CN110871298B - 加工装置的维护方法和加工装置 - Google Patents

加工装置的维护方法和加工装置 Download PDF

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Publication number
CN110871298B
CN110871298B CN201910763142.6A CN201910763142A CN110871298B CN 110871298 B CN110871298 B CN 110871298B CN 201910763142 A CN201910763142 A CN 201910763142A CN 110871298 B CN110871298 B CN 110871298B
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China
Prior art keywords
flatness
holding
unit
holding surface
imaging
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Active
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CN201910763142.6A
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English (en)
Chinese (zh)
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CN110871298A (zh
Inventor
平沼千纮
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Disco Corp
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Disco Corp
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q16/00—Equipment for precise positioning of tool or work into particular locations not otherwise provided for
    • B23Q16/02—Indexing equipment
    • B23Q16/12—Indexing equipment using optics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D79/00—Methods, machines, or devices not covered elsewhere, for working metal by removal of material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/08—Protective coverings for parts of machine tools; Splash guards
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
    • B23Q17/2409—Arrangements for indirect observation of the working space using image recording means, e.g. a camera
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
    • B23Q17/248—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves using special electromagnetic means or methods
    • B23Q17/249—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves using special electromagnetic means or methods using image analysis, e.g. for radar, infrared or array camera images
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22—Feeding members carrying tools or work
    • B23Q5/28—Electric drives
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Optics & Photonics (AREA)
  • Remote Sensing (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Dicing (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
  • Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
CN201910763142.6A 2018-09-03 2019-08-19 加工装置的维护方法和加工装置 Active CN110871298B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018164513A JP7181028B2 (ja) 2018-09-03 2018-09-03 加工装置のメンテナンス方法および加工装置
JP2018-164513 2018-09-03

Publications (2)

Publication Number Publication Date
CN110871298A CN110871298A (zh) 2020-03-10
CN110871298B true CN110871298B (zh) 2024-03-29

Family

ID=69716890

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910763142.6A Active CN110871298B (zh) 2018-09-03 2019-08-19 加工装置的维护方法和加工装置

Country Status (4)

Country Link
JP (1) JP7181028B2 (ko)
KR (1) KR102628743B1 (ko)
CN (1) CN110871298B (ko)
TW (1) TWI813748B (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023039754A (ja) * 2021-09-09 2023-03-22 Ｔｏｗａ株式会社 メンテナンス方法、及び電子部品の製造方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002048527A (ja) * 2000-07-31 2002-02-15 Nikon Corp 面形状計測方法
JP2002343754A (ja) * 2001-05-15 2002-11-29 Nikon Corp 研磨装置、研磨方法およびこの研磨装置を用いた半導体デバイス製造方法
CN101206995A (zh) * 2006-12-20 2008-06-25 中芯国际集成电路制造(上海)有限公司 监测晶圆托盘平整性的方法
CN204359286U (zh) * 2014-12-10 2015-05-27 昆山源顺电子科技有限公司 一种基于图像识别的手机屏蔽罩平整度连续检测装置
CN105043308A (zh) * 2015-08-26 2015-11-11 湖南千盟工业视觉技术有限公司 一种基于机器视觉的瓷砖平整度检测装置
CN105472960A (zh) * 2014-09-29 2016-04-06 Juki株式会社 电子部件安装装置
TW201802916A (zh) * 2016-04-07 2018-01-16 迪思科股份有限公司 加工方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2005088686A1 (ja) * 2004-03-16 2008-01-31 株式会社ニコン 段差計測方法及び装置、並びに露光方法及び装置
US7593100B2 (en) * 2005-01-24 2009-09-22 Nikon Corporation Measuring method, measuring system, inspecting method, inspecting system, exposure method and exposure system, in which information as to the degree of the flatness of an object is pre-obtained
KR100689850B1 (ko) * 2006-02-13 2007-03-08 삼성전자주식회사 기판검사장치
JP2013108823A (ja) 2011-11-21 2013-06-06 Disco Abrasive Syst Ltd マグネットスタンドのスタンドベース
JP6120710B2 (ja) * 2013-07-19 2017-04-26 株式会社ディスコ 切削装置
JP6109010B2 (ja) * 2013-08-14 2017-04-05 株式会社ディスコ 研削装置
JP2017157748A (ja) 2016-03-03 2017-09-07 株式会社ディスコ 切削装置
KR101858823B1 (ko) * 2016-08-25 2018-05-18 주식회사 포스코 강판의 평탄도 측정장치 및 방법

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002048527A (ja) * 2000-07-31 2002-02-15 Nikon Corp 面形状計測方法
JP2002343754A (ja) * 2001-05-15 2002-11-29 Nikon Corp 研磨装置、研磨方法およびこの研磨装置を用いた半導体デバイス製造方法
CN101206995A (zh) * 2006-12-20 2008-06-25 中芯国际集成电路制造(上海)有限公司 监测晶圆托盘平整性的方法
CN105472960A (zh) * 2014-09-29 2016-04-06 Juki株式会社 电子部件安装装置
CN204359286U (zh) * 2014-12-10 2015-05-27 昆山源顺电子科技有限公司 一种基于图像识别的手机屏蔽罩平整度连续检测装置
CN105043308A (zh) * 2015-08-26 2015-11-11 湖南千盟工业视觉技术有限公司 一种基于机器视觉的瓷砖平整度检测装置
TW201802916A (zh) * 2016-04-07 2018-01-16 迪思科股份有限公司 加工方法

Also Published As

Publication number Publication date
KR102628743B1 (ko) 2024-01-23
JP7181028B2 (ja) 2022-11-30
CN110871298A (zh) 2020-03-10
TWI813748B (zh) 2023-09-01
TW202010998A (zh) 2020-03-16
KR20200026751A (ko) 2020-03-11
JP2020038087A (ja) 2020-03-12

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