CN108627147B - 传感器元件控制装置、物理量传感器及其故障诊断方法 - Google Patents
传感器元件控制装置、物理量传感器及其故障诊断方法 Download PDFInfo
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- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
- G01C19/5614—Signal processing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
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- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
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- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5663—Manufacturing; Trimming; Mounting; Housings
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- G—PHYSICS
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- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
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- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
- G01C25/005—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass initial alignment, calibration or starting-up of inertial devices
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
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Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017-057137 | 2017-03-23 | ||
| JP2017057137A JP6828544B2 (ja) | 2017-03-23 | 2017-03-23 | センサー素子制御装置、物理量センサー、電子機器、移動体及び物理量センサーの故障診断方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108627147A CN108627147A (zh) | 2018-10-09 |
| CN108627147B true CN108627147B (zh) | 2023-08-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810177778.8A Active CN108627147B (zh) | 2017-03-23 | 2018-03-05 | 传感器元件控制装置、物理量传感器及其故障诊断方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US10731985B2 (enExample) |
| JP (1) | JP6828544B2 (enExample) |
| CN (1) | CN108627147B (enExample) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6972845B2 (ja) * | 2017-09-28 | 2021-11-24 | セイコーエプソン株式会社 | 物理量測定装置、電子機器及び移動体 |
| US11372093B2 (en) * | 2018-09-14 | 2022-06-28 | Fujifilm Sonosite, Inc. | Automated fault detection and correction in an ultrasound imaging system |
| GB2577483B (en) * | 2018-09-18 | 2022-06-08 | Cambridge Entpr Ltd | Inertial sensor and method of inertial sensing with tuneable mode coupling strength |
| EP3647741B1 (en) * | 2018-10-29 | 2022-08-03 | Melexis Bulgaria Ltd. | Sensor diagnostic device and method |
| JP7243352B2 (ja) * | 2019-03-22 | 2023-03-22 | セイコーエプソン株式会社 | センサー故障予知システム、センサー故障予知方法、物理量センサー、電子機器および移動体 |
| CN110081907B (zh) * | 2019-04-19 | 2021-01-01 | 北京航天发射技术研究所 | 一种用于定位瞄准系统的故障诊断方法和故障诊断装置 |
| JP7293839B2 (ja) * | 2019-04-23 | 2023-06-20 | セイコーエプソン株式会社 | 物理量検出回路、物理量センサー、電子機器、移動体及び物理量センサーの故障診断方法 |
| JP7243485B2 (ja) * | 2019-06-27 | 2023-03-22 | セイコーエプソン株式会社 | 物理量検出回路、物理量センサー、電子機器、移動体及び物理量センサーの故障診断方法 |
| JP7251385B2 (ja) | 2019-07-30 | 2023-04-04 | セイコーエプソン株式会社 | 振動デバイス、電子機器および移動体 |
| JP7375572B2 (ja) * | 2020-01-24 | 2023-11-08 | セイコーエプソン株式会社 | 物理量検出回路、物理量センサー、電子機器、移動体及び物理量センサーの故障診断方法 |
| WO2022239692A1 (ja) * | 2021-05-13 | 2022-11-17 | ローム株式会社 | 加速度センサ |
| US12416499B1 (en) * | 2022-12-27 | 2025-09-16 | Hrl Laboratories, Llc | Real-time adaptive tuning of gyroscopes via quadrature dithering |
| CN116358400A (zh) * | 2023-04-21 | 2023-06-30 | 王元西 | 一种高精度线性位移和角位移系统 |
| CN118981668B (zh) * | 2024-10-21 | 2025-01-24 | 南京凯奥思数据技术有限公司 | 一种便携式旋转类设备故障诊断仪及诊断方法 |
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| JPH07181042A (ja) * | 1993-12-22 | 1995-07-18 | Nissan Motor Co Ltd | 角速度センサの故障診断装置 |
| KR20050061705A (ko) * | 2003-12-18 | 2005-06-23 | 현담산업 주식회사 | 연료 펌프의 불량 진단 장치 및 방법 |
| JP2008175805A (ja) * | 2006-12-20 | 2008-07-31 | Epson Toyocom Corp | 振動ジャイロセンサ |
| WO2009125589A1 (ja) * | 2008-04-10 | 2009-10-15 | パナソニック株式会社 | 慣性力センサ |
| JP2010043962A (ja) * | 2008-08-13 | 2010-02-25 | Epson Toyocom Corp | 角速度検出回路、角速度検出装置及び角速度検出装置の故障診断方法 |
| JP2011257428A (ja) * | 2011-08-24 | 2011-12-22 | Seiko Epson Corp | 角速度測定方法および角速度測定装置の診断回路 |
| CN102803897A (zh) * | 2009-06-12 | 2012-11-28 | 精工恩琵希株式会社 | 物理量检测装置和物理量检测装置的控制方法、异常诊断系统和异常诊断方法 |
| KR101432786B1 (ko) * | 2013-11-14 | 2014-09-23 | 엠앤디테크놀로지 주식회사 | 모터의 고장진단방법 및 그 시스템 |
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| JP6465294B2 (ja) * | 2015-03-17 | 2019-02-06 | セイコーエプソン株式会社 | 駆動回路、振動デバイス、電子機器及び移動体 |
| WO2016166960A1 (ja) * | 2015-04-13 | 2016-10-20 | パナソニックＩｐマネジメント株式会社 | 駆動回路、物理量センサ及び電子機器 |
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| JP6972845B2 (ja) * | 2017-09-28 | 2021-11-24 | セイコーエプソン株式会社 | 物理量測定装置、電子機器及び移動体 |
-
2017
- 2017-03-23 JP JP2017057137A patent/JP6828544B2/ja active Active
-
2018
- 2018-03-05 CN CN201810177778.8A patent/CN108627147B/zh active Active
- 2018-03-19 US US15/924,793 patent/US10731985B2/en active Active
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| JPH07181042A (ja) * | 1993-12-22 | 1995-07-18 | Nissan Motor Co Ltd | 角速度センサの故障診断装置 |
| KR20050061705A (ko) * | 2003-12-18 | 2005-06-23 | 현담산업 주식회사 | 연료 펌프의 불량 진단 장치 및 방법 |
| JP2008175805A (ja) * | 2006-12-20 | 2008-07-31 | Epson Toyocom Corp | 振動ジャイロセンサ |
| WO2009125589A1 (ja) * | 2008-04-10 | 2009-10-15 | パナソニック株式会社 | 慣性力センサ |
| JP2010043962A (ja) * | 2008-08-13 | 2010-02-25 | Epson Toyocom Corp | 角速度検出回路、角速度検出装置及び角速度検出装置の故障診断方法 |
| CN102803897A (zh) * | 2009-06-12 | 2012-11-28 | 精工恩琵希株式会社 | 物理量检测装置和物理量检测装置的控制方法、异常诊断系统和异常诊断方法 |
| JP2011257428A (ja) * | 2011-08-24 | 2011-12-22 | Seiko Epson Corp | 角速度測定方法および角速度測定装置の診断回路 |
| KR101432786B1 (ko) * | 2013-11-14 | 2014-09-23 | 엠앤디테크놀로지 주식회사 | 모터의 고장진단방법 및 그 시스템 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20180274921A1 (en) | 2018-09-27 |
| JP6828544B2 (ja) | 2021-02-10 |
| JP2018159630A (ja) | 2018-10-11 |
| US10731985B2 (en) | 2020-08-04 |
| CN108627147A (zh) | 2018-10-09 |
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