SG10201913058YA - Laser processing apparatus and method of checking contamination of condenser lens - Google Patents

Laser processing apparatus and method of checking contamination of condenser lens

Info

Publication number
SG10201913058YA
SG10201913058YA SG10201913058YA SG10201913058YA SG10201913058YA SG 10201913058Y A SG10201913058Y A SG 10201913058YA SG 10201913058Y A SG10201913058Y A SG 10201913058YA SG 10201913058Y A SG10201913058Y A SG 10201913058YA SG 10201913058Y A SG10201913058Y A SG 10201913058YA
Authority
SG
Singapore
Prior art keywords
processing apparatus
laser processing
condenser lens
checking contamination
contamination
Prior art date
Application number
SG10201913058YA
Other languages
English (en)
Inventor
Teranishi Shunsuke
Original Assignee
Disco Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Disco Corp filed Critical Disco Corp
Publication of SG10201913058YA publication Critical patent/SG10201913058YA/en

Links

SG10201913058YA 2019-01-11 2019-12-23 Laser processing apparatus and method of checking contamination of condenser lens SG10201913058YA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019003408A JP2020110823A (ja) 2019-01-11 2019-01-11 レーザー加工装置および集光レンズの確認方法

Publications (1)

Publication Number Publication Date
SG10201913058YA true SG10201913058YA (en) 2020-08-28

Family

ID=71581091

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201913058YA SG10201913058YA (en) 2019-01-11 2019-12-23 Laser processing apparatus and method of checking contamination of condenser lens

Country Status (5)

Country Link
JP (1) JP2020110823A (ko)
KR (1) KR20200087677A (ko)
CN (1) CN111434435A (ko)
SG (1) SG10201913058YA (ko)
TW (1) TW202027898A (ko)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6066226A (ja) * 1983-09-21 1985-04-16 Matsushita Electric Ind Co Ltd レ−ザ加工装置のレンズ汚れ検出装置
CN101078691A (zh) * 2006-05-23 2007-11-28 山崎马扎克公司 激光加工机的聚光透镜的污垢检测方法及装置
JP5286039B2 (ja) * 2008-11-12 2013-09-11 株式会社ディスコ レーザ加工装置
JP2016010809A (ja) * 2014-06-30 2016-01-21 株式会社ディスコ レーザー加工装置
JP6327524B2 (ja) * 2015-01-28 2018-05-23 株式会社東京精密 レーザーダイシング装置
JP2017006930A (ja) 2015-06-17 2017-01-12 株式会社ディスコ レーザー加工装置
KR20170015866A (ko) * 2015-07-09 2017-02-10 주식회사 이오테크닉스 레이저 가공장치
JP6906837B2 (ja) 2017-02-13 2021-07-21 株式会社ディスコ レーザー加工装置

Also Published As

Publication number Publication date
CN111434435A (zh) 2020-07-21
JP2020110823A (ja) 2020-07-27
TW202027898A (zh) 2020-08-01
KR20200087677A (ko) 2020-07-21

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