CN1123783C - 用于绝对距离的电光测量装置 - Google Patents

用于绝对距离的电光测量装置 Download PDF

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Publication number
CN1123783C
CN1123783C CN96191462A CN96191462A CN1123783C CN 1123783 C CN1123783 C CN 1123783C CN 96191462 A CN96191462 A CN 96191462A CN 96191462 A CN96191462 A CN 96191462A CN 1123783 C CN1123783 C CN 1123783C
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CN
China
Prior art keywords
modulation
measurement device
optical measurement
polarization
crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN96191462A
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English (en)
Chinese (zh)
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CN1172532A (zh
Inventor
D·梅尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leica Geosystems AG
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Leica AG Switzerland
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Filing date
Publication date
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Publication of CN1172532A publication Critical patent/CN1172532A/zh
Application granted granted Critical
Publication of CN1123783C publication Critical patent/CN1123783C/zh
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/499—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00 using polarisation effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
    • G01S17/36—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated with phase comparison between the received signal and the contemporaneously transmitted signal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/491—Details of non-pulse systems
    • G01S7/4911—Transmitters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/491—Details of non-pulse systems
    • G01S7/4912—Receivers
    • G01S7/4917—Receivers superposing optical signals in a photodetector, e.g. optical heterodyne detection

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Electromagnetism (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
CN96191462A 1995-11-15 1996-11-13 用于绝对距离的电光测量装置 Expired - Lifetime CN1123783C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19542490.5 1995-11-15
DE19542490A DE19542490C1 (de) 1995-11-15 1995-11-15 Elektro-optisches Meßgerät für absolute Distanzen

Publications (2)

Publication Number Publication Date
CN1172532A CN1172532A (zh) 1998-02-04
CN1123783C true CN1123783C (zh) 2003-10-08

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN96191462A Expired - Lifetime CN1123783C (zh) 1995-11-15 1996-11-13 用于绝对距离的电光测量装置

Country Status (8)

Country Link
US (1) US5764360A (enExample)
EP (1) EP0807262B1 (enExample)
JP (1) JP3754707B2 (enExample)
KR (1) KR100253496B1 (enExample)
CN (1) CN1123783C (enExample)
CA (1) CA2205937C (enExample)
DE (2) DE19542490C1 (enExample)
WO (1) WO1997018486A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105699980A (zh) * 2016-04-11 2016-06-22 中国科学院光电研究院 一种高精度激光测距装置与测量方法

