FI127409B - radiation window - Google Patents
radiation window Download PDFInfo
- Publication number
- FI127409B FI127409B FI20175037A FI20175037A FI127409B FI 127409 B FI127409 B FI 127409B FI 20175037 A FI20175037 A FI 20175037A FI 20175037 A FI20175037 A FI 20175037A FI 127409 B FI127409 B FI 127409B
- Authority
- FI
- Finland
- Prior art keywords
- layer
- silicon wafer
- window
- silicon
- window layer
- Prior art date
Links
- 230000005855 radiation Effects 0.000 title claims description 25
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 126
- 239000010703 silicon Substances 0.000 claims abstract description 126
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 125
- 238000000034 method Methods 0.000 claims abstract description 55
- 238000005530 etching Methods 0.000 claims abstract description 26
- 239000010410 layer Substances 0.000 claims description 211
- 235000012431 wafers Nutrition 0.000 claims description 113
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 50
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 36
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 20
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 20
- 239000002344 surface layer Substances 0.000 claims description 19
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 14
- 229910021389 graphene Inorganic materials 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 11
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 10
- 229910052782 aluminium Inorganic materials 0.000 claims description 10
- 239000000377 silicon dioxide Substances 0.000 claims description 7
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 5
- 229920000642 polymer Polymers 0.000 claims description 5
- 239000002296 pyrolytic carbon Substances 0.000 claims description 5
- -1 methyl carbon nitrides Chemical class 0.000 claims description 4
- 229910052718 tin Inorganic materials 0.000 claims description 4
- 229910003465 moissanite Inorganic materials 0.000 claims description 3
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims 1
- 229910004298 SiO 2 Inorganic materials 0.000 claims 1
- 229910010413 TiO 2 Inorganic materials 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 239000004411 aluminium Substances 0.000 description 7
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 6
- 229910052681 coesite Inorganic materials 0.000 description 6
- 229910052906 cristobalite Inorganic materials 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 235000012239 silicon dioxide Nutrition 0.000 description 6
- 229910052682 stishovite Inorganic materials 0.000 description 6
- 229910052905 tridymite Inorganic materials 0.000 description 6
- 238000000151 deposition Methods 0.000 description 5
- 230000003595 spectral effect Effects 0.000 description 4
- BSYNRYMUTXBXSQ-UHFFFAOYSA-N Aspirin Chemical compound CC(=O)OC1=CC=CC=C1C(O)=O BSYNRYMUTXBXSQ-UHFFFAOYSA-N 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 3
- 101000836150 Homo sapiens Transforming acidic coiled-coil-containing protein 3 Proteins 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 102100027048 Transforming acidic coiled-coil-containing protein 3 Human genes 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 230000004936 stimulating effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000004876 x-ray fluorescence Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J47/00—Tubes for determining the presence, intensity, density or energy of radiation or particles
- H01J47/001—Details
- H01J47/002—Vessels or containers
- H01J47/004—Windows permeable to X-rays, gamma-rays, or particles
