JP2020507085A - 放射線窓 - Google Patents

放射線窓 Download PDF

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Publication number
JP2020507085A
JP2020507085A JP2019559402A JP2019559402A JP2020507085A JP 2020507085 A JP2020507085 A JP 2020507085A JP 2019559402 A JP2019559402 A JP 2019559402A JP 2019559402 A JP2019559402 A JP 2019559402A JP 2020507085 A JP2020507085 A JP 2020507085A
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JP
Japan
Prior art keywords
layer
window
silicon wafer
silicon
window layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2019559402A
Other languages
English (en)
Japanese (ja)
Other versions
JP2020507085A5 (enExample
Inventor
チェクロブ，ニコライ
Original Assignee
オックスフォード インストゥルメンツ テクノロジーズ オサケユイチア
オックスフォード インストゥルメンツ テクノロジーズ オサケユイチア
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by オックスフォード インストゥルメンツ テクノロジーズ オサケユイチア, オックスフォード インストゥルメンツ テクノロジーズ オサケユイチア filed Critical オックスフォード インストゥルメンツ テクノロジーズ オサケユイチア
Publication of JP2020507085A publication Critical patent/JP2020507085A/ja
Publication of JP2020507085A5 publication Critical patent/JP2020507085A5/ja
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J47/00—Tubes for determining the presence, intensity, density or energy of radiation or particles
    • H01J47/001—Details
    • H01J47/002—Vessels or containers
    • H01J47/004—Windows permeable to X-rays, gamma-rays, or particles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B38/00—Ancillary operations in connection with laminating processes
    • B32B38/10—Removing layers, or parts of layers, mechanically or chemically
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T7/00—Details of radiation-measuring instruments
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith
    • H01J35/18—Windows
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/02—Vessels; Containers; Shields associated therewith; Vacuum locks
    • H01J5/18—Windows permeable to X-rays, gamma-rays, or particles
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/301—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices being sensitive to very short wavelength, e.g. being sensitive to X-rays, gamma-rays or corpuscular radiation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Measurement Of Radiation (AREA)
  • Solid State Image Pick-Up Elements (AREA)
JP2019559402A 2017-01-18 2018-01-17 放射線窓 Pending JP2020507085A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FI20175037 2017-01-18
FI20175037A FI127409B (en) 2017-01-18 2017-01-18 radiation window
PCT/FI2018/050034 WO2018134480A1 (en) 2017-01-18 2018-01-17 Radiation window

Publications (2)

Publication Number Publication Date
JP2020507085A true JP2020507085A (ja) 2020-03-05
JP2020507085A5 JP2020507085A5 (enExample) 2021-01-21

Family

ID=61017944

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019559402A Pending JP2020507085A (ja) 2017-01-18 2018-01-17 放射線窓

Country Status (7)

Country Link
US (1) US10943756B2 (enExample)
JP (1) JP2020507085A (enExample)
CN (1) CN110192124B (enExample)
DE (1) DE112018000422B4 (enExample)
FI (1) FI127409B (enExample)
GB (1) GB2573073B (enExample)
WO (1) WO2018134480A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230019749A (ko) * 2021-08-02 2023-02-09 서울대학교산학협력단 샘플 고정용 장치 및 그 제조 방법

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10991540B2 (en) 2018-07-06 2021-04-27 Moxtek, Inc. Liquid crystal polymer for mounting x-ray window
FI130065B (en) 2019-03-27 2023-01-13 Oxford Instruments Tech Oy Method for making a radiation window and a radiation window structure
JP7429422B2 (ja) * 2020-01-08 2024-02-08 国立大学法人東海国立大学機構 グラフェン層とアルミ層を備えるフィルムおよびその製造方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03105300A (ja) * 1989-09-20 1991-05-02 Mitsubishi Electric Corp 軟ｘ線透過窓
JPH06289145A (ja) * 1993-03-24 1994-10-18 Sumitomo Electric Ind Ltd Ｘ線窓材及びその製造方法
JP2012242381A (ja) * 2011-05-16 2012-12-10 Brigham Young Univ 炭素複合材料の支持構造
US20140008538A1 (en) * 2010-09-21 2014-01-09 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften, E.V. Radiation entry window for a radiation detector
DE102014103546A1 (de) * 2014-02-10 2015-08-13 Ketek Gmbh Röntgenstrahlungsdurchtrittsfenster und Verfahren zur Herstellung desselben

Family Cites Families (20)

