CN110164825A - 薄膜覆晶封装结构及其可挠性基板 - Google Patents
薄膜覆晶封装结构及其可挠性基板 Download PDFInfo
- Publication number
- CN110164825A CN110164825A CN201810339871.4A CN201810339871A CN110164825A CN 110164825 A CN110164825 A CN 110164825A CN 201810339871 A CN201810339871 A CN 201810339871A CN 110164825 A CN110164825 A CN 110164825A
- Authority
- CN
- China
- Prior art keywords
- groove
- base plate
- flexible base
- bending part
- line layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000009975 flexible effect Effects 0.000 title claims abstract description 64
- 239000012528 membrane Substances 0.000 title claims abstract description 33
- 238000005452 bending Methods 0.000 claims abstract description 82
- 239000010410 layer Substances 0.000 claims description 46
- 239000011241 protective layer Substances 0.000 claims description 32
- 239000000084 colloidal system Substances 0.000 claims description 10
- 238000012856 packing Methods 0.000 claims description 9
- 238000000608 laser ablation Methods 0.000 claims description 5
- 238000004806 packaging method and process Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 6
- 238000002679 ablation Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/4985—Flexible insulating substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/538—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
- H01L23/5387—Flexible insulating substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/13—Mountings, e.g. non-detachable insulating substrates characterised by the shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/14—Mountings, e.g. non-detachable insulating substrates characterised by the material or its electrical properties
- H01L23/142—Metallic substrates having insulating layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3157—Partial encapsulation or coating
- H01L23/3185—Partial encapsulation or coating the coating covering also the sidewalls of the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49838—Geometry or layout
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/562—Protection against mechanical damage
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L24/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/73—Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/16227—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29099—Material
- H01L2224/2919—Material with a principal constituent of the material being a polymer, e.g. polyester, phenolic based polymer, epoxy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/3201—Structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/3205—Shape