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T7/00—Details of radiation-measuring instruments
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
- B32B38/10—Removing layers, or parts of layers, mechanically or chemically
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/16—Vessels; Containers; Shields associated therewith
- H01J35/18—Windows
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
- H01J5/02—Vessels; Containers; Shields associated therewith; Vacuum locks
- H01J5/18—Windows permeable to X-rays, gamma-rays, or particles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
- H10F30/301—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices being sensitive to very short wavelength, e.g. being sensitive to X-rays, gamma-rays or corpuscular radiation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- High Energy & Nuclear Physics (AREA)
- Molecular Biology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Measurement Of Radiation (AREA)
- Solid State Image Pick-Up Elements (AREA)
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FI20175037A FI127409B (en) | 2017-01-18 | 2017-01-18 | radiation window |
| DE112018000422.8T DE112018000422B4 (de) | 2017-01-18 | 2018-01-17 | Strahlungsfenster |
| JP2019559402A JP2020507085A (ja) | 2017-01-18 | 2018-01-17 | 放射線窓 |
| PCT/FI2018/050034 WO2018134480A1 (en) | 2017-01-18 | 2018-01-17 | Radiation window |
| CN201880007470.7A CN110192124B (zh) | 2017-01-18 | 2018-01-17 | 辐射窗口 |
| GB1910264.9A GB2573073B (en) | 2017-01-18 | 2018-01-17 | Radiation window |
| US16/478,134 US10943756B2 (en) | 2017-01-18 | 2018-01-17 | Radiation window |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FI20175037A FI127409B (en) | 2017-01-18 | 2017-01-18 | radiation window |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FI20175037A7 FI20175037A7 (fi) | 2018-02-06 |
| FI127409B true FI127409B (en) | 2018-05-15 |
Family
ID=61017944
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FI20175037A FI127409B (en) | 2017-01-18 | 2017-01-18 | radiation window |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US10943756B2 (enExample) |
| JP (1) | JP2020507085A (enExample) |
| CN (1) | CN110192124B (enExample) |
| DE (1) | DE112018000422B4 (enExample) |
| FI (1) | FI127409B (enExample) |
| GB (1) | GB2573073B (enExample) |
| WO (1) | WO2018134480A1 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10991540B2 (en) * | 2018-07-06 | 2021-04-27 | Moxtek, Inc. | Liquid crystal polymer for mounting x-ray window |
| FI130065B (en) | 2019-03-27 | 2023-01-13 | Oxford Instruments Tech Oy | Radiant window manufacturing method and radiant window structure |
| JP7429422B2 (ja) * | 2020-01-08 | 2024-02-08 | 国立大学法人東海国立大学機構 | グラフェン層とアルミ層を備えるフィルムおよびその製造方法 |
| KR102616229B1 (ko) * | 2021-08-02 | 2023-12-20 | 서울대학교산학협력단 | 샘플 고정용 장치 및 그 제조 방법 |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03105300A (ja) * | 1989-09-20 | 1991-05-02 | Mitsubishi Electric Corp | 軟ｘ線透過窓 |
| JPH0786560B2 (ja) * | 1989-11-29 | 1995-09-20 | 日本電気株式会社 | Ｘ―線透過窓の製造方法 |
| JP3026284B2 (ja) * | 1990-09-18 | 2000-03-27 | 住友電気工業株式会社 | Ｘ線窓材とその製造方法 |
| JPH06289145A (ja) * | 1993-03-24 | 1994-10-18 | Sumitomo Electric Ind Ltd | Ｘ線窓材及びその製造方法 |
| JP3731251B2 (ja) | 1996-06-27 | 2006-01-05 | 株式会社ニコン | 多層膜ｘ線ハーフミラーの製造方法 |
| US6261943B1 (en) * | 2000-02-08 | 2001-07-17 | Nec Research Institute, Inc. | Method for fabricating free-standing thin metal films |
| JP2005539351A (ja) * | 2002-09-13 | 2005-12-22 | モックステック・インコーポレーテッド | 放射窓及びその製造方法 |
