CN111128846B - 一种用于芯片封装的顶针装置 - Google Patents

一种用于芯片封装的顶针装置 Download PDF

Info

Publication number
CN111128846B
CN111128846B CN201911346279.8A CN201911346279A CN111128846B CN 111128846 B CN111128846 B CN 111128846B CN 201911346279 A CN201911346279 A CN 201911346279A CN 111128846 B CN111128846 B CN 111128846B
Authority
CN
China
Prior art keywords
thimble
ejector pin
knob
platform
ejector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201911346279.8A
Other languages
English (en)
Other versions
CN111128846A (zh
Inventor
金超超
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hefei Qizhong Sealing Technology Co ltd
Chipmore Technology Corp Ltd
Original Assignee
Hefei Qizhong Technology Co ltd
Chipmore Technology Corp Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hefei Qizhong Technology Co ltd, Chipmore Technology Corp Ltd filed Critical Hefei Qizhong Technology Co ltd
Priority to CN201911346279.8A priority Critical patent/CN111128846B/zh
Publication of CN111128846A publication Critical patent/CN111128846A/zh
Priority to KR1020217041159A priority patent/KR102680707B1/ko
Priority to JP2021575341A priority patent/JP7271730B2/ja
Priority to US17/620,062 priority patent/US20220352003A1/en
Priority to PCT/CN2020/120539 priority patent/WO2021129053A1/zh
Application granted granted Critical
Publication of CN111128846B publication Critical patent/CN111128846B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68742Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67132Apparatus for placing on an insulating substrate, e.g. tape
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6835Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L21/6836Wafer tapes, e.g. grinding or dicing support tapes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68785Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00Constructional details common to different types of electric apparatus
    • H05K7/02Arrangements of circuit components or wiring on supporting structure
    • H05K7/10Plug-in assemblages of components, e.g. IC sockets
    • H05K7/1053Plug-in assemblages of components, e.g. IC sockets having interior leads
    • H05K7/1076Plug-in assemblages of components, e.g. IC sockets having interior leads co-operating by sliding
    • H05K7/1084Plug-in assemblages of components, e.g. IC sockets having interior leads co-operating by sliding pin grid array package carriers
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2113/00Details relating to the application field
    • G06F2113/18Chip packaging
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2221/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
    • H01L2221/67Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
    • H01L2221/683Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L2221/68304Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L2221/68381Details of chemical or physical process used for separating the auxiliary support from a device or wafer
    • H01L2221/68386Separation by peeling
    • H01L2221/6839Separation by peeling using peeling wedge or knife or bar
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/0061Tools for holding the circuit boards during processing; handling transport of printed circuit boards

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Infusion, Injection, And Reservoir Apparatuses (AREA)

Abstract

本发明公开了一种用于芯片封装的顶针装置,包括针筒、基座和顶针座模块,所述针筒套设于所述顶针座模块的外侧,所述基座位于所述顶针座模块的下方,且用于固定所述顶针座模块;所述顶针座模块包括旋钮单元和支撑单元,所述支撑单元的顶部设有可拆卸的顶针,所述旋钮单元套设于所述支撑单元的外侧,且转动所述旋钮单元,所述支撑单元上下垂直移动;所述针筒的上表面设有真空孔和与所述顶针相对应的顶针孔。通过调节旋钮单元,即可作用于相应的支撑单元上,从而满足不同产品所需顶针数量和位置的要求,并减少金属异物的发生,提高工作人员更换产品的效率。