- H01L2224/32057—Shape in side view
- H01L2224/32058—Shape in side view being non uniform along the layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32104—Disposition relative to the bonding area, e.g. bond pad
- H01L2224/32105—Disposition relative to the bonding area, e.g. bond pad the layer connector connecting bonding areas being not aligned with respect to each other
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32104—Disposition relative to the bonding area, e.g. bond pad
- H01L2224/32106—Disposition relative to the bonding area, e.g. bond pad the layer connector connecting one bonding area to at least two respective bonding areas
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73201—Location after the connecting process on the same surface
- H01L2224/73203—Bump and layer connectors
- H01L2224/73204—Bump and layer connectors the bump connector being embedded into the layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/8138—Bonding interfaces outside the semiconductor or solid-state body
- H01L2224/81399—Material
- H01L2224/814—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/81438—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/81447—Copper [Cu] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L24/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L24/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L24/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
- H01L2924/141—Analog devices
- H01L2924/1426—Driver
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/1511—Structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/1515—Shape
- H01L2924/15153—Shape the die mounting substrate comprising a recess for hosting the device
- H01L2924/15155—Shape the die mounting substrate comprising a recess for hosting the device the shape of the recess being other than a cuboid
- H01L2924/15156—Side view
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Geometry (AREA)
- Structure Of Printed Boards (AREA)
- Wire Bonding (AREA)
- Structures For Mounting Electric Components On Printed Circuit Boards (AREA)
Abstract
一种薄膜覆晶封装结构具有芯片及可挠性基板,该可挠性基板具有薄膜及线路层,该线路层形成于该薄膜的第一表面并电性连接该芯片,至少一个凹槽凹设于该薄膜的第二表面,当该可挠性基板与外部电子元件接合时,会被弯折而形成多个平板部及至少一个弯折部,该弯折部位于该些平板部之间,其中该凹槽位于该弯折部,可避免该可挠性基板的该弯折部断裂。
Description
技术领域
本发明关于一种薄膜覆晶封装结构,特别是一种可避免因弯折导致断裂的薄膜覆晶封装结构。
背景技术
驱动I C为消费电子产品显示器的重要元件,其多以薄膜覆晶封装(Chip OnFilm,COF)或芯片载体封装(Tape Carrier Package,TCP)技术进行封装,以热压合方式使芯片上的凸块与软性电路基板的内引脚接合,而位于软性电路基板两端的外引脚分别与显示器面板及控制信号的电路板接合。由于显示器已逐步朝向薄型化及全荧幕方向发展,软性电路基板接合显示器面板及电路板时必须弯折以符合配置需求,然而位于软性电路基板弯折处的元件容易受弯曲应力影响而损坏或断裂,因此必须寻求解决方案以有效减少弯曲应力的影响。
