GB2573073B - Radiation window - Google Patents

Radiation window Download PDF

Info

Publication number
GB2573073B
GB2573073B GB1910264.9A GB201910264A GB2573073B GB 2573073 B GB2573073 B GB 2573073B GB 201910264 A GB201910264 A GB 201910264A GB 2573073 B GB2573073 B GB 2573073B
Authority
GB
United Kingdom
Prior art keywords
radiation window
radiation
window
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB1910264.9A
Other languages
English (en)
Other versions
GB2573073A (en
GB201910264D0 (en
Inventor
Chekurov Nikolai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oxford Instruments Technologies OY
Original Assignee
Oxford Instruments Technologies OY
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oxford Instruments Technologies OY filed Critical Oxford Instruments Technologies OY
Publication of GB201910264D0 publication Critical patent/GB201910264D0/en
Publication of GB2573073A publication Critical patent/GB2573073A/en
Application granted granted Critical
Publication of GB2573073B publication Critical patent/GB2573073B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J47/00Tubes for determining the presence, intensity, density or energy of radiation or particles
    • H01J47/001Details
    • H01J47/002Vessels or containers
    • H01J47/004Windows permeable to X-rays, gamma-rays, or particles
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01TMEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T7/00Details of radiation-measuring instruments
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B38/00Ancillary operations in connection with laminating processes
    • B32B38/10Removing layers, or parts of layers, mechanically or chemically
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00X-ray tubes
    • H01J35/02Details
    • H01J35/16Vessels; Containers; Shields associated therewith
    • H01J35/18Windows
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/02Vessels; Containers; Shields associated therewith; Vacuum locks
    • H01J5/18Windows permeable to X-rays, gamma-rays, or particles
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/301Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices being sensitive to very short wavelength, e.g. being sensitive to X-rays, gamma-rays or corpuscular radiation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Measurement Of Radiation (AREA)
  • Solid State Image Pick-Up Elements (AREA)
GB1910264.9A 2017-01-18 2018-01-17 Radiation window Active GB2573073B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20175037A FI127409B (en) 2017-01-18 2017-01-18 radiation window
PCT/FI2018/050034 WO2018134480A1 (en) 2017-01-18 2018-01-17 Radiation window

Publications (3)

Publication Number Publication Date
GB201910264D0 GB201910264D0 (en) 2019-09-04
GB2573073A GB2573073A (en) 2019-10-23
GB2573073B true GB2573073B (en) 2022-04-13

Family

ID=61017944

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1910264.9A Active GB2573073B (en) 2017-01-18 2018-01-17 Radiation window

Country Status (7)

Country Link
US (1) US10943756B2 (enExample)
JP (1) JP2020507085A (enExample)
CN (1) CN110192124B (enExample)
DE (1) DE112018000422B4 (enExample)
FI (1) FI127409B (enExample)
GB (1) GB2573073B (enExample)
WO (1) WO2018134480A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10991540B2 (en) * 2018-07-06 2021-04-27 Moxtek, Inc. Liquid crystal polymer for mounting x-ray window
FI130065B (en) 2019-03-27 2023-01-13 Oxford Instruments Tech Oy Radiant window manufacturing method and radiant window structure
JP7429422B2 (ja) * 2020-01-08 2024-02-08 国立大学法人東海国立大学機構 グラフェン層とアルミ層を備えるフィルムおよびその製造方法
KR102616229B1 (ko) * 2021-08-02 2023-12-20 서울대학교산학협력단 샘플 고정용 장치 및 그 제조 방법

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0476827A1 (en) * 1990-09-18 1992-03-25 Sumitomo Electric Industries, Limited X-ray window and method of producing same
EP2817818A1 (en) * 2012-02-15 2014-12-31 HS Foils OY Method and arrangement for manufacturing a radiation window
DE102014103546A1 (de) * 2014-02-10 2015-08-13 Ketek Gmbh Röntgenstrahlungsdurchtrittsfenster und Verfahren zur Herstellung desselben
GB2561429A (en) * 2016-11-30 2018-10-17 Shenzhen Ivps Tech Co Ltd Conductive contact structure, electrode assembly, power supply assembly and electronic cigarette having same