Families Citing this family (47)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2769992B1 (fr) * 1997-10-21 2000-01-28 Thomson Csf Dispositif optique a modulation de polarisation pour la mesure de distance et/ou de vitesse d'objet
FR2792735B1 (fr) * 1999-04-26 2003-06-20 France Telecom Dispositif et procede de reglage du signal de commande d'un modulateur electro-optique
WO2001009642A1 (de) * 1999-07-28 2001-02-08 Leica Geosystems Ag Verfahren und anordnung zur bestimmung von räumlichen positionen und orientierungen
JP2004527765A (ja) * 2001-05-30 2004-09-09 イーグル レイ コーポレーション 距離測定用光学センサー
DE10153049B4 (de) * 2001-10-26 2007-03-08 Wiest Ag 3D-Koordinationssystem
CN101031817B (zh) * 2004-09-30 2011-02-09 Faro科技有限公司 测量移动后向反射器的绝对测距仪
DE502004011107D1 (de) 2004-10-13 2010-06-10 Leica Geosystems Ag Verfahren und Messgerät zur Messung eines Absolutdistanzwertes
CN1313836C (zh) * 2005-02-05 2007-05-02 中国科学院上海光学精密机械研究所 电光调制脉冲激光测距仪
EP1696201A1 (de) * 2005-02-23 2006-08-30 Leica Geosystems AG Phasenrauschkompensation für interferometrische Absolutdistanzmesser
EP1757956A1 (de) * 2005-08-24 2007-02-28 Leica Geosystems AG Mehrzielfähiges Distanzmessverfahren nach dem Phasenmessprinzip
JP2007309677A (ja) * 2006-05-16 2007-11-29 Mitsutoyo Corp 追尾式レーザ干渉計の絶対距離推定方法及び追尾式レーザ干渉計
CN101952741B (zh) * 2008-02-19 2013-06-19 莱卡地球系统公开股份有限公司 光电距离测量仪
EP2157401A1 (en) 2008-08-18 2010-02-24 Holding Prodim Systems B.V. Apparatus and method for measuring spatial co-ordinates
EP2161535B1 (en) * 2008-09-04 2011-06-29 Mitutoyo Research Center Europe B.V. Interferometer using polarization modulation
US8107056B1 (en) 2008-09-17 2012-01-31 University Of Central Florida Research Foundation, Inc. Hybrid optical distance sensor
US9482755B2 (en) 2008-11-17 2016-11-01 Faro Technologies, Inc. Measurement system having air temperature compensation between a target and a laser tracker
US7895015B2 (en) * 2008-12-04 2011-02-22 Parker David H Method for measuring the structural health of a civil structure
US10203268B2 (en) 2008-12-04 2019-02-12 Laura P. Solliday Methods for measuring and modeling the process of prestressing concrete during tensioning/detensioning based on electronic distance measurements
US9354043B2 (en) 2008-12-04 2016-05-31 Laura P. Solliday Methods for measuring and modeling the structural health of pressure vessels based on electronic distance measurements
US7856334B2 (en) * 2008-12-06 2010-12-21 Parker David H Method for calibrating a laser-based spherical coordinate measurement system by a mechanical harmonic oscillator
US8213022B1 (en) 2009-03-04 2012-07-03 University Of Central Florida Research Foundation, Inc. Spatially smart optical sensing and scanning
US8659749B2 (en) * 2009-08-07 2014-02-25 Faro Technologies, Inc. Absolute distance meter with optical switch
US8619265B2 (en) 2011-03-14 2013-12-31 Faro Technologies, Inc. Automatic measurement of dimensional data with a laser tracker
US9772394B2 (en) 2010-04-21 2017-09-26 Faro Technologies, Inc. Method and apparatus for following an operator and locking onto a retroreflector with a laser tracker
US9377885B2 (en) 2010-04-21 2016-06-28 Faro Technologies, Inc. Method and apparatus for locking onto a retroreflector with a laser tracker
US9400170B2 (en) 2010-04-21 2016-07-26 Faro Technologies, Inc. Automatic measurement of dimensional data within an acceptance region by a laser tracker
US8416396B2 (en) 2010-07-18 2013-04-09 David H. Parker Methods and apparatus for optical amplitude modulated wavefront shaping
US8902408B2 (en) 2011-02-14 2014-12-02 Faro Technologies Inc. Laser tracker used with six degree-of-freedom probe having separable spherical retroreflector
GB2518769A (en) 2011-03-03 2015-04-01 Faro Tech Inc Target apparatus and method
US8537376B2 (en) 2011-04-15 2013-09-17 Faro Technologies, Inc. Enhanced position detector in laser tracker