Description

一种用于芯片封装的顶针装置
技术领域
本发明涉及一种芯片封装技术领域,特别是涉及一种用于芯片封装的顶针装置。
背景技术
现阶段,芯片的拾放主要是由吸嘴、蓝膜盘、顶针机构共同完成的。芯片分布在可移动的蓝膜盘上,待当前芯片完成拾取后,蓝膜盘移动,使下一颗芯片位于顶针的上方,进行下一次的拾取。顶针机构位于蓝膜盘下方,可将芯片从切割完成后的晶圆中顶出,且被位于蓝膜盘上方的吸嘴拾取。
在芯片结合机中,由于各个产品的芯片长度、大小不一,所需顶针数量与顶针的安装孔位置也随之不同。如若更换产品,往往需要拆卸针筒,更换顶针,将顶针调至水平后再安装针筒。而顶针机构的稳定性决定了芯片从蓝膜盘能否顺利拾取,进一步决定了设备能否稳定可靠生产。
但是,在变更产品时,通常需要人为操作,工程人员在拆装针筒、调节顶针时,极易出现安装偏差或者产生金属异物等情况,从而将导致产品异常。并且,由于频繁更换产品作业,为了适应不同芯片,随之大幅度降低了顶针机构的工作效率。
因此,设计一种可以大幅度提高芯片封装效率的顶针装置是具有重要意义的。
发明内容
针对现有技术中存在的技术问题,本发明的目的是:提供一种用于芯片封装的顶针装置,仅需通过调节旋钮单元,即可作用于相应的支撑单元上,从而满足不同产品所需顶针数量和位置的要求,并减少金属异物的发生,提高芯片封装效率。
本发明的目的通过下述技术方案实现:包括针筒、基座和顶针座模块,所述针筒套设于所述顶针座模块的外侧,所述基座位于所述顶针座模块的下方,且用于固定所述顶针座模块;
所述顶针座模块包括旋钮单元和支撑单元,所述支撑单元的顶部设有可拆卸的顶针,所述旋钮单元套设于所述支撑单元的外侧,且转动所述旋钮单元,所述支撑单元上下垂直移动;
所述针筒的上表面设有真空孔和与所述顶针相对应的顶针孔。
优选地,所述支撑单元的数量为至少两个,所述旋钮单元的数量与所述支撑单元的数量一致,且每个所述旋钮单元分别对应每个所述支撑单元。
优选地,所述支撑单元的数量为三个,分别为外侧顶针座、中间顶针座和内侧顶针座;
所述旋钮单元的数量为三个,与所述支撑单元一一对应,分别为外侧旋钮、中间旋钮和内侧旋钮;
所述外侧顶针座、所述中间顶针座和所述内侧顶针座相互嵌套,且三个所述顶针座的表面设有滑槽,相邻所述顶针座通过所述滑槽在所述旋钮单元的控制下,进行上下垂直移动。
优选地,所述外侧顶针座的上方设有第一平台,所述第一平台的两端分别设有第一顶针和第二顶针;
所述中间顶针座的上方设有第二平台,所述第二平台的两端分别设有第三顶针和第四顶针;
所述内侧顶针座的上方设有第三平台,所述第三平台的两端分别设有第五顶针和第六顶针。
优选地,所述针筒的上表面设有六个顶针孔,分别对应所述第一顶针、所述第二顶针、所述第三顶针、所述第四顶针、所述第五顶针和所述第六顶针。
优选地,所述外侧旋钮控制所述第一平台进行上下垂直移动,所述中间旋钮控制所述第二平台进行上下垂直移动,所述内侧旋钮控制所述第三平台进行上下垂直移动;
当所述第一平台、所述第二平台和所述第三平台移动至同一水平面时,所述第一顶针、所述第二顶针、所述第三顶针、所述第四顶针、所述第五顶针和所述第六顶针依次排列。
优选地,所述外侧顶针座与所述第一平台之间设有第一支撑柱,所述中间顶针座与所述第二平台之间设有第二支撑柱,所述内侧顶针座与所述第三平台之间设有第三支撑柱;
所述第二支撑柱的下端设有折弯处。
优选地,所述基座的中心竖立有基轴,所述基轴与所述内侧顶针座的内表面的滑槽相对应;
