (https=)
CN (1) CN112533878A (https=)
SG (1) SG11202101068VA (https=)
TW (1) TWI795571B (https=)
WO (1) WO2020031481A1 (https=)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10182139A (ja) * 1996-12-18 1998-07-07 Mitsubishi Chem Corp 合成石英ガラス粉末の品質評価方法
JPH10203893A (ja) * 1997-01-20 1998-08-04 Mitsubishi Materials Shilicon Corp 高強度石英ガラスルツボ及びその製造方法
JP2000072589A (ja) * 1998-08-31 2000-03-07 Shinetsu Quartz Prod Co Ltd シリコン単結晶引き上げ用石英ガラスるつぼ及び その製造方法
CN101724887A (zh) * 2008-10-31 2010-06-09 日本超精石英株式会社 具有多层结构的石英玻璃坩埚
JP2018104248A (ja) * 2016-12-28 2018-07-05 クアーズテック株式会社 シリコン単結晶引上げ用石英ガラスルツボ

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3621282B2 (ja) 1999-02-25 2005-02-16 東芝セラミックス株式会社 石英ガラスルツボおよびその製造方法
DE10217946A1 (de) 2002-04-22 2003-11-13 Heraeus Quarzglas Quarzglastiegel und Verfahren zur Herstellung desselben
JP4717771B2 (ja) 2006-09-28 2011-07-06 コバレントマテリアル株式会社 シリカガラスルツボ
JP4814855B2 (ja) 2007-09-28 2011-11-16 コバレントマテリアル株式会社 シリカガラスルツボ
JP5774400B2 (ja) * 2010-08-12 2015-09-09 株式会社Sumco シリカ粉の評価方法、シリカガラスルツボ、シリカガラスルツボの製造方法
JP5992572B2 (ja) 2010-08-12 2016-09-14 株式会社Sumco シリカ粉の評価方法、シリカガラスルツボ、シリカガラスルツボの製造方法
JP2017186135A (ja) * 2016-04-07 2017-10-12 理想科学工業株式会社 印刷システム
JP2018104247A (ja) 2016-12-28 2018-07-05 クアーズテック株式会社 シリカ焼結体とその製造方法
JP6855358B2 (ja) * 2017-09-27 2021-04-07 クアーズテック株式会社 シリコン単結晶引上げ用石英ガラスルツボ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10182139A (ja) * 1996-12-18 1998-07-07 Mitsubishi Chem Corp 合成石英ガラス粉末の品質評価方法
JPH10203893A (ja) * 1997-01-20 1998-08-04 Mitsubishi Materials Shilicon Corp 高強度石英ガラスルツボ及びその製造方法
JP2000072589A (ja) * 1998-08-31 2000-03-07 Shinetsu Quartz Prod Co Ltd シリコン単結晶引き上げ用石英ガラスるつぼ及び その製造方法
CN101724887A (zh) * 2008-10-31 2010-06-09 日本超精石英株式会社 具有多层结构的石英玻璃坩埚
JP2018104248A (ja) * 2016-12-28 2018-07-05 クアーズテック株式会社 シリコン単結晶引上げ用石英ガラスルツボ

Also Published As

Publication number Publication date
TW202018134A (zh) 2020-05-16
TWI795571B (zh) 2023-03-11
KR20210040976A (ko) 2021-04-14
SG11202101068VA (en) 2021-03-30
US11821103B2 (en) 2023-11-21
EP3835270A1 (en) 2021-06-16
US20210310151A1 (en) 2021-10-07
EP3835270B1 (en) 2025-11-26
KR102788131B1 (ko) 2025-03-31
EP3835270A4 (en) 2022-05-04
WO2020031481A1 (ja) 2020-02-13
JP2020026362A (ja) 2020-02-20
JP7349779B2 (ja) 2023-09-25

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