USD688577S1 (en) 2012-02-21 2013-08-27 Faro Technologies, Inc. Laser tracker
US9164173B2 (en) 2011-04-15 2015-10-20 Faro Technologies, Inc. Laser tracker that uses a fiber-optic coupler and an achromatic launch to align and collimate two wavelengths of light
US9686532B2 (en) 2011-04-15 2017-06-20 Faro Technologies, Inc. System and method of acquiring three-dimensional coordinates using multiple coordinate measurement devices
US9482529B2 (en) 2011-04-15 2016-11-01 Faro Technologies, Inc. Three-dimensional coordinate scanner and method of operation
CN104094081A (zh) 2012-01-27 2014-10-08 法罗技术股份有限公司 利用条形码识别的检查方法
EP2653884A1 (en) * 2012-04-16 2013-10-23 Leica Geosystems AG Electro-optic distance-measuring device
EP2653908A1 (en) * 2012-04-16 2013-10-23 Leica Geosystems AG Electro-optic modulator and electro-optic distance-measuring device
EP2662702A1 (de) * 2012-05-07 2013-11-13 Leica Geosystems AG Lasertracker mit Interferometer und Absolutdistanzmesseinheit sowie Kalibrierverfahren für einen Lasertracker
CN103472454A (zh) * 2012-06-07 2013-12-25 北京博新精仪科技发展有限公司 相位式测距仪的数字信号处理系统
US9041914B2 (en) 2013-03-15 2015-05-26 Faro Technologies, Inc. Three-dimensional coordinate scanner and method of operation
KR102151708B1 (ko) * 2013-11-06 2020-09-03 현대모비스(주) 차량 제어 방법 및 이를 위한 장치
DE102014201472B4 (de) 2014-01-28 2017-10-12 Leica Microsystems Cms Gmbh Verfahren zur Reduktion mechanischer Schwingungen bei elektrooptischen Modulatoren und Anordnung mit einem elektrooptischen Modulator
US9395174B2 (en) 2014-06-27 2016-07-19 Faro Technologies, Inc. Determining retroreflector orientation by optimizing spatial fit
EP3271747B1 (en) * 2015-03-17 2022-05-25 Cornell University Depth field imaging apparatus, methods, and applications
EP3388861B1 (de) 2017-04-11 2021-09-29 Leica Geosystems AG Absolute distanzmessung auf dynamische ziele
CN109557521B (zh) * 2017-09-25 2020-10-02 北京振兴计量测试研究所 红外脉冲激光目标模拟装置
CN119509415B (zh) * 2024-11-15 2025-10-14 山西大学 一种二维角位移测量的外差干涉仪及测量方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB919368A (en) * 1960-09-22 1963-02-27 Nat Res Dev Improvements relating to the measurement of distance
US3424531A (en) * 1965-09-17 1969-01-28 Commerce Usa Distance measuring instrument using a pair of modulated light waves
US4688940A (en) * 1985-03-12 1987-08-25 Zygo Corporation Heterodyne interferometer system
KR900002117B1 (ko) * 1985-03-28 1990-04-02 시부야 고오교오 가부시끼가이샤 레이저 광선을 이용한 거리측정방법과 장치
CH668488A5 (de) * 1985-06-12 1988-12-30 Kern & Co Ag Elektrooptisches distanzmessgeraet.
US4714339B2 (en) * 1986-02-28 2000-05-23 Us Commerce Three and five axis laser tracking systems
CH674675A5 (enExample) * 1987-10-23 1990-06-29 Kern & Co Ag
JPH04331333A (ja) * 1991-05-02 1992-11-19 Canon Inc 波長変化測定装置
DE4306884C2 (de) * 1993-02-23 2002-05-29 Jenoptik Jena Gmbh Phasenmoduliertes Interferometer
DE4314488C2 (de) * 1993-05-03 1997-11-20 Heidenhain Gmbh Dr Johannes Interferometrisches Meßverfahren für Absolutmessungen sowie dafür geeignete Laserinterferometeranordnung
US5523839A (en) * 1994-02-28 1996-06-04 Minnesota Mining & Manufacturing Differential optical interferometric profilomenty for real time manufacturing control

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105699980A (zh) * 2016-04-11 2016-06-22 中国科学院光电研究院 一种高精度激光测距装置与测量方法

Also Published As

Publication number Publication date
CN1172532A (zh) 1998-02-04
CA2205937C (en) 2004-08-17
JPH10512965A (ja) 1998-12-08
KR100253496B1 (ko) 2000-04-15
EP0807262B1 (de) 2001-12-19
WO1997018486A1 (de) 1997-05-22
DE59608503D1 (de) 2002-01-31
DE19542490C1 (de) 1997-06-05
EP0807262A1 (de) 1997-11-19
KR970707451A (ko) 1997-12-01
CA2205937A1 (en) 1997-05-22
US5764360A (en) 1998-06-09
JP3754707B2 (ja) 2006-03-15

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