| JP2005003564A (ja) | 2003-06-13 | 2005-01-06 | Ushio Inc | 電子ビーム管および電子ビーム取り出し用窓 |
| CN101253419B (zh) * | 2005-09-01 | 2011-07-27 | 上海丽恒光微电子科技有限公司 | X射线探测器和x射线探测器制造方法 |
| US7618906B2 (en) * | 2005-11-17 | 2009-11-17 | Oxford Instruments Analytical Oy | Window membrane for detector and analyser devices, and a method for manufacturing a window membrane |
| US9305735B2 (en) | 2007-09-28 | 2016-04-05 | Brigham Young University | Reinforced polymer x-ray window |
| FI20105626A0 (fi) * | 2010-06-03 | 2010-06-03 | Hs Foils Oy | Erittäin ohut berylliumikkuna ja menetelmä sen valmistamiseksi |
| US8494119B2 (en) * | 2010-06-18 | 2013-07-23 | Oxford Instruments Analytical Oy | Radiation window, and a method for its manufacturing |
| DE102010046100A1 (de) * | 2010-09-21 | 2012-03-22 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Strahlungseintrittsfenster für einen Strahlungsdetektor |
| US8989354B2 (en) * | 2011-05-16 | 2015-03-24 | Brigham Young University | Carbon composite support structure |
| EP2817818B1 (en) * | 2012-02-15 | 2017-05-31 | HS Foils OY | Method and arrangement for manufacturing a radiation window |
| WO2013138258A1 (en) * | 2012-03-11 | 2013-09-19 | Mark Larson | Improved radiation window with support structure |
| DE102012107342B4 (de) * | 2012-08-09 | 2019-10-10 | Ketek Gmbh | Röntgenstrahlungsdurchtrittsfenster für einen Strahlungsdetektor, Strahlungsdetektor mit einem solchen Röntgenstrahlungsdurchtrittsfenster sowie Verfahren zur Herstellung eines Röntgenstrahlungsdurchtrittsfensters |
| DE102014103546A1 (de) * | 2014-02-10 | 2015-08-13 | Ketek Gmbh | Röntgenstrahlungsdurchtrittsfenster und Verfahren zur Herstellung desselben |
| JP6355934B2 (ja) | 2014-02-18 | 2018-07-11 | 株式会社堀場製作所 | 放射線透過窓、放射線検出器及び放射線検出装置 |
| US10468383B2 (en) * | 2015-01-16 | 2019-11-05 | Makoto Shizukuishi | Semiconductor device and manufacturing method thereof |
| CN107430967A (zh) * | 2015-01-22 | 2017-12-01 | 卢克赛尔公司 | 用于大面积x射线检测器窗口的改进的材料和结构 |
| FI20155881A7 (fi) * | 2015-11-26 | 2017-05-27 | Hs Foils Oy | Menetelmä säteilyikkunan valmistamiseksi ja säteilyikkuna |
| US10869506B2 (en) * | 2016-11-30 | 2020-12-22 | Shenzhen Ivps Technology Co., Ltd. | Conductive contact structure, electrode assembly, power supply assembly and electronic cigarette having same |
| US20180061608A1 (en) * | 2017-09-28 | 2018-03-01 | Oxford Instruments X-ray Technology Inc. | Window member for an x-ray device |
-
2017
- 2017-01-18 FI FI20175037A patent/FI127409B/en active IP Right Grant
-
2018
- 2018-01-17 US US16/478,134 patent/US10943756B2/en active Active
- 2018-01-17 DE DE112018000422.8T patent/DE112018000422B4/de active Active
- 2018-01-17 JP JP2019559402A patent/JP2020507085A/ja active Pending
- 2018-01-17 CN CN201880007470.7A patent/CN110192124B/zh active Active
- 2018-01-17 WO PCT/FI2018/050034 patent/WO2018134480A1/en not_active Ceased
- 2018-01-17 GB GB1910264.9A patent/GB2573073B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| DE112018000422T5 (de) | 2019-10-24 |
| US20190355539A1 (en) | 2019-11-21 |
| DE112018000422B4 (de) | 2022-06-30 |
| GB2573073B (en) | 2022-04-13 |
| GB2573073A (en) | 2019-10-23 |
| CN110192124A (zh) | 2019-08-30 |
| GB201910264D0 (en) | 2019-09-04 |
| FI20175037A7 (fi) | 2018-02-06 |
| WO2018134480A1 (en) | 2018-07-26 |
| US10943756B2 (en) | 2021-03-09 |
| JP2020507085A (ja) | 2020-03-05 |
| CN110192124B (zh) | 2023-07-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PC | Transfer of assignment of patent |
Owner name: OXFORD INSTRUMENTS TECHNOLOGIES OY |
|
| FG | Patent granted |
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