所述基座的表面设有圆孔。
优选地,所述内侧顶针座的上方设有与所述第二支撑柱的折弯处相对应的凹槽。
优选地,所述旋钮单元的内部设有用于驱使所述支撑单元上下垂直移动的导向槽;
所述支撑单元的外侧设有与所述导向槽相配合的突起。
本发明相对于现有技术具有如下的优点及效果:
1、本发明所述的用于芯片封装的顶针装置,通过调节旋钮单元,即可作用于相应的支撑单元上,从而满足不同产品所需顶针数量和位置的要求,并减少金属异物的发生,提高工作人员更换产品的效率。
2、本发明三个所述顶针座的表面设有滑槽,相邻顶针座通过滑槽在旋钮单元的控制下,进行上下垂直移动,而基座的中心竖立有基轴,基轴与内侧顶针座的内表面的滑槽相对应,可以避免单侧滑槽产生的上升倾斜的问题。
附图说明
图1是本发明实施例用于芯片封装的顶针装置的主视图;
图2是本发明实施例用于芯片封装的顶针装置的结构示意图;
图3是本发明实施例基座和顶针座模块的爆炸图;
图4是本发明实施例针筒的主视图;
图5是本发明实施例针筒的侧视图;
图6是本发明实施例基座和顶针座模块的结构示意图;
图7是本发明实施例顶针座模块的结构示意图;
图8是本发明实施例旋钮单元的结构示意图;
图9是本发明实施例支撑单元的结构示意图;
图10是本发明实施例外侧顶针座和外侧旋钮的结构示意图;
图11是本发明实施例中间顶针座和中间旋钮的结构示意图;
图12是本发明实施例内侧顶针座和内侧旋钮的结构示意图;
图13是本发明实施例六根顶针处于同一水平面的结构示意图;
图14是本发明实施例基座的主视图。
其中,本发明实施例中:1、针筒;2、基座;21、基轴;3、顶针座模块;31、旋钮单元;311、外侧旋钮;312、中间旋钮;313、内侧旋钮;32、支撑单元;321、外侧顶针座;322、中间顶针座;323、内侧顶针座;4、顶针;5、真空孔;6、顶针孔;7、滑槽;8、第一平台;81、第一顶针;82、第二顶针;9、第二平台;91、第三顶针;92、第四顶针;10、第三平台;101、第五顶针;102、第六顶针;11、第一支撑柱;12、第二支撑柱;121、折弯处;13、第三支撑柱;14、凹槽;15、导向槽;16、突起;17、压花;18、圆孔。
具体实施方式
为了使本领域的技术人员更好地理解本发明中的技术方案,下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都应当属于本发明保护的范围。
如图1至图6所示,本发明优选实施例的一种用于芯片封装的顶针装置,包括针筒1、基座2和顶针座模块3,针筒1套设于顶针座模块3的外侧,基座2位于顶针座模块3的下方,且用于固定顶针座模块3。其中,顶针座模块3包括旋钮单元31和支撑单元32,支撑单元32的顶部设有可拆卸的顶针4,旋钮单元31套设于支撑单元32的外侧,且转动旋钮单元31,支撑单元32上下垂直移动。此外,在针筒1的上表面设有与顶针4相对应的顶针孔6。本发明所述的用于芯片封装的顶针装置,通过转动旋钮单元31将支撑单元32上移,支撑单元32顶部的顶针4从而被顶起,便于工作人员调整顶针4水平和高度,提高了工作人员更换产品的效率。
在本发明所述的用于芯片封装的顶针装置中,支撑单元32的数量为至少两个,旋钮单元31的数量与支撑单元32的数量一致,且每个旋钮单元31分别对应每个支撑单元32。
