CN110459500A - 微型器件真空吸头以及微型器件转移的方法 - Google Patents
微型器件真空吸头以及微型器件转移的方法 Download PDFInfo
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- CN110459500A CN110459500A CN201910687238.9A CN201910687238A CN110459500A CN 110459500 A CN110459500 A CN 110459500A CN 201910687238 A CN201910687238 A CN 201910687238A CN 110459500 A CN110459500 A CN 110459500A
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- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/15—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission
- H01L27/153—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission in a repetitive configuration, e.g. LED bars
- H01L27/156—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission in a repetitive configuration, e.g. LED bars two-dimensional arrays
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (9)
Priority Applications (1)
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CN201910687238.9A CN110459500A (zh) | 2019-07-29 | 2019-07-29 | 微型器件真空吸头以及微型器件转移的方法 |
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CN201910687238.9A CN110459500A (zh) | 2019-07-29 | 2019-07-29 | 微型器件真空吸头以及微型器件转移的方法 |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111244004A (zh) * | 2020-01-19 | 2020-06-05 | 南京中电熊猫平板显示科技有限公司 | 一种微型发光二极管的转移方法及转运基板 |
CN111383967A (zh) * | 2020-03-20 | 2020-07-07 | 武汉大学 | 一种采用压电材料的微型发光二极管转印组件及转印方法 |
CN112271157A (zh) * | 2020-09-29 | 2021-01-26 | 南京中电熊猫液晶显示科技有限公司 | 一种微型器件转移头及其制造方法 |
CN113733143A (zh) * | 2020-05-29 | 2021-12-03 | 深超光电(深圳)有限公司 | 真空吸附装置 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
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CN205723483U (zh) * | 2016-06-29 | 2016-11-23 | 中国振华集团永光电子有限公司(国营第八七三厂) | 一种陶瓷贴片器件定位加工夹具 |
KR101712187B1 (ko) * | 2015-11-05 | 2017-03-13 | (주) 씨앤아이테크놀로지 | 반도체 패키지의 일괄 처리 방법 및 장치 |
CN106952852A (zh) * | 2017-04-17 | 2017-07-14 | 如皋市大昌电子有限公司 | 一种用于芯片焊接时批量转运的吸笔装置 |
CN208189560U (zh) * | 2018-05-17 | 2018-12-04 | 湖州靖源信息技术有限公司 | 一种芯片批量定位装置 |
CN109256351A (zh) * | 2018-09-20 | 2019-01-22 | 南方科技大学 | 微型芯片的批量转移装置以及转移方法 |
CN208538814U (zh) * | 2018-06-25 | 2019-02-22 | 江西兆驰半导体有限公司 | 一种用于微型发光二极管的转移头阵列 |
-
2019
- 2019-07-29 CN CN201910687238.9A patent/CN110459500A/zh active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101712187B1 (ko) * | 2015-11-05 | 2017-03-13 | (주) 씨앤아이테크놀로지 | 반도체 패키지의 일괄 처리 방법 및 장치 |
CN205723483U (zh) * | 2016-06-29 | 2016-11-23 | 中国振华集团永光电子有限公司(国营第八七三厂) | 一种陶瓷贴片器件定位加工夹具 |
CN106952852A (zh) * | 2017-04-17 | 2017-07-14 | 如皋市大昌电子有限公司 | 一种用于芯片焊接时批量转运的吸笔装置 |
CN208189560U (zh) * | 2018-05-17 | 2018-12-04 | 湖州靖源信息技术有限公司 | 一种芯片批量定位装置 |
CN208538814U (zh) * | 2018-06-25 | 2019-02-22 | 江西兆驰半导体有限公司 | 一种用于微型发光二极管的转移头阵列 |
CN109256351A (zh) * | 2018-09-20 | 2019-01-22 | 南方科技大学 | 微型芯片的批量转移装置以及转移方法 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111244004A (zh) * | 2020-01-19 | 2020-06-05 | 南京中电熊猫平板显示科技有限公司 | 一种微型发光二极管的转移方法及转运基板 |
CN111383967A (zh) * | 2020-03-20 | 2020-07-07 | 武汉大学 | 一种采用压电材料的微型发光二极管转印组件及转印方法 |
CN113733143A (zh) * | 2020-05-29 | 2021-12-03 | 深超光电(深圳)有限公司 | 真空吸附装置 |
CN112271157A (zh) * | 2020-09-29 | 2021-01-26 | 南京中电熊猫液晶显示科技有限公司 | 一种微型器件转移头及其制造方法 |
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Effective date of registration: 20200910 Address after: No.7 Tianyou Road, Qixia District, Nanjing City, Jiangsu Province Applicant after: NANJING CEC PANDA LCD TECHNOLOGY Co.,Ltd. Address before: Nanjing Crystal Valley Road in Qixia District of Nanjing City Tianyou 210033 Jiangsu province No. 7 Applicant before: NANJING CEC PANDA FPD TECHNOLOGY Co.,Ltd. Applicant before: NANJING CEC PANDA LCD TECHNOLOGY Co.,Ltd. Applicant before: Nanjing East China Electronic Information Technology Co.,Ltd. |
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Application publication date: 20191115 |