GB2561439B - Radiation window - Google Patents

Radiation window Download PDF

Info

Publication number
GB2561439B
GB2561439B GB1802342.4A GB201802342A GB2561439B GB 2561439 B GB2561439 B GB 2561439B GB 201802342 A GB201802342 A GB 201802342A GB 2561439 B GB2561439 B GB 2561439B
Authority
GB
United Kingdom
Prior art keywords
radiation window
radiation
window
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB1802342.4A
Other versions
GB2561439A (en
GB201802342D0 (en
Inventor
Chekurov Nikolai
Nenonen Seppo
Andersson Hans
Talvitie Heli
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oxford Instruments Technologies OY
Original Assignee
Oxford Instruments Technologies OY
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oxford Instruments Technologies OY filed Critical Oxford Instruments Technologies OY
Publication of GB201802342D0 publication Critical patent/GB201802342D0/en
Publication of GB2561439A publication Critical patent/GB2561439A/en
Application granted granted Critical
Publication of GB2561439B publication Critical patent/GB2561439B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01TMEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T7/00Details of radiation-measuring instruments
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J47/00Tubes for determining the presence, intensity, density or energy of radiation or particles
    • H01J47/001Details
    • H01J47/002Vessels or containers
    • H01J47/004Windows permeable to X-rays, gamma-rays, or particles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B38/00Ancillary operations in connection with laminating processes
    • B32B38/10Removing layers, or parts of layers, mechanically or chemically
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00X-ray tubes
    • H01J35/02Details
    • H01J35/16Vessels; Containers; Shields associated therewith
    • H01J35/18Windows
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/02Vessels; Containers; Shields associated therewith; Vacuum locks
    • H01J5/18Windows permeable to X-rays, gamma-rays, or particles
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/08Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
    • H01L31/085Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors the device being sensitive to very short wavelength, e.g. X-ray, Gamma-rays

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Electromagnetism (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Drying Of Semiconductors (AREA)
  • Recrystallisation Techniques (AREA)
  • Micromachines (AREA)
GB1802342.4A 2017-02-15 2018-02-13 Radiation window Active GB2561439B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI20175121A FI128876B (en) 2017-02-15 2017-02-15 Radiation window

Publications (3)

Publication Number Publication Date
GB201802342D0 GB201802342D0 (en) 2018-03-28
GB2561439A GB2561439A (en) 2018-10-17
GB2561439B true GB2561439B (en) 2020-07-08

Family

ID=61731458

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1802342.4A Active GB2561439B (en) 2017-02-15 2018-02-13 Radiation window

Country Status (3)

Country Link
DE (1) DE102018000848A1 (en)
FI (1) FI128876B (en)
GB (1) GB2561439B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI130065B (en) 2019-03-27 2023-01-13 Oxford Instruments Tech Oy Radiation window manufacturing method and radiation window construct

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3707130A1 (en) * 1987-03-03 1988-09-15 Fraunhofer Ges Forschung Method of fabricating silicon X-ray masks
US4862490A (en) * 1986-10-23 1989-08-29 Hewlett-Packard Company Vacuum windows for soft x-ray machines
US5418833A (en) * 1993-04-23 1995-05-23 The Regents Of The University Of California High performance x-ray anti-scatter grid
US6477226B1 (en) * 1998-11-17 2002-11-05 Bruker Axs Analytical X-Ray Systems Gmbh X-ray analysis device with X-ray optical semi-conductor construction element
US6477225B1 (en) * 2000-08-09 2002-11-05 Sandia National Laboratories X-ray mask and method for providing same
US20040146139A1 (en) * 2002-05-14 2004-07-29 Morales Alfredo M X-ray mask and method for making
US20080317209A1 (en) * 2007-06-19 2008-12-25 Oxford Instruments Analytical Oy Gas tight radiation window, and a method for its manufacturing
WO2012091715A1 (en) * 2010-12-30 2012-07-05 Utc Fire & Security Corporation Ionization window
US20130051535A1 (en) * 2011-05-16 2013-02-28 Robert C. Davis Carbon composite support structure
US20130168781A1 (en) * 2011-12-28 2013-07-04 Utc Fire & Security Corporation Two-wafer mems ionization device
DE102014103546A1 (en) * 2014-02-10 2015-08-13 Ketek Gmbh X-ray transmission window and method of making the same

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4862490A (en) * 1986-10-23 1989-08-29 Hewlett-Packard Company Vacuum windows for soft x-ray machines
DE3707130A1 (en) * 1987-03-03 1988-09-15 Fraunhofer Ges Forschung Method of fabricating silicon X-ray masks
US5418833A (en) * 1993-04-23 1995-05-23 The Regents Of The University Of California High performance x-ray anti-scatter grid
US6477226B1 (en) * 1998-11-17 2002-11-05 Bruker Axs Analytical X-Ray Systems Gmbh X-ray analysis device with X-ray optical semi-conductor construction element
US6477225B1 (en) * 2000-08-09 2002-11-05 Sandia National Laboratories X-ray mask and method for providing same
US20040146139A1 (en) * 2002-05-14 2004-07-29 Morales Alfredo M X-ray mask and method for making
US20080317209A1 (en) * 2007-06-19 2008-12-25 Oxford Instruments Analytical Oy Gas tight radiation window, and a method for its manufacturing
WO2012091715A1 (en) * 2010-12-30 2012-07-05 Utc Fire & Security Corporation Ionization window
US20130051535A1 (en) * 2011-05-16 2013-02-28 Robert C. Davis Carbon composite support structure
US20130168781A1 (en) * 2011-12-28 2013-07-04 Utc Fire & Security Corporation Two-wafer mems ionization device
DE102014103546A1 (en) * 2014-02-10 2015-08-13 Ketek Gmbh X-ray transmission window and method of making the same

Also Published As

Publication number Publication date
GB2561439A (en) 2018-10-17
DE102018000848A1 (en) 2018-08-16
GB201802342D0 (en) 2018-03-28
FI128876B (en) 2021-02-15
FI20175121L (en) 2018-08-16

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