CN111908123A - 储料器输送机 - Google Patents

储料器输送机 Download PDF

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CN111908123A
CN111908123A CN202010393875.8A CN202010393875A CN111908123A CN 111908123 A CN111908123 A CN 111908123A CN 202010393875 A CN202010393875 A CN 202010393875A CN 111908123 A CN111908123 A CN 111908123A
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traveling
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conveyor
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CN111908123B (zh
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郑光九
张龍培
罗庆柱
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Sanus Technology Co ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G25/00—Conveyors comprising a cyclically-moving, e.g. reciprocating, carrier or impeller which is disengaged from the load during the return part of its movement
    • B65G25/04—Conveyors comprising a cyclically-moving, e.g. reciprocating, carrier or impeller which is disengaged from the load during the return part of its movement the carrier or impeller having identical forward and return paths of movement, e.g. reciprocating conveyors
    • B65G25/06—Conveyors comprising a cyclically-moving, e.g. reciprocating, carrier or impeller which is disengaged from the load during the return part of its movement the carrier or impeller having identical forward and return paths of movement, e.g. reciprocating conveyors having carriers, e.g. belts
    • B65G25/065—Reciprocating floor conveyors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67751—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a single workpiece
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a batch of workpieces

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Abstract

本发明的储料器输送机的特征在于，包括：搬送轨道，包括直线区间及曲线区间；以及转向架，沿着上述搬送轨道的直线区间及曲线区间进行移动，能够变更行驶方向。在这种储料器输送机中，转向架沿着搬送轨道的直线区间及曲线区间进行移动，包括本体部、旋转台、一对行驶部、升降部及转动轴承，因此，即使不追加设置缓冲区或设备也能够直线行驶、曲线行驶、升降、旋转，自身也可自行移送到缓冲区。由此，可具有无需追加设置用于物流移送的缓冲区或设备的效果。