发明内容
本发明的目的在于提供一种薄膜覆晶封装结构,其包含芯片及可挠性基板,该可挠性基板具有薄膜及线路层,该薄膜具有第一表面及相对于该第一表面的第二表面,该线路层形成于该第一表面并电性连接该芯片,至少一个凹槽凹设于该第二表面,该凹槽具有槽底面,其中该可挠性基板以位于该第一表面的该线路层与外部电子元件接合时,该可挠性基板被弯折而形成有多个平板部及至少一个弯折部,该弯折部位于该些平板部之间,该凹槽位于该弯折部。
所述的薄膜覆晶封装结构,其中该凹槽是由激光烧蚀该薄膜所形成。
所述的薄膜覆晶封装结构,其中该槽底面与该第一表面之间具有厚度,该厚度不小于6μm。
所述的薄膜覆晶封装结构,其中该厚度介于6-20μm之间。
所述的薄膜覆晶封装结构,其中该凹槽位于该弯折部的外缘。
所述的薄膜覆晶封装结构,其中该可挠性基板另具有保护层,该保护层覆盖该第一表面及该线路层,该线路层的一部分位于该保护层及该凹槽之间。
所述的薄膜覆晶封装结构,其中该线路层的一部分位于该芯片及该凹槽之间。
所述的薄膜覆晶封装结构,其中该凹槽的宽度不小于该芯片的宽度。
所述的薄膜覆晶封装结构,其另包含封装胶体,该封装胶体填充于该芯片及该可挠性基板之间,该凹槽的宽度不小于该封装胶体的宽度。
所述的薄膜覆晶封装结构,其中该可挠性基板被弯折后形成有第一弯折部及第二弯折部,第一凹槽及第二凹槽凹设于该第二表面且分别位于该第一弯折部及该第二弯折部,该芯片位于该第一弯折部及该第二弯折部之间。
所述的薄膜覆晶封装结构,其中该可挠性基板另具有保护层,该保护层覆盖该第一表面及该线路层,该线路层的一部分位于该保护层及该第一凹槽之间,且该线路层的一部分位于该保护层及该第二凹槽之间。
本发明的另一目的在于提供一种可挠性基板,其包含薄膜及线路层,该薄膜具有第一表面及相对于该第一表面的第二表面,该线路层形成于该第一表面,至少一个凹槽凹设于该第二表面,该凹槽具有槽底面,其中该可挠性基板以位于该第一表面的该线路层与外部电子元件接合时,该可挠性基板被弯折而形成有多个平板部及至少一个弯折部,该弯折部位于该些平板部之间,该凹槽位于该弯折部。
所述的可挠性基板,其中该凹槽是由激光烧蚀该薄膜所形成。
所述的可挠性基板,其中该槽底面与该第一表面之间具有厚度,该厚度不小于6μm。
所述的可挠性基板,其中该厚度介于6-20μm之间。
所述的可挠性基板,其中该凹槽位于该弯折部的外缘。
所述的可挠性基板,其另包含保护层,该保护层覆盖该第一表面及该线路层,该线路层的一部分位于该保护层及该凹槽之间。
所述的可挠性基板,其中芯片设置区位于对应该凹槽的该第一表面。
所述的可挠性基板,其中该可挠性基板被弯折后形成有第一弯折部及第二弯折部,第一凹槽及第二凹槽凹设于该第二表面且分别位于该第一弯折部及该第二弯折部,芯片设置区位于该第一表面且位于该第一弯折部及该第二弯折部之间。
所述的可挠性基板,其另包含保护层,该保护层覆盖该第一表面及该线路层,该线路层的一部分位于该保护层及该第一凹槽之间,且该线路层的一部分位于该保护层及该第二凹槽之间。
本发明借由形成该凹槽以薄化位于该弯折部的该薄膜,因此可提升其可挠性,避免位于该可挠性基板的该线路层或其他元件受弯曲应力影响而损坏或断裂。
附图说明
图1:依据本发明的第一实施例,一种薄膜覆晶封装结构的剖视图。
图2:依据本发明的第一实施例,该薄膜覆晶封装结构与外部电子元件接合的示意图。
图3:依据本发明的第二实施例,一种薄膜覆晶封装结构的剖视图。
图4:依据本发明的第二实施例,该薄膜覆晶封装结构与外部电子元件接合的示意图。
图5:依据本发明的第三实施例,一种薄膜覆晶封装结构的剖视图。
图6:依据本发明的第三实施例,该薄膜覆晶封装结构与外部电子元件接合的示意图。
【主要元件符号说明】
100:芯片 110:主动面
120:凸块 200:可挠性基板
210:薄膜 211:第一表面
211a:芯片设置区 212:第二表面
220:线路层 230:保护层
240:平板部 240a:第一平板部
240b:第二平板部 240c:第三平板部
250:弯折部 250a:第一弯折部
250b:第二弯折部 260:凹槽
260a:第一凹槽 260b:第二凹槽
261:槽底面 300:封装胶体
A:薄膜覆晶封装结构 P1:显示器面板
P2:电路板
具体实施方式
请参阅图1,其为本发明的第一实施例,一种薄膜覆晶封装结构A包含有芯片100及可挠性基板200,较佳地,该薄膜覆晶封装结构A另包含封装胶体300,该封装胶体300填充于该芯片100及该可挠性基板200之间,该封装胶体300可为底部填充胶(underfill),但本发明不以此为限制。
请参阅图1,该可挠性基板200具有薄膜210及线路层220,该薄膜210具有第一表面211及相对于该第一表面211的第二表面212,该线路层220形成于该第一表面211并电性连接该芯片100,在该第一实施例中,该可挠性基板200另具有保护层230,该保护层230覆盖该第一表面211及该线路层220,较佳地,该薄膜210为聚酰亚胺薄膜(PI film),该线路层220为铜线路,该保护层230为防焊漆(solder resist),但本发明不以此为限制。
请参阅图1,芯片设置区211a位于该第一表面211,该保护层230显露该芯片设置区211a,该芯片100设置于该芯片设置区211a以电性连接该线路层220,其中该芯片100的主动面110设置有多个凸块120,该些凸块120用以电性连接该线路层220,该些凸块120的材质可为金、铜、银、镍或其合金。
请参阅图1和图2,当该可挠性基板200以位于该第一表面211的该线路层220与外部电子元件接合时,该可挠性基板200会被弯折而形成有多个平板部240及至少一个弯折部250,该弯折部250位于该些平板部240之间,在该第一实施例中,该可挠性基板200被弯折后形成第一平板部240a、第二平板部240b及该弯折部250,该弯折部250位于该第一平板部240a及该第二平板部240b之间,该第一平板部240a与显示器面板P1接合,该第二平板部240b与电路板P2接合,较佳地,该芯片设置区211a位于该第二平板部240b的内缘。
