CN111527309A - 干式真空泵和控制真空泵的同步马达的方法 - Google Patents

干式真空泵和控制真空泵的同步马达的方法 Download PDF

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Publication number
CN111527309A
CN111527309A CN201880079549.0A CN201880079549A CN111527309A CN 111527309 A CN111527309 A CN 111527309A CN 201880079549 A CN201880079549 A CN 201880079549A CN 111527309 A CN111527309 A CN 111527309A
Authority
CN
China
Prior art keywords
vacuum pump
rotor
stator
pumping
windings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201880079549.0A
Other languages
English (en)
Chinese (zh)
Inventor
Y·格勒尼耶
D·皮埃尔让
J-M·佩吉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Pfeiffer Vacuum SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum SAS filed Critical Pfeiffer Vacuum SAS
Publication of CN111527309A publication Critical patent/CN111527309A/zh
Pending legal-status Critical Current

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/02Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/0085Prime movers
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K1/00Details of the magnetic circuit
    • H02K1/06Details of the magnetic circuit characterised by the shape, form or construction
    • H02K1/22Rotating parts of the magnetic circuit
    • H02K1/27Rotor cores with permanent magnets
    • H02K1/2706Inner rotors
    • H02K1/272Inner rotors the magnetisation axis of the magnets being perpendicular to the rotor axis
    • H02K1/2726Inner rotors the magnetisation axis of the magnets being perpendicular to the rotor axis the rotor consisting of a single magnet or two or more axially juxtaposed single magnets
    • H02K1/2733Annular magnets
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K16/00Machines with more than one rotor or stator
    • H02K16/04Machines with one rotor and two stators
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K7/00Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/14Structural association with mechanical loads, e.g. with hand-held machine tools or fans
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00Components
    • F04C2240/40Electric motor
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00Control; Monitoring or safety arrangements
    • F04C2270/02Power
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00Control; Monitoring or safety arrangements
    • F04C2270/60Prime mover parameters
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05BINDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00Working fluid
    • F05B2210/10Kind or type
    • F05B2210/12Kind or type gaseous, i.e. compressible

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
CN201880079549.0A 2018-01-09 2018-12-05 干式真空泵和控制真空泵的同步马达的方法 Pending CN111527309A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR1850164A FR3076582B1 (fr) 2018-01-09 2018-01-09 Pompe a vide de type seche et procede de commande d'un moteur synchrone de pompe a vide
FR1850164 2018-01-09
PCT/EP2018/083695 WO2019137700A1 (fr) 2018-01-09 2018-12-05 Pompe à vide de type sèche et procédé de commande d'un moteur synchrone de pompe à vide

Publications (1)

Publication Number Publication Date
CN111527309A true CN111527309A (zh) 2020-08-11

Family

ID=62092050

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201880079549.0A Pending CN111527309A (zh) 2018-01-09 2018-12-05 干式真空泵和控制真空泵的同步马达的方法

Country Status (8)

Country Link
US (1) US11396875B2 (https=)
EP (1) EP3737864A1 (https=)
JP (1) JP2021510192A (https=)
KR (1) KR20200104893A (https=)
CN (1) CN111527309A (https=)
FR (1) FR3076582B1 (https=)
TW (1) TWI753219B (https=)
WO (1) WO2019137700A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112583221A (zh) * 2020-12-01 2021-03-30 西北工业大学 一种用于水下航行器的大功率差对转电机

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3112175B1 (fr) * 2020-07-01 2022-07-08 Pfeiffer Vacuum Pompe à vide de type sèche
FR3112171B1 (fr) * 2020-10-16 2022-07-08 Pfeiffer Vacuum Procédé de contrôle d’une puissance de fonctionnement d’une pompe à vide et pompe à vide
FR3129992B1 (fr) * 2021-12-08 2023-12-01 Pfeiffer Vacuum Groupe de pompage, dispositif et procédé de pompage et de traitement
CN117977856B (zh) * 2023-12-08 2024-09-27 北京传动精彩科技有限公司 一种高功率和高精度平衡的伺服电机及电机系统