如图7至图12所示,支撑单元32的数量优选为三个,分别为外侧顶针座321、中间顶针座322和内侧顶针座323;相应的,旋钮单元31的数量为三个,与支撑单元32一一对应,分别为外侧旋钮311、中间旋钮312和内侧旋钮313。当然,根据实际需要,支撑单元32和旋钮单元31的数量可以相应的增加或者减少。
其中,外侧顶针座321、中间顶针座322和内侧顶针座323相互嵌套,即,外侧顶针座321位于中间顶针座322的外侧,中间顶针座322位于内侧顶针座323的外侧,且外侧顶针座321、中间顶针座322和内侧顶针座323呈同心圆柱状。并且,三个顶针座的表面设有滑槽7,外侧顶针座321的内侧、中间顶针座322的内外侧、内侧顶针座323的内外侧均设有滑槽7,且滑槽7均一一对应,参考图9至图12。相邻顶针座通过滑槽7在旋钮单元31的控制下,进行上下垂直移动,采用顶针座表面设置对称滑槽7的方式,便于顶针座上下滑动定位,从而避免单侧滑槽7产生的上升倾斜的问题。
在本实施例中,外侧旋钮311位于中间旋钮312的上方,中间旋钮312位于内侧旋钮313的上方,外侧旋钮311、中间旋钮312和内侧旋钮313均套设于外侧顶针座321的外侧。转动外侧旋钮311,外侧顶针座321进行上下垂直移动;转动中间旋钮312,中间顶针座322进行上下垂直移动;转动内侧旋钮313,内侧顶针座323进行上下垂直移动。
具体的,外侧顶针座321的上方设有第一平台8,第一平台8的两端分别设有第一顶针81和第二顶针82;中间顶针座322的上方设有第二平台9,第二平台9的两端分别设有第三顶针91和第四顶针92;内侧顶针座323的上方设有第三平台10,第三平台10的两端分别设有第五顶针101和第六顶针102。外侧旋钮311控制第一平台8进行上下垂直移动,中间旋钮312控制第二平台9进行上下垂直移动,内侧旋钮313控制第三平台10进行上下垂直移动。当第一平台8、第二平台9和第三平台10移动至同一水平面时,第一顶针81、第二顶针82、第三顶针91、第四顶针92、第五顶针101和第六顶针102依次排列。即,当第一平台8、第二平台9和第三平台10移动至同一水平面时,第一顶针81和第二顶针82位于最外侧的两端,第五顶针101和第六顶针102位于最内侧的两端,第三顶针91位于第一顶针81和第五顶针101之间,第四顶针92位于第二顶针82和第六顶针102之间,参考图13。通过旋钮将相对应的顶针4顶起合适的高度,提高了工作人员作业不同产品时,更改机台硬件的效率。
另外,在针筒1的上表面设有六个顶针孔6,分别对应第一顶针81、第二顶针82、第三顶针91、第四顶针92、第五顶针101和第六顶针102。
与现有的封装机台相比,在变更产品时,工作人员往往需要人为拆装顶针4,但是顶针4的位置无法确保每次拆装后都处于水平直线上,并且增加了工作人员数量。而本发明所述的用于芯片封装的顶针装置,当第一平台8、第二平台9和第三平台10均移动至同一水平面时,第一顶针81、第二顶针82、第三顶针91、第四顶针92、第五顶针101和第六顶针102同样位于水平直线上。每根顶针4通过止付螺丝固定,止付螺丝也就是顶丝,用来固定的,大多是轴孔,用顶丝顶住轴,使它不能来回移动。止付螺丝将顶针4固定在相应的平台上,而止付螺丝的安装不会干涉嵌套在外的顶针座,因此,可以避免旋钮单元31将顶针座顶起时与止付螺丝干涉。工作人员只需要调整相应的旋钮单元31,就可以将所需位置的顶针4顶起,提高了芯片封装效率。并且,降低了工作人员拆装针筒1,调节顶针4时产生的金属异物,从而避免造成芯片封装后短路的情况发生。
