KR102788131B1 - 석영유리 도가니 - Google Patents

석영유리 도가니 Download PDF

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Publication number
KR102788131B1
KR102788131B1 KR1020217003924A KR20217003924A KR102788131B1 KR 102788131 B1 KR102788131 B1 KR 102788131B1 KR 1020217003924 A KR1020217003924 A KR 1020217003924A KR 20217003924 A KR20217003924 A KR 20217003924A KR 102788131 B1 KR102788131 B1 KR 102788131B1
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KR
South Korea
Prior art keywords
layer
quartz glass
glass crucible
devitrification
crucible
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
KR1020217003924A
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English (en)
Korean (ko)
Other versions
KR20210040976A (ko
Inventor
유지 바바
Original Assignee
신에쯔 세끼에이 가부시키가이샤
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Application filed by 신에쯔 세끼에이 가부시키가이샤 filed Critical 신에쯔 세끼에이 가부시키가이샤
Publication of KR20210040976A publication Critical patent/KR20210040976A/ko
Application granted granted Critical
Publication of KR102788131B1 publication Critical patent/KR102788131B1/ko
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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
    • C03B19/095—Other methods of shaping glass by fusing powdered glass in a shaping mould by centrifuging, e.g. arc discharge in rotating mould
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
    • C30B35/002—Crucibles or containers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Glass Compositions (AREA)
KR1020217003924A 2018-08-09 2019-06-04 석영유리 도가니 Active KR102788131B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2018150790A JP7349779B2 (ja) 2018-08-09 2018-08-09 石英ガラスるつぼ
JPJP-P-2018-150790 2018-08-09
PCT/JP2019/022168 WO2020031481A1 (ja) 2018-08-09 2019-06-04 石英ガラスるつぼ

Publications (2)

Publication Number Publication Date
KR20210040976A KR20210040976A (ko) 2021-04-14
KR102788131B1 true KR102788131B1 (ko) 2025-03-31

Family

ID=69415494

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020217003924A Active KR102788131B1 (ko) 2018-08-09 2019-06-04 석영유리 도가니

Country Status (8)

Country Link
US (1) US11821103B2 (https=)
EP (1) EP3835270B1 (https=)
JP (1) JP7349779B2 (https=)
KR (1) KR102788131B1 (https=)
CN (1) CN112533878A (https=)
SG (1) SG11202101068VA (https=)
TW (1) TWI795571B (https=)
WO (1) WO2020031481A1 (https=)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008081374A (ja) * 2006-09-28 2008-04-10 Covalent Materials Corp シリカガラスルツボ
US20120037069A1 (en) * 2010-08-12 2012-02-16 Japan Super Quartz Corporation Method of evaluating silica powder, vitreous silica crucible, and method of manufacturing vitreous silica crucible
JP2018104248A (ja) * 2016-12-28 2018-07-05 クアーズテック株式会社 シリコン単結晶引上げ用石英ガラスルツボ

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10182139A (ja) * 1996-12-18 1998-07-07 Mitsubishi Chem Corp 合成石英ガラス粉末の品質評価方法
JPH10203893A (ja) * 1997-01-20 1998-08-04 Mitsubishi Materials Shilicon Corp 高強度石英ガラスルツボ及びその製造方法
JP4140868B2 (ja) * 1998-08-31 2008-08-27 信越石英株式会社 シリコン単結晶引き上げ用石英ガラスるつぼ及び その製造方法
JP3621282B2 (ja) 1999-02-25 2005-02-16 東芝セラミックス株式会社 石英ガラスルツボおよびその製造方法
DE10217946A1 (de) 2002-04-22 2003-11-13 Heraeus Quarzglas Quarzglastiegel und Verfahren zur Herstellung desselben
JP4814855B2 (ja) 2007-09-28 2011-11-16 コバレントマテリアル株式会社 シリカガラスルツボ
JP5069663B2 (ja) * 2008-10-31 2012-11-07 ジャパンスーパークォーツ株式会社 多層構造を有する石英ガラスルツボ
JP5992572B2 (ja) 2010-08-12 2016-09-14 株式会社Sumco シリカ粉の評価方法、シリカガラスルツボ、シリカガラスルツボの製造方法
JP2017186135A (ja) * 2016-04-07 2017-10-12 理想科学工業株式会社 印刷システム
JP2018104247A (ja) 2016-12-28 2018-07-05 クアーズテック株式会社 シリカ焼結体とその製造方法
JP6855358B2 (ja) * 2017-09-27 2021-04-07 クアーズテック株式会社 シリコン単結晶引上げ用石英ガラスルツボ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008081374A (ja) * 2006-09-28 2008-04-10 Covalent Materials Corp シリカガラスルツボ
US20120037069A1 (en) * 2010-08-12 2012-02-16 Japan Super Quartz Corporation Method of evaluating silica powder, vitreous silica crucible, and method of manufacturing vitreous silica crucible
JP2018104248A (ja) * 2016-12-28 2018-07-05 クアーズテック株式会社 シリコン単結晶引上げ用石英ガラスルツボ

Also Published As

Publication number Publication date
TW202018134A (zh) 2020-05-16
TWI795571B (zh) 2023-03-11
KR20210040976A (ko) 2021-04-14
CN112533878A (zh) 2021-03-19
SG11202101068VA (en) 2021-03-30
US11821103B2 (en) 2023-11-21
EP3835270A1 (en) 2021-06-16
US20210310151A1 (en) 2021-10-07
EP3835270B1 (en) 2025-11-26
EP3835270A4 (en) 2022-05-04
WO2020031481A1 (ja) 2020-02-13
JP2020026362A (ja) 2020-02-20
JP7349779B2 (ja) 2023-09-25

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