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0447257A2 (en) * 1990-03-16 1991-09-18 Satake Engineering Co., Ltd. Two-stator induction synchronous motor
US20040075415A1 (en) * 2002-10-21 2004-04-22 A.O. Smith Corporation Electric motor
US20040075236A1 (en) * 2002-10-16 2004-04-22 Visteon Global Technologies, Inc.. Integrated motor
EP1900943A1 (en) * 2006-09-12 2008-03-19 Kabushiki Kaisha Toyota Jidoshokki Method of controlling the stopping operation of vacuum pump and device therefor
US20150037180A1 (en) * 2013-07-30 2015-02-05 Timothy D. Abbott Electric motor and magnetic gear
JP2015220905A (ja) * 2014-05-20 2015-12-07 株式会社荏原製作所 電動モータを備えたポンプおよびその制御方法

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US4785213A (en) * 1986-05-30 1988-11-15 Satake Engineering Co., Ltd. Variable speed controlled induction motor
JPH01152992A (ja) * 1987-12-10 1989-06-15 Mitsubishi Electric Corp かご形誘導電動機
JP3432679B2 (ja) * 1996-06-03 2003-08-04 株式会社荏原製作所 容積式真空ポンプ
US20030138327A1 (en) * 2002-01-18 2003-07-24 Robert Jones Speed control for a pumping system
US20070020107A1 (en) * 2005-06-29 2007-01-25 Ioan Sauciuc High pressure pump for cooling electronics
CN101375063B (zh) * 2006-01-31 2011-04-27 株式会社荏原制作所 真空泵单元
JP4840234B2 (ja) 2007-04-10 2011-12-21 株式会社Ihi タンデムスクリューコンプレッサ
EP2434156A1 (en) * 2009-05-20 2012-03-28 Mitsubishi Heavy Industries, Ltd. Dry vacuum pump
TW201042889A (en) * 2009-05-20 2010-12-01 Profan Technology Corp Integrated high voltage brushless axle fan motor
DE112012001192B4 (de) * 2011-03-11 2016-12-15 Ulvac Kiko, Inc. Vakuumpumpe, Vakuumauspumpvorrichtung und Verfahren, zum Betreiben einer Vakuumpumpe
EP2615307B1 (de) * 2012-01-12 2019-08-21 Vacuubrand Gmbh + Co Kg Schraubenvakuumpumpe
JP6009193B2 (ja) * 2012-03-30 2016-10-19 株式会社荏原製作所 真空排気装置
FR3008145B1 (fr) * 2013-07-04 2015-08-07 Pfeiffer Vacuum Sas Pompe a vide primaire seche
DE112018005090B4 (de) * 2017-10-31 2023-11-30 Ulvac, Inc. Vakuumpumpe und Steuerungsverfahren dafür

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0447257A2 (en) * 1990-03-16 1991-09-18 Satake Engineering Co., Ltd. Two-stator induction synchronous motor
US20040075236A1 (en) * 2002-10-16 2004-04-22 Visteon Global Technologies, Inc.. Integrated motor
US20040075415A1 (en) * 2002-10-21 2004-04-22 A.O. Smith Corporation Electric motor
EP1900943A1 (en) * 2006-09-12 2008-03-19 Kabushiki Kaisha Toyota Jidoshokki Method of controlling the stopping operation of vacuum pump and device therefor
US20150037180A1 (en) * 2013-07-30 2015-02-05 Timothy D. Abbott Electric motor and magnetic gear
JP2015220905A (ja) * 2014-05-20 2015-12-07 株式会社荏原製作所 電動モータを備えたポンプおよびその制御方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112583221A (zh) * 2020-12-01 2021-03-30 西北工业大学 一种用于水下航行器的大功率差对转电机

Also Published As

Publication number Publication date
EP3737864A1 (fr) 2020-11-18
WO2019137700A1 (fr) 2019-07-18
US11396875B2 (en) 2022-07-26
JP2021510192A (ja) 2021-04-15
TWI753219B (zh) 2022-01-21
US20210277900A1 (en) 2021-09-09
KR20200104893A (ko) 2020-09-04
TW201930729A (zh) 2019-08-01
FR3076582B1 (fr) 2020-01-24
FR3076582A1 (fr) 2019-07-12

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Application publication date: 20200811