CN110133335A - 探针、探测单元以及检查装置 - Google Patents

探针、探测单元以及检查装置 Download PDF

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Publication number
CN110133335A
CN110133335A CN201910102581.2A CN201910102581A CN110133335A CN 110133335 A CN110133335 A CN 110133335A CN 201910102581 A CN201910102581 A CN 201910102581A CN 110133335 A CN110133335 A CN 110133335A
Authority
CN
China
Prior art keywords
probe
mentioned
sectional shape
fitting portion
supporting part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910102581.2A
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English (en)
Chinese (zh)
Inventor
小川原崇裕
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hioki EE Corp
Original Assignee
Hioki EE Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hioki EE Corp filed Critical Hioki EE Corp
Publication of CN110133335A publication Critical patent/CN110133335A/zh
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G01R1/06727—Cantilever beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G01R1/06738—Geometry aspects related to tip portion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Measuring Leads Or Probes (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
CN201910102581.2A 2018-02-09 2019-02-01 探针、探测单元以及检查装置 Pending CN110133335A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018022122A JP7032167B2 (ja) 2018-02-09 2018-02-09 プローブピン、プローブユニットおよび検査装置
JP2018-022122 2018-02-09

Publications (1)

Publication Number Publication Date
CN110133335A true CN110133335A (zh) 2019-08-16

Family

ID=67568539

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910102581.2A Pending CN110133335A (zh) 2018-02-09 2019-02-01 探针、探测单元以及检查装置

Country Status (4)

Country Link
JP (1) JP7032167B2 (ko)
KR (1) KR102545415B1 (ko)
CN (1) CN110133335A (ko)
TW (1) TWI821243B (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112730925B (zh) * 2019-10-14 2024-03-19 台湾中华精测科技股份有限公司 交错式探针卡
TWI709752B (zh) * 2019-10-14 2020-11-11 中華精測科技股份有限公司 交錯式探針卡

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1441254A (zh) * 2002-02-28 2003-09-10 株式会社阿迪泰克工程 轨迹测定装置
CN1934453A (zh) * 2004-03-24 2007-03-21 泰克诺探头公司 用于测试头的接触探针
JP2007218675A (ja) * 2006-02-15 2007-08-30 Fujitsu Ltd プローブ及びプローブの製造方法
JP2011138637A (ja) * 2009-12-25 2011-07-14 Smk Corp レセプタクルとコンタクトプローブの嵌合方法及びこの方法に使用されるコンタクトプローブ
CN103226155A (zh) * 2012-01-26 2013-07-31 日本电产理德株式会社 探针及连接夹具
CN103238077A (zh) * 2010-11-29 2013-08-07 株式会社精研 接触检查用工具
CN104297535A (zh) * 2013-07-16 2015-01-21 日置电机株式会社 探针单元以及基板检查装置
CN105319405A (zh) * 2014-07-29 2016-02-10 日置电机株式会社 探针单元、探针单元制造方法及检查方法

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JP4308371B2 (ja) 1999-07-02 2009-08-05 株式会社ヨコオ コンタクトプローブ及びプローブ装置
JP2001041978A (ja) * 1999-07-30 2001-02-16 Japan Electronic Materials Corp プローブ及びこれを用いたプローブカード
JP4527267B2 (ja) * 2000-11-13 2010-08-18 東京エレクトロン株式会社 コンタクタの製造方法
JP3592279B2 (ja) * 2001-09-21 2004-11-24 日本電産リード株式会社 基板検査用プローブ及びそれを用いた基板検査装置
JP2003287552A (ja) * 2002-03-28 2003-10-10 Ns:Kk プロ−ブ針及びその研磨方法
KR100851088B1 (ko) * 2004-03-24 2008-08-08 테크노프로브 에스.피.에이. 시험용 헤드의 접촉 프로브
KR20050115354A (ko) * 2004-06-03 2005-12-07 주식회사 한샘디지텍 인쇄회로기판의 통전검사용 프로브장치에 있어서의테스트핀 구조
AT504288B1 (de) 2005-04-12 2010-04-15 Technoprobe Spa Prüfkopf mit vertikalen prüfnadeln für integrierte halbleitergeräte
WO2007041585A1 (en) * 2005-09-30 2007-04-12 Sv Probe Pte Ltd Cantilever probe structure for a probe card assembly
JP4831614B2 (ja) 2006-08-15 2011-12-07 株式会社ヨコオ ケルビン検査用治具
KR100830352B1 (ko) * 2006-12-21 2008-05-19 주식회사 파이컴 프로브 팁, 프로브 카드, 프로브 팁 제조 방법 및 프로브구조물 제조 방법
KR100885064B1 (ko) * 2007-05-31 2009-02-25 송광석 반도체소자 검사용 접촉체
DE102008023761B9 (de) * 2008-05-09 2012-11-08 Feinmetall Gmbh Elektrisches Kontaktelement zum Berührungskontaktieren von elektrischen Prüflingen sowie entsprechende Kontaktieranordnung
JP5968158B2 (ja) * 2012-08-10 2016-08-10 株式会社日本マイクロニクス コンタクトプローブ及びプローブカード
JP6000046B2 (ja) 2012-10-02 2016-09-28 日置電機株式会社 プローブユニットおよび検査装置
JP6062235B2 (ja) * 2012-12-26 2017-01-18 東京特殊電線株式会社 ２芯コンタクトプローブ、２芯コンタクトプローブ・ユニットおよび２芯コンタクトプローブの製造方法
JP6367249B2 (ja) * 2014-02-13 2018-08-01 日本発條株式会社 プローブユニット
JP6532755B2 (ja) 2014-07-29 2019-06-19 日置電機株式会社 プローブユニット、プローブユニット製造方法および検査方法
JP6502095B2 (ja) 2015-01-06 2019-04-17 日置電機株式会社 プローブユニットおよび検査装置
JP6610322B2 (ja) 2016-02-15 2019-11-27 オムロン株式会社 プローブピンおよびそれを用いた検査装置

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1441254A (zh) * 2002-02-28 2003-09-10 株式会社阿迪泰克工程 轨迹测定装置
CN1934453A (zh) * 2004-03-24 2007-03-21 泰克诺探头公司 用于测试头的接触探针
JP2007218675A (ja) * 2006-02-15 2007-08-30 Fujitsu Ltd プローブ及びプローブの製造方法
JP2011138637A (ja) * 2009-12-25 2011-07-14 Smk Corp レセプタクルとコンタクトプローブの嵌合方法及びこの方法に使用されるコンタクトプローブ
CN103238077A (zh) * 2010-11-29 2013-08-07 株式会社精研 接触检查用工具
CN103226155A (zh) * 2012-01-26 2013-07-31 日本电产理德株式会社 探针及连接夹具
CN104297535A (zh) * 2013-07-16 2015-01-21 日置电机株式会社 探针单元以及基板检查装置
CN105319405A (zh) * 2014-07-29 2016-02-10 日置电机株式会社 探针单元、探针单元制造方法及检查方法

Also Published As

Publication number Publication date
TWI821243B (zh) 2023-11-11
KR20190096810A (ko) 2019-08-20
KR102545415B1 (ko) 2023-06-20
JP7032167B2 (ja) 2022-03-08
JP2019138766A (ja) 2019-08-22
TW201935012A (zh) 2019-09-01

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