DE112018000422B4 - Strahlungsfenster - Google Patents

Strahlungsfenster Download PDF

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Publication number
DE112018000422B4
DE112018000422B4 DE112018000422.8T DE112018000422T DE112018000422B4 DE 112018000422 B4 DE112018000422 B4 DE 112018000422B4 DE 112018000422 T DE112018000422 T DE 112018000422T DE 112018000422 B4 DE112018000422 B4 DE 112018000422B4
Authority
DE
Germany
Prior art keywords
layer
silicon wafer
window
silicon
window layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE112018000422.8T
Other languages
German (de)
English (en)
Other versions
DE112018000422T5 (de
Inventor
Nikolai Chekurov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oxford Instruments Technologies OY
Original Assignee
Oxford Instruments Technologies OY
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oxford Instruments Technologies OY filed Critical Oxford Instruments Technologies OY
Publication of DE112018000422T5 publication Critical patent/DE112018000422T5/de
Application granted granted Critical
Publication of DE112018000422B4 publication Critical patent/DE112018000422B4/de
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Anticipated expiration legal-status Critical

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J47/00—Tubes for determining the presence, intensity, density or energy of radiation or particles
    • H01J47/001—Details
    • H01J47/002—Vessels or containers
    • H01J47/004—Windows permeable to X-rays, gamma-rays, or particles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T7/00—Details of radiation-measuring instruments
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B38/00—Ancillary operations in connection with laminating processes
    • B32B38/10—Removing layers, or parts of layers, mechanically or chemically
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith
    • H01J35/18—Windows
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/02—Vessels; Containers; Shields associated therewith; Vacuum locks
    • H01J5/18—Windows permeable to X-rays, gamma-rays, or particles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/301—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices being sensitive to very short wavelength, e.g. being sensitive to X-rays, gamma-rays or corpuscular radiation

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Measurement Of Radiation (AREA)
  • Solid State Image Pick-Up Elements (AREA)
DE112018000422.8T 2017-01-18 2018-01-17 Strahlungsfenster Active DE112018000422B4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FI20175037 2017-01-18
FI20175037A FI127409B (en) 2017-01-18 2017-01-18 radiation window
PCT/FI2018/050034 WO2018134480A1 (en) 2017-01-18 2018-01-17 Radiation window

Publications (2)

Publication Number Publication Date
DE112018000422T5 DE112018000422T5 (de) 2019-10-24
DE112018000422B4 true DE112018000422B4 (de) 2022-06-30

Family

ID=61017944

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112018000422.8T Active DE112018000422B4 (de) 2017-01-18 2018-01-17 Strahlungsfenster

Country Status (7)

Country Link
US (1) US10943756B2 (enExample)
JP (1) JP2020507085A (enExample)
CN (1) CN110192124B (enExample)
DE (1) DE112018000422B4 (enExample)
FI (1) FI127409B (enExample)
GB (1) GB2573073B (enExample)
WO (1) WO2018134480A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10991540B2 (en) * 2018-07-06 2021-04-27 Moxtek, Inc. Liquid crystal polymer for mounting x-ray window
FI130065B (en) 2019-03-27 2023-01-13 Oxford Instruments Tech Oy Radiant window manufacturing method and radiant window structure
JP7429422B2 (ja) * 2020-01-08 2024-02-08 国立大学法人東海国立大学機構 グラフェン層とアルミ層を備えるフィルムおよびその製造方法
KR102616229B1 (ko) * 2021-08-02 2023-12-20 서울대학교산학협력단 샘플 고정용 장치 및 그 제조 방법

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6870174B2 (en) 2003-06-13 2005-03-22 Ushio Denki Kabushiki Kaisha Electron beam tube and window for electron beam extraction
JP3731251B2 (ja) 1996-06-27 2006-01-05 株式会社ニコン 多層膜ｘ線ハーフミラーの製造方法
US20120025110A1 (en) 2007-09-28 2012-02-02 Davis Robert C Reinforced polymer x-ray window
US20150053640A1 (en) 2012-02-15 2015-02-26 Hs Foils Oy Method and arrangement for manufacturing a radiation window
DE102014103546A1 (de) 2014-02-10 2015-08-13 Ketek Gmbh Röntgenstrahlungsdurchtrittsfenster und Verfahren zur Herstellung desselben
US20150235726A1 (en) 2014-02-18 2015-08-20 Horiba, Ltd. Radiolucent window, radiation detector and radiation detection apparatus

