JP6828544B2 - センサー素子制御装置、物理量センサー、電子機器、移動体及び物理量センサーの故障診断方法 - Google Patents

センサー素子制御装置、物理量センサー、電子機器、移動体及び物理量センサーの故障診断方法 Download PDF

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JP6828544B2
JP6828544B2 JP2017057137A JP2017057137A JP6828544B2 JP 6828544 B2 JP6828544 B2 JP 6828544B2 JP 2017057137 A JP2017057137 A JP 2017057137A JP 2017057137 A JP2017057137 A JP 2017057137A JP 6828544 B2 JP6828544 B2 JP 6828544B2
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signal
sensor element
detection
frequency
drive
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JP2018159630A5 (enExample
JP2018159630A (ja
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典仁 松川
典仁 松川
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Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2017057137A priority Critical patent/JP6828544B2/ja
Priority to CN201810177778.8A priority patent/CN108627147B/zh
Priority to US15/924,793 priority patent/US10731985B2/en
Publication of JP2018159630A publication Critical patent/JP2018159630A/ja
Publication of JP2018159630A5 publication Critical patent/JP2018159630A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5614—Signal processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5663—Manufacturing; Trimming; Mounting; Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
    • G01C25/005—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass initial alignment, calibration or starting-up of inertial devices

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Signal Processing (AREA)
  • Manufacturing & Machinery (AREA)
  • Gyroscopes (AREA)
JP2017057137A 2017-03-23 2017-03-23 センサー素子制御装置、物理量センサー、電子機器、移動体及び物理量センサーの故障診断方法 Active JP6828544B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2017057137A JP6828544B2 (ja) 2017-03-23 2017-03-23 センサー素子制御装置、物理量センサー、電子機器、移動体及び物理量センサーの故障診断方法
CN201810177778.8A CN108627147B (zh) 2017-03-23 2018-03-05 传感器元件控制装置、物理量传感器及其故障诊断方法
US15/924,793 US10731985B2 (en) 2017-03-23 2018-03-19 Sensor element control device, physical quantity sensor, electronic device, and fault diagnosis method of vehicle and physical quantity sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017057137A JP6828544B2 (ja) 2017-03-23 2017-03-23 センサー素子制御装置、物理量センサー、電子機器、移動体及び物理量センサーの故障診断方法

Publications (3)

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JP2018159630A JP2018159630A (ja) 2018-10-11
JP2018159630A5 JP2018159630A5 (enExample) 2020-03-05
JP6828544B2 true JP6828544B2 (ja) 2021-02-10

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US (1) US10731985B2 (enExample)
JP (1) JP6828544B2 (enExample)
CN (1) CN108627147B (enExample)

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JP6972845B2 (ja) * 2017-09-28 2021-11-24 セイコーエプソン株式会社 物理量測定装置、電子機器及び移動体
US11372093B2 (en) * 2018-09-14 2022-06-28 Fujifilm Sonosite, Inc. Automated fault detection and correction in an ultrasound imaging system
GB2577483B (en) * 2018-09-18 2022-06-08 Cambridge Entpr Ltd Inertial sensor and method of inertial sensing with tuneable mode coupling strength
EP3647741B1 (en) * 2018-10-29 2022-08-03 Melexis Bulgaria Ltd. Sensor diagnostic device and method
JP7243352B2 (ja) * 2019-03-22 2023-03-22 セイコーエプソン株式会社 センサー故障予知システム、センサー故障予知方法、物理量センサー、電子機器および移動体
CN110081907B (zh) * 2019-04-19 2021-01-01 北京航天发射技术研究所 一种用于定位瞄准系统的故障诊断方法和故障诊断装置
JP7293839B2 (ja) * 2019-04-23 2023-06-20 セイコーエプソン株式会社 物理量検出回路、物理量センサー、電子機器、移動体及び物理量センサーの故障診断方法
JP7243485B2 (ja) * 2019-06-27 2023-03-22 セイコーエプソン株式会社 物理量検出回路、物理量センサー、電子機器、移動体及び物理量センサーの故障診断方法
JP7251385B2 (ja) 2019-07-30 2023-04-04 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
JP7375572B2 (ja) * 2020-01-24 2023-11-08 セイコーエプソン株式会社 物理量検出回路、物理量センサー、電子機器、移動体及び物理量センサーの故障診断方法
WO2022239692A1 (ja) * 2021-05-13 2022-11-17 ローム株式会社 加速度センサ
US12416499B1 (en) * 2022-12-27 2025-09-16 Hrl Laboratories, Llc Real-time adaptive tuning of gyroscopes via quadrature dithering
CN116358400A (zh) * 2023-04-21 2023-06-30 王元西 一种高精度线性位移和角位移系统
CN118981668B (zh) * 2024-10-21 2025-01-24 南京凯奥思数据技术有限公司 一种便携式旋转类设备故障诊断仪及诊断方法

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US20180274921A1 (en) 2018-09-27
CN108627147B (zh) 2023-08-11
JP2018159630A (ja) 2018-10-11
US10731985B2 (en) 2020-08-04
CN108627147A (zh) 2018-10-09

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