请参阅图1和图2,至少一个凹槽260凹设于该薄膜210的该第二表面212,该凹槽260是由激光烧蚀该薄膜210所形成,借由控制激光能量及烧蚀时间,使该凹槽260未贯穿该薄膜210且具有槽底面261,较佳地,使用波长介于355~1064nm的激光光束烧蚀该薄膜210以形成该凹槽260,该槽底面261与该薄膜210的该第一表面211之间具有厚度,该厚度为该槽底面261及该第一表面211之间的最短距离,其中该厚度不小于6μm,较佳地,该厚度介于6-20μm之间,在本实施例中,使用波长355nm的激光光束烧蚀该薄膜210,使该厚度实质上等于15μm。
请参阅图1和图2,该凹槽260形成于该可挠性基板200的预定弯折区域,因此当弯折该可挠性基板200时,该凹槽260会位于该弯折部250,因此相对位于该第一平板部240a及该第二平板部240b的该薄膜210,位于该弯折部250的该薄膜210较为薄化,较佳地,该可挠性基板200朝向该第一表面211方向弯折,使得该凹槽260位于该弯折部250的外缘,而该线路层220的一部分位于该保护层230及该凹槽260之间,因此该凹槽260可避免位于该弯折部250的该线路层220及该保护层230受弯曲应力影响而损坏或断裂。
请参阅图3和图4,其为本发明的第二实施例,该第二实施例与该第一实施例的差异在于该芯片设置区211a的位置,在该第二实施例中,该芯片设置区211a位于该弯折部250,即该芯片设置区211a位于对应该凹槽260的该第一表面211上,而该线路层220的一部分位于该芯片100及该凹槽260之间,由于填充于该芯片100及该可挠性基板200之间的该封装胶体300会导致应力集中于该弯折部250,因此于相同方向,该凹槽260的宽度不小于该芯片100及该封装胶体300的宽度,使该凹槽260的形成范围完全涵盖该芯片100及该封装胶体300,以避免该芯片100因该弯折部250及该封装胶体300所造成的应力而脱落损坏。
请参阅图5和图6,其为本发明的第三实施例,该第三实施例与该第一实施例的差异在于该可挠性基板200被弯折后形成有该第一平板部240a、该第二平板部240b、第三平板部240c、第一弯折部250a及第二弯折部250b,该第一弯折部250a位于该第一平板部240a及该第三平板部240c之间,该第二弯折部250b位于该第二平板部240b及该第三平板部240c之间,在该第三实施例中,第一凹槽260a及第二凹槽260b凹设于该薄膜210的该第二表面212,且当该可挠性基板200被弯折时,该第一凹槽260a及该第二凹槽260b分别位于该第一弯折部250a及该第二弯折部250b。
请参阅图6,较佳地,该第一凹槽260a及该第二凹槽260b分别位于该第一弯折部250a及该第二弯折部250b的外缘,由于该线路层220的一部分位于该保护层230及该第一凹槽260a之间,且该线路层220的一部分位于该保护层230及该第二凹槽260b之间,因此借由该第一凹槽260a及该第二凹槽260b的设置,可避免位于该第一弯折部250a及该第二弯折部250b的该线路层220及该保护层230因应力而导致剥离的情形发生。
请参阅图5和图6,在该第三实施例中,该芯片设置区211a位于该第三平板部240c的该第一表面211且位于该第一弯折部250a及该第二弯折部250b之间,因此设置于该第三平板部240c的该芯片100亦位于该第一弯折部250a及该第二弯折部250b之间。
由于该芯片100的硬度较高,位于该芯片设置区211a的该薄膜210不会因该可挠性基板200被弯折而弯曲,使得该可挠性基板200于该第一弯折部250a及该第二弯折部250b之间形成该第三平板区240c,此外,由于无须薄化位于该第三平板区240c的该薄膜210,因此该第三平板部240c可提供良好支撑力,以避免该芯片100脱离该可挠性基板200。
本发明于该可挠性基板200的该弯折部250形成该凹槽260,以薄化位于该弯折部250的该薄膜210并提升其可挠性,可有效避免该可挠性基板200上的该线路层220、该保护层230或其他元件受弯曲应力影响而损坏或断裂。
以上所述,仅是本发明的较佳实施例而已,并非对本发明作任何形式上的限制,虽然本发明已以较佳实施例揭露如上,然而并非用以限定本发明,任何熟悉本专业的技术人员,在不脱离本发明技术方案范围内,当可利用上述揭示的技术内容作出些许更动或修饰为等同变化的等效实施例,但凡是未脱离本发明技术方案的内容,依据本发明的技术实质对以上实施例所作的任何简单修改、等同变化与修饰,均仍属于本发明技术方案的范围内。
Claims (20)
1.一种薄膜覆晶封装结构,其特征在于,其包含:
芯片;以及
可挠性基板,具有薄膜及线路层,该薄膜具有第一表面及相对于该第一表面的第二表面,该线路层形成于该第一表面并电性连接该芯片,至少一个凹槽凹设于该第二表面,该凹槽具有槽底面,其中该可挠性基板以位于该第一表面的该线路层与外部电子元件接合时,该可挠性基板被弯折而形成有多个平板部及至少一个弯折部,该弯折部位于该些平板部之间,该凹槽位于该弯折部。
2.如权利要求1所述的薄膜覆晶封装结构,其特征在于,其中该凹槽是由激光烧蚀该薄膜所形成。
3.如权利要求1所述的薄膜覆晶封装结构,其特征在于,其中该槽底面与该第一表面之间具有厚度,该厚度不小于6μm。
4.如权利要求3所述的薄膜覆晶封装结构,其特征在于,其中该厚度介于6-20μm之间。
5.如权利要求1所述的薄膜覆晶封装结构,其特征在于,其中该凹槽位于该弯折部的外缘。
6.如权利要求1所述的薄膜覆晶封装结构,其特征在于,其中该可挠性基板另具有保护层,该保护层覆盖该第一表面及该线路层,该线路层的一部分位于该保护层及该凹槽之间。
7.如权利要求1所述的薄膜覆晶封装结构,其特征在于,其中该线路层的一部分位于该芯片及该凹槽之间。
8.如权利要求7所述的薄膜覆晶封装结构,其特征在于,其中该凹槽的宽度不小于该芯片的宽度。