Description

储料器输送机
技术领域
本发明涉及储料器输送机，具体地，涉及具有如下结构的储料器输送机，即，包括：搬送轨道，包括直线区间及曲线区间；以及转向架，沿着上述搬送轨道的直线区间及曲线区间进行移动，能够变更行驶方向。
背景技术
通常，为了适应信息化社会的发展，液晶显示设备(LCD，Liquid CrystalDisplay)及有机发光二极管器件(OLED，Organic Light Emitting Diodes)等平板显示设备(FPD，Flat Panel Display)的使用日益增多。
在这种平板显示设备的制造工序中，基板将以单张或组别形态搬送至各个制造设备。在这种情况下，可使用以单张方式装载多个基板并以组别形态搬送的料盒(cassette)。即，以装载于料盒的状态向制造设备搬送基板。
另一方面，进行基板制造工序的多个制造设备各自的基板处理能力及处理时间各不相同。因此，需要使用临时保管料盒的储料器(stocker)，储料器包括搁架(shelf)、接口(port)及主架(rack master)，搁架为对装载基板的料盒进行实际保管的设备。
并且，为了提高平板显示设备制造工序的作业效率，还包括输送机(CONVEYOR)，用于在储料器与储料器之间或储料器与进行各个工序的设备之间搬送收纳多个基板的料盒。
由此，输送机在临时储存料盒的储料器与储料器之间或储料器与进行一系列工序的设备之间进行往复，从而从储料器向储料器或从储料器向各个设备或从各个设备向储料器分别搬送料盒。
作为代表性的一例，图1示出了这种储料器输送机(以下，称为“现有技术”)。
如图1所示，现有技术的储料器输送机包括：搬送轨道10，设置在生产线，能够沿着设定路径搬送料盒30；以及转向架20，沿着上述搬送轨道10进行移动，能够收纳料盒30。
并且，搬送轨道10以“┓”形状弯曲成90°，使料盒30的搬送路径从X轴变更到Y轴。而且，转向架20包括：第一转向架21，行驶在X轴；以及第二转向架22，行驶在Y轴。
在这种情况下，第一转向架21适用能够实现X轴行驶、Z轴升降及T轴旋转的三轴转向架，第二转向架22适用能够实现Y轴行驶、Z轴升降的二轴转向架。
这种第一转向架21的T轴旋转是为了在搬送料盒30时也能够维持方向性，这是因为，由于在料盒30的一侧形成用于引出或引入基板的投入口，所以需以可在搬送料盒30的储料器或进行制造工序的多个制造设备中通过相应投入口引出或引入基板的方式维持方向性。
并且，在轨道10的入口、在使搬送路径从X轴向Y轴变更的部分及出口这三个位置设置作为料盒30的等待场所的缓冲区40。
具体地，缓冲区40为从储料器的主架50向第一转向架21搬送料盒前的等待场所、从第一转向架21向第二转向架22搬送料盒前的等待场所以及从第二转向架22向其他储料器或进行制造工序的制造设备搬送料盒前的等待场所。
但现有技术的储料器输送机具有如下问题，即，随着料盒的搬送方向(转向架的行驶方向)发生变更，转向架的数量也会增加。即，若以搬送方向变更为X轴、Y轴的方式产生两次变更，则转向架的数量也要增加至两台，若以搬送方向变更为X轴、Y轴、X轴的方式产生三次变更，则转向架的数量也要增加至三台。
不仅如此，随着转向架数量的增加，缓冲区的数量也要随之增加。即，现有技术的储料器输送机具有如下问题，即，随着转向架及缓冲区数量的增加，储料器输送机的制造成本也会增加，收益性下降。
因此，目前需要开发一种改善形态的储料器输送机，即，一种即使变更料盒的搬送方向(转向架的行驶方向)也能够适用一台转向架的储料器输送机。
现有技术文件
专利文献0001
公开专利公报第10-2008-0056049号(2008年06月20日)
发明内容
技术问题
本发明用于解决如上所述的诸多现有问题，本发明的目的在于，提供一种即使变更料盒的搬送方向(转向架的行驶方向)也能够适用一台转向架且不需要追加设置转向架及缓冲区的储料器输送机。
技术方案
为了实现上述目的，本发明提供的储料器输送机包括：搬送轨道，包括直线区间及曲线区间；以及转向架，沿着上述搬送轨道的直线区间及曲线区间进行移动，能够变更行驶方向。
其中，上述转向架包括：本体部；旋转台，以能够旋转的方式设置在上述本体部的一侧；一对行驶部，沿着行驶方向以留有间隔的方式设置在上述本体部的另一侧，在两侧面设置与上述搬送轨道的一面相接触的行驶轮；升降部，设置在上述一对行驶部的内侧，用于使上述本体部升降；以及一对转动轴承，设置在上述升降部与上述本体部之间。
在这种情况下，上述一对行驶部包括驱动部，上述驱动部与设置在上述两侧面中的一侧面的行驶轮相连接，用于向上述行驶轮提供旋转所需的驱动力。
并且，上述一对行驶部还包括一对引导部，上述一对引导部设置在上述两侧面中的另一侧面，隔着上述行驶轮配置在两侧。
并且，上述一对引导部包括：块部，一面固定在上述另一侧面，具有从上述一面向上述搬送轨道延伸而成的水平面；以及引导轮，设置在贯通上述块部的水平面的旋转轴，在与上述搬送轨道的侧面相接触的状态下能够进行旋转。
发明的效果
在本发明的储料器输送机中，转向架沿着搬送轨道的直线区间及曲线区间进行移动，由于包括本体部、旋转台、一对行驶部、升降部及转动轴承，即使不追加设置缓冲区或设备也能够直线行驶、曲线行驶、升降、旋转，自身也可自行移送到缓冲区。由此，可具有无需追加设置用于物流移送的缓冲区或设备的效果。
并且，在本发明的储料器输送机中，引导轮以与搬送轨道的侧面相接触的状态在曲线区间进行移动，转向架通过引导轮的引导来在搬送轨道的曲线区间进行移动，从而使行驶方向顺畅地从X轴变更到Y轴。因此，并不需要增加用于变更料盒的搬送方向的转向架及缓冲区的数量，由此，可具有降低制造成本、提高收益性、提高产品竞争力的效果。
并且，相比现有技术，由于本发明的储料器输送机减少了基于料盒搬送量的总时间，所以增加了整体物流移送速度，从而提高了效益性。
附图说明
图1为示出现有技术的储料器输送机的俯视图。
图2为示出本发明的储料器输送机的俯视图。
图3为从本发明的储料器输送机中分解转向架的立体图。
图4为在本发明的储料器输送机中放大转向架的一对引导部的立体图。
图5为示出现有技术的储料器输送机与本发明的储料器输送机的基于料盒搬送量的总时间的图。
