JP3754707B2 - 絶対距離のための電気光学的な測定装置 - Google Patents
絶対距離のための電気光学的な測定装置 Download PDFInfo
- Publication number
- JP3754707B2 JP3754707B2 JP51857297A JP51857297A JP3754707B2 JP 3754707 B2 JP3754707 B2 JP 3754707B2 JP 51857297 A JP51857297 A JP 51857297A JP 51857297 A JP51857297 A JP 51857297A JP 3754707 B2 JP3754707 B2 JP 3754707B2
- Authority
- JP
- Japan
- Prior art keywords
- modulation
- measuring device
- polarization
- interferometer
- reflector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005259 measurement Methods 0.000 claims description 47
- 230000010287 polarization Effects 0.000 claims description 45
- 239000013078 crystal Substances 0.000 claims description 38
- 238000000034 method Methods 0.000 claims description 12
- 238000001514 detection method Methods 0.000 claims description 5
- 229940125730 polarisation modulator Drugs 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 description 11
- 230000001419 dependent effect Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 238000000691 measurement method Methods 0.000 description 4
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 2
- 230000035559 beat frequency Effects 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 238000010791 quenching Methods 0.000 description 2
- 230000000171 quenching effect Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 208000012886 Vertigo Diseases 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 239000008710 crystal-8 Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
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- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 230000002277 temperature effect Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/499—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00 using polarisation effects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
- G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
- G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
- G01S17/36—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated with phase comparison between the received signal and the contemporaneously transmitted signal
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/491—Details of non-pulse systems
- G01S7/4911—Transmitters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/491—Details of non-pulse systems
- G01S7/4912—Receivers
- G01S7/4917—Receivers superposing optical signals in a photodetector, e.g. optical heterodyne detection
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Computer Networks & Wireless Communication (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Electromagnetism (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Radar Systems And Details Thereof (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19542490.5 | 1995-11-15 | ||
| DE19542490A DE19542490C1 (de) | 1995-11-15 | 1995-11-15 | Elektro-optisches Meßgerät für absolute Distanzen |
| PCT/EP1996/004955 WO1997018486A1 (de) | 1995-11-15 | 1996-11-13 | Elektro-optisches messgerät für absolute distanzen |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH10512965A JPH10512965A (ja) | 1998-12-08 |
| JPH10512965A5 JPH10512965A5 (enExample) | 2004-10-07 |
| JP3754707B2 true JP3754707B2 (ja) | 2006-03-15 |
Family
ID=7777468
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP51857297A Expired - Lifetime JP3754707B2 (ja) | 1995-11-15 | 1996-11-13 | 絶対距離のための電気光学的な測定装置 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US5764360A (enExample) |
| EP (1) | EP0807262B1 (enExample) |
| JP (1) | JP3754707B2 (enExample) |
| KR (1) | KR100253496B1 (enExample) |
| CN (1) | CN1123783C (enExample) |
| CA (1) | CA2205937C (enExample) |
| DE (2) | DE19542490C1 (enExample) |
| WO (1) | WO1997018486A1 (enExample) |
Families Citing this family (48)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2769992B1 (fr) * | 1997-10-21 | 2000-01-28 | Thomson Csf | Dispositif optique a modulation de polarisation pour la mesure de distance et/ou de vitesse d'objet |
| FR2792735B1 (fr) * | 1999-04-26 | 2003-06-20 | France Telecom | Dispositif et procede de reglage du signal de commande d'un modulateur electro-optique |
| WO2001009642A1 (de) * | 1999-07-28 | 2001-02-08 | Leica Geosystems Ag | Verfahren und anordnung zur bestimmung von räumlichen positionen und orientierungen |