9.如权利要求7所述的薄膜覆晶封装结构,其特征在于,其另包含封装胶体,该封装胶体填充于该芯片及该可挠性基板之间,该凹槽的宽度不小于该封装胶体的宽度。
10.如权利要求1所述的薄膜覆晶封装结构,其特征在于,其中该可挠性基板被弯折后形成有第一弯折部及第二弯折部,第一凹槽及第二凹槽凹设于该第二表面且分别位于该第一弯折部及该第二弯折部,该芯片位于该第一弯折部及该第二弯折部之间。
11.如权利要求10所述的薄膜覆晶封装结构,其特征在于,其中该可挠性基板另具有保护层,该保护层覆盖该第一表面及该线路层,该线路层的一部分位于该保护层及该第一凹槽之间,且该线路层的一部分位于该保护层及该第二凹槽之间。
12.一种可挠性基板,其特征在于,其包含:
线路层;以及
薄膜,具有第一表面及相对于该第一表面的第二表面,该线路层形成于该第一表面,至少一个凹槽凹设于该第二表面,该凹槽具有槽底面,其中该可挠性基板以位于该第一表面的该线路层与外部电子元件接合时,该可挠性基板被弯折而形成有多个平板部及至少一个弯折部,该弯折部位于该些平板部之间,该凹槽位于该弯折部。
13.如权利要求12所述的可挠性基板,其特征在于,其中该凹槽是由激光烧蚀该薄膜所形成。
14.如权利要求12所述的可挠性基板,其特征在于,其中该槽底面与该第一表面之间具有厚度,该厚度不小于6μm。
15.如权利要求14所述的可挠性基板,其特征在于,其中该厚度介于6-20μm之间。
16.如权利要求12所述的可挠性基板,其特征在于,其中该凹槽位于该弯折部的外缘。
17.如权利要求12所述的可挠性基板,其特征在于,其另包含保护层,该保护层覆盖该第一表面及该线路层,该线路层的一部分位于该保护层及该凹槽之间。
18.如权利要求12所述的可挠性基板,其特征在于,其中芯片设置区位于对应该凹槽的该第一表面。
19.如权利要求12所述的可挠性基板,其特征在于,其中该可挠性基板被弯折后形成有第一弯折部及第二弯折部,第一凹槽及第二凹槽凹设于该第二表面且分别位于该第一弯折部及该第二弯折部,芯片设置区位于该第一表面且位于该第一弯折部及该第二弯折部之间。
20.如权利要求19所述的可挠性基板,其特征在于,其另包含保护层,该保护层覆盖该第一表面及该线路层,该线路层的一部分位于该保护层及该第一凹槽之间,且该线路层的一部分位于该保护层及该第二凹槽之间。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW107105137 | 2018-02-13 | ||
TW107105137A TWI646637B (zh) | 2018-02-13 | 2018-02-13 | 薄膜覆晶封裝結構及其可撓性基板 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN110164825A true CN110164825A (zh) | 2019-08-23 |
CN110164825B CN110164825B (zh) | 2020-10-20 |
Family
ID=65803664
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201810339871.4A Active CN110164825B (zh) | 2018-02-13 | 2018-04-16 | 薄膜覆晶封装结构及其可挠性基板 |
Country Status (5)
Country | Link |
---|---|
US (1) | US10580729B2 (zh) |
JP (1) | JP6653345B2 (zh) |
KR (1) | KR102027393B1 (zh) |
CN (1) | CN110164825B (zh) |
TW (1) | TWI646637B (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110480156A (zh) * | 2019-09-11 | 2019-11-22 | 深圳市集银科技有限公司 | Cof折弯方法及切割机 |
CN111341737A (zh) * | 2020-04-14 | 2020-06-26 | 武汉华星光电技术有限公司 | 一种封装结构和显示装置 |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020177079A (ja) * | 2019-04-16 | 2020-10-29 | 株式会社ジャパンディスプレイ | 表示装置、フレキシブル配線基板、及び、表示装置の製造方法 |
TWI724807B (zh) * | 2019-07-24 | 2021-04-11 | 友達光電股份有限公司 | 可撓式裝置 |
KR20210073147A (ko) * | 2019-12-10 | 2021-06-18 | 엘지디스플레이 주식회사 | 표시장치 |
KR20210157945A (ko) * | 2020-06-22 | 2021-12-30 | 삼성디스플레이 주식회사 | 표시장치 |
TWI761962B (zh) * | 2020-09-21 | 2022-04-21 | 友達光電股份有限公司 | 顯示面板 |
CN117316954A (zh) * | 2022-06-22 | 2023-12-29 | 群创光电股份有限公司 | 可挠曲电子装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20130148312A1 (en) * | 2011-12-12 | 2013-06-13 | Sang-uk Han | Tape wiring substrate and chip-on-film package including the same |