此外,外侧顶针座321与第一平台8之间设有第一支撑柱11,中间顶针座322与第二平台9之间设有第二支撑柱12,内侧顶针座323与第三平台10之间设有第三支撑柱13。第一支撑柱11和第三支撑柱13呈圆柱状,而为了防止第二平台9在中间旋钮312的作用下被顶起时,与外侧顶针座321的底面发生干涉、阻碍,所以在第二支撑柱12的下端设有折弯处121。相应的,为了配合第二支撑柱12下端的折弯处121,在内侧顶针座323的上方设有与第二支撑柱12的折弯处121相对应的凹槽14。采用该种设计,可以防止第三平台10在内侧旋钮313的作用下被顶起时,与第二支撑柱12发生干涉、阻碍。
如图14所示,基座2的中心竖立有基轴21,基轴21与内侧顶针座323的内侧滑槽7相对应。基座2的表面开设有圆孔18,用于抽取针筒1内部的真空。圆孔18的数量为多个,优选为四个,并且呈圆周阵列分布,可以使真空吸附更均衡。而针筒1的上表面除了设计有顶针孔6之外,还设有真空孔5和真空槽,通过基座2与针筒1的相互作用,可以减少针筒泄漏真空,从而提高真空吸附的稳定性。当工作人员频繁更换产品作业,安装顶针4或者针筒1往往会出现作业异常,比如芯片吸取异常、漏真空等。但是,在基座2的表面开设圆孔18,在针筒1的上表面设置真空孔5和真空槽,能够降低芯片吸取异常、漏真空情况的发生。另外,在基座2底部设有螺纹孔,而针筒1的底部一侧设有止付螺丝孔,通过止付螺丝固定该针筒1。
在本实施例中,旋钮单元31的外表面设有压花17,不仅美观耐看,而且工作人员在操作旋钮单元31的时候,压花17能够起到防滑的效果。此外,旋钮单元31的一侧设有止付螺丝孔,用于将顶针座固定。
另外,在旋钮单元31内部设有收容所述支撑单元的收容腔,在收容腔内壁面上经刻蚀形成用于驱使支撑单元32上下垂直移动的导向槽15,所述导向槽15呈凸轮槽设置。旋钮单元31相对应的顶针座在导向槽15内滑动,实现顶针座的上下移动。在导向槽15的外侧设有释放口,用于放置顶针座。另外,在外侧顶针座321、中间顶针座322和内侧顶针座323的外侧均设有与导向槽15相配合的突起16。本发明所述的用于芯片封装的顶针装置,内部设计凸轮槽导向结构,开突起16配合口,将凸轮槽的展开长度设置为与顶针座上升下降高度一致。通过三段旋钮内部制作凸轮槽方式,根据顶针4顶起的高度,准确计算出凸轮槽的曲线,进行内部面蚀刻,结构简单、设计美观、操作便捷。
根据该设计进行的实验验证,采用上述结构,根据产品要求,仅需要更换一次0.1mm或者0.14mm的顶针4即可。方便快捷,风险小,有利于在同类设备中进行大力推广。
本发明所述的用于芯片封装的顶针装置的工作原理如下:根据产品大小,调节相应旋钮,对应的顶针座向上移动;相应的平台升起,平台上方的顶针4被顶起。并且,本发明在完成第一次安装后,仅需调整一次顶针4水平和高度即可,大幅度提高了更换硬件的效率和顶针4将芯片顶起的可靠性。
应当理解,虽然本说明书按照实施例加以描述,但并非每个实施例仅包含一个独立的技术方案,说明书的这种叙述方式仅仅是为清楚起见,本领域技术人员应当将说明书作为一个整体,各实施例中的技术方案也可以经适当组合,形成本领域技术人员可以理解的其他实施例。
上文所列出的一系列的详细说明仅仅是针对本发明的可行性实施例的具体说明,并非用以限制本发明的保护范围,凡未脱离本发明技艺精神所作的等效实施例或变更均应包含在本发明的保护范围之内。