附图标记的说明
100：搬送轨道 110：搬送轨道的一面
120：搬送轨道的侧面 200：转向架
210：本体部 211：旋转部
220：旋转台 230：一对行驶部
231：行驶轮 231a：驱动部
232：一对引导部 232a：块部
232b：引导轮 232c：旋转轴
240：升降部 241：一对连杆部
250：一对转动轴承 300：缓冲区
具体实施方式
以下，参照多个附图详细说明本发明的实施例。应注意的是，当对各附图中的多个结构要素添加附图标记时，即使显示在不同的附图上，对相同的结构要素也赋予了相同的附图标记。并且，当判断有可能模糊本发明的要旨时，将省略其详细说明。并且，以下虽然说明了本发明实施例，但本发明的技术思想并不限定于此，当然，可通过普通技术人员实施。
图2为示出本发明的储料器输送机的俯视图，图3为从本发明的储料器输送机中分解转向架的立体图，图4为在本发明的储料器输送机中放大转向架的一对引导部的立体图。
以下，参照图2至图4，说明本发明优选实施例的储料器输送机。
参照图2，本发明的储料器输送机可包括：搬送轨道100，包括直线区间及曲线区间；以及转向架200，沿着上述搬送轨道100的直线区间及曲线区间进行移动，能够变更行驶方向。
其中，搬送轨道100以能够沿着设定路径搬送料盒的方式沿着生产线设置，转向架200将在收纳料盒的状态下沿着搬送轨道100的直线区间及曲线区间进行移动。
并且，由于搬送轨道100的整体形态为“┓”型的曲线形态，因而可使料盒的搬送路径从X轴变更到Y轴。其中，搬送轨道100可形成有与后述的行驶轮231相向的平坦的一面110和与后述的引导轮232b相对的侧面120。
而且，转向架200适用以收纳料盒的状态实现X轴行驶、Y轴行驶、Z轴升降及T轴旋转的三轴转向架200。
另一方面，在搬送轨道100的入口及出口设置有两处作为料盒的等待场所的缓冲区300。
具体地，缓冲区300为从储料器的主架向转向架200搬送料盒前的等待场所、从转向架200向其他储料器或执行制造工序的制造设备搬送料盒前的等待场所。
当对本发明与图1中的现有技术进行比较时，虽然从X轴到Y轴的搬送路径相同，但转向架及缓冲区的数量分别少了一个。
参照图3，本发明的转向架200可包括本体部210、旋转台220、一对行驶部230、升降部240及一对转动轴承250。
其中，旋转台200设置在本体部210的一侧。其中，旋转台220可通过设置在本体部210与旋转台220之间的旋转部211来以能够相对于本体部210进行旋转的方式设置。这种旋转台220可装载如上所述的料盒等的装载物。
转向架200的一对行驶部230沿着行驶方向以留有间隔的方式设置在本体部210的另一侧，在两侧面设置与搬送轨道100的一面相接触的行驶轮231。
其中，一对行驶部230可包括驱动部231a。驱动部231a与设置在一对行驶部230的两侧面中的一侧面的行驶轮231相连接，用于向行驶轮231提供旋转所需的驱动力。在这种情况下，行驶轮231能够在与搬送轨道100的一面110相接触的状态下进行旋转，同时沿着搬送轨道100进行移动。
并且，转向架200的升降部240设置在一对行驶部230的内侧空间，并可用于使本体部210升降。虽未在附图中详细示出，但升降部240包括以留有规定间隔的方式设置的一对连杆部241，一对连杆部241可以与导螺杆等的动力传递部件(未图示)相连接。即，若动力传递部件通过电机等驱动手段(未图示)进行旋转，则一对连杆部241从动力传递部件接收驱动力，从而可使本体部210升降。
并且，一对转动轴承250可设置在升降部240与本体部210之间。由于现有的空中走行式穿梭车(OHS，Over Head Shuttle)无法进行升降及旋转，存在自身无法放置在缓冲区300，需要追加设置即插即用(PNP，Plug and Play)设备才能进行物流移送的问题。
相反，由于本发明的转向架200包括旋转台220、转动轴承250，无需追加设置缓冲区或设备也能够直线行驶、曲线行驶、升降、旋转，自身可自行移动至缓冲区。即，本发明的转向架200并不需要追加设置用于物流移送的缓冲区或设备，具有料盒移送时间相比其他设备更短的效果。
另一方面，一对行驶部230还包括一对引导部232。一对引导部232可设置在两侧面中的另一侧面，隔着行驶轮231配置在两侧。
参照图4，一对引导部232可包括块部232a及引导轮232b。其中，块部232a的一面固定在一对行驶部230的另一侧面，具有从一面向搬送轨道100延伸而成的水平面。
并且，引导轮232b以能够旋转的方式设置在贯通块部232a的水平面的旋转轴232c的一端部。虽未在附图中详细示出，但可在引导轮232b与旋转轴232c之间插入轴承(未图示)。即，引导轮232b在与搬送轨道100的侧面120相接触的状态下进行旋转，同时可沿着搬送轨道100进行移动。
像这样，本发明的转向架200在与搬送轨道100的侧面120相接触的状态下通过旋转的引导轮232b被引导，从而可变更行驶方向。即，随着引导轮232b与搬送轨道100的侧面120相接触的状态下在曲线区间进行移动，转向架200通过引导轮232b的引导来在搬送轨道100的曲线区间进行移动，从而可顺畅地将行驶方向从X轴变更到Y轴。
因此，无需增加用于变更料盒的搬送方向的转向架及缓冲区的数量，由此，可降低制造成本、提高收益性、提高产品竞争力。
另一方面，图5为示出现有技术的储料器输送机(OHCV，直线Over Head Conveyor)与本发明的储料器输送机的基于料盒搬送量的总时间的图。如图5所示，现有技术的储料器输送机搬送十次料盒(CST，Cassette)所需的总时间为729.3秒，本发明的储料器输送机的总时间为597.5秒。
即，与现有技术相比，本发明的储料器输送机使基于料盒搬送量的总时间减少，所以可增加整体物流移送速度，从而提高效益性。并且，与现有技术的储料器输送机相比，由于能够曲线行驶，从而可明显减少转向架及缓冲区的数量。
以上，虽然详细说明了本发明的优选实施例，但本发明的技术范围并不限定于上述实施例，应根据本发明要求保护范围来解释。在这种情况下，本发明所属技术领域的普通技术人员可在不脱离本发明要求保护范围的情况下进行多种修改和变形。