| JP2004527765A (ja) * | 2001-05-30 | 2004-09-09 | イーグル レイ コーポレーション | 距離測定用光学センサー |
| DE10153049B4 (de) * | 2001-10-26 | 2007-03-08 | Wiest Ag | 3D-Koordinationssystem |
| CN101031817B (zh) * | 2004-09-30 | 2011-02-09 | Faro科技有限公司 | 测量移动后向反射器的绝对测距仪 |
| DE502004011107D1 (de) | 2004-10-13 | 2010-06-10 | Leica Geosystems Ag | Verfahren und Messgerät zur Messung eines Absolutdistanzwertes |
| CN1313836C (zh) * | 2005-02-05 | 2007-05-02 | 中国科学院上海光学精密机械研究所 | 电光调制脉冲激光测距仪 |
| EP1696201A1 (de) * | 2005-02-23 | 2006-08-30 | Leica Geosystems AG | Phasenrauschkompensation für interferometrische Absolutdistanzmesser |
| EP1757956A1 (de) * | 2005-08-24 | 2007-02-28 | Leica Geosystems AG | Mehrzielfähiges Distanzmessverfahren nach dem Phasenmessprinzip |
| JP2007309677A (ja) * | 2006-05-16 | 2007-11-29 | Mitsutoyo Corp | 追尾式レーザ干渉計の絶対距離推定方法及び追尾式レーザ干渉計 |
| CN101952741B (zh) * | 2008-02-19 | 2013-06-19 | 莱卡地球系统公开股份有限公司 | 光电距离测量仪 |
| EP2157401A1 (en) | 2008-08-18 | 2010-02-24 | Holding Prodim Systems B.V. | Apparatus and method for measuring spatial co-ordinates |
| EP2161535B1 (en) * | 2008-09-04 | 2011-06-29 | Mitutoyo Research Center Europe B.V. | Interferometer using polarization modulation |
| US8107056B1 (en) | 2008-09-17 | 2012-01-31 | University Of Central Florida Research Foundation, Inc. | Hybrid optical distance sensor |
| US9482755B2 (en) | 2008-11-17 | 2016-11-01 | Faro Technologies, Inc. | Measurement system having air temperature compensation between a target and a laser tracker |
| US7895015B2 (en) * | 2008-12-04 | 2011-02-22 | Parker David H | Method for measuring the structural health of a civil structure |
| US10203268B2 (en) | 2008-12-04 | 2019-02-12 | Laura P. Solliday | Methods for measuring and modeling the process of prestressing concrete during tensioning/detensioning based on electronic distance measurements |
| US9354043B2 (en) | 2008-12-04 | 2016-05-31 | Laura P. Solliday | Methods for measuring and modeling the structural health of pressure vessels based on electronic distance measurements |
| US7856334B2 (en) * | 2008-12-06 | 2010-12-21 | Parker David H | Method for calibrating a laser-based spherical coordinate measurement system by a mechanical harmonic oscillator |
| US8213022B1 (en) | 2009-03-04 | 2012-07-03 | University Of Central Florida Research Foundation, Inc. | Spatially smart optical sensing and scanning |
| US8659749B2 (en) * | 2009-08-07 | 2014-02-25 | Faro Technologies, Inc. | Absolute distance meter with optical switch |
| US8619265B2 (en) | 2011-03-14 | 2013-12-31 | Faro Technologies, Inc. | Automatic measurement of dimensional data with a laser tracker |
| US9772394B2 (en) | 2010-04-21 | 2017-09-26 | Faro Technologies, Inc. | Method and apparatus for following an operator and locking onto a retroreflector with a laser tracker |
| US9377885B2 (en) | 2010-04-21 | 2016-06-28 | Faro Technologies, Inc. | Method and apparatus for locking onto a retroreflector with a laser tracker |
| US9400170B2 (en) | 2010-04-21 | 2016-07-26 | Faro Technologies, Inc. | Automatic measurement of dimensional data within an acceptance region by a laser tracker |
| US8416396B2 (en) | 2010-07-18 | 2013-04-09 | David H. Parker | Methods and apparatus for optical amplitude modulated wavefront shaping |
| US8902408B2 (en) | 2011-02-14 | 2014-12-02 | Faro Technologies Inc. | Laser tracker used with six degree-of-freedom probe having separable spherical retroreflector |
| GB2518769A (en) | 2011-03-03 | 2015-04-01 | Faro Tech Inc | Target apparatus and method |
| US8537376B2 (en) | 2011-04-15 | 2013-09-17 | Faro Technologies, Inc. | Enhanced position detector in laser tracker |
| USD688577S1 (en) | 2012-02-21 | 2013-08-27 | Faro Technologies, Inc. | Laser tracker |
| US9164173B2 (en) | 2011-04-15 | 2015-10-20 | Faro Technologies, Inc. | Laser tracker that uses a fiber-optic coupler and an achromatic launch to align and collimate two wavelengths of light |
| US9686532B2 (en) | 2011-04-15 | 2017-06-20 | Faro Technologies, Inc. | System and method of acquiring three-dimensional coordinates using multiple coordinate measurement devices |
| US9482529B2 (en) | 2011-04-15 | 2016-11-01 | Faro Technologies, Inc. | Three-dimensional coordinate scanner and method of operation |