Claims (9)

1.一种用于芯片封装的顶针装置,其特征在于,包括针筒、基座和顶针座模块,所述针筒套设于所述顶针座模块的外侧,所述基座位于所述顶针座模块的下方,且用于固定所述顶针座模块;
所述顶针座模块包括旋钮单元和支撑单元,所述支撑单元的顶部设有可拆卸的顶针,所述旋钮单元套设于所述支撑单元的外侧,并且具有收容所述支撑单元的收容腔和设置于收容腔内壁面上的导向槽,所述导向槽呈凸轮槽设置,所述支撑单元外侧设有与导向槽相配合的突起,进而转动所述旋钮单元,所述支撑单元上下垂直移动;
所述针筒的上表面设有真空孔和与所述顶针相对应的顶针孔。
2.根据权利要求1所述的用于芯片封装的顶针装置,其特征在于,所述支撑单元的数量为至少两个,所述旋钮单元的数量与所述支撑单元的数量一致,且每个所述旋钮单元分别对应每个所述支撑单元。
3.根据权利要求2所述的用于芯片封装的顶针装置,其特征在于,所述支撑单元的数量为三个,分别为外侧顶针座、中间顶针座和内侧顶针座;
所述旋钮单元的数量为三个,与所述支撑单元一一对应,分别为外侧旋钮、中间旋钮和内侧旋钮;
所述外侧顶针座、所述中间顶针座和所述内侧顶针座相互嵌套,且三个所述顶针座的表面设有滑槽,相邻所述顶针座通过所述滑槽在所述旋钮单元的控制下,进行上下垂直移动。
4.根据权利要求3所述的用于芯片封装的顶针装置,其特征在于,所述外侧顶针座的上方设有第一平台,所述第一平台的两端分别设有第一顶针和第二顶针;
所述中间顶针座的上方设有第二平台,所述第二平台的两端分别设有第三顶针和第四顶针;
所述内侧顶针座的上方设有第三平台,所述第三平台的两端分别设有第五顶针和第六顶针。
5.根据权利要求4所述的用于芯片封装的顶针装置,其特征在于,所述针筒的上表面设有六个顶针孔,分别对应所述第一顶针、所述第二顶针、所述第三顶针、所述第四顶针、所述第五顶针和所述第六顶针。
6.根据权利要求4所述的用于芯片封装的顶针装置,其特征在于,所述外侧旋钮控制所述第一平台进行上下垂直移动,所述中间旋钮控制所述第二平台进行上下垂直移动,所述内侧旋钮控制所述第三平台进行上下垂直移动;
当所述第一平台、所述第二平台和所述第三平台移动至同一水平面时,所述第一顶针、所述第二顶针、所述第三顶针、所述第四顶针、所述第五顶针和所述第六顶针依次排列。
7.根据权利要求4所述的用于芯片封装的顶针装置,其特征在于,所述外侧顶针座与所述第一平台之间设有第一支撑柱,所述中间顶针座与所述第二平台之间设有第二支撑柱,所述内侧顶针座与所述第三平台之间设有第三支撑柱;
所述第二支撑柱的下端设有折弯处。
8.根据权利要求3所述的用于芯片封装的顶针装置,其特征在于,所述基座的中心竖立有基轴,所述基轴与所述内侧顶针座的内表面的滑槽相对应;
所述基座的表面设有圆孔。
9.根据权利要求7所述的用于芯片封装的顶针装置,其特征在于,所述内侧顶针座的上方设有与所述第二支撑柱的折弯处相对应的凹槽。
CN201911346279.8A 2019-12-24 2019-12-24 一种用于芯片封装的顶针装置 Active CN111128846B (zh)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CN201911346279.8A CN111128846B (zh) 2019-12-24 2019-12-24 一种用于芯片封装的顶针装置
KR1020217041159A KR102680707B1 (ko) 2019-12-24 2020-10-13 칩 패키징에 이용되는 밀핀 장치
JP2021575341A JP7271730B2 (ja) 2019-12-24 2020-10-13 チップパッケージ用のエジェクターピン装置
US17/620,062 US20220352003A1 (en) 2019-12-24 2020-10-13 Ejector pin device for chip packaging
PCT/CN2020/120539 WO2021129053A1 (zh) 2019-12-24 2020-10-13 一种用于芯片封装的顶针装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201911346279.8A CN111128846B (zh) 2019-12-24 2019-12-24 一种用于芯片封装的顶针装置

