JP2017006930A - レーザー加工装置 - Google Patents
レーザー加工装置 Download PDFInfo
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- JP2017006930A JP2017006930A JP2015121924A JP2015121924A JP2017006930A JP 2017006930 A JP2017006930 A JP 2017006930A JP 2015121924 A JP2015121924 A JP 2015121924A JP 2015121924 A JP2015121924 A JP 2015121924A JP 2017006930 A JP2017006930 A JP 2017006930A
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- 230000005856 abnormality Effects 0.000 claims abstract description 27
- 238000012544 monitoring process Methods 0.000 claims abstract description 27
- 230000001678 irradiating effect Effects 0.000 claims abstract description 5
- 230000002159 abnormal effect Effects 0.000 claims description 5
- 238000000034 method Methods 0.000 abstract description 11
- 238000002679 ablation Methods 0.000 abstract description 9
- 238000003672 processing method Methods 0.000 abstract description 7
- 230000035699 permeability Effects 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 description 36
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 19
- 229910052710 silicon Inorganic materials 0.000 description 19
- 239000010703 silicon Substances 0.000 description 19
- 239000000758 substrate Substances 0.000 description 15
- 230000010355 oscillation Effects 0.000 description 8
- 230000007547 defect Effects 0.000 description 4
- 238000003754 machining Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
- B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/0823—Devices involving rotation of the workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/083—Devices involving movement of the workpiece in at least one axial direction
- B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/0869—Devices involving movement of the laser head in at least one axial direction
- B23K26/0876—Devices involving movement of the laser head in at least one axial direction in at least two axial directions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02299—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment
- H01L21/02312—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment treatment by exposure to a gas or vapour
- H01L21/02315—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment treatment by exposure to a gas or vapour treatment by exposure to a plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/268—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76886—Modifying permanently or temporarily the pattern or the conductivity of conductive members, e.g. formation of alloys, reduction of contact resistances
- H01L21/76892—Modifying permanently or temporarily the pattern or the conductivity of conductive members, e.g. formation of alloys, reduction of contact resistances modifying the pattern
- H01L21/76894—Modifying permanently or temporarily the pattern or the conductivity of conductive members, e.g. formation of alloys, reduction of contact resistances modifying the pattern using a laser, e.g. laser cutting, laser direct writing, laser repair
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/40—Semiconductor devices
Abstract
被加工物の内部に改質層を形成するレーザー加工方法において、アブレーションの発生を最小限に抑え、被加工物を正常に分割できない領域が生じるという問題を解消する。
【解決手段】
被加工物を保持する保持手段と、該保持手段によって保持された被加工物に対して透過性を有する波長のレーザー光線を照射して内部に改質層を形成する集光器を備えたレーザー光線照射手段と、該保持手段を該レーザー光線照射手段に対して相対的に加工送りする加工送り手段と、から少なくとも構成されるレーザー加工装置であって、該レーザー光線が照射された領域を監視する監視手段を具備し、該監視手段が、該レーザー光線の集光点が被加工物の内部から表面側に移動することによって発生する光を検出した場合に、異常であると判定し該レーザー光線による加工を停止するレーザー加工装置が提供される。
【選択図】図1
Description
波長 :1064nm
繰り返し周波数 :50kHz
スポット径 :φ2μm
平均出力 :1W
送り速度 :100mm/秒
3:チャックテーブル機構
4:レーザー光線照射ユニット支持機構
5:レーザー光線照射ユニット
6:制御部
31、41:案内レール
32:第1の滑動ブロック
33:第2の滑動ブロック
36:チャックテーブル
42:可動支持基台
51:ユニットホルダ
52:レーザー光線照射手段
53:集光器
54:発振器
55:Z軸方向位置検出手段
522:ホトデテクター
523:バンドバスフィルター
533:ダイクロイックミラー
Claims (4)
- 被加工物を保持する保持手段と、該保持手段によって保持された被加工物に対して透過性を有する波長のレーザー光線を照射して内部に改質層を形成する集光器を備えたレーザー光線照射手段と、該保持手段を該レーザー光線照射手段に対して相対的に加工送りする加工送り手段と、から少なくとも構成されるレーザー加工装置であって、
該レーザー光線が照射された領域を監視する監視手段を具備し、
該監視手段が、該レーザー光線の集光点が被加工物の内部から表面側に移動することによって発生する光を検出した場合に、異常であると判定し該レーザー光線による加工を停止するレーザー加工装置。 - 前記監視手段が、前記集光器に隣接して配設されるホトデテクターと、該ホトデテクターが該所定値を超える光を検出した場合に、前記異常であると判定する異常判定部と、を備え、該異常判定部が異常と判定した場合に、該レーザー光線による加工を停止する請求項1に記載のレーザー加工装置。
