CN110192124B - 辐射窗口 - Google Patents

辐射窗口 Download PDF

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Publication number
CN110192124B
CN110192124B CN201880007470.7A CN201880007470A CN110192124B CN 110192124 B CN110192124 B CN 110192124B CN 201880007470 A CN201880007470 A CN 201880007470A CN 110192124 B CN110192124 B CN 110192124B
Authority
CN
China
Prior art keywords
layer
silicon wafer
window
silicon
window layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201880007470.7A
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English (en)
Chinese (zh)
Other versions
CN110192124A (zh
Inventor
尼古拉·契科罗夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oxford Instruments Technologies OY
Original Assignee
Oxford Instruments Technologies OY
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oxford Instruments Technologies OY filed Critical Oxford Instruments Technologies OY
Publication of CN110192124A publication Critical patent/CN110192124A/zh
Application granted granted Critical
Publication of CN110192124B publication Critical patent/CN110192124B/zh
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/02—Vessels; Containers; Shields associated therewith; Vacuum locks
    • H01J5/18—Windows permeable to X-rays, gamma-rays, or particles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J47/00—Tubes for determining the presence, intensity, density or energy of radiation or particles
    • H01J47/001—Details
    • H01J47/002—Vessels or containers
    • H01J47/004—Windows permeable to X-rays, gamma-rays, or particles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T7/00—Details of radiation-measuring instruments
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B38/00—Ancillary operations in connection with laminating processes
    • B32B38/10—Removing layers, or parts of layers, mechanically or chemically
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith
    • H01J35/18—Windows
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/301—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices being sensitive to very short wavelength, e.g. being sensitive to X-rays, gamma-rays or corpuscular radiation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Measurement Of Radiation (AREA)
  • Solid State Image Pick-Up Elements (AREA)
CN201880007470.7A 2017-01-18 2018-01-17 辐射窗口 Active CN110192124B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FI20175037 2017-01-18
FI20175037A FI127409B (en) 2017-01-18 2017-01-18 radiation window
PCT/FI2018/050034 WO2018134480A1 (en) 2017-01-18 2018-01-17 Radiation window

Publications (2)

Publication Number Publication Date
CN110192124A CN110192124A (zh) 2019-08-30
CN110192124B true CN110192124B (zh) 2023-07-25

Family

ID=61017944

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201880007470.7A Active CN110192124B (zh) 2017-01-18 2018-01-17 辐射窗口

Country Status (7)

Country Link
US (1) US10943756B2 (enExample)
JP (1) JP2020507085A (enExample)
CN (1) CN110192124B (enExample)
DE (1) DE112018000422B4 (enExample)
FI (1) FI127409B (enExample)
GB (1) GB2573073B (enExample)
WO (1) WO2018134480A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10991540B2 (en) 2018-07-06 2021-04-27 Moxtek, Inc. Liquid crystal polymer for mounting x-ray window
FI130065B (en) 2019-03-27 2023-01-13 Oxford Instruments Tech Oy Method for making a radiation window and a radiation window structure
JP7429422B2 (ja) * 2020-01-08 2024-02-08 国立大学法人東海国立大学機構 グラフェン層とアルミ層を備えるフィルムおよびその製造方法
KR102616229B1 (ko) * 2021-08-02 2023-12-20 서울대학교산학협력단 샘플 고정용 장치 및 그 제조 방법