Publications (2)

Publication Number Publication Date
CN111128846A CN111128846A (zh) 2020-05-08
CN111128846B true CN111128846B (zh) 2022-02-22

Family

ID=70501849

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201911346279.8A Active CN111128846B (zh) 2019-12-24 2019-12-24 一种用于芯片封装的顶针装置

Country Status (5)

Country Link
US (1) US20220352003A1 (zh)
JP (1) JP7271730B2 (zh)
KR (1) KR102680707B1 (zh)
CN (1) CN111128846B (zh)
WO (1) WO2021129053A1 (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111128846B (zh) * 2019-12-24 2022-02-22 颀中科技(苏州)有限公司 一种用于芯片封装的顶针装置
CN113414737B (zh) * 2021-07-09 2022-05-17 长鑫存储技术有限公司 顶针安装治具及方法
JP2023147018A (ja) * 2022-03-29 2023-10-12 東レエンジニアリング株式会社 突き上げヘッド及び突き上げ装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05326672A (ja) * 1992-05-21 1993-12-10 Sony Corp チップ突き上げ装置
CN103077918A (zh) * 2013-01-09 2013-05-01 广东志成华科光电设备有限公司 一种芯片分选设备顶针装置
CN105140156A (zh) * 2015-08-26 2015-12-09 华中科技大学 一种面向柔性芯片的多顶针剥离装置及剥离方法
CN206864447U (zh) * 2017-06-08 2018-01-09 太极半导体(苏州)有限公司 一种超薄芯片的吸取装置

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2995435B2 (ja) * 1991-12-26 1999-12-27 エムテック株式会社 チップ自動選別搬送装置
JPH05310322A (ja) * 1992-05-11 1993-11-22 Sony Corp 温度槽内の搬送装置
JPH10189690A (ja) * 1996-12-26 1998-07-21 Hitachi Ltd 半導体チップのピックアップ方法及びピックアップ装置
JP2005150214A (ja) * 2003-11-12 2005-06-09 Renesas Technology Corp 半導体装置の製造方法およびそれに用いられる半導体製造装置
JP2007115934A (ja) * 2005-10-21 2007-05-10 Matsushita Electric Ind Co Ltd 電子部品突き上げ装置及び電子部品の供給方法
JP4504308B2 (ja) * 2005-12-15 2010-07-14 株式会社日立ハイテクインスツルメンツ ダイピックアップ方法及びダイピックアップ装置
JP5040666B2 (ja) * 2008-01-15 2012-10-03 株式会社ジェイテクト ボールねじ装置
JP2013051265A (ja) * 2011-08-30 2013-03-14 Dainippon Screen Mfg Co Ltd 昇降ユニットおよび基板処理装置
CN103681441B (zh) * 2013-11-11 2016-08-24 爱立发自动化设备(上海)有限公司 一种用于半导体芯片封装的顶针治具机构
KR102231146B1 (ko) * 2014-04-22 2021-03-23 (주)제이티 이송툴모듈, 니들핀 조립체, 및 그를 가지는 소자핸들러
KR20170030336A (ko) * 2015-09-09 2017-03-17 세메스 주식회사 다이 이젝팅 장치
CN107093575A (zh) * 2017-05-08 2017-08-25 大连佳峰自动化股份有限公司 顶针系统
CN109935545B (zh) * 2019-01-22 2022-03-18 厦门市三安集成电路有限公司 一种挑起不同尺寸晶片的顶针模组
CN111128846B (zh) * 2019-12-24 2022-02-22 颀中科技(苏州)有限公司 一种用于芯片封装的顶针装置
WO2021173498A1 (en) * 2020-02-24 2021-09-02 Lam Research Corporation Semiconductor processing chamber with dual-lift mechanism for edge ring elevation management
CN114933167A (zh) * 2022-04-27 2022-08-23 泉州兰姆达仪器设备有限公司 一种激光芯片测试分选机的顶针机构及其工作方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05326672A (ja) * 1992-05-21 1993-12-10 Sony Corp チップ突き上げ装置
CN103077918A (zh) * 2013-01-09 2013-05-01 广东志成华科光电设备有限公司 一种芯片分选设备顶针装置
CN105140156A (zh) * 2015-08-26 2015-12-09 华中科技大学 一种面向柔性芯片的多顶针剥离装置及剥离方法
CN206864447U (zh) * 2017-06-08 2018-01-09 太极半导体(苏州)有限公司 一种超薄芯片的吸取装置

