CN111434435A - 激光加工装置和聚光透镜的污染确认方法 - Google Patents
激光加工装置和聚光透镜的污染确认方法 Download PDFInfo
- Publication number
- CN111434435A CN111434435A CN201911353186.8A CN201911353186A CN111434435A CN 111434435 A CN111434435 A CN 111434435A CN 201911353186 A CN201911353186 A CN 201911353186A CN 111434435 A CN111434435 A CN 111434435A
- Authority
- CN
- China
- Prior art keywords
- condenser lens
- unit
- light
- contamination
- light receiving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000011109 contamination Methods 0.000 title claims abstract description 46
- 238000000034 method Methods 0.000 title claims description 10
- 238000001514 detection method Methods 0.000 claims abstract description 64
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 238000003754 machining Methods 0.000 description 6
- 230000003028 elevating effect Effects 0.000 description 3
- 239000002390 adhesive tape Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000002679 ablation Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000004148 unit process Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
- B23K26/705—Beam measuring device
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Laser Beam Processing (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019-003408 | 2019-01-11 | ||
JP2019003408A JP2020110823A (ja) | 2019-01-11 | 2019-01-11 | レーザー加工装置および集光レンズの確認方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN111434435A true CN111434435A (zh) | 2020-07-21 |
Family
ID=71581091
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201911353186.8A Pending CN111434435A (zh) | 2019-01-11 | 2019-12-25 | 激光加工装置和聚光透镜的污染确认方法 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP2020110823A (ko) |
KR (1) | KR20200087677A (ko) |
CN (1) | CN111434435A (ko) |
SG (1) | SG10201913058YA (ko) |
TW (1) | TW202027898A (ko) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6066226A (ja) * | 1983-09-21 | 1985-04-16 | Matsushita Electric Ind Co Ltd | レ−ザ加工装置のレンズ汚れ検出装置 |
CN101078691A (zh) * | 2006-05-23 | 2007-11-28 | 山崎马扎克公司 | 激光加工机的聚光透镜的污垢检测方法及装置 |
CN105312777A (zh) * | 2014-06-30 | 2016-02-10 | 株式会社迪思科 | 激光加工装置 |
CN106256476A (zh) * | 2015-06-17 | 2016-12-28 | 株式会社迪思科 | 激光加工装置 |
TW201711779A (zh) * | 2015-07-09 | 2017-04-01 | Eo科技股份有限公司 | 雷射加工裝置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5286039B2 (ja) * | 2008-11-12 | 2013-09-11 | 株式会社ディスコ | レーザ加工装置 |
JP6327524B2 (ja) * | 2015-01-28 | 2018-05-23 | 株式会社東京精密 | レーザーダイシング装置 |
JP6906837B2 (ja) | 2017-02-13 | 2021-07-21 | 株式会社ディスコ | レーザー加工装置 |
-
2019
- 2019-01-11 JP JP2019003408A patent/JP2020110823A/ja active Pending
- 2019-12-23 SG SG10201913058YA patent/SG10201913058YA/en unknown
- 2019-12-24 KR KR1020190174019A patent/KR20200087677A/ko not_active Application Discontinuation
- 2019-12-25 CN CN201911353186.8A patent/CN111434435A/zh active Pending
-
2020
- 2020-01-10 TW TW109100928A patent/TW202027898A/zh unknown
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6066226A (ja) * | 1983-09-21 | 1985-04-16 | Matsushita Electric Ind Co Ltd | レ−ザ加工装置のレンズ汚れ検出装置 |
CN101078691A (zh) * | 2006-05-23 | 2007-11-28 | 山崎马扎克公司 | 激光加工机的聚光透镜的污垢检测方法及装置 |
CN105312777A (zh) * | 2014-06-30 | 2016-02-10 | 株式会社迪思科 | 激光加工装置 |
CN106256476A (zh) * | 2015-06-17 | 2016-12-28 | 株式会社迪思科 | 激光加工装置 |
TW201711779A (zh) * | 2015-07-09 | 2017-04-01 | Eo科技股份有限公司 | 雷射加工裝置 |
Also Published As
Publication number | Publication date |
---|---|
TW202027898A (zh) | 2020-08-01 |
JP2020110823A (ja) | 2020-07-27 |
KR20200087677A (ko) | 2020-07-21 |
SG10201913058YA (en) | 2020-08-28 |
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Legal Events
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PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
WD01 | Invention patent application deemed withdrawn after publication | ||
WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20200721 |