SG10201913058YA - Laser processing apparatus and method of checking contamination of condenser lens - Google Patents
Laser processing apparatus and method of checking contamination of condenser lensInfo
- Publication number
- SG10201913058YA SG10201913058YA SG10201913058YA SG10201913058YA SG10201913058YA SG 10201913058Y A SG10201913058Y A SG 10201913058YA SG 10201913058Y A SG10201913058Y A SG 10201913058YA SG 10201913058Y A SG10201913058Y A SG 10201913058YA SG 10201913058Y A SG10201913058Y A SG 10201913058YA
- Authority
- SG
- Singapore
- Prior art keywords
- processing apparatus
- laser processing
- condenser lens
- checking contamination
- contamination
- Prior art date
Links
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019003408A JP2020110823A (en) | 2019-01-11 | 2019-01-11 | Laser processing device and examination method for condenser lens |
Publications (1)
Publication Number | Publication Date |
---|---|
SG10201913058YA true SG10201913058YA (en) | 2020-08-28 |
Family
ID=71581091
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG10201913058YA SG10201913058YA (en) | 2019-01-11 | 2019-12-23 | Laser processing apparatus and method of checking contamination of condenser lens |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP2020110823A (en) |
KR (1) | KR20200087677A (en) |
CN (1) | CN111434435A (en) |
SG (1) | SG10201913058YA (en) |
TW (1) | TW202027898A (en) |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6066226A (en) * | 1983-09-21 | 1985-04-16 | Matsushita Electric Ind Co Ltd | Detector for lens dirt in laser working device |
CN101078691A (en) * | 2006-05-23 | 2007-11-28 | 山崎马扎克公司 | Laser processing machine condensing lens dirt detecting method and device |
JP5286039B2 (en) * | 2008-11-12 | 2013-09-11 | 株式会社ディスコ | Laser processing equipment |
JP2016010809A (en) * | 2014-06-30 | 2016-01-21 | 株式会社ディスコ | Laser processing device |
JP6327524B2 (en) * | 2015-01-28 | 2018-05-23 | 株式会社東京精密 | Laser dicing equipment |
JP2017006930A (en) | 2015-06-17 | 2017-01-12 | 株式会社ディスコ | Laser processing device |
KR20170015866A (en) * | 2015-07-09 | 2017-02-10 | 주식회사 이오테크닉스 | Laser processing apparatus |
JP6906837B2 (en) | 2017-02-13 | 2021-07-21 | 株式会社ディスコ | Laser processing equipment |
-
2019
- 2019-01-11 JP JP2019003408A patent/JP2020110823A/en active Pending
- 2019-12-23 SG SG10201913058YA patent/SG10201913058YA/en unknown
- 2019-12-24 KR KR1020190174019A patent/KR20200087677A/en not_active Application Discontinuation
- 2019-12-25 CN CN201911353186.8A patent/CN111434435A/en active Pending
-
2020
- 2020-01-10 TW TW109100928A patent/TW202027898A/en unknown
Also Published As
Publication number | Publication date |
---|---|
CN111434435A (en) | 2020-07-21 |
KR20200087677A (en) | 2020-07-21 |
TW202027898A (en) | 2020-08-01 |
JP2020110823A (en) | 2020-07-27 |
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