Also Published As

Publication number Publication date
KR102680707B1 (ko) 2024-07-01
US20220352003A1 (en) 2022-11-03
KR20220017416A (ko) 2022-02-11
WO2021129053A1 (zh) 2021-07-01
JP7271730B2 (ja) 2023-05-11
CN111128846A (zh) 2020-05-08
JP2022538987A (ja) 2022-09-07

Similar Documents

Publication Publication Date Title
CN111128846B (zh) 一种用于芯片封装的顶针装置
CN108857346B (zh) 剪刀脚自动组装系统
CN113148611B (zh) 一种高效的双工位全自动芯片排列系统
CN114597733B (zh) 连接器插接设备
WO2017206651A1 (zh) 基板支撑结构及曝光机
CN116275736A (zh) 一种组合式led灯珠焊接装置及其焊接方法
CN109227086A (zh) 一种矩形边框用组装装置及其组装方法
CN219928751U (zh) 块状生瓷片印刷机供料机构
CN209528337U (zh) 一种自由组合多功能屏风
CN111229995A (zh) 一种线材加工设备的自动高速分排序机构及其分排序方法
JP2014124705A (ja) 汎用受け治具
CN216671460U (zh) 键盘压装设备
KR101189779B1 (ko) 기판 고정 장치
CN205668034U (zh) 一种o型密封圈成形机构
TWM557730U (zh) 電子元件測試裝置
CN203899636U (zh) 高度连续可调试验架
CN112850594A (zh) 一种多级升降装置
CN219876306U (zh) 一种osp防止叠板的上板装置
CN116493510B (zh) 一种电子元件引脚成型设备
CN114666996B (zh) 一种pcb线路板加工线用元件贴装设备
CN108705335A (zh) 一种具有自动夹装功能的自动化加工设备
TWM609249U (zh) 具定位板之封裝基板入料載台
KR102316942B1 (ko) 선반 유닛 및 이를 갖는 스토커
CN220265139U (zh) 一种凸轮顶升机构
CN219716838U (zh) 一种bga植球平台调节装置

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
CB02 Change of applicant information
CB02 Change of applicant information

Address after: No. 166 Fengli Street, Suzhou Industrial Park, Jiangsu Province

Applicant after: CHIPMORE TECHNOLOGY Corp.,Ltd.

Applicant after: Xi'an yisiwei Material Technology Co., Ltd

Address before: No. 166 Fengli Street, Suzhou Industrial Park, Jiangsu Province

Applicant before: CHIPMORE TECHNOLOGY Corp.,Ltd.

Applicant before: Beijing yisiwei Technology Co.,Ltd.

TA01 Transfer of patent application right
TA01 Transfer of patent application right

Effective date of registration: 20210621

Address after: 215000 No.166, Fengli street, Suzhou Industrial Park, Jiangsu Province

Applicant after: CHIPMORE TECHNOLOGY Corp.,Ltd.

Applicant after: Hefei Qizhong Sealing Technology Co.,Ltd.

Address before: 215000 No.166, Fengli street, Suzhou Industrial Park, Jiangsu Province

Applicant before: CHIPMORE TECHNOLOGY Corp.,Ltd.

Applicant before: Xi'an yisiwei Material Technology Co., Ltd

CB02 Change of applicant information
CB02 Change of applicant information

Address after: 215000 No.166, Fengli street, Suzhou Industrial Park, Jiangsu Province

Applicant after: CHIPMORE TECHNOLOGY Corp.,Ltd.

Applicant after: Hefei Qizhong Technology Co., Ltd

Address before: 215000 No.166, Fengli street, Suzhou Industrial Park, Jiangsu Province

Applicant before: CHIPMORE TECHNOLOGY Corp.,Ltd.

Applicant before: Hefei Qizhong sealing and Testing Technology Co., Ltd

GR01 Patent grant
GR01 Patent grant