CN110332765B - 一种电镀产品的干燥方法及干燥装置 - Google Patents
一种电镀产品的干燥方法及干燥装置 Download PDFInfo
- Publication number
- CN110332765B CN110332765B CN201910633606.1A CN201910633606A CN110332765B CN 110332765 B CN110332765 B CN 110332765B CN 201910633606 A CN201910633606 A CN 201910633606A CN 110332765 B CN110332765 B CN 110332765B
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- China
- Prior art keywords
- product
- drying
- electroplating
- relative humidity
- temperature
- Prior art date
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Links
- 238000009713 electroplating Methods 0.000 title claims abstract description 70
- 238000001035 drying Methods 0.000 title claims abstract description 66
- 239000007788 liquid Substances 0.000 claims abstract description 36
- 238000001704 evaporation Methods 0.000 claims abstract description 14
- 238000007664 blowing Methods 0.000 claims abstract description 10
- 229920006395 saturated elastomer Polymers 0.000 claims abstract description 7
- 238000000034 method Methods 0.000 claims description 6
- 238000001816 cooling Methods 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 23
- 230000008020 evaporation Effects 0.000 description 11
- 238000007747 plating Methods 0.000 description 7
- 238000004140 cleaning Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 230000032683 aging Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B15/00—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/004—Nozzle assemblies; Air knives; Air distributors; Blow boxes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B3/00—Drying solid materials or objects by processes involving the application of heat
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B3/00—Drying solid materials or objects by processes involving the application of heat
- F26B3/02—Drying solid materials or objects by processes involving the application of heat by convection, i.e. heat being conveyed from a heat source to the materials or objects to be dried by a gas or vapour, e.g. air
- F26B3/04—Drying solid materials or objects by processes involving the application of heat by convection, i.e. heat being conveyed from a heat source to the materials or objects to be dried by a gas or vapour, e.g. air the gas or vapour circulating over or surrounding the materials or objects to be dried
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Microbiology (AREA)
- Electroplating Methods And Accessories (AREA)
- Drying Of Solid Materials (AREA)
Abstract
Description
Claims (3)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2019105824496 | 2019-06-29 | ||
CN201910582449 | 2019-06-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN110332765A CN110332765A (zh) | 2019-10-15 |
CN110332765B true CN110332765B (zh) | 2021-06-18 |
Family
ID=68145073
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201910633606.1A Active CN110332765B (zh) | 2019-06-29 | 2019-07-15 | 一种电镀产品的干燥方法及干燥装置 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN110332765B (zh) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1941282A (zh) * | 2005-09-30 | 2007-04-04 | 株式会社日立高科技 | 基板干燥装置、基板干燥方法以及基板制造方法 |
CN101808754A (zh) * | 2007-05-14 | 2010-08-18 | 朗姆研究公司 | 防止过早干燥的装置、系统和方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2503524A1 (fr) * | 1981-04-01 | 1982-10-08 | Sagem | Perfectionnements apportes aux machines pour secher des cartes a circuits imprimes cablees apres nettoyage de celles-ci a l'issue d'une operation de soudage automatique des composants |
CA2507402C (en) * | 2005-05-16 | 2008-04-15 | Bourgault Industries Ltd. | Apparatus and method for drying ground |
CN201104081Y (zh) * | 2007-09-30 | 2008-08-20 | 扬博科技股份有限公司 | 电路板干燥装置 |
JP5125419B2 (ja) * | 2007-10-31 | 2013-01-23 | 井関農機株式会社 | 乾燥装置 |
US20120260517A1 (en) * | 2011-04-18 | 2012-10-18 | Lam Research Corporation | Apparatus and Method for Reducing Substrate Pattern Collapse During Drying Operations |
CN102252507A (zh) * | 2011-06-20 | 2011-11-23 | 乐山希尔电子有限公司 | 电镀烘干机 |
CN102607240B (zh) * | 2012-03-06 | 2014-07-23 | 宁德新能源科技有限公司 | 一种锂离子电池极片的干燥设备及方法 |
CN103234328B (zh) * | 2013-03-28 | 2015-04-08 | 京东方科技集团股份有限公司 | 一种基板减压干燥方法及装置 |
CN104654752A (zh) * | 2013-11-21 | 2015-05-27 | 江苏苏北砂轮厂有限公司 | 一种陶瓷结合剂砂轮湿坯干燥房 |
CN107036394B (zh) * | 2017-05-04 | 2019-06-04 | 四川农业大学 | 一种楠木板材的真空干燥方法 |
CN109200736B (zh) * | 2017-06-30 | 2021-01-08 | 京东方科技集团股份有限公司 | 冷凝板、真空干燥设备以及真空干燥方法 |
-
2019
- 2019-07-15 CN CN201910633606.1A patent/CN110332765B/zh active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1941282A (zh) * | 2005-09-30 | 2007-04-04 | 株式会社日立高科技 | 基板干燥装置、基板干燥方法以及基板制造方法 |
CN101808754A (zh) * | 2007-05-14 | 2010-08-18 | 朗姆研究公司 | 防止过早干燥的装置、系统和方法 |
Also Published As
Publication number | Publication date |
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CN110332765A (zh) | 2019-10-15 |
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TR01 | Transfer of patent right |
Effective date of registration: 20231227 Address after: 230031, 2nd Floor, Building 4, No. 1666 Ningxi Road, High tech Zone, Hefei City, Anhui Province Patentee after: Hefei Sox Surface Treatment Technology Co.,Ltd. Address before: 516626 No.1 Qingxin Road, Hongcao high tech Zone, Shanwei City, Guangdong Province Patentee before: SHANWEI SOURCE ADVANCED MATERIALS Corp. |
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CP03 | Change of name, title or address |
Address after: 230031, 2nd Floor, Building 4, No. 1666 Ningxi Road, High tech Zone, Hefei City, Anhui Province Patentee after: Hefei Suoyibai Metal Surface Treatment Co.,Ltd. Country or region after: China Address before: 230031, 2nd Floor, Building 4, No. 1666 Ningxi Road, High tech Zone, Hefei City, Anhui Province Patentee before: Hefei Sox Surface Treatment Technology Co.,Ltd. Country or region before: China |