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03105300A (ja) * 1989-09-20 1991-05-02 Mitsubishi Electric Corp 軟ｘ線透過窓
JPH0786560B2 (ja) * 1989-11-29 1995-09-20 日本電気株式会社 Ｘ―線透過窓の製造方法
JP3026284B2 (ja) * 1990-09-18 2000-03-27 住友電気工業株式会社 Ｘ線窓材とその製造方法
JPH06289145A (ja) * 1993-03-24 1994-10-18 Sumitomo Electric Ind Ltd Ｘ線窓材及びその製造方法
US6261943B1 (en) * 2000-02-08 2001-07-17 Nec Research Institute, Inc. Method for fabricating free-standing thin metal films
JP2005539351A (ja) * 2002-09-13 2005-12-22 モックステック・インコーポレーテッド 放射窓及びその製造方法
CN101253419B (zh) * 2005-09-01 2011-07-27 上海丽恒光微电子科技有限公司 X射线探测器和x射线探测器制造方法
US7618906B2 (en) * 2005-11-17 2009-11-17 Oxford Instruments Analytical Oy Window membrane for detector and analyser devices, and a method for manufacturing a window membrane
FI20105626A0 (fi) * 2010-06-03 2010-06-03 Hs Foils Oy Erittäin ohut berylliumikkuna ja menetelmä sen valmistamiseksi
US8494119B2 (en) * 2010-06-18 2013-07-23 Oxford Instruments Analytical Oy Radiation window, and a method for its manufacturing
DE102010046100A1 (de) * 2010-09-21 2012-03-22 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Strahlungseintrittsfenster für einen Strahlungsdetektor
US8989354B2 (en) * 2011-05-16 2015-03-24 Brigham Young University Carbon composite support structure
WO2013138258A1 (en) * 2012-03-11 2013-09-19 Mark Larson Improved radiation window with support structure
DE102012107342B4 (de) * 2012-08-09 2019-10-10 Ketek Gmbh Röntgenstrahlungsdurchtrittsfenster für einen Strahlungsdetektor, Strahlungsdetektor mit einem solchen Röntgenstrahlungsdurchtrittsfenster sowie Verfahren zur Herstellung eines Röntgenstrahlungsdurchtrittsfensters
US10468383B2 (en) * 2015-01-16 2019-11-05 Makoto Shizukuishi Semiconductor device and manufacturing method thereof
CN107430967A (zh) * 2015-01-22 2017-12-01 卢克赛尔公司 用于大面积x射线检测器窗口的改进的材料和结构
FI20155881A7 (fi) * 2015-11-26 2017-05-27 Hs Foils Oy Menetelmä säteilyikkunan valmistamiseksi ja säteilyikkuna
US10869506B2 (en) * 2016-11-30 2020-12-22 Shenzhen Ivps Technology Co., Ltd. Conductive contact structure, electrode assembly, power supply assembly and electronic cigarette having same
US20180061608A1 (en) * 2017-09-28 2018-03-01 Oxford Instruments X-ray Technology Inc. Window member for an x-ray device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3731251B2 (ja) 1996-06-27 2006-01-05 株式会社ニコン 多層膜ｘ線ハーフミラーの製造方法
US6870174B2 (en) 2003-06-13 2005-03-22 Ushio Denki Kabushiki Kaisha Electron beam tube and window for electron beam extraction
US20120025110A1 (en) 2007-09-28 2012-02-02 Davis Robert C Reinforced polymer x-ray window
US20150053640A1 (en) 2012-02-15 2015-02-26 Hs Foils Oy Method and arrangement for manufacturing a radiation window
DE102014103546A1 (de) 2014-02-10 2015-08-13 Ketek Gmbh Röntgenstrahlungsdurchtrittsfenster und Verfahren zur Herstellung desselben
US20150235726A1 (en) 2014-02-18 2015-08-20 Horiba, Ltd. Radiolucent window, radiation detector and radiation detection apparatus

Also Published As

Publication number Publication date
DE112018000422T5 (de) 2019-10-24
US20190355539A1 (en) 2019-11-21
GB2573073B (en) 2022-04-13
FI127409B (en) 2018-05-15
GB2573073A (en) 2019-10-23
CN110192124A (zh) 2019-08-30
GB201910264D0 (en) 2019-09-04
FI20175037A7 (fi) 2018-02-06
WO2018134480A1 (en) 2018-07-26
US10943756B2 (en) 2021-03-09
JP2020507085A (ja) 2020-03-05
CN110192124B (zh) 2023-07-25

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