- 前記監視手段が、前記集光器に隣接して配設されるホトデテクターと、該ホトデテクターが被加工物にて発生した所定の波長を有するプラズマを検出した場合に、前記異常であると判定する異常判定部と、を備え、該異常判定部が異常と判定した場合に、該レーザー光線による加工を停止する請求項1に記載のレーザー加工装置。
- 前記レーザー光線照射手段は、レーザー光線を発振する発振器と、該発振器が発振した該レーザー光線を前記集光器に導く第一の経路と、を含み、
前記監視手段が、該第一の経路に配設され該発振器が発振した所定の波長のレーザー光線を透過し、被加工物側からのその他の波長の光を反射して第二の経路に導くダイクロイックミラーと、該第二の経路に配設され該ダイクロイックミラーによって反射された光を検出するホトデテクターと、該ホトデテクターが所定値を超える光を検出した場合に、前記異常であると判定する異常判定部と、を備え、該異常判定部が異常と判定した場合に、該レーザー光線による加工を停止する請求項1に記載のレーザー加工装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015121924A JP2017006930A (ja) | 2015-06-17 | 2015-06-17 | レーザー加工装置 |
TW105114743A TW201707824A (zh) | 2015-06-17 | 2016-05-12 | 雷射加工裝置 |
KR1020160071516A KR20160149145A (ko) | 2015-06-17 | 2016-06-09 | 레이저 가공 장치 |
CN201610423196.4A CN106256476A (zh) | 2015-06-17 | 2016-06-15 | 激光加工装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015121924A JP2017006930A (ja) | 2015-06-17 | 2015-06-17 | レーザー加工装置 |
Publications (1)
Publication Number | Publication Date |
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JP2017006930A true JP2017006930A (ja) | 2017-01-12 |
Family
ID=57713719
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2015121924A Pending JP2017006930A (ja) | 2015-06-17 | 2015-06-17 | レーザー加工装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP2017006930A (ja) |
KR (1) | KR20160149145A (ja) |
CN (1) | CN106256476A (ja) |
TW (1) | TW201707824A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020094902A (ja) * | 2018-12-12 | 2020-06-18 | 株式会社ディスコ | 被加工物の検査方法 |
KR20200087677A (ko) | 2019-01-11 | 2020-07-21 | 가부시기가이샤 디스코 | 레이저 가공 장치 및 집광 렌즈의 오염 확인 방법 |
JP2021000645A (ja) * | 2019-06-20 | 2021-01-07 | 株式会社ディスコ | レーザー加工装置 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107357257A (zh) * | 2017-06-27 | 2017-11-17 | 安徽联亚智能装备制造有限公司 | 一种激光加工数据搜集及故障诊断系统 |
JP7105058B2 (ja) * | 2017-12-05 | 2022-07-22 | 株式会社ディスコ | ウェーハの加工方法 |
CN108326436B (zh) * | 2018-01-25 | 2018-12-18 | 绍兴协众进出口有限公司 | 一种高端数字化模具生产设备 |
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JPH11138896A (ja) * | 1997-11-07 | 1999-05-25 | Sumitomo Heavy Ind Ltd | レーザを用いたマーキング方法、マーキング装置、及びマークの観察方法、観察装置 |
JP2003019583A (ja) * | 2000-09-13 | 2003-01-21 | Hamamatsu Photonics Kk | レーザ加工方法 |
JP2007284288A (ja) * | 2006-04-17 | 2007-11-01 | Seiko Epson Corp | 基板のスクライブ方法及びスクライブ装置 |
JP2013086130A (ja) * | 2011-10-18 | 2013-05-13 | Disco Corp | レーザー光線の出力設定方法およびレーザー加工装置 |
JP2015024428A (ja) * | 2013-07-26 | 2015-02-05 | 住友大阪セメント株式会社 | 加工装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP5902540B2 (ja) * | 2012-04-02 | 2016-04-13 | 株式会社ディスコ | レーザー加工方法およびレーザー加工装置 |
JP2013230478A (ja) * | 2012-04-27 | 2013-11-14 | Disco Corp | レーザー加工装置及びレーザー加工方法 |
JP6425368B2 (ja) * | 2012-04-27 | 2018-11-21 | 株式会社ディスコ | レーザー加工装置及びレーザー加工方法 |
-
2015
- 2015-06-17 JP JP2015121924A patent/JP2017006930A/ja active Pending
-
2016
- 2016-05-12 TW TW105114743A patent/TW201707824A/zh unknown
- 2016-06-09 KR KR1020160071516A patent/KR20160149145A/ko unknown
- 2016-06-15 CN CN201610423196.4A patent/CN106256476A/zh active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11138896A (ja) * | 1997-11-07 | 1999-05-25 | Sumitomo Heavy Ind Ltd | レーザを用いたマーキング方法、マーキング装置、及びマークの観察方法、観察装置 |
JP2003019583A (ja) * | 2000-09-13 | 2003-01-21 | Hamamatsu Photonics Kk | レーザ加工方法 |
JP2007284288A (ja) * | 2006-04-17 | 2007-11-01 | Seiko Epson Corp | 基板のスクライブ方法及びスクライブ装置 |
JP2013086130A (ja) * | 2011-10-18 | 2013-05-13 | Disco Corp | レーザー光線の出力設定方法およびレーザー加工装置 |
JP2015024428A (ja) * | 2013-07-26 | 2015-02-05 | 住友大阪セメント株式会社 | 加工装置 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020094902A (ja) * | 2018-12-12 | 2020-06-18 | 株式会社ディスコ | 被加工物の検査方法 |
KR20200087677A (ko) | 2019-01-11 | 2020-07-21 | 가부시기가이샤 디스코 | 레이저 가공 장치 및 집광 렌즈의 오염 확인 방법 |
JP2021000645A (ja) * | 2019-06-20 | 2021-01-07 | 株式会社ディスコ | レーザー加工装置 |
Also Published As
Publication number | Publication date |
---|---|
KR20160149145A (ko) | 2016-12-27 |
CN106256476A (zh) | 2016-12-28 |
TW201707824A (zh) | 2017-03-01 |
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