| CN104094081A (zh) | 2012-01-27 | 2014-10-08 | 法罗技术股份有限公司 | 利用条形码识别的检查方法 |
| EP2653884A1 (en) * | 2012-04-16 | 2013-10-23 | Leica Geosystems AG | Electro-optic distance-measuring device |
| EP2653908A1 (en) * | 2012-04-16 | 2013-10-23 | Leica Geosystems AG | Electro-optic modulator and electro-optic distance-measuring device |
| EP2662702A1 (de) * | 2012-05-07 | 2013-11-13 | Leica Geosystems AG | Lasertracker mit Interferometer und Absolutdistanzmesseinheit sowie Kalibrierverfahren für einen Lasertracker |
| CN103472454A (zh) * | 2012-06-07 | 2013-12-25 | 北京博新精仪科技发展有限公司 | 相位式测距仪的数字信号处理系统 |
| US9041914B2 (en) | 2013-03-15 | 2015-05-26 | Faro Technologies, Inc. | Three-dimensional coordinate scanner and method of operation |
| KR102151708B1 (ko) * | 2013-11-06 | 2020-09-03 | 현대모비스(주) | 차량 제어 방법 및 이를 위한 장치 |
| DE102014201472B4 (de) | 2014-01-28 | 2017-10-12 | Leica Microsystems Cms Gmbh | Verfahren zur Reduktion mechanischer Schwingungen bei elektrooptischen Modulatoren und Anordnung mit einem elektrooptischen Modulator |
| US9395174B2 (en) | 2014-06-27 | 2016-07-19 | Faro Technologies, Inc. | Determining retroreflector orientation by optimizing spatial fit |
| EP3271747B1 (en) * | 2015-03-17 | 2022-05-25 | Cornell University | Depth field imaging apparatus, methods, and applications |
| CN105699980B (zh) * | 2016-04-11 | 2017-11-28 | 中国科学院光电研究院 | 一种高精度激光测距装置与测量方法 |
| EP3388861B1 (de) | 2017-04-11 | 2021-09-29 | Leica Geosystems AG | Absolute distanzmessung auf dynamische ziele |
| CN109557521B (zh) * | 2017-09-25 | 2020-10-02 | 北京振兴计量测试研究所 | 红外脉冲激光目标模拟装置 |
| CN119509415B (zh) * | 2024-11-15 | 2025-10-14 | 山西大学 | 一种二维角位移测量的外差干涉仪及测量方法 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB919368A (en) * | 1960-09-22 | 1963-02-27 | Nat Res Dev | Improvements relating to the measurement of distance |
| US3424531A (en) * | 1965-09-17 | 1969-01-28 | Commerce Usa | Distance measuring instrument using a pair of modulated light waves |
| US4688940A (en) * | 1985-03-12 | 1987-08-25 | Zygo Corporation | Heterodyne interferometer system |
| KR900002117B1 (ko) * | 1985-03-28 | 1990-04-02 | 시부야 고오교오 가부시끼가이샤 | 레이저 광선을 이용한 거리측정방법과 장치 |
| CH668488A5 (de) * | 1985-06-12 | 1988-12-30 | Kern & Co Ag | Elektrooptisches distanzmessgeraet. |
| US4714339B2 (en) * | 1986-02-28 | 2000-05-23 | Us Commerce | Three and five axis laser tracking systems |
| CH674675A5 (enExample) * | 1987-10-23 | 1990-06-29 | Kern & Co Ag | |
| JPH04331333A (ja) * | 1991-05-02 | 1992-11-19 | Canon Inc | 波長変化測定装置 |
| DE4306884C2 (de) * | 1993-02-23 | 2002-05-29 | Jenoptik Jena Gmbh | Phasenmoduliertes Interferometer |
| DE4314488C2 (de) * | 1993-05-03 | 1997-11-20 | Heidenhain Gmbh Dr Johannes | Interferometrisches Meßverfahren für Absolutmessungen sowie dafür geeignete Laserinterferometeranordnung |
| US5523839A (en) * | 1994-02-28 | 1996-06-04 | Minnesota Mining & Manufacturing | Differential optical interferometric profilomenty for real time manufacturing control |
-
1995
- 1995-11-15 DE DE19542490A patent/DE19542490C1/de not_active Expired - Fee Related
-
1996
- 1996-11-13 DE DE59608503T patent/DE59608503D1/de not_active Expired - Lifetime
- 1996-11-13 CN CN96191462A patent/CN1123783C/zh not_active Expired - Lifetime
- 1996-11-13 JP JP51857297A patent/JP3754707B2/ja not_active Expired - Lifetime
- 1996-11-13 KR KR1019970703344A patent/KR100253496B1/ko not_active Expired - Lifetime
- 1996-11-13 CA CA002205937A patent/CA2205937C/en not_active Expired - Lifetime
- 1996-11-13 WO PCT/EP1996/004955 patent/WO1997018486A1/de not_active Ceased
- 1996-11-13 US US08/836,878 patent/US5764360A/en not_active Expired - Lifetime
- 1996-11-13 EP EP96938188A patent/EP0807262B1/de not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| CN1172532A (zh) | 1998-02-04 |
| CA2205937C (en) | 2004-08-17 |
| CN1123783C (zh) | 2003-10-08 |
| JPH10512965A (ja) | 1998-12-08 |
| KR100253496B1 (ko) | 2000-04-15 |
| EP0807262B1 (de) | 2001-12-19 |
| WO1997018486A1 (de) | 1997-05-22 |
| DE59608503D1 (de) | 2002-01-31 |
| DE19542490C1 (de) | 1997-06-05 |
| EP0807262A1 (de) | 1997-11-19 |
| KR970707451A (ko) | 1997-12-01 |
| CA2205937A1 (en) | 1997-05-22 |
| US5764360A (en) | 1998-06-09 |
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| EXPY | Cancellation because of completion of term |