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JPH0786560B2 (ja) * 1989-11-29 1995-09-20 日本電気株式会社 Ｘ―線透過窓の製造方法
JP3026284B2 (ja) * 1990-09-18 2000-03-27 住友電気工業株式会社 Ｘ線窓材とその製造方法
JP3731251B2 (ja) 1996-06-27 2006-01-05 株式会社ニコン 多層膜ｘ線ハーフミラーの製造方法
US6261943B1 (en) * 2000-02-08 2001-07-17 Nec Research Institute, Inc. Method for fabricating free-standing thin metal films
CN100394529C (zh) * 2002-09-13 2008-06-11 莫克斯泰克公司 辐射窗及其制造方法
JP2005003564A (ja) 2003-06-13 2005-01-06 Ushio Inc 電子ビーム管および電子ビーム取り出し用窓
CN101253419B (zh) * 2005-09-01 2011-07-27 上海丽恒光微电子科技有限公司 X射线探测器和x射线探测器制造方法
US7618906B2 (en) * 2005-11-17 2009-11-17 Oxford Instruments Analytical Oy Window membrane for detector and analyser devices, and a method for manufacturing a window membrane
US9305735B2 (en) 2007-09-28 2016-04-05 Brigham Young University Reinforced polymer x-ray window
FI20105626A0 (fi) * 2010-06-03 2010-06-03 Hs Foils Oy Erittäin ohut berylliumikkuna ja menetelmä sen valmistamiseksi
US8494119B2 (en) * 2010-06-18 2013-07-23 Oxford Instruments Analytical Oy Radiation window, and a method for its manufacturing
WO2013121078A1 (en) 2012-02-15 2013-08-22 Hs Foils Oy Method and arrangement for manufacturing a radiation window
WO2013138258A1 (en) * 2012-03-11 2013-09-19 Mark Larson Improved radiation window with support structure
DE102012107342B4 (de) * 2012-08-09 2019-10-10 Ketek Gmbh Röntgenstrahlungsdurchtrittsfenster für einen Strahlungsdetektor, Strahlungsdetektor mit einem solchen Röntgenstrahlungsdurchtrittsfenster sowie Verfahren zur Herstellung eines Röntgenstrahlungsdurchtrittsfensters
JP6355934B2 (ja) 2014-02-18 2018-07-11 株式会社堀場製作所 放射線透過窓、放射線検出器及び放射線検出装置
CN107112315B (zh) * 2015-01-16 2019-03-29 雫石诚 半导体器件及其制造方法
CN107430967A (zh) * 2015-01-22 2017-12-01 卢克赛尔公司 用于大面积x射线检测器窗口的改进的材料和结构
FI20155881A (fi) * 2015-11-26 2017-05-27 Hs Foils Oy Menetelmä säteilyikkunan valmistamiseksi ja säteilyikkuna
US10869506B2 (en) * 2016-11-30 2020-12-22 Shenzhen Ivps Technology Co., Ltd. Conductive contact structure, electrode assembly, power supply assembly and electronic cigarette having same
US20180061608A1 (en) * 2017-09-28 2018-03-01 Oxford Instruments X-ray Technology Inc. Window member for an x-ray device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03105300A (ja) * 1989-09-20 1991-05-02 Mitsubishi Electric Corp 軟ｘ線透過窓
JPH06289145A (ja) * 1993-03-24 1994-10-18 Sumitomo Electric Ind Ltd Ｘ線窓材及びその製造方法
US20140008538A1 (en) * 2010-09-21 2014-01-09 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften, E.V. Radiation entry window for a radiation detector
JP2012242381A (ja) * 2011-05-16 2012-12-10 Brigham Young Univ 炭素複合材料の支持構造
DE102014103546A1 (de) * 2014-02-10 2015-08-13 Ketek Gmbh Röntgenstrahlungsdurchtrittsfenster und Verfahren zur Herstellung desselben

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230019749A (ko) * 2021-08-02 2023-02-09 서울대학교산학협력단 샘플 고정용 장치 및 그 제조 방법
KR102616229B1 (ko) 2021-08-02 2023-12-20 서울대학교산학협력단 샘플 고정용 장치 및 그 제조 방법

Also Published As

Publication number Publication date
US10943756B2 (en) 2021-03-09
CN110192124A (zh) 2019-08-30
CN110192124B (zh) 2023-07-25
WO2018134480A1 (en) 2018-07-26
US20190355539A1 (en) 2019-11-21
GB201910264D0 (en) 2019-09-04
DE112018000422B4 (de) 2022-06-30
GB2573073B (en) 2022-04-13
GB2573073A (en) 2019-10-23
DE112018000422T5 (de) 2019-10-24
FI20175037A7 (fi) 2018-02-06
FI127409B (en) 2018-05-15

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