SG10201913058YA - Laser processing apparatus and method of checking contamination of condenser lens - Google Patents

Laser processing apparatus and method of checking contamination of condenser lens

Info

Publication number
SG10201913058YA
SG10201913058YA SG10201913058YA SG10201913058YA SG10201913058YA SG 10201913058Y A SG10201913058Y A SG 10201913058YA SG 10201913058Y A SG10201913058Y A SG 10201913058YA SG 10201913058Y A SG10201913058Y A SG 10201913058YA SG 10201913058Y A SG10201913058Y A SG 10201913058YA
Authority
SG
Singapore
Prior art keywords
processing apparatus
laser processing
condenser lens
checking contamination
contamination
Prior art date
Application number
SG10201913058YA
Inventor
Teranishi Shunsuke
Original Assignee
Disco Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Disco Corp filed Critical Disco Corp
Publication of SG10201913058YA publication Critical patent/SG10201913058YA/en

Links

SG10201913058YA 2019-01-11 2019-12-23 Laser processing apparatus and method of checking contamination of condenser lens SG10201913058YA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019003408A JP2020110823A (en) 2019-01-11 2019-01-11 Laser processing device and examination method for condenser lens

Publications (1)

Publication Number Publication Date
SG10201913058YA true SG10201913058YA (en) 2020-08-28

Family

ID=71581091

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201913058YA SG10201913058YA (en) 2019-01-11 2019-12-23 Laser processing apparatus and method of checking contamination of condenser lens

Country Status (5)

Country Link
JP (1) JP2020110823A (en)
KR (1) KR20200087677A (en)
CN (1) CN111434435A (en)
SG (1) SG10201913058YA (en)
TW (1) TW202027898A (en)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6066226A (en) * 1983-09-21 1985-04-16 Matsushita Electric Ind Co Ltd Detector for lens dirt in laser working device
CN101078691A (en) * 2006-05-23 2007-11-28 山崎马扎克公司 Laser processing machine condensing lens dirt detecting method and device
JP5286039B2 (en) * 2008-11-12 2013-09-11 株式会社ディスコ Laser processing equipment
JP2016010809A (en) * 2014-06-30 2016-01-21 株式会社ディスコ Laser processing device
JP6327524B2 (en) * 2015-01-28 2018-05-23 株式会社東京精密 Laser dicing equipment
JP2017006930A (en) 2015-06-17 2017-01-12 株式会社ディスコ Laser processing device
KR20170015866A (en) * 2015-07-09 2017-02-10 주식회사 이오테크닉스 Laser processing apparatus
JP6906837B2 (en) 2017-02-13 2021-07-21 株式会社ディスコ Laser processing equipment

Also Published As

Publication number Publication date
CN111434435A (en) 2020-07-21
KR20200087677A (en) 2020-07-21
TW202027898A (en) 2020-08-01
JP2020110823A (en) 2020-07-27

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