Claims (5)

1.一种储料器输送机，其特征在于，
包括：
搬送轨道，包括直线区间及曲线区间；以及
转向架，沿着上述搬送轨道的直线区间及曲线区间进行移动，能够变更行驶方向。
2.根据权利要求1所述的储料器输送机，其特征在于，上述转向架包括：
本体部；
旋转台，以能够旋转的方式设置在上述本体部的一侧；
一对行驶部，沿着行驶方向以留有间隔的方式设置在上述本体部的另一侧，在两侧面设置与上述搬送轨道的一面相接触的行驶轮；
升降部，设置在上述一对行驶部的内侧，用于使上述本体部升降；以及
一对转动轴承，设置在上述升降部与上述本体部之间。
3.根据权利要求2所述的储料器输送机，其特征在于，上述一对行驶部包括驱动部，上述驱动部与设置在上述两侧面中的一侧面的行驶轮相连接，用于向上述行驶轮提供旋转所需的驱动力。
4.根据权利要求3所述的储料器输送机，其特征在于，上述一对行驶部还包括一对引导部，上述一对引导部设置在上述两侧面中的另一侧面，隔着上述行驶轮配置在两侧。
5.根据权利要求4所述的储料器输送机，其特征在于，上述一对引导部包括：
块部，一面固定在上述另一侧面，具有从上述一面向上述搬送轨道延伸而成的水平面；以及
引导轮，设置在贯通上述块部的水平面的旋转轴，在与上述搬送轨道的侧面相接触的状态下能够进行旋转。
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