CN106158817A (zh) * | 2015-05-13 | 2016-11-23 | 南茂科技股份有限公司 | 薄膜覆晶封装结构及封装模块 |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03174756A (ja) | 1990-03-27 | 1991-07-29 | Sanyo Electric Co Ltd | 混成集積回路装置 |
JPH044773U (zh) | 1990-04-26 | 1992-01-16 | ||
JPH0462885A (ja) | 1990-06-25 | 1992-02-27 | Seiko Epson Corp | フレキシブル回路基板 |
JP2538112Y2 (ja) * | 1991-05-21 | 1997-06-11 | シャープ株式会社 | 実装基板 |
US6714625B1 (en) * | 1992-04-08 | 2004-03-30 | Elm Technology Corporation | Lithography device for semiconductor circuit pattern generation |
JPH08186336A (ja) * | 1994-12-28 | 1996-07-16 | Mitsubishi Electric Corp | 回路基板、駆動回路モジュール及びそれを用いた液晶表示装置並びにそれらの製造方法 |
US5847356A (en) | 1996-08-30 | 1998-12-08 | Hewlett-Packard Company | Laser welded inkjet printhead assembly utilizing a combination laser and fiber optic push connect system |
US6140707A (en) | 1998-05-07 | 2000-10-31 | 3M Innovative Properties Co. | Laminated integrated circuit package |
JP3998878B2 (ja) * | 1999-11-25 | 2007-10-31 | シャープ株式会社 | 半導体装置、半導体装置の製造方法、およびパッケージの製造方法 |
US6480359B1 (en) | 2000-05-09 | 2002-11-12 | 3M Innovative Properties Company | Hard disk drive suspension with integral flexible circuit |
JP2002319781A (ja) | 2001-04-20 | 2002-10-31 | Fujikura Ltd | 電子部品実装モジュール |
JP2003116067A (ja) | 2001-10-09 | 2003-04-18 | Mitsubishi Electric Corp | 固体撮像装置の製造方法 |
JP2005303172A (ja) | 2004-04-15 | 2005-10-27 | Nitto Denko Corp | 配線回路基板 |
JP4591168B2 (ja) | 2005-04-14 | 2010-12-01 | パナソニック株式会社 | 立体構成電子回路ユニットとその製造方法 |
KR20100029629A (ko) | 2008-09-08 | 2010-03-17 | 삼성전자주식회사 | 방열용 접착층을 구비하는 테이프 패키지 및 이를 구비하는디스플레이 장치 |
US9176535B2 (en) * | 2011-06-03 | 2015-11-03 | Microsoft Technology Licensing, Llc | Flexible display flexure assembly |
US9419065B2 (en) * | 2012-08-07 | 2016-08-16 | Apple Inc. | Flexible displays |
JP5720862B2 (ja) * | 2012-12-29 | 2015-05-20 | 株式会社村田製作所 | 回路基板 |
US9516743B2 (en) * | 2013-02-27 | 2016-12-06 | Apple Inc. | Electronic device with reduced-stress flexible display |
US20150085456A1 (en) * | 2013-03-05 | 2015-03-26 | Ronald Steven Cok | Imprinted multi-level micro-wire circuit structure |
US9690032B1 (en) * | 2013-03-12 | 2017-06-27 | Flex Lighting Ii Llc | Lightguide including a film with one or more bends |
TWI692272B (zh) * | 2014-05-28 | 2020-04-21 | 美商飛利斯有限公司 | 在多數表面上具有可撓性電子組件之裝置 |
KR102319543B1 (ko) * | 2014-10-22 | 2021-11-02 | 삼성디스플레이 주식회사 | 롤러블 표시 장치, 롤러블 표시 장치의 제조 방법 및 플렉서블 표시 장치 |
US10304905B2 (en) * | 2015-02-20 | 2019-05-28 | Kaneka Corporation | Light-emitting module |
KR102415324B1 (ko) * | 2015-05-04 | 2022-06-30 | 삼성디스플레이 주식회사 | 표시 장치 |
-
2018
- 2018-02-13 TW TW107105137A patent/TWI646637B/zh active