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03170033A (ja) * 1989-11-29 1991-07-23 Nec Corp Ｘ―線透過窓の製造方法
US6261943B1 (en) * 2000-02-08 2001-07-17 Nec Research Institute, Inc. Method for fabricating free-standing thin metal films
CN1682334A (zh) * 2002-09-13 2005-10-12 莫克斯泰克公司 辐射窗及其制造方法
CN101253419A (zh) * 2005-09-01 2008-08-27 唐德铮 X射线探测器和x射线探测器制造方法
WO2011151505A1 (en) * 2010-06-03 2011-12-08 Hs Foils Oy Ultra thin radiation window and method for its manufacturing
CN102903584A (zh) * 2011-05-16 2013-01-30 布莱阿姆青年大学 碳复合支撑结构
WO2013138258A1 (en) * 2012-03-11 2013-09-19 Mark Larson Improved radiation window with support structure
CN107112315A (zh) * 2015-01-16 2017-08-29 雫石诚 半导体器件及其制造方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03105300A (ja) * 1989-09-20 1991-05-02 Mitsubishi Electric Corp 軟ｘ線透過窓
JP3026284B2 (ja) * 1990-09-18 2000-03-27 住友電気工業株式会社 Ｘ線窓材とその製造方法
JPH06289145A (ja) * 1993-03-24 1994-10-18 Sumitomo Electric Ind Ltd Ｘ線窓材及びその製造方法
JP3731251B2 (ja) 1996-06-27 2006-01-05 株式会社ニコン 多層膜ｘ線ハーフミラーの製造方法
JP2005003564A (ja) 2003-06-13 2005-01-06 Ushio Inc 電子ビーム管および電子ビーム取り出し用窓
US7618906B2 (en) * 2005-11-17 2009-11-17 Oxford Instruments Analytical Oy Window membrane for detector and analyser devices, and a method for manufacturing a window membrane
US9305735B2 (en) 2007-09-28 2016-04-05 Brigham Young University Reinforced polymer x-ray window
US8494119B2 (en) * 2010-06-18 2013-07-23 Oxford Instruments Analytical Oy Radiation window, and a method for its manufacturing
DE102010046100A1 (de) * 2010-09-21 2012-03-22 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Strahlungseintrittsfenster für einen Strahlungsdetektor
WO2013121078A1 (en) 2012-02-15 2013-08-22 Hs Foils Oy Method and arrangement for manufacturing a radiation window
DE102012107342B4 (de) * 2012-08-09 2019-10-10 Ketek Gmbh Röntgenstrahlungsdurchtrittsfenster für einen Strahlungsdetektor, Strahlungsdetektor mit einem solchen Röntgenstrahlungsdurchtrittsfenster sowie Verfahren zur Herstellung eines Röntgenstrahlungsdurchtrittsfensters
DE102014103546A1 (de) * 2014-02-10 2015-08-13 Ketek Gmbh Röntgenstrahlungsdurchtrittsfenster und Verfahren zur Herstellung desselben
JP6355934B2 (ja) 2014-02-18 2018-07-11 株式会社堀場製作所 放射線透過窓、放射線検出器及び放射線検出装置
CN107430967A (zh) * 2015-01-22 2017-12-01 卢克赛尔公司 用于大面积x射线检测器窗口的改进的材料和结构
FI20155881A (fi) * 2015-11-26 2017-05-27 Hs Foils Oy Menetelmä säteilyikkunan valmistamiseksi ja säteilyikkuna
US10869506B2 (en) * 2016-11-30 2020-12-22 Shenzhen Ivps Technology Co., Ltd. Conductive contact structure, electrode assembly, power supply assembly and electronic cigarette having same
US20180061608A1 (en) * 2017-09-28 2018-03-01 Oxford Instruments X-ray Technology Inc. Window member for an x-ray device

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03170033A (ja) * 1989-11-29 1991-07-23 Nec Corp Ｘ―線透過窓の製造方法
US6261943B1 (en) * 2000-02-08 2001-07-17 Nec Research Institute, Inc. Method for fabricating free-standing thin metal films
CN1682334A (zh) * 2002-09-13 2005-10-12 莫克斯泰克公司 辐射窗及其制造方法
CN101253419A (zh) * 2005-09-01 2008-08-27 唐德铮 X射线探测器和x射线探测器制造方法
WO2011151505A1 (en) * 2010-06-03 2011-12-08 Hs Foils Oy Ultra thin radiation window and method for its manufacturing
CN102903584A (zh) * 2011-05-16 2013-01-30 布莱阿姆青年大学 碳复合支撑结构
WO2013138258A1 (en) * 2012-03-11 2013-09-19 Mark Larson Improved radiation window with support structure
CN107112315A (zh) * 2015-01-16 2017-08-29 雫石诚 半导体器件及其制造方法

Also Published As

Publication number Publication date
US10943756B2 (en) 2021-03-09
CN110192124A (zh) 2019-08-30
WO2018134480A1 (en) 2018-07-26
US20190355539A1 (en) 2019-11-21
GB201910264D0 (en) 2019-09-04
DE112018000422B4 (de) 2022-06-30
JP2020507085A (ja) 2020-03-05
GB2573073B (en) 2022-04-13
GB2573073A (en) 2019-10-23
DE112018000422T5 (de) 2019-10-24
FI20175037A7 (fi) 2018-02-06
FI127409B (en) 2018-05-15

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