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JPH03105300A (ja) * 1989-09-20 1991-05-02 Mitsubishi Electric Corp 軟x線透過窓
JPH0786560B2 (ja) * 1989-11-29 1995-09-20 日本電気株式会社 X―線透過窓の製造方法
JPH06289145A (ja) * 1993-03-24 1994-10-18 Sumitomo Electric Ind Ltd X線窓材及びその製造方法
JP3731251B2 (ja) 1996-06-27 2006-01-05 株式会社ニコン 多層膜x線ハーフミラーの製造方法
US6261943B1 (en) * 2000-02-08 2001-07-17 Nec Research Institute, Inc. Method for fabricating free-standing thin metal films
JP2005539351A (ja) * 2002-09-13 2005-12-22 モックステック・インコーポレーテッド 放射窓及びその製造方法
JP2005003564A (ja) 2003-06-13 2005-01-06 Ushio Inc 電子ビーム管および電子ビーム取り出し用窓
CN101253419B (zh) * 2005-09-01 2011-07-27 上海丽恒光微电子科技有限公司 X射线探测器和x射线探测器制造方法
US7618906B2 (en) * 2005-11-17 2009-11-17 Oxford Instruments Analytical Oy Window membrane for detector and analyser devices, and a method for manufacturing a window membrane
US9305735B2 (en) 2007-09-28 2016-04-05 Brigham Young University Reinforced polymer x-ray window
FI20105626A0 (fi) * 2010-06-03 2010-06-03 Hs Foils Oy Erittäin ohut berylliumikkuna ja menetelmä sen valmistamiseksi
US8494119B2 (en) * 2010-06-18 2013-07-23 Oxford Instruments Analytical Oy Radiation window, and a method for its manufacturing
DE102010046100A1 (de) * 2010-09-21 2012-03-22 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Strahlungseintrittsfenster für einen Strahlungsdetektor
US8989354B2 (en) * 2011-05-16 2015-03-24 Brigham Young University Carbon composite support structure
WO2013138258A1 (en) * 2012-03-11 2013-09-19 Mark Larson Improved radiation window with support structure
DE102012107342B4 (de) * 2012-08-09 2019-10-10 Ketek Gmbh Röntgenstrahlungsdurchtrittsfenster für einen Strahlungsdetektor, Strahlungsdetektor mit einem solchen Röntgenstrahlungsdurchtrittsfenster sowie Verfahren zur Herstellung eines Röntgenstrahlungsdurchtrittsfensters
JP6355934B2 (ja) 2014-02-18 2018-07-11 株式会社堀場製作所 放射線透過窓、放射線検出器及び放射線検出装置
US10468383B2 (en) * 2015-01-16 2019-11-05 Makoto Shizukuishi Semiconductor device and manufacturing method thereof
CN107430967A (zh) * 2015-01-22 2017-12-01 卢克赛尔公司 用于大面积x射线检测器窗口的改进的材料和结构
FI20155881A7 (fi) * 2015-11-26 2017-05-27 Hs Foils Oy Menetelmä säteilyikkunan valmistamiseksi ja säteilyikkuna
US20180061608A1 (en) * 2017-09-28 2018-03-01 Oxford Instruments X-ray Technology Inc. Window member for an x-ray device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0476827A1 (en) * 1990-09-18 1992-03-25 Sumitomo Electric Industries, Limited X-ray window and method of producing same
EP2817818A1 (en) * 2012-02-15 2014-12-31 HS Foils OY Method and arrangement for manufacturing a radiation window
DE102014103546A1 (de) * 2014-02-10 2015-08-13 Ketek Gmbh Röntgenstrahlungsdurchtrittsfenster und Verfahren zur Herstellung desselben
GB2561429A (en) * 2016-11-30 2018-10-17 Shenzhen Ivps Tech Co Ltd Conductive contact structure, electrode assembly, power supply assembly and electronic cigarette having same

Also Published As

Publication number Publication date
DE112018000422T5 (de) 2019-10-24
US20190355539A1 (en) 2019-11-21
DE112018000422B4 (de) 2022-06-30
FI127409B (en) 2018-05-15
GB2573073A (en) 2019-10-23
CN110192124A (zh) 2019-08-30
GB201910264D0 (en) 2019-09-04
FI20175037A7 (fi) 2018-02-06
WO2018134480A1 (en) 2018-07-26
US10943756B2 (en) 2021-03-09
JP2020507085A (ja) 2020-03-05
CN110192124B (zh) 2023-07-25

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