- 2018-04-13 US US15/952,814 patent/US10580729B2/en active Active
- 2018-04-16 CN CN201810339871.4A patent/CN110164825B/zh active Active
- 2018-04-17 JP JP2018078830A patent/JP6653345B2/ja active Active
- 2018-04-19 KR KR1020180045458A patent/KR102027393B1/ko active IP Right Grant
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20130148312A1 (en) * | 2011-12-12 | 2013-06-13 | Sang-uk Han | Tape wiring substrate and chip-on-film package including the same |
CN106158817A (zh) * | 2015-05-13 | 2016-11-23 | 南茂科技股份有限公司 | 薄膜覆晶封装结构及封装模块 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110480156A (zh) * | 2019-09-11 | 2019-11-22 | 深圳市集银科技有限公司 | Cof折弯方法及切割机 |
CN111341737A (zh) * | 2020-04-14 | 2020-06-26 | 武汉华星光电技术有限公司 | 一种封装结构和显示装置 |
Also Published As
Publication number | Publication date |
---|---|
TW201935620A (zh) | 2019-09-01 |
TWI646637B (zh) | 2019-01-01 |
KR20190098001A (ko) | 2019-08-21 |
KR102027393B1 (ko) | 2019-10-01 |
US20190252298A1 (en) | 2019-08-15 |
JP6653345B2 (ja) | 2020-02-26 |
US10580729B2 (en) | 2020-03-03 |
JP2019140365A (ja) | 2019-08-22 |
CN110164825B (zh) | 2020-10-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN110164825A (zh) | 薄膜覆晶封装结构及其可挠性基板 | |
US9760754B2 (en) | Printed circuit board assembly forming enhanced fingerprint module | |
US20180336393A1 (en) | Fingerprint sensing unit | |
JP2002373969A (ja) | 半導体装置及び半導体装置の製造方法 | |
JPH08186151A (ja) | 半導体装置及びその製造方法 | |
JP2005310905A (ja) | 電子部品の接続構造 | |
CN103972201A (zh) | 封装结构与显示模组 | |
TW515011B (en) | Substrate for semiconductor device, semiconductor-chip mounting substrate, semiconductor device and its manufacturing method, circuit board, and electronic machine | |
US9349940B2 (en) | Semiconductor device and method of manufacturing the same | |
CN105742223B (zh) | 电子器件和制造电子器件的方法 | |
CN105097761B (zh) | 芯片封装结构 | |
JP2008140400A (ja) | 電子タグおよびその製造方法 | |
JP5078631B2 (ja) | 半導体装置 | |
TWI415227B (zh) | 晶片封裝結構以及導線架構 | |
JP2006245396A (ja) | 半導体装置及びその製造方法 | |
CN105742257B (zh) | 电子器件和制造电子器件的方法 | |
JP2005116881A (ja) | 半導体装置及びその製造方法、回路基板並びに電子機器 | |
US9633297B2 (en) | IC module, IC card, and IC module substrate | |
JP2000174176A (ja) | Icモジュール用のリードフレーム、及びそれを用いたicモジュール、並びにicカード | |
JP2008269648A (ja) | 接触型非接触型共用icカード | |
US20060108674A1 (en) | Package structure of memory card and packaging method for the structure | |
CN105742253B (zh) | 安装影像传感器的印刷电路板总成 | |
JP4225312B2 (ja) | 半導体装置 | |
JP2011138362A (ja) | Icカード | |
TW200830512A (en) | Film type package for fingerprint sensor |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |