CN108281387B - 柔性显示装置的制作方法及柔性显示装置 - Google Patents
柔性显示装置的制作方法及柔性显示装置 Download PDFInfo
- Publication number
- CN108281387B CN108281387B CN201810065169.3A CN201810065169A CN108281387B CN 108281387 B CN108281387 B CN 108281387B CN 201810065169 A CN201810065169 A CN 201810065169A CN 108281387 B CN108281387 B CN 108281387B
- Authority
- CN
- China
- Prior art keywords
- flexible display
- display panels
- flexible
- bent area
- glue
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 37
- 238000005452 bending Methods 0.000 claims abstract description 26
- 239000003292 glue Substances 0.000 claims description 41
- 239000000463 material Substances 0.000 claims description 31
- 230000000875 corresponding Effects 0.000 claims description 20
- 239000010409 thin film Substances 0.000 claims description 12
- 239000000853 adhesive Substances 0.000 claims description 8
- 230000001070 adhesive Effects 0.000 claims description 8
- 238000005538 encapsulation Methods 0.000 claims description 8
- 239000004697 Polyetherimide Substances 0.000 claims description 6
- 229920001230 polyarylate Polymers 0.000 claims description 6
- 229920001601 polyetherimide Polymers 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- 229920001721 Polyimide Polymers 0.000 claims description 5
- 239000004642 Polyimide Substances 0.000 claims description 5
- 239000004734 Polyphenylene sulfide Substances 0.000 claims description 5
- 229920000069 poly(p-phenylene sulfide) Polymers 0.000 claims description 4
- 238000007711 solidification Methods 0.000 claims description 4
- 230000003447 ipsilateral Effects 0.000 claims description 3
- 239000011241 protective layer Substances 0.000 abstract description 5
- 239000010410 layer Substances 0.000 description 78
- 230000002633 protecting Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 230000001681 protective Effects 0.000 description 4
- XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc oxide Inorganic materials data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 4
- 239000000203 mixture Substances 0.000 description 3
- 230000027756 respiratory electron transport chain Effects 0.000 description 3
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound data:image/svg+xml;base64,<?xml version='1.0' encoding='iso-8859-1'?>
<svg version='1.1' baseProfile='full'
              xmlns='http://www.w3.org/2000/svg'
                      xmlns:rdkit='http://www.rdkit.org/xml'
                      xmlns:xlink='http://www.w3.org/1999/xlink'
                  xml:space='preserve'
width='300px' height='300px' viewBox='0 0 300 300'>
<!-- END OF HEADER -->
<rect style='opacity:1.0;fill:#FFFFFF;stroke:none' width='300' height='300' x='0' y='0'> </rect>
<text x='138' y='170' class='atom-0' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >G</text>
<text x='165.6' y='170' class='atom-0' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >a</text>
<path d='M 187.229,150 L 187.221,149.828 L 187.199,149.657 L 187.162,149.489 L 187.111,149.325 L 187.046,149.166 L 186.968,149.012 L 186.877,148.867 L 186.773,148.729 L 186.658,148.601 L 186.533,148.483 L 186.397,148.377 L 186.254,148.282 L 186.102,148.201 L 185.944,148.132 L 185.781,148.078 L 185.614,148.037 L 185.444,148.012 L 185.272,148 L 185.1,148.004 L 184.929,148.023 L 184.76,148.056 L 184.594,148.103 L 184.434,148.165 L 184.279,148.24 L 184.131,148.328 L 183.991,148.429 L 183.861,148.541 L 183.741,148.664 L 183.631,148.797 L 183.534,148.939 L 183.449,149.088 L 183.377,149.245 L 183.319,149.407 L 183.275,149.573 L 183.245,149.743 L 183.231,149.914 L 183.231,150.086 L 183.245,150.257 L 183.275,150.427 L 183.319,150.593 L 183.377,150.755 L 183.449,150.912 L 183.534,151.061 L 183.631,151.203 L 183.741,151.336 L 183.861,151.459 L 183.991,151.571 L 184.131,151.672 L 184.279,151.76 L 184.434,151.835 L 184.594,151.897 L 184.76,151.944 L 184.929,151.977 L 185.1,151.996 L 185.272,152 L 185.444,151.988 L 185.614,151.963 L 185.781,151.922 L 185.944,151.868 L 186.102,151.799 L 186.254,151.718 L 186.397,151.623 L 186.533,151.517 L 186.658,151.399 L 186.773,151.271 L 186.877,151.133 L 186.968,150.988 L 187.046,150.834 L 187.111,150.675 L 187.162,150.511 L 187.199,150.343 L 187.221,150.172 L 187.229,150 L 185.229,150 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 187.229,168.455 L 187.221,168.283 L 187.199,168.112 L 187.162,167.944 L 187.111,167.779 L 187.046,167.62 L 186.968,167.467 L 186.877,167.321 L 186.773,167.184 L 186.658,167.056 L 186.533,166.938 L 186.397,166.831 L 186.254,166.737 L 186.102,166.655 L 185.944,166.587 L 185.781,166.532 L 185.614,166.492 L 185.444,166.466 L 185.272,166.455 L 185.1,166.459 L 184.929,166.477 L 184.76,166.51 L 184.594,166.558 L 184.434,166.619 L 184.279,166.695 L 184.131,166.783 L 183.991,166.883 L 183.861,166.995 L 183.741,167.118 L 183.631,167.251 L 183.534,167.393 L 183.449,167.543 L 183.377,167.699 L 183.319,167.861 L 183.275,168.028 L 183.245,168.197 L 183.231,168.369 L 183.231,168.541 L 183.245,168.712 L 183.275,168.882 L 183.319,169.048 L 183.377,169.21 L 183.449,169.366 L 183.534,169.516 L 183.631,169.658 L 183.741,169.791 L 183.861,169.914 L 183.991,170.026 L 184.131,170.126 L 184.279,170.215 L 184.434,170.29 L 184.594,170.351 L 184.76,170.399 L 184.929,170.432 L 185.1,170.45 L 185.272,170.454 L 185.444,170.443 L 185.614,170.417 L 185.781,170.377 L 185.944,170.322 L 186.102,170.254 L 186.254,170.172 L 186.397,170.078 L 186.533,169.971 L 186.658,169.853 L 186.773,169.725 L 186.877,169.588 L 186.968,169.442 L 187.046,169.289 L 187.111,169.13 L 187.162,168.965 L 187.199,168.797 L 187.221,168.626 L 187.229,168.455 L 185.229,168.455 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 187.229,131.545 L 187.221,131.374 L 187.199,131.203 L 187.162,131.035 L 187.111,130.87 L 187.046,130.711 L 186.968,130.558 L 186.877,130.412 L 186.773,130.275 L 186.658,130.147 L 186.533,130.029 L 186.397,129.922 L 186.254,129.828 L 186.102,129.746 L 185.944,129.678 L 185.781,129.623 L 185.614,129.583 L 185.444,129.557 L 185.272,129.546 L 185.1,129.55 L 184.929,129.568 L 184.76,129.601 L 184.594,129.649 L 184.434,129.71 L 184.279,129.785 L 184.131,129.874 L 183.991,129.974 L 183.861,130.086 L 183.741,130.209 L 183.631,130.342 L 183.534,130.484 L 183.449,130.634 L 183.377,130.79 L 183.319,130.952 L 183.275,131.118 L 183.245,131.288 L 183.231,131.459 L 183.231,131.631 L 183.245,131.803 L 183.275,131.972 L 183.319,132.139 L 183.377,132.301 L 183.449,132.457 L 183.534,132.607 L 183.631,132.749 L 183.741,132.882 L 183.861,133.005 L 183.991,133.117 L 184.131,133.217 L 184.279,133.305 L 184.434,133.381 L 184.594,133.442 L 184.76,133.49 L 184.929,133.523 L 185.1,133.541 L 185.272,133.545 L 185.444,133.534 L 185.614,133.508 L 185.781,133.468 L 185.944,133.413 L 186.102,133.345 L 186.254,133.263 L 186.397,133.169 L 186.533,133.062 L 186.658,132.944 L 186.773,132.816 L 186.877,132.679 L 186.968,132.533 L 187.046,132.38 L 187.111,132.221 L 187.162,132.056 L 187.199,131.888 L 187.221,131.717 L 187.229,131.545 L 185.229,131.545 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 187.229,150 L 187.221,149.828 L 187.199,149.657 L 187.162,149.489 L 187.111,149.325 L 187.046,149.166 L 186.968,149.012 L 186.877,148.867 L 186.773,148.729 L 186.658,148.601 L 186.533,148.483 L 186.397,148.377 L 186.254,148.282 L 186.102,148.201 L 185.944,148.132 L 185.781,148.078 L 185.614,148.037 L 185.444,148.012 L 185.272,148 L 185.1,148.004 L 184.929,148.023 L 184.76,148.056 L 184.594,148.103 L 184.434,148.165 L 184.279,148.24 L 184.131,148.328 L 183.991,148.429 L 183.861,148.541 L 183.741,148.664 L 183.631,148.797 L 183.534,148.939 L 183.449,149.088 L 183.377,149.245 L 183.319,149.407 L 183.275,149.573 L 183.245,149.743 L 183.231,149.914 L 183.231,150.086 L 183.245,150.257 L 183.275,150.427 L 183.319,150.593 L 183.377,150.755 L 183.449,150.912 L 183.534,151.061 L 183.631,151.203 L 183.741,151.336 L 183.861,151.459 L 183.991,151.571 L 184.131,151.672 L 184.279,151.76 L 184.434,151.835 L 184.594,151.897 L 184.76,151.944 L 184.929,151.977 L 185.1,151.996 L 185.272,152 L 185.444,151.988 L 185.614,151.963 L 185.781,151.922 L 185.944,151.868 L 186.102,151.799 L 186.254,151.718 L 186.397,151.623 L 186.533,151.517 L 186.658,151.399 L 186.773,151.271 L 186.877,151.133 L 186.968,150.988 L 187.046,150.834 L 187.111,150.675 L 187.162,150.511 L 187.199,150.343 L 187.221,150.172 L 187.229,150 L 185.229,150 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
</svg>
 data:image/svg+xml;base64,<?xml version='1.0' encoding='iso-8859-1'?>
<svg version='1.1' baseProfile='full'
              xmlns='http://www.w3.org/2000/svg'
                      xmlns:rdkit='http://www.rdkit.org/xml'
                      xmlns:xlink='http://www.w3.org/1999/xlink'
                  xml:space='preserve'
width='85px' height='85px' viewBox='0 0 85 85'>
<!-- END OF HEADER -->
<rect style='opacity:1.0;fill:#FFFFFF;stroke:none' width='85' height='85' x='0' y='0'> </rect>
<text x='35.0455' y='53.5909' class='atom-0' style='font-size:23px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >G</text>
<text x='51.0409' y='53.5909' class='atom-0' style='font-size:23px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >a</text>
<path d='M 65.6174,42 L 65.6132,41.9004 L 65.6003,41.8015 L 65.579,41.704 L 65.5494,41.6088 L 65.5118,41.5164 L 65.4663,41.4277 L 65.4134,41.3431 L 65.3534,41.2635 L 65.2867,41.1893 L 65.214,41.1211 L 65.1356,41.0594 L 65.0522,41.0046 L 64.9645,40.9572 L 64.873,40.9176 L 64.7784,40.886 L 64.6814,40.8626 L 64.5828,40.8476 L 64.4833,40.8412 L 64.3836,40.8433 L 64.2844,40.854 L 64.1866,40.8732 L 64.0907,40.9008 L 63.9976,40.9364 L 63.9078,40.98 L 63.8222,41.0311 L 63.7413,41.0894 L 63.6656,41.1544 L 63.5959,41.2257 L 63.5325,41.3027 L 63.476,41.3848 L 63.4267,41.4716 L 63.3851,41.5622 L 63.3515,41.6561 L 63.326,41.7525 L 63.3089,41.8508 L 63.3003,41.9501 L 63.3003,42.0499 L 63.3089,42.1492 L 63.326,42.2475 L 63.3515,42.3439 L 63.3851,42.4378 L 63.4267,42.5284 L 63.476,42.6152 L 63.5325,42.6973 L 63.5959,42.7743 L 63.6656,42.8456 L 63.7413,42.9106 L 63.8222,42.9689 L 63.9078,43.02 L 63.9976,43.0636 L 64.0907,43.0992 L 64.1866,43.1268 L 64.2844,43.146 L 64.3836,43.1567 L 64.4833,43.1588 L 64.5828,43.1524 L 64.6814,43.1374 L 64.7784,43.114 L 64.873,43.0824 L 64.9645,43.0428 L 65.0522,42.9954 L 65.1356,42.9406 L 65.214,42.8789 L 65.2867,42.8107 L 65.3534,42.7365 L 65.4134,42.6569 L 65.4663,42.5723 L 65.5118,42.4836 L 65.5494,42.3912 L 65.579,42.296 L 65.6003,42.1985 L 65.6132,42.0996 L 65.6174,42 L 64.4584,42 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 65.6174,46.6364 L 65.6132,46.5367 L 65.6003,46.4378 L 65.579,46.3404 L 65.5494,46.2451 L 65.5118,46.1528 L 65.4663,46.064 L 65.4134,45.9795 L 65.3534,45.8998 L 65.2867,45.8256 L 65.214,45.7574 L 65.1356,45.6957 L 65.0522,45.641 L 64.9645,45.5936 L 64.873,45.554 L 64.7784,45.5223 L 64.6814,45.4989 L 64.5828,45.484 L 64.4833,45.4775 L 64.3836,45.4797 L 64.2844,45.4904 L 64.1866,45.5096 L 64.0907,45.5371 L 63.9976,45.5728 L 63.9078,45.6163 L 63.8222,45.6675 L 63.7413,45.7257 L 63.6656,45.7907 L 63.5959,45.862 L 63.5325,45.939 L 63.476,46.0212 L 63.4267,46.1079 L 63.3851,46.1986 L 63.3515,46.2924 L 63.326,46.3889 L 63.3089,46.4871 L 63.3003,46.5865 L 63.3003,46.6862 L 63.3089,46.7856 L 63.326,46.8839 L 63.3515,46.9803 L 63.3851,47.0742 L 63.4267,47.1648 L 63.476,47.2515 L 63.5325,47.3337 L 63.5959,47.4107 L 63.6656,47.482 L 63.7413,47.547 L 63.8222,47.6053 L 63.9078,47.6564 L 63.9976,47.6999 L 64.0907,47.7356 L 64.1866,47.7631 L 64.2844,47.7823 L 64.3836,47.793 L 64.4833,47.7952 L 64.5828,47.7888 L 64.6814,47.7738 L 64.7784,47.7504 L 64.873,47.7188 L 64.9645,47.6791 L 65.0522,47.6317 L 65.1356,47.577 L 65.214,47.5153 L 65.2867,47.4471 L 65.3534,47.3729 L 65.4134,47.2932 L 65.4663,47.2087 L 65.5118,47.1199 L 65.5494,47.0276 L 65.579,46.9323 L 65.6003,46.8349 L 65.6132,46.736 L 65.6174,46.6364 L 64.4584,46.6364 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 65.6174,37.3636 L 65.6132,37.264 L 65.6003,37.1651 L 65.579,37.0677 L 65.5494,36.9724 L 65.5118,36.8801 L 65.4663,36.7913 L 65.4134,36.7068 L 65.3534,36.6271 L 65.2867,36.5529 L 65.214,36.4847 L 65.1356,36.423 L 65.0522,36.3683 L 64.9645,36.3209 L 64.873,36.2812 L 64.7784,36.2496 L 64.6814,36.2262 L 64.5828,36.2112 L 64.4833,36.2048 L 64.3836,36.207 L 64.2844,36.2177 L 64.1866,36.2369 L 64.0907,36.2644 L 63.9976,36.3001 L 63.9078,36.3436 L 63.8222,36.3947 L 63.7413,36.453 L 63.6656,36.518 L 63.5959,36.5893 L 63.5325,36.6663 L 63.476,36.7485 L 63.4267,36.8352 L 63.3851,36.9258 L 63.3515,37.0197 L 63.326,37.1161 L 63.3089,37.2144 L 63.3003,37.3138 L 63.3003,37.4135 L 63.3089,37.5129 L 63.326,37.6111 L 63.3515,37.7076 L 63.3851,37.8014 L 63.4267,37.8921 L 63.476,37.9788 L 63.5325,38.061 L 63.5959,38.138 L 63.6656,38.2093 L 63.7413,38.2743 L 63.8222,38.3325 L 63.9078,38.3837 L 63.9976,38.4272 L 64.0907,38.4629 L 64.1866,38.4904 L 64.2844,38.5096 L 64.3836,38.5203 L 64.4833,38.5225 L 64.5828,38.516 L 64.6814,38.5011 L 64.7784,38.4777 L 64.873,38.446 L 64.9645,38.4064 L 65.0522,38.359 L 65.1356,38.3043 L 65.214,38.2426 L 65.2867,38.1744 L 65.3534,38.1002 L 65.4134,38.0205 L 65.4663,37.936 L 65.5118,37.8472 L 65.5494,37.7549 L 65.579,37.6596 L 65.6003,37.5622 L 65.6132,37.4633 L 65.6174,37.3636 L 64.4584,37.3636 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 65.6174,42 L 65.6132,41.9004 L 65.6003,41.8015 L 65.579,41.704 L 65.5494,41.6088 L 65.5118,41.5164 L 65.4663,41.4277 L 65.4134,41.3431 L 65.3534,41.2635 L 65.2867,41.1893 L 65.214,41.1211 L 65.1356,41.0594 L 65.0522,41.0046 L 64.9645,40.9572 L 64.873,40.9176 L 64.7784,40.886 L 64.6814,40.8626 L 64.5828,40.8476 L 64.4833,40.8412 L 64.3836,40.8433 L 64.2844,40.854 L 64.1866,40.8732 L 64.0907,40.9008 L 63.9976,40.9364 L 63.9078,40.98 L 63.8222,41.0311 L 63.7413,41.0894 L 63.6656,41.1544 L 63.5959,41.2257 L 63.5325,41.3027 L 63.476,41.3848 L 63.4267,41.4716 L 63.3851,41.5622 L 63.3515,41.6561 L 63.326,41.7525 L 63.3089,41.8508 L 63.3003,41.9501 L 63.3003,42.0499 L 63.3089,42.1492 L 63.326,42.2475 L 63.3515,42.3439 L 63.3851,42.4378 L 63.4267,42.5284 L 63.476,42.6152 L 63.5325,42.6973 L 63.5959,42.7743 L 63.6656,42.8456 L 63.7413,42.9106 L 63.8222,42.9689 L 63.9078,43.02 L 63.9976,43.0636 L 64.0907,43.0992 L 64.1866,43.1268 L 64.2844,43.146 L 64.3836,43.1567 L 64.4833,43.1588 L 64.5828,43.1524 L 64.6814,43.1374 L 64.7784,43.114 L 64.873,43.0824 L 64.9645,43.0428 L 65.0522,42.9954 L 65.1356,42.9406 L 65.214,42.8789 L 65.2867,42.8107 L 65.3534,42.7365 L 65.4134,42.6569 L 65.4663,42.5723 L 65.5118,42.4836 L 65.5494,42.3912 L 65.579,42.296 L 65.6003,42.1985 L 65.6132,42.0996 L 65.6174,42 L 64.4584,42 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
</svg>
 [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- 239000004568 cement Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium Chemical compound data:image/svg+xml;base64,<?xml version='1.0' encoding='iso-8859-1'?>
<svg version='1.1' baseProfile='full'
              xmlns='http://www.w3.org/2000/svg'
                      xmlns:rdkit='http://www.rdkit.org/xml'
                      xmlns:xlink='http://www.w3.org/1999/xlink'
                  xml:space='preserve'
width='300px' height='300px' viewBox='0 0 300 300'>
<!-- END OF HEADER -->
<rect style='opacity:1.0;fill:#FFFFFF;stroke:none' width='300' height='300' x='0' y='0'> </rect>
<text x='144' y='170' class='atom-0' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >I</text>
<text x='157.8' y='170' class='atom-0' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >n</text>
<path d='M 186.364,150 L 186.356,149.828 L 186.334,149.657 L 186.297,149.489 L 186.246,149.325 L 186.181,149.166 L 186.103,149.012 L 186.011,148.867 L 185.908,148.729 L 185.793,148.601 L 185.667,148.483 L 185.532,148.377 L 185.388,148.282 L 185.237,148.201 L 185.079,148.132 L 184.916,148.078 L 184.749,148.037 L 184.578,148.012 L 184.407,148 L 184.235,148.004 L 184.064,148.023 L 183.895,148.056 L 183.729,148.103 L 183.569,148.165 L 183.414,148.24 L 183.266,148.328 L 183.126,148.429 L 182.996,148.541 L 182.875,148.664 L 182.766,148.797 L 182.669,148.939 L 182.584,149.088 L 182.512,149.245 L 182.454,149.407 L 182.41,149.573 L 182.38,149.743 L 182.365,149.914 L 182.365,150.086 L 182.38,150.257 L 182.41,150.427 L 182.454,150.593 L 182.512,150.755 L 182.584,150.912 L 182.669,151.061 L 182.766,151.203 L 182.875,151.336 L 182.996,151.459 L 183.126,151.571 L 183.266,151.672 L 183.414,151.76 L 183.569,151.835 L 183.729,151.897 L 183.895,151.944 L 184.064,151.977 L 184.235,151.996 L 184.407,152 L 184.578,151.988 L 184.749,151.963 L 184.916,151.922 L 185.079,151.868 L 185.237,151.799 L 185.388,151.718 L 185.532,151.623 L 185.667,151.517 L 185.793,151.399 L 185.908,151.271 L 186.011,151.133 L 186.103,150.988 L 186.181,150.834 L 186.246,150.675 L 186.297,150.511 L 186.334,150.343 L 186.356,150.172 L 186.364,150 L 184.364,150 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 186.364,168.455 L 186.356,168.283 L 186.334,168.112 L 186.297,167.944 L 186.246,167.779 L 186.181,167.62 L 186.103,167.467 L 186.011,167.321 L 185.908,167.184 L 185.793,167.056 L 185.667,166.938 L 185.532,166.831 L 185.388,166.737 L 185.237,166.655 L 185.079,166.587 L 184.916,166.532 L 184.749,166.492 L 184.578,166.466 L 184.407,166.455 L 184.235,166.459 L 184.064,166.477 L 183.895,166.51 L 183.729,166.558 L 183.569,166.619 L 183.414,166.695 L 183.266,166.783 L 183.126,166.883 L 182.996,166.995 L 182.875,167.118 L 182.766,167.251 L 182.669,167.393 L 182.584,167.543 L 182.512,167.699 L 182.454,167.861 L 182.41,168.028 L 182.38,168.197 L 182.365,168.369 L 182.365,168.541 L 182.38,168.712 L 182.41,168.882 L 182.454,169.048 L 182.512,169.21 L 182.584,169.366 L 182.669,169.516 L 182.766,169.658 L 182.875,169.791 L 182.996,169.914 L 183.126,170.026 L 183.266,170.126 L 183.414,170.215 L 183.569,170.29 L 183.729,170.351 L 183.895,170.399 L 184.064,170.432 L 184.235,170.45 L 184.407,170.454 L 184.578,170.443 L 184.749,170.417 L 184.916,170.377 L 185.079,170.322 L 185.237,170.254 L 185.388,170.172 L 185.532,170.078 L 185.667,169.971 L 185.793,169.853 L 185.908,169.725 L 186.011,169.588 L 186.103,169.442 L 186.181,169.289 L 186.246,169.13 L 186.297,168.965 L 186.334,168.797 L 186.356,168.626 L 186.364,168.455 L 184.364,168.455 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 186.364,131.545 L 186.356,131.374 L 186.334,131.203 L 186.297,131.035 L 186.246,130.87 L 186.181,130.711 L 186.103,130.558 L 186.011,130.412 L 185.908,130.275 L 185.793,130.147 L 185.667,130.029 L 185.532,129.922 L 185.388,129.828 L 185.237,129.746 L 185.079,129.678 L 184.916,129.623 L 184.749,129.583 L 184.578,129.557 L 184.407,129.546 L 184.235,129.55 L 184.064,129.568 L 183.895,129.601 L 183.729,129.649 L 183.569,129.71 L 183.414,129.785 L 183.266,129.874 L 183.126,129.974 L 182.996,130.086 L 182.875,130.209 L 182.766,130.342 L 182.669,130.484 L 182.584,130.634 L 182.512,130.79 L 182.454,130.952 L 182.41,131.118 L 182.38,131.288 L 182.365,131.459 L 182.365,131.631 L 182.38,131.803 L 182.41,131.972 L 182.454,132.139 L 182.512,132.301 L 182.584,132.457 L 182.669,132.607 L 182.766,132.749 L 182.875,132.882 L 182.996,133.005 L 183.126,133.117 L 183.266,133.217 L 183.414,133.305 L 183.569,133.381 L 183.729,133.442 L 183.895,133.49 L 184.064,133.523 L 184.235,133.541 L 184.407,133.545 L 184.578,133.534 L 184.749,133.508 L 184.916,133.468 L 185.079,133.413 L 185.237,133.345 L 185.388,133.263 L 185.532,133.169 L 185.667,133.062 L 185.793,132.944 L 185.908,132.816 L 186.011,132.679 L 186.103,132.533 L 186.181,132.38 L 186.246,132.221 L 186.297,132.056 L 186.334,131.888 L 186.356,131.717 L 186.364,131.545 L 184.364,131.545 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 186.364,150 L 186.356,149.828 L 186.334,149.657 L 186.297,149.489 L 186.246,149.325 L 186.181,149.166 L 186.103,149.012 L 186.011,148.867 L 185.908,148.729 L 185.793,148.601 L 185.667,148.483 L 185.532,148.377 L 185.388,148.282 L 185.237,148.201 L 185.079,148.132 L 184.916,148.078 L 184.749,148.037 L 184.578,148.012 L 184.407,148 L 184.235,148.004 L 184.064,148.023 L 183.895,148.056 L 183.729,148.103 L 183.569,148.165 L 183.414,148.24 L 183.266,148.328 L 183.126,148.429 L 182.996,148.541 L 182.875,148.664 L 182.766,148.797 L 182.669,148.939 L 182.584,149.088 L 182.512,149.245 L 182.454,149.407 L 182.41,149.573 L 182.38,149.743 L 182.365,149.914 L 182.365,150.086 L 182.38,150.257 L 182.41,150.427 L 182.454,150.593 L 182.512,150.755 L 182.584,150.912 L 182.669,151.061 L 182.766,151.203 L 182.875,151.336 L 182.996,151.459 L 183.126,151.571 L 183.266,151.672 L 183.414,151.76 L 183.569,151.835 L 183.729,151.897 L 183.895,151.944 L 184.064,151.977 L 184.235,151.996 L 184.407,152 L 184.578,151.988 L 184.749,151.963 L 184.916,151.922 L 185.079,151.868 L 185.237,151.799 L 185.388,151.718 L 185.532,151.623 L 185.667,151.517 L 185.793,151.399 L 185.908,151.271 L 186.011,151.133 L 186.103,150.988 L 186.181,150.834 L 186.246,150.675 L 186.297,150.511 L 186.334,150.343 L 186.356,150.172 L 186.364,150 L 184.364,150 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
</svg>
 data:image/svg+xml;base64,<?xml version='1.0' encoding='iso-8859-1'?>
<svg version='1.1' baseProfile='full'
              xmlns='http://www.w3.org/2000/svg'
                      xmlns:rdkit='http://www.rdkit.org/xml'
                      xmlns:xlink='http://www.w3.org/1999/xlink'
                  xml:space='preserve'
width='85px' height='85px' viewBox='0 0 85 85'>
<!-- END OF HEADER -->
<rect style='opacity:1.0;fill:#FFFFFF;stroke:none' width='85' height='85' x='0' y='0'> </rect>
<text x='38.5227' y='53.5909' class='atom-0' style='font-size:23px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >I</text>
<text x='46.5205' y='53.5909' class='atom-0' style='font-size:23px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >n</text>
<path d='M 65.0659,42 L 65.0616,41.9004 L 65.0488,41.8015 L 65.0275,41.704 L 64.9979,41.6088 L 64.9602,41.5164 L 64.9148,41.4277 L 64.8618,41.3431 L 64.8018,41.2635 L 64.7352,41.1893 L 64.6624,41.1211 L 64.5841,41.0594 L 64.5007,41.0046 L 64.4129,40.9572 L 64.3214,40.9176 L 64.2268,40.886 L 64.1299,40.8626 L 64.0313,40.8476 L 63.9318,40.8412 L 63.832,40.8433 L 63.7329,40.854 L 63.635,40.8732 L 63.5392,40.9008 L 63.446,40.9364 L 63.3563,40.98 L 63.2707,41.0311 L 63.1897,41.0894 L 63.1141,41.1544 L 63.0443,41.2257 L 62.981,41.3027 L 62.9244,41.3848 L 62.8752,41.4716 L 62.8336,41.5622 L 62.7999,41.6561 L 62.7745,41.7525 L 62.7574,41.8508 L 62.7488,41.9501 L 62.7488,42.0499 L 62.7574,42.1492 L 62.7745,42.2475 L 62.7999,42.3439 L 62.8336,42.4378 L 62.8752,42.5284 L 62.9244,42.6152 L 62.981,42.6973 L 63.0443,42.7743 L 63.1141,42.8456 L 63.1897,42.9106 L 63.2707,42.9689 L 63.3563,43.02 L 63.446,43.0636 L 63.5392,43.0992 L 63.635,43.1268 L 63.7329,43.146 L 63.832,43.1567 L 63.9318,43.1588 L 64.0313,43.1524 L 64.1299,43.1374 L 64.2268,43.114 L 64.3214,43.0824 L 64.4129,43.0428 L 64.5007,42.9954 L 64.5841,42.9406 L 64.6624,42.8789 L 64.7352,42.8107 L 64.8018,42.7365 L 64.8618,42.6569 L 64.9148,42.5723 L 64.9602,42.4836 L 64.9979,42.3912 L 65.0275,42.296 L 65.0488,42.1985 L 65.0616,42.0996 L 65.0659,42 L 63.9068,42 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 65.0659,46.6364 L 65.0616,46.5367 L 65.0488,46.4378 L 65.0275,46.3404 L 64.9979,46.2451 L 64.9602,46.1528 L 64.9148,46.064 L 64.8618,45.9795 L 64.8018,45.8998 L 64.7352,45.8256 L 64.6624,45.7574 L 64.5841,45.6957 L 64.5007,45.641 L 64.4129,45.5936 L 64.3214,45.554 L 64.2268,45.5223 L 64.1299,45.4989 L 64.0313,45.484 L 63.9318,45.4775 L 63.832,45.4797 L 63.7329,45.4904 L 63.635,45.5096 L 63.5392,45.5371 L 63.446,45.5728 L 63.3563,45.6163 L 63.2707,45.6675 L 63.1897,45.7257 L 63.1141,45.7907 L 63.0443,45.862 L 62.981,45.939 L 62.9244,46.0212 L 62.8752,46.1079 L 62.8336,46.1986 L 62.7999,46.2924 L 62.7745,46.3889 L 62.7574,46.4871 L 62.7488,46.5865 L 62.7488,46.6862 L 62.7574,46.7856 L 62.7745,46.8839 L 62.7999,46.9803 L 62.8336,47.0742 L 62.8752,47.1648 L 62.9244,47.2515 L 62.981,47.3337 L 63.0443,47.4107 L 63.1141,47.482 L 63.1897,47.547 L 63.2707,47.6053 L 63.3563,47.6564 L 63.446,47.6999 L 63.5392,47.7356 L 63.635,47.7631 L 63.7329,47.7823 L 63.832,47.793 L 63.9318,47.7952 L 64.0313,47.7888 L 64.1299,47.7738 L 64.2268,47.7504 L 64.3214,47.7188 L 64.4129,47.6791 L 64.5007,47.6317 L 64.5841,47.577 L 64.6624,47.5153 L 64.7352,47.4471 L 64.8018,47.3729 L 64.8618,47.2932 L 64.9148,47.2087 L 64.9602,47.1199 L 64.9979,47.0276 L 65.0275,46.9323 L 65.0488,46.8349 L 65.0616,46.736 L 65.0659,46.6364 L 63.9068,46.6364 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 65.0659,37.3636 L 65.0616,37.264 L 65.0488,37.1651 L 65.0275,37.0677 L 64.9979,36.9724 L 64.9602,36.8801 L 64.9148,36.7913 L 64.8618,36.7068 L 64.8018,36.6271 L 64.7352,36.5529 L 64.6624,36.4847 L 64.5841,36.423 L 64.5007,36.3683 L 64.4129,36.3209 L 64.3214,36.2812 L 64.2268,36.2496 L 64.1299,36.2262 L 64.0313,36.2112 L 63.9318,36.2048 L 63.832,36.207 L 63.7329,36.2177 L 63.635,36.2369 L 63.5392,36.2644 L 63.446,36.3001 L 63.3563,36.3436 L 63.2707,36.3947 L 63.1897,36.453 L 63.1141,36.518 L 63.0443,36.5893 L 62.981,36.6663 L 62.9244,36.7485 L 62.8752,36.8352 L 62.8336,36.9258 L 62.7999,37.0197 L 62.7745,37.1161 L 62.7574,37.2144 L 62.7488,37.3138 L 62.7488,37.4135 L 62.7574,37.5129 L 62.7745,37.6111 L 62.7999,37.7076 L 62.8336,37.8014 L 62.8752,37.8921 L 62.9244,37.9788 L 62.981,38.061 L 63.0443,38.138 L 63.1141,38.2093 L 63.1897,38.2743 L 63.2707,38.3325 L 63.3563,38.3837 L 63.446,38.4272 L 63.5392,38.4629 L 63.635,38.4904 L 63.7329,38.5096 L 63.832,38.5203 L 63.9318,38.5225 L 64.0313,38.516 L 64.1299,38.5011 L 64.2268,38.4777 L 64.3214,38.446 L 64.4129,38.4064 L 64.5007,38.359 L 64.5841,38.3043 L 64.6624,38.2426 L 64.7352,38.1744 L 64.8018,38.1002 L 64.8618,38.0205 L 64.9148,37.936 L 64.9602,37.8472 L 64.9979,37.7549 L 65.0275,37.6596 L 65.0488,37.5622 L 65.0616,37.4633 L 65.0659,37.3636 L 63.9068,37.3636 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 65.0659,42 L 65.0616,41.9004 L 65.0488,41.8015 L 65.0275,41.704 L 64.9979,41.6088 L 64.9602,41.5164 L 64.9148,41.4277 L 64.8618,41.3431 L 64.8018,41.2635 L 64.7352,41.1893 L 64.6624,41.1211 L 64.5841,41.0594 L 64.5007,41.0046 L 64.4129,40.9572 L 64.3214,40.9176 L 64.2268,40.886 L 64.1299,40.8626 L 64.0313,40.8476 L 63.9318,40.8412 L 63.832,40.8433 L 63.7329,40.854 L 63.635,40.8732 L 63.5392,40.9008 L 63.446,40.9364 L 63.3563,40.98 L 63.2707,41.0311 L 63.1897,41.0894 L 63.1141,41.1544 L 63.0443,41.2257 L 62.981,41.3027 L 62.9244,41.3848 L 62.8752,41.4716 L 62.8336,41.5622 L 62.7999,41.6561 L 62.7745,41.7525 L 62.7574,41.8508 L 62.7488,41.9501 L 62.7488,42.0499 L 62.7574,42.1492 L 62.7745,42.2475 L 62.7999,42.3439 L 62.8336,42.4378 L 62.8752,42.5284 L 62.9244,42.6152 L 62.981,42.6973 L 63.0443,42.7743 L 63.1141,42.8456 L 63.1897,42.9106 L 63.2707,42.9689 L 63.3563,43.02 L 63.446,43.0636 L 63.5392,43.0992 L 63.635,43.1268 L 63.7329,43.146 L 63.832,43.1567 L 63.9318,43.1588 L 64.0313,43.1524 L 64.1299,43.1374 L 64.2268,43.114 L 64.3214,43.0824 L 64.4129,43.0428 L 64.5007,42.9954 L 64.5841,42.9406 L 64.6624,42.8789 L 64.7352,42.8107 L 64.8018,42.7365 L 64.8618,42.6569 L 64.9148,42.5723 L 64.9602,42.4836 L 64.9979,42.3912 L 65.0275,42.296 L 65.0488,42.1985 L 65.0616,42.0996 L 65.0659,42 L 63.9068,42 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
</svg>
 [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000006011 modification reaction Methods 0.000 description 2
- 230000003287 optical Effects 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N oxygen Chemical compound data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances data:image/svg+xml;base64,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 data:image/svg+xml;base64,PD94bWwgdmVyc2lvbj0nMS4wJyBlbmNvZGluZz0naXNvLTg4NTktMSc/Pgo8c3ZnIHZlcnNpb249JzEuMScgYmFzZVByb2ZpbGU9J2Z1bGwnCiAgICAgICAgICAgICAgeG1sbnM9J2h0dHA6Ly93d3cudzMub3JnLzIwMDAvc3ZnJwogICAgICAgICAgICAgICAgICAgICAgeG1sbnM6cmRraXQ9J2h0dHA6Ly93d3cucmRraXQub3JnL3htbCcKICAgICAgICAgICAgICAgICAgICAgIHhtbG5zOnhsaW5rPSdodHRwOi8vd3d3LnczLm9yZy8xOTk5L3hsaW5rJwogICAgICAgICAgICAgICAgICB4bWw6c3BhY2U9J3ByZXNlcnZlJwp3aWR0aD0nODVweCcgaGVpZ2h0PSc4NXB4JyB2aWV3Qm94PScwIDAgODUgODUnPgo8IS0tIEVORCBPRiBIRUFERVIgLS0+CjxyZWN0IHN0eWxlPSdvcGFjaXR5OjEuMDtmaWxsOiNGRkZGRkY7c3Ryb2tlOm5vbmUnIHdpZHRoPSc4NScgaGVpZ2h0PSc4NScgeD0nMCcgeT0nMCc+IDwvcmVjdD4KPHRleHQgeD0nMTMuMzEyOCcgeT0nNTMuNTkwOScgY2xhc3M9J2F0b20tMCcgc3R5bGU9J2ZvbnQtc2l6ZToyM3B4O2ZvbnQtc3R5bGU6bm9ybWFsO2ZvbnQtd2VpZ2h0Om5vcm1hbDtmaWxsLW9wYWNpdHk6MTtzdHJva2U6bm9uZTtmb250LWZhbWlseTpzYW5zLXNlcmlmO3RleHQtYW5jaG9yOnN0YXJ0O2ZpbGw6I0U4NDIzNScgPkg8L3RleHQ+Cjx0ZXh0IHg9JzI4LjE1NjknIHk9JzYyLjg2MzYnIGNsYXNzPSdhdG9tLTAnIHN0eWxlPSdmb250LXNpemU6MTVweDtmb250LXN0eWxlOm5vcm1hbDtmb250LXdlaWdodDpub3JtYWw7ZmlsbC1vcGFjaXR5OjE7c3Ryb2tlOm5vbmU7Zm9udC1mYW1pbHk6c2Fucy1zZXJpZjt0ZXh0LWFuY2hvcjpzdGFydDtmaWxsOiNFODQyMzUnID4yPC90ZXh0Pgo8dGV4dCB4PSczNS4wNDU1JyB5PSc1My41OTA5JyBjbGFzcz0nYXRvbS0wJyBzdHlsZT0nZm9udC1zaXplOjIzcHg7Zm9udC1zdHlsZTpub3JtYWw7Zm9udC13ZWlnaHQ6bm9ybWFsO2ZpbGwtb3BhY2l0eToxO3N0cm9rZTpub25lO2ZvbnQtZmFtaWx5OnNhbnMtc2VyaWY7dGV4dC1hbmNob3I6c3RhcnQ7ZmlsbDojRTg0MjM1JyA+TzwvdGV4dD4KPC9zdmc+Cg== O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- 230000036536 Cave Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000023298 conjugation with cellular fusion Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- MRNHPUHPBOKKQT-UHFFFAOYSA-N indium;tin;hydrate Chemical compound data:image/svg+xml;base64,<?xml version='1.0' encoding='iso-8859-1'?>
<svg version='1.1' baseProfile='full'
              xmlns='http://www.w3.org/2000/svg'
                      xmlns:rdkit='http://www.rdkit.org/xml'
                      xmlns:xlink='http://www.w3.org/1999/xlink'
                  xml:space='preserve'
width='300px' height='300px' viewBox='0 0 300 300'>
<!-- END OF HEADER -->
<rect style='opacity:1.0;fill:#FFFFFF;stroke:none' width='300' height='300' x='0' y='0'> </rect>
<text x='9.12337' y='268.066' class='atom-0' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#E84235' >H</text>
<text x='34.7367' y='284.066' class='atom-0' style='font-size:26px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#E84235' >2</text>
<text x='46.6229' y='268.066' class='atom-0' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#E84235' >O</text>
<text x='241.754' y='268.066' class='atom-1' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >I</text>
<text x='255.554' y='268.066' class='atom-1' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >n</text>
<text x='46.6229' y='78.9341' class='atom-2' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >S</text>
<text x='74.2229' y='78.9341' class='atom-2' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >n</text>
<path d='M 284.108,248.066 L 284.101,247.894 L 284.079,247.723 L 284.042,247.555 L 283.991,247.391 L 283.926,247.231 L 283.847,247.078 L 283.756,246.932 L 283.652,246.795 L 283.538,246.667 L 283.412,246.549 L 283.277,246.443 L 283.133,246.348 L 282.981,246.266 L 282.824,246.198 L 282.66,246.143 L 282.493,246.103 L 282.323,246.077 L 282.151,246.066 L 281.979,246.07 L 281.808,246.088 L 281.639,246.122 L 281.474,246.169 L 281.313,246.231 L 281.158,246.306 L 281.01,246.394 L 280.871,246.494 L 280.74,246.607 L 280.62,246.73 L 280.511,246.862 L 280.413,247.004 L 280.328,247.154 L 280.256,247.31 L 280.198,247.472 L 280.154,247.639 L 280.125,247.808 L 280.11,247.98 L 280.11,248.152 L 280.125,248.323 L 280.154,248.493 L 280.198,248.659 L 280.256,248.821 L 280.328,248.978 L 280.413,249.127 L 280.511,249.269 L 280.62,249.402 L 280.74,249.525 L 280.871,249.637 L 281.01,249.738 L 281.158,249.826 L 281.313,249.901 L 281.474,249.962 L 281.639,250.01 L 281.808,250.043 L 281.979,250.062 L 282.151,250.065 L 282.323,250.054 L 282.493,250.028 L 282.66,249.988 L 282.824,249.933 L 282.981,249.865 L 283.133,249.783 L 283.277,249.689 L 283.412,249.582 L 283.538,249.465 L 283.652,249.337 L 283.756,249.199 L 283.847,249.053 L 283.926,248.9 L 283.991,248.741 L 284.042,248.576 L 284.079,248.408 L 284.101,248.238 L 284.108,248.066 L 282.108,248.066 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 284.108,274.435 L 284.101,274.264 L 284.079,274.093 L 284.042,273.925 L 283.991,273.76 L 283.926,273.601 L 283.847,273.448 L 283.756,273.302 L 283.652,273.165 L 283.538,273.037 L 283.412,272.919 L 283.277,272.812 L 283.133,272.718 L 282.981,272.636 L 282.824,272.568 L 282.66,272.513 L 282.493,272.473 L 282.323,272.447 L 282.151,272.436 L 281.979,272.44 L 281.808,272.458 L 281.639,272.491 L 281.474,272.539 L 281.313,272.6 L 281.158,272.675 L 281.01,272.764 L 280.871,272.864 L 280.74,272.976 L 280.62,273.099 L 280.511,273.232 L 280.413,273.374 L 280.328,273.524 L 280.256,273.68 L 280.198,273.842 L 280.154,274.008 L 280.125,274.178 L 280.11,274.349 L 280.11,274.522 L 280.125,274.693 L 280.154,274.863 L 280.198,275.029 L 280.256,275.191 L 280.328,275.347 L 280.413,275.497 L 280.511,275.639 L 280.62,275.772 L 280.74,275.895 L 280.871,276.007 L 281.01,276.107 L 281.158,276.196 L 281.313,276.271 L 281.474,276.332 L 281.639,276.38 L 281.808,276.413 L 281.979,276.431 L 282.151,276.435 L 282.323,276.424 L 282.493,276.398 L 282.66,276.358 L 282.824,276.303 L 282.981,276.235 L 283.133,276.153 L 283.277,276.059 L 283.412,275.952 L 283.538,275.834 L 283.652,275.706 L 283.756,275.569 L 283.847,275.423 L 283.926,275.27 L 283.991,275.111 L 284.042,274.946 L 284.079,274.778 L 284.101,274.607 L 284.108,274.435 L 282.108,274.435 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 284.108,221.696 L 284.101,221.524 L 284.079,221.353 L 284.042,221.185 L 283.991,221.021 L 283.926,220.862 L 283.847,220.708 L 283.756,220.563 L 283.652,220.425 L 283.538,220.297 L 283.412,220.179 L 283.277,220.073 L 283.133,219.978 L 282.981,219.897 L 282.824,219.828 L 282.66,219.774 L 282.493,219.733 L 282.323,219.708 L 282.151,219.696 L 281.979,219.7 L 281.808,219.719 L 281.639,219.752 L 281.474,219.799 L 281.313,219.861 L 281.158,219.936 L 281.01,220.024 L 280.871,220.125 L 280.74,220.237 L 280.62,220.36 L 280.511,220.493 L 280.413,220.635 L 280.328,220.784 L 280.256,220.941 L 280.198,221.103 L 280.154,221.269 L 280.125,221.439 L 280.11,221.61 L 280.11,221.782 L 280.125,221.953 L 280.154,222.123 L 280.198,222.289 L 280.256,222.451 L 280.328,222.608 L 280.413,222.757 L 280.511,222.899 L 280.62,223.032 L 280.74,223.155 L 280.871,223.267 L 281.01,223.368 L 281.158,223.456 L 281.313,223.531 L 281.474,223.593 L 281.639,223.64 L 281.808,223.673 L 281.979,223.692 L 282.151,223.696 L 282.323,223.684 L 282.493,223.659 L 282.66,223.618 L 282.824,223.564 L 282.981,223.495 L 283.133,223.414 L 283.277,223.319 L 283.412,223.213 L 283.538,223.095 L 283.652,222.967 L 283.756,222.829 L 283.847,222.684 L 283.926,222.53 L 283.991,222.371 L 284.042,222.207 L 284.079,222.039 L 284.101,221.868 L 284.108,221.696 L 282.108,221.696 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 284.108,248.066 L 284.101,247.894 L 284.079,247.723 L 284.042,247.555 L 283.991,247.391 L 283.926,247.231 L 283.847,247.078 L 283.756,246.932 L 283.652,246.795 L 283.538,246.667 L 283.412,246.549 L 283.277,246.443 L 283.133,246.348 L 282.981,246.266 L 282.824,246.198 L 282.66,246.143 L 282.493,246.103 L 282.323,246.077 L 282.151,246.066 L 281.979,246.07 L 281.808,246.088 L 281.639,246.122 L 281.474,246.169 L 281.313,246.231 L 281.158,246.306 L 281.01,246.394 L 280.871,246.494 L 280.74,246.607 L 280.62,246.73 L 280.511,246.862 L 280.413,247.004 L 280.328,247.154 L 280.256,247.31 L 280.198,247.472 L 280.154,247.639 L 280.125,247.808 L 280.11,247.98 L 280.11,248.152 L 280.125,248.323 L 280.154,248.493 L 280.198,248.659 L 280.256,248.821 L 280.328,248.978 L 280.413,249.127 L 280.511,249.269 L 280.62,249.402 L 280.74,249.525 L 280.871,249.637 L 281.01,249.738 L 281.158,249.826 L 281.313,249.901 L 281.474,249.962 L 281.639,250.01 L 281.808,250.043 L 281.979,250.062 L 282.151,250.065 L 282.323,250.054 L 282.493,250.028 L 282.66,249.988 L 282.824,249.933 L 282.981,249.865 L 283.133,249.783 L 283.277,249.689 L 283.412,249.582 L 283.538,249.465 L 283.652,249.337 L 283.756,249.199 L 283.847,249.053 L 283.926,248.9 L 283.991,248.741 L 284.042,248.576 L 284.079,248.408 L 284.101,248.238 L 284.108,248.066 L 282.108,248.066 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 98.4355,46.9341 L 98.4281,46.7622 L 98.406,46.5915 L 98.3692,46.4234 L 98.3182,46.2591 L 98.2532,46.0997 L 98.1747,45.9466 L 98.0834,45.8007 L 97.9798,45.6632 L 97.8649,45.5352 L 97.7393,45.4175 L 97.6041,45.311 L 97.4603,45.2166 L 97.3088,45.1348 L 97.1509,45.0664 L 96.9877,45.0118 L 96.8204,44.9715 L 96.6503,44.9457 L 96.4786,44.9346 L 96.3065,44.9383 L 96.1354,44.9568 L 95.9665,44.9899 L 95.8011,45.0374 L 95.6404,45.0989 L 95.4856,45.1741 L 95.3378,45.2623 L 95.1982,45.3628 L 95.0677,45.475 L 94.9473,45.598 L 94.838,45.7309 L 94.7404,45.8726 L 94.6555,46.0223 L 94.5837,46.1787 L 94.5256,46.3407 L 94.4816,46.5071 L 94.4522,46.6766 L 94.4374,46.8481 L 94.4374,47.0201 L 94.4522,47.1916 L 94.4816,47.3611 L 94.5256,47.5275 L 94.5837,47.6895 L 94.6555,47.8459 L 94.7404,47.9956 L 94.838,48.1374 L 94.9473,48.2702 L 95.0677,48.3932 L 95.1982,48.5054 L 95.3378,48.606 L 95.4856,48.6941 L 95.6404,48.7693 L 95.8011,48.8308 L 95.9665,48.8783 L 96.1354,48.9115 L 96.3065,48.9299 L 96.4786,48.9336 L 96.6503,48.9225 L 96.8204,48.8967 L 96.9877,48.8564 L 97.1509,48.8018 L 97.3088,48.7334 L 97.4603,48.6516 L 97.6041,48.5572 L 97.7393,48.4507 L 97.8649,48.333 L 97.9798,48.205 L 98.0834,48.0675 L 98.1747,47.9217 L 98.2532,47.7685 L 98.3182,47.6092 L 98.3692,47.4448 L 98.406,47.2767 L 98.4281,47.106 L 98.4355,46.9341 L 96.4355,46.9341 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 98.4355,70.9341 L 98.4281,70.7622 L 98.406,70.5915 L 98.3692,70.4234 L 98.3182,70.2591 L 98.2532,70.0997 L 98.1747,69.9466 L 98.0834,69.8007 L 97.9798,69.6632 L 97.8649,69.5352 L 97.7393,69.4175 L 97.6041,69.311 L 97.4603,69.2166 L 97.3088,69.1348 L 97.1509,69.0664 L 96.9877,69.0118 L 96.8204,68.9715 L 96.6503,68.9457 L 96.4786,68.9346 L 96.3065,68.9383 L 96.1354,68.9568 L 95.9665,68.9899 L 95.8011,69.0374 L 95.6404,69.0989 L 95.4856,69.1741 L 95.3378,69.2623 L 95.1982,69.3628 L 95.0677,69.475 L 94.9473,69.598 L 94.838,69.7309 L 94.7404,69.8726 L 94.6555,70.0223 L 94.5837,70.1787 L 94.5256,70.3407 L 94.4816,70.5071 L 94.4522,70.6766 L 94.4374,70.8481 L 94.4374,71.0201 L 94.4522,71.1916 L 94.4816,71.3611 L 94.5256,71.5275 L 94.5837,71.6895 L 94.6555,71.8459 L 94.7404,71.9956 L 94.838,72.1374 L 94.9473,72.2702 L 95.0677,72.3932 L 95.1982,72.5054 L 95.3378,72.606 L 95.4856,72.6941 L 95.6404,72.7693 L 95.8011,72.8308 L 95.9665,72.8783 L 96.1354,72.9115 L 96.3065,72.9299 L 96.4786,72.9336 L 96.6503,72.9225 L 96.8204,72.8967 L 96.9877,72.8564 L 97.1509,72.8018 L 97.3088,72.7334 L 97.4603,72.6516 L 97.6041,72.5572 L 97.7393,72.4507 L 97.8649,72.333 L 97.9798,72.205 L 98.0834,72.0675 L 98.1747,71.9217 L 98.2532,71.7685 L 98.3182,71.6092 L 98.3692,71.4448 L 98.406,71.2767 L 98.4281,71.106 L 98.4355,70.9341 L 96.4355,70.9341 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 98.4355,54.9341 L 98.4281,54.7622 L 98.406,54.5915 L 98.3692,54.4234 L 98.3182,54.2591 L 98.2532,54.0997 L 98.1747,53.9466 L 98.0834,53.8007 L 97.9798,53.6632 L 97.8649,53.5352 L 97.7393,53.4175 L 97.6041,53.311 L 97.4603,53.2166 L 97.3088,53.1348 L 97.1509,53.0664 L 96.9877,53.0118 L 96.8204,52.9715 L 96.6503,52.9457 L 96.4786,52.9346 L 96.3065,52.9383 L 96.1354,52.9568 L 95.9665,52.9899 L 95.8011,53.0374 L 95.6404,53.0989 L 95.4856,53.1741 L 95.3378,53.2623 L 95.1982,53.3628 L 95.0677,53.475 L 94.9473,53.598 L 94.838,53.7309 L 94.7404,53.8726 L 94.6555,54.0223 L 94.5837,54.1787 L 94.5256,54.3407 L 94.4816,54.5071 L 94.4522,54.6766 L 94.4374,54.8481 L 94.4374,55.0201 L 94.4522,55.1916 L 94.4816,55.3611 L 94.5256,55.5275 L 94.5837,55.6895 L 94.6555,55.8459 L 94.7404,55.9956 L 94.838,56.1374 L 94.9473,56.2702 L 95.0677,56.3932 L 95.1982,56.5054 L 95.3378,56.606 L 95.4856,56.6941 L 95.6404,56.7693 L 95.8011,56.8308 L 95.9665,56.8783 L 96.1354,56.9115 L 96.3065,56.9299 L 96.4786,56.9336 L 96.6503,56.9225 L 96.8204,56.8967 L 96.9877,56.8564 L 97.1509,56.8018 L 97.3088,56.7334 L 97.4603,56.6516 L 97.6041,56.5572 L 97.7393,56.4507 L 97.8649,56.333 L 97.9798,56.205 L 98.0834,56.0675 L 98.1747,55.9217 L 98.2532,55.7685 L 98.3182,55.6092 L 98.3692,55.4448 L 98.406,55.2767 L 98.4281,55.106 L 98.4355,54.9341 L 96.4355,54.9341 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 98.4355,62.9341 L 98.4281,62.7622 L 98.406,62.5915 L 98.3692,62.4234 L 98.3182,62.2591 L 98.2532,62.0997 L 98.1747,61.9466 L 98.0834,61.8007 L 97.9798,61.6632 L 97.8649,61.5352 L 97.7393,61.4175 L 97.6041,61.311 L 97.4603,61.2166 L 97.3088,61.1348 L 97.1509,61.0664 L 96.9877,61.0118 L 96.8204,60.9715 L 96.6503,60.9457 L 96.4786,60.9346 L 96.3065,60.9383 L 96.1354,60.9568 L 95.9665,60.9899 L 95.8011,61.0374 L 95.6404,61.0989 L 95.4856,61.1741 L 95.3378,61.2623 L 95.1982,61.3628 L 95.0677,61.475 L 94.9473,61.598 L 94.838,61.7309 L 94.7404,61.8726 L 94.6555,62.0223 L 94.5837,62.1787 L 94.5256,62.3407 L 94.4816,62.5071 L 94.4522,62.6766 L 94.4374,62.8481 L 94.4374,63.0201 L 94.4522,63.1916 L 94.4816,63.3611 L 94.5256,63.5275 L 94.5837,63.6895 L 94.6555,63.8459 L 94.7404,63.9956 L 94.838,64.1374 L 94.9473,64.2702 L 95.0677,64.3932 L 95.1982,64.5054 L 95.3378,64.606 L 95.4856,64.6941 L 95.6404,64.7693 L 95.8011,64.8308 L 95.9665,64.8783 L 96.1354,64.9115 L 96.3065,64.9299 L 96.4786,64.9336 L 96.6503,64.9225 L 96.8204,64.8967 L 96.9877,64.8564 L 97.1509,64.8018 L 97.3088,64.7334 L 97.4603,64.6516 L 97.6041,64.5572 L 97.7393,64.4507 L 97.8649,64.333 L 97.9798,64.205 L 98.0834,64.0675 L 98.1747,63.9217 L 98.2532,63.7685 L 98.3182,63.6092 L 98.3692,63.4448 L 98.406,63.2767 L 98.4281,63.106 L 98.4355,62.9341 L 96.4355,62.9341 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
</svg>
 data:image/svg+xml;base64,<?xml version='1.0' encoding='iso-8859-1'?>
<svg version='1.1' baseProfile='full'
              xmlns='http://www.w3.org/2000/svg'
                      xmlns:rdkit='http://www.rdkit.org/xml'
                      xmlns:xlink='http://www.w3.org/1999/xlink'
                  xml:space='preserve'
width='85px' height='85px' viewBox='0 0 85 85'>
<!-- END OF HEADER -->
<rect style='opacity:1.0;fill:#FFFFFF;stroke:none' width='85' height='85' x='0' y='0'> </rect>
<text x='3.36364' y='64.1078' class='atom-0' style='font-size:20px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#E84235' >H</text>
<text x='16.7398' y='72.4636' class='atom-0' style='font-size:13px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#E84235' >2</text>
<text x='22.9471' y='64.1078' class='atom-0' style='font-size:20px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#E84235' >O</text>
<text x='60.896' y='64.1078' class='atom-1' style='font-size:20px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >I</text>
<text x='68.1028' y='64.1078' class='atom-1' style='font-size:20px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >n</text>
<text x='22.9471' y='29.2923' class='atom-2' style='font-size:20px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >S</text>
<text x='37.3607' y='29.2923' class='atom-2' style='font-size:20px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >n</text>
<path d='M 80.5565,53.6632 L 80.5526,53.5734 L 80.5411,53.4843 L 80.5219,53.3965 L 80.4952,53.3107 L 80.4613,53.2274 L 80.4203,53.1475 L 80.3726,53.0713 L 80.3185,52.9995 L 80.2585,52.9326 L 80.1929,52.8712 L 80.1223,52.8156 L 80.0472,52.7662 L 79.9681,52.7236 L 79.8856,52.6878 L 79.8004,52.6593 L 79.713,52.6383 L 79.6242,52.6248 L 79.5345,52.619 L 79.4447,52.6209 L 79.3553,52.6306 L 79.2671,52.6478 L 79.1807,52.6727 L 79.0968,52.7048 L 79.016,52.7441 L 78.9388,52.7901 L 78.8658,52.8426 L 78.7977,52.9012 L 78.7348,52.9654 L 78.6777,53.0348 L 78.6268,53.1089 L 78.5824,53.187 L 78.5449,53.2687 L 78.5146,53.3533 L 78.4916,53.4402 L 78.4763,53.5287 L 78.4685,53.6183 L 78.4685,53.7081 L 78.4763,53.7977 L 78.4916,53.8862 L 78.5146,53.9731 L 78.5449,54.0577 L 78.5824,54.1394 L 78.6268,54.2175 L 78.6777,54.2916 L 78.7348,54.361 L 78.7977,54.4252 L 78.8658,54.4838 L 78.9388,54.5363 L 79.016,54.5823 L 79.0968,54.6216 L 79.1807,54.6537 L 79.2671,54.6785 L 79.3553,54.6958 L 79.4447,54.7055 L 79.5345,54.7074 L 79.6242,54.7016 L 79.713,54.6881 L 79.8004,54.6671 L 79.8856,54.6386 L 79.9681,54.6028 L 80.0472,54.5601 L 80.1223,54.5108 L 80.1929,54.4552 L 80.2585,54.3938 L 80.3185,54.3269 L 80.3726,54.2551 L 80.4203,54.1789 L 80.4613,54.0989 L 80.4952,54.0157 L 80.5219,53.9299 L 80.5411,53.8421 L 80.5526,53.753 L 80.5565,53.6632 L 79.512,53.6632 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 80.5565,57.8411 L 80.5526,57.7513 L 80.5411,57.6621 L 80.5219,57.5743 L 80.4952,57.4885 L 80.4613,57.4053 L 80.4203,57.3253 L 80.3726,57.2492 L 80.3185,57.1774 L 80.2585,57.1105 L 80.1929,57.049 L 80.1223,56.9934 L 80.0472,56.9441 L 79.9681,56.9014 L 79.8856,56.8657 L 79.8004,56.8372 L 79.713,56.8161 L 79.6242,56.8026 L 79.5345,56.7968 L 79.4447,56.7988 L 79.3553,56.8084 L 79.2671,56.8257 L 79.1807,56.8505 L 79.0968,56.8827 L 79.016,56.9219 L 78.9388,56.968 L 78.8658,57.0205 L 78.7977,57.0791 L 78.7348,57.1433 L 78.6777,57.2127 L 78.6268,57.2867 L 78.5824,57.3649 L 78.5449,57.4465 L 78.5146,57.5311 L 78.4916,57.618 L 78.4763,57.7066 L 78.4685,57.7961 L 78.4685,57.886 L 78.4763,57.9755 L 78.4916,58.0641 L 78.5146,58.151 L 78.5449,58.2356 L 78.5824,58.3172 L 78.6268,58.3954 L 78.6777,58.4694 L 78.7348,58.5388 L 78.7977,58.603 L 78.8658,58.6616 L 78.9388,58.7141 L 79.016,58.7602 L 79.0968,58.7994 L 79.1807,58.8316 L 79.2671,58.8564 L 79.3553,58.8737 L 79.4447,58.8833 L 79.5345,58.8853 L 79.6242,58.8795 L 79.713,58.866 L 79.8004,58.8449 L 79.8856,58.8164 L 79.9681,58.7807 L 80.0472,58.738 L 80.1223,58.6887 L 80.1929,58.6331 L 80.2585,58.5716 L 80.3185,58.5047 L 80.3726,58.433 L 80.4203,58.3568 L 80.4613,58.2768 L 80.4952,58.1936 L 80.5219,58.1078 L 80.5411,58.02 L 80.5526,57.9308 L 80.5565,57.8411 L 79.512,57.8411 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 80.5565,49.4853 L 80.5526,49.3955 L 80.5411,49.3064 L 80.5219,49.2186 L 80.4952,49.1328 L 80.4613,49.0496 L 80.4203,48.9696 L 80.3726,48.8934 L 80.3185,48.8216 L 80.2585,48.7548 L 80.1929,48.6933 L 80.1223,48.6377 L 80.0472,48.5884 L 79.9681,48.5457 L 79.8856,48.51 L 79.8004,48.4815 L 79.713,48.4604 L 79.6242,48.4469 L 79.5345,48.4411 L 79.4447,48.443 L 79.3553,48.4527 L 79.2671,48.47 L 79.1807,48.4948 L 79.0968,48.5269 L 79.016,48.5662 L 78.9388,48.6122 L 78.8658,48.6647 L 78.7977,48.7233 L 78.7348,48.7876 L 78.6777,48.857 L 78.6268,48.931 L 78.5824,49.0092 L 78.5449,49.0908 L 78.5146,49.1754 L 78.4916,49.2623 L 78.4763,49.3509 L 78.4685,49.4404 L 78.4685,49.5303 L 78.4763,49.6198 L 78.4916,49.7083 L 78.5146,49.7952 L 78.5449,49.8798 L 78.5824,49.9615 L 78.6268,50.0397 L 78.6777,50.1137 L 78.7348,50.1831 L 78.7977,50.2473 L 78.8658,50.3059 L 78.9388,50.3584 L 79.016,50.4045 L 79.0968,50.4437 L 79.1807,50.4759 L 79.2671,50.5007 L 79.3553,50.518 L 79.4447,50.5276 L 79.5345,50.5296 L 79.6242,50.5238 L 79.713,50.5103 L 79.8004,50.4892 L 79.8856,50.4607 L 79.9681,50.425 L 80.0472,50.3823 L 80.1223,50.333 L 80.1929,50.2774 L 80.2585,50.2159 L 80.3185,50.149 L 80.3726,50.0772 L 80.4203,50.0011 L 80.4613,49.9211 L 80.4952,49.8379 L 80.5219,49.752 L 80.5411,49.6642 L 80.5526,49.5751 L 80.5565,49.4853 L 79.512,49.4853 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 80.5565,53.6632 L 80.5526,53.5734 L 80.5411,53.4843 L 80.5219,53.3965 L 80.4952,53.3107 L 80.4613,53.2274 L 80.4203,53.1475 L 80.3726,53.0713 L 80.3185,52.9995 L 80.2585,52.9326 L 80.1929,52.8712 L 80.1223,52.8156 L 80.0472,52.7662 L 79.9681,52.7236 L 79.8856,52.6878 L 79.8004,52.6593 L 79.713,52.6383 L 79.6242,52.6248 L 79.5345,52.619 L 79.4447,52.6209 L 79.3553,52.6306 L 79.2671,52.6478 L 79.1807,52.6727 L 79.0968,52.7048 L 79.016,52.7441 L 78.9388,52.7901 L 78.8658,52.8426 L 78.7977,52.9012 L 78.7348,52.9654 L 78.6777,53.0348 L 78.6268,53.1089 L 78.5824,53.187 L 78.5449,53.2687 L 78.5146,53.3533 L 78.4916,53.4402 L 78.4763,53.5287 L 78.4685,53.6183 L 78.4685,53.7081 L 78.4763,53.7977 L 78.4916,53.8862 L 78.5146,53.9731 L 78.5449,54.0577 L 78.5824,54.1394 L 78.6268,54.2175 L 78.6777,54.2916 L 78.7348,54.361 L 78.7977,54.4252 L 78.8658,54.4838 L 78.9388,54.5363 L 79.016,54.5823 L 79.0968,54.6216 L 79.1807,54.6537 L 79.2671,54.6785 L 79.3553,54.6958 L 79.4447,54.7055 L 79.5345,54.7074 L 79.6242,54.7016 L 79.713,54.6881 L 79.8004,54.6671 L 79.8856,54.6386 L 79.9681,54.6028 L 80.0472,54.5601 L 80.1223,54.5108 L 80.1929,54.4552 L 80.2585,54.3938 L 80.3185,54.3269 L 80.3726,54.2551 L 80.4203,54.1789 L 80.4613,54.0989 L 80.4952,54.0157 L 80.5219,53.9299 L 80.5411,53.8421 L 80.5526,53.753 L 80.5565,53.6632 L 79.512,53.6632 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 47.2999,12.5809 L 47.296,12.4911 L 47.2845,12.402 L 47.2653,12.3142 L 47.2386,12.2284 L 47.2047,12.1452 L 47.1637,12.0652 L 47.116,11.989 L 47.0619,11.9172 L 47.0019,11.8503 L 46.9363,11.7889 L 46.8657,11.7333 L 46.7906,11.684 L 46.7115,11.6413 L 46.629,11.6055 L 46.5438,11.577 L 46.4565,11.556 L 46.3676,11.5425 L 46.2779,11.5367 L 46.1881,11.5386 L 46.0987,11.5483 L 46.0105,11.5656 L 45.9241,11.5904 L 45.8402,11.6225 L 45.7594,11.6618 L 45.6822,11.7078 L 45.6093,11.7603 L 45.5411,11.8189 L 45.4783,11.8831 L 45.4211,11.9525 L 45.3702,12.0266 L 45.3258,12.1047 L 45.2883,12.1864 L 45.258,12.271 L 45.2351,12.3579 L 45.2197,12.4464 L 45.2119,12.536 L 45.2119,12.6258 L 45.2197,12.7154 L 45.2351,12.8039 L 45.258,12.8908 L 45.2883,12.9754 L 45.3258,13.0571 L 45.3702,13.1352 L 45.4211,13.2093 L 45.4783,13.2787 L 45.5411,13.3429 L 45.6093,13.4015 L 45.6822,13.454 L 45.7594,13.5 L 45.8402,13.5393 L 45.9241,13.5714 L 46.0105,13.5962 L 46.0987,13.6135 L 46.1881,13.6232 L 46.2779,13.6251 L 46.3676,13.6193 L 46.4565,13.6058 L 46.5438,13.5848 L 46.629,13.5563 L 46.7115,13.5205 L 46.7906,13.4779 L 46.8657,13.4285 L 46.9363,13.3729 L 47.0019,13.3115 L 47.0619,13.2446 L 47.116,13.1728 L 47.1637,13.0966 L 47.2047,13.0166 L 47.2386,12.9334 L 47.2653,12.8476 L 47.2845,12.7598 L 47.296,12.6707 L 47.2999,12.5809 L 46.2554,12.5809 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 47.2999,25.1145 L 47.296,25.0247 L 47.2845,24.9356 L 47.2653,24.8478 L 47.2386,24.762 L 47.2047,24.6787 L 47.1637,24.5988 L 47.116,24.5226 L 47.0619,24.4508 L 47.0019,24.3839 L 46.9363,24.3225 L 46.8657,24.2669 L 46.7906,24.2175 L 46.7115,24.1748 L 46.629,24.1391 L 46.5438,24.1106 L 46.4565,24.0895 L 46.3676,24.0761 L 46.2779,24.0703 L 46.1881,24.0722 L 46.0987,24.0818 L 46.0105,24.0991 L 45.9241,24.124 L 45.8402,24.1561 L 45.7594,24.1953 L 45.6822,24.2414 L 45.6093,24.2939 L 45.5411,24.3525 L 45.4783,24.4167 L 45.4211,24.4861 L 45.3702,24.5602 L 45.3258,24.6383 L 45.2883,24.72 L 45.258,24.8046 L 45.2351,24.8915 L 45.2197,24.98 L 45.2119,25.0695 L 45.2119,25.1594 L 45.2197,25.249 L 45.2351,25.3375 L 45.258,25.4244 L 45.2883,25.509 L 45.3258,25.5907 L 45.3702,25.6688 L 45.4211,25.7429 L 45.4783,25.8123 L 45.5411,25.8765 L 45.6093,25.9351 L 45.6822,25.9876 L 45.7594,26.0336 L 45.8402,26.0729 L 45.9241,26.105 L 46.0105,26.1298 L 46.0987,26.1471 L 46.1881,26.1568 L 46.2779,26.1587 L 46.3676,26.1529 L 46.4565,26.1394 L 46.5438,26.1183 L 46.629,26.0898 L 46.7115,26.0541 L 46.7906,26.0114 L 46.8657,25.9621 L 46.9363,25.9065 L 47.0019,25.845 L 47.0619,25.7782 L 47.116,25.7064 L 47.1637,25.6302 L 47.2047,25.5502 L 47.2386,25.467 L 47.2653,25.3812 L 47.2845,25.2934 L 47.296,25.2043 L 47.2999,25.1145 L 46.2554,25.1145 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 47.2999,16.7588 L 47.296,16.669 L 47.2845,16.5799 L 47.2653,16.4921 L 47.2386,16.4062 L 47.2047,16.323 L 47.1637,16.243 L 47.116,16.1669 L 47.0619,16.0951 L 47.0019,16.0282 L 46.9363,15.9667 L 46.8657,15.9111 L 46.7906,15.8618 L 46.7115,15.8191 L 46.629,15.7834 L 46.5438,15.7549 L 46.4565,15.7338 L 46.3676,15.7203 L 46.2779,15.7145 L 46.1881,15.7165 L 46.0987,15.7261 L 46.0105,15.7434 L 45.9241,15.7682 L 45.8402,15.8004 L 45.7594,15.8396 L 45.6822,15.8857 L 45.6093,15.9382 L 45.5411,15.9968 L 45.4783,16.061 L 45.4211,16.1304 L 45.3702,16.2044 L 45.3258,16.2826 L 45.2883,16.3643 L 45.258,16.4489 L 45.2351,16.5357 L 45.2197,16.6243 L 45.2119,16.7138 L 45.2119,16.8037 L 45.2197,16.8932 L 45.2351,16.9818 L 45.258,17.0687 L 45.2883,17.1533 L 45.3258,17.2349 L 45.3702,17.3131 L 45.4211,17.3871 L 45.4783,17.4565 L 45.5411,17.5208 L 45.6093,17.5793 L 45.6822,17.6319 L 45.7594,17.6779 L 45.8402,17.7171 L 45.9241,17.7493 L 46.0105,17.7741 L 46.0987,17.7914 L 46.1881,17.8011 L 46.2779,17.803 L 46.3676,17.7972 L 46.4565,17.7837 L 46.5438,17.7626 L 46.629,17.7341 L 46.7115,17.6984 L 46.7906,17.6557 L 46.8657,17.6064 L 46.9363,17.5508 L 47.0019,17.4893 L 47.0619,17.4224 L 47.116,17.3507 L 47.1637,17.2745 L 47.2047,17.1945 L 47.2386,17.1113 L 47.2653,17.0255 L 47.2845,16.9377 L 47.296,16.8486 L 47.2999,16.7588 L 46.2554,16.7588 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 47.2999,20.9366 L 47.296,20.8468 L 47.2845,20.7577 L 47.2653,20.6699 L 47.2386,20.5841 L 47.2047,20.5009 L 47.1637,20.4209 L 47.116,20.3447 L 47.0619,20.2729 L 47.0019,20.2061 L 46.9363,20.1446 L 46.8657,20.089 L 46.7906,20.0397 L 46.7115,19.997 L 46.629,19.9613 L 46.5438,19.9328 L 46.4565,19.9117 L 46.3676,19.8982 L 46.2779,19.8924 L 46.1881,19.8943 L 46.0987,19.904 L 46.0105,19.9213 L 45.9241,19.9461 L 45.8402,19.9782 L 45.7594,20.0175 L 45.6822,20.0635 L 45.6093,20.116 L 45.5411,20.1746 L 45.4783,20.2389 L 45.4211,20.3082 L 45.3702,20.3823 L 45.3258,20.4604 L 45.2883,20.5421 L 45.258,20.6267 L 45.2351,20.7136 L 45.2197,20.8021 L 45.2119,20.8917 L 45.2119,20.9816 L 45.2197,21.0711 L 45.2351,21.1596 L 45.258,21.2465 L 45.2883,21.3311 L 45.3258,21.4128 L 45.3702,21.491 L 45.4211,21.565 L 45.4783,21.6344 L 45.5411,21.6986 L 45.6093,21.7572 L 45.6822,21.8097 L 45.7594,21.8558 L 45.8402,21.895 L 45.9241,21.9272 L 46.0105,21.952 L 46.0987,21.9693 L 46.1881,21.9789 L 46.2779,21.9808 L 46.3676,21.975 L 46.4565,21.9616 L 46.5438,21.9405 L 46.629,21.912 L 46.7115,21.8763 L 46.7906,21.8336 L 46.8657,21.7842 L 46.9363,21.7286 L 47.0019,21.6672 L 47.0619,21.6003 L 47.116,21.5285 L 47.1637,21.4524 L 47.2047,21.3724 L 47.2386,21.2892 L 47.2653,21.2033 L 47.2845,21.1155 L 47.296,21.0264 L 47.2999,20.9366 L 46.2554,20.9366 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
</svg>
 O.[In].[Sn] MRNHPUHPBOKKQT-UHFFFAOYSA-N 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 238000005424 photoluminescence Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000002269 spontaneous Effects 0.000 description 1
- 230000021037 unidirectional conjugation Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
- G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
- G09F9/301—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements flexible foldable or roll-able electronic displays, e.g. thin LCD, OLED
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/562—Protection against mechanical damage
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L51/00—Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
- H01L51/50—Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof specially adapted for light emission, e.g. organic light emitting diodes [OLED] or polymer light emitting devices [PLED]
- H01L51/56—Processes or apparatus specially adapted for the manufacture or treatment of such devices or of parts thereof
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
- G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
- G09F9/33—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being semiconductor devices, e.g. diodes
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/28—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including components using organic materials as the active part, or using a combination of organic materials with other materials as the active part
- H01L27/32—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including components using organic materials as the active part, or using a combination of organic materials with other materials as the active part with components specially adapted for light emission, e.g. flat-panel displays using organic light-emitting diodes [OLED]
- H01L27/3241—Matrix-type displays
- H01L27/3244—Active matrix displays
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/28—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including components using organic materials as the active part, or using a combination of organic materials with other materials as the active part
- H01L27/32—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including components using organic materials as the active part, or using a combination of organic materials with other materials as the active part with components specially adapted for light emission, e.g. flat-panel displays using organic light-emitting diodes [OLED]
- H01L27/3241—Matrix-type displays
- H01L27/3244—Active matrix displays
- H01L27/326—Active matrix displays special geometry or disposition of pixel-elements
- H01L27/3262—Active matrix displays special geometry or disposition of pixel-elements of TFT
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/28—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including components using organic materials as the active part, or using a combination of organic materials with other materials as the active part
- H01L27/32—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including components using organic materials as the active part, or using a combination of organic materials with other materials as the active part with components specially adapted for light emission, e.g. flat-panel displays using organic light-emitting diodes [OLED]
- H01L27/3241—Matrix-type displays
- H01L27/3244—Active matrix displays
- H01L27/3276—Wiring lines
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L51/00—Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
- H01L51/0096—Substrates
- H01L51/0097—Substrates flexible substrates
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L51/00—Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
- H01L51/50—Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof specially adapted for light emission, e.g. organic light emitting diodes [OLED] or polymer light emitting devices [PLED]
- H01L51/52—Details of devices
- H01L51/5237—Passivation; Containers; Encapsulation, e.g. against humidity
- H01L51/5253—Protective coatings
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L2227/00—Indexing scheme for devices consisting of a plurality of semiconductor or other solid state components formed in or on a common substrate covered by group H01L27/00
- H01L2227/32—Devices including an organic light emitting device [OLED], e.g. OLED display
- H01L2227/323—Multistep processes for AMOLED
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L2251/00—Indexing scheme relating to organic semiconductor devices covered by group H01L51/00
- H01L2251/50—Organic light emitting devices
- H01L2251/53—Structure
- H01L2251/5338—Flexible OLED
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
Abstract
本发明提供一种柔性显示装置的制作方法及柔性显示装置。本发明的柔性显示装置的制作方法中,先将柔性显示面板的弯折区与柔性电路板绑定,而后将柔性显示面板的弯折区向柔性显示面板的背面弯曲,之后在柔性显示面板上制作位于柔性显示面板的正面对应弯折区设置的第一保护胶层。利用第一保护胶层对弯折区内的走线进行保护,同时由于第一保护层形成在弯折区弯曲之后,相比于现有技术,降低了将柔性显示面板的弯折区弯曲的难度,减小柔性显示面板的弯折区在弯曲时所受的应力,提升产品品质。
Description
技术领域
本发明涉及显示技术领域,尤其涉及一种柔性显示装置的制作方法及柔性显示装置。
背景技术
有机发光二极管显示装置(Organic Light Emitting Display,OLED)具有自发光、驱动电压低、发光效率高、响应时间短、清晰度与对比度高、近180°视角、使用温度范围宽,可实现柔性显示与大面积全色显示等诸多优点,被业界公认为是最有发展潜力的显示装置。
OLED器件通常包括:基板、设于基板上的阳极、设于阳极上的空穴注入层、设于空穴注入层上的空穴传输层、设于空穴传输层上的发光层、设于发光层上的电子传输层、设于电子传输层上的电子注入层、及设于电子注入层上的阴极。OLED器件的发光原理为半导体材料和有机发光材料在电场驱动下,通过载流子注入和复合导致发光。具体的,OLED器件通常采用氧化铟锡(ITO)电极和金属电极分别作为器件的阳极和阴极,在一定电压驱动下,电子和空穴分别从阴极和阳极注入到电子传输层和空穴传输层,电子和空穴分别经过电子传输层和空穴传输层迁移到发光层,并在发光层中相遇,形成激子并使发光分子激发,后者经过辐射弛豫而发出可见光。
随着科技的发展,柔性显示装置展现出越来越广泛的应用前景,而柔性OLED显示装置作为当前最被看好的柔性显示技术,各方面投资和市占率不断上升。请参阅图1,为现有的一种柔性显示装置,包括柔性显示面板100’及与柔性显示面板100’绑定的柔性电路板(Flexible Printed Circuit,FPC)200’,所述柔性显示面板100’的一端设有弯折区110’,所述柔性电路板200’与柔性显示面板100’的弯折区110’绑定,且所述柔性显示面板100’的弯折区110’向柔性显示面板100’的背面弯曲,以减小显示装置的边界(border)宽度,提升屏占比,而现有技术在将柔性显示面板100’的弯折区110’弯曲之前,会在柔性显示面板100’正面对应弯折区110’涂布一层保护胶层500’(例如紫外光固化胶)并进行固化,之后将柔性显示面板100’的弯折区110’及其上的保护胶层500’向柔性显示面板100’的背面弯曲,该保护胶层500’的设置是为了对柔性显示面板100’的弯折区110’进行保护,然而,保护胶层500’的厚度较柔性显示面板100’中的柔性基板更厚,且其由于经过固化具有较高的硬度,大大增加了将柔性显示面板100’的弯折区110’弯曲的难度,且会增大弯折区110’在弯曲时受到的应力,对弯折区110’内的线路造成损伤。
发明内容
本发明的目的在于提供一种柔性显示装置的制作方法,能够对柔性显示面板的弯折区进行保护,降低将柔性显示面板的弯折区弯曲的难度,防止柔性显示面板的弯折区在弯曲时受到较大的应力。
本发明的另一目的在于提供一种柔性显示装置,能够对柔性显示面板的弯折区进行保护,降低将柔性显示面板的弯折区弯曲的难度,防止柔性显示面板的弯折区在弯曲时受到较大的应力。
为实现上述目的,本发明首先提供一种柔性显示装置的制作方法,包括如下步骤:
步骤S1、提供柔性显示面板;
所述柔性显示面板具有位于其一端的弯折区;
步骤S2、提供柔性电路板,将所述柔性电路板与柔性显示面板的弯折区绑定;
步骤S3、将柔性显示面板的弯折区向柔性显示面板的背面弯曲;
步骤S4、在柔性显示面板上涂布胶材,形成位于柔性显示面板的正面对应弯折区设置的第一保护胶层。
所述柔性显示面板包括柔性基板、于柔性基板一侧依次设置的TFT阵列层及OLED器件层以及设于柔性基板设有TFT阵列层的一侧且位于弯折区内的走线层,所述柔性显示面板的背面为柔性基板远离TFT阵列层的一侧,所述第一保护胶层设于所述走线层上。
所述柔性基板的材料为聚酰亚胺、聚醚酰亚胺、聚苯硫醚及聚芳酯中的一种或多种的组合。
所述柔性显示面板还包括覆盖OLED器件层的薄膜封装层;
所述步骤S1还包括,在薄膜封装层远离柔性衬底的一侧依次制作触控模组、圆偏光片及保护盖板。
所述步骤S4具体为:在柔性显示面板的正面对应弯折区喷涂胶材,形成位于柔性显示面板的正面对应弯折区设置的第一保护胶层。
所述步骤S4具体为:将柔性显示面板的弯折区浸泡在胶材中,使胶材对应弯折区涂布在柔性显示面板的正面及背面,形成位于柔性显示面板的正面对应弯折区设置的第一保护胶层,同时形成位于柔性显示面板的背面对应弯折区设置的第二保护胶层。
所述胶材为紫外光固化胶、热固化胶或常温固化胶,所述步骤S4还包括在柔性显示面板上涂布胶材后对胶材进行固化的步骤。
所述柔性显示面板的背面设有支撑板,所述支撑板覆盖柔性显示面板除弯折区以外的区域。
所述步骤S3之前还包括在支撑板远离柔性显示面板的侧面或柔性电路板与柔性显示面板的背面位于同侧的侧面设置双面胶的步骤,所述步骤S3将柔性显示面板的弯折区向柔性显示面板的背面弯曲后,双面胶将柔性电路板与支撑板贴附。
本发明还提供一种柔性显示装置,采用上述的柔性显示装置的制作方法制得,该柔性显示装置包括:柔性显示面板、与柔性显示面板绑定的柔性电路板以及设置在柔性显示面板上的第一保护胶层;
所述柔性显示面板具有位于其一端的弯折区,所述柔性电路板与柔性显示面板的弯折区绑定;所述柔性显示面板的弯折区向柔性显示面板的背面弯曲;所述第一保护胶层于柔性显示面板的正面对应所述弯折区设置。
本发明的有益效果:本发明提供的一种柔性显示装置的制作方法中,先将柔性显示面板的弯折区与柔性电路板绑定,而后将柔性显示面板的弯折区向柔性显示面板的背面弯曲,之后在柔性显示面板上制作位于柔性显示面板的正面对应弯折区设置的第一保护胶层。利用第一保护胶层对弯折区内的走线进行保护,同时由于第一保护层形成在弯折区弯曲之后,相比于现有技术,降低了将柔性显示面板的弯折区弯曲的难度,减小柔性显示面板的弯折区在弯曲时所受的应力,提升产品品质。本发明提供的一种柔性显示装置采用上述的柔性显示装置的制作方法制得,能够对柔性显示面板的弯折区进行保护,降低将柔性显示面板的弯折区弯曲的难度,防止柔性显示面板的弯折区在弯曲时受到较大的应力。
附图说明
为了能更进一步了解本发明的特征以及技术内容,请参阅以下有关本发明的详细说明与附图,然而附图仅提供参考与说明用,并非用来对本发明加以限制。
附图中,
图1为现有的一种柔性显示装置的结构示意图;
图2为本发明的柔性显示装置的制作方法的流程图;
图3为本发明的柔性显示装置的制作方法的步骤S1及步骤S2的示意图;
图4为本发明的柔性显示装置的制作方法的步骤S3的示意图;
图5为本发明的柔性显示装置的制作方法的第一实施例的步骤S4的示意图暨本发明的柔性显示装置的第一实施例的结构示意图;
图6为本发明的柔性显示装置的制作方法的第二实施例的步骤S4的示意图暨本发明的柔性显示装置的第二实施例的结构示意图。
具体实施方式
为更进一步阐述本发明所采取的技术手段及其效果,以下结合本发明的优选实施例及其附图进行详细描述。
请参阅图2,本发明提供一种柔性显示装置的制作方法,包括如下步骤:
步骤S1、请参阅图3,提供柔性显示面板100;
所述柔性显示面板100具有位于其一端的弯折区101。
具体地,请参阅图3,所述柔性显示面板100包括柔性基板110、于柔性基板110一侧依次设置的TFT(薄膜晶体管)阵列层120及OLED器件层130以及设于柔性基板110设有TFT阵列层120的一侧且位于弯折区101内的走线层140,所述柔性显示面板100的背面为柔性基板110远离TFT阵列层120的一侧,所述柔性显示面板100的正面为与背面相对的一侧。
具体地,所述走线层140可与TFT阵列层120的源漏极层位于同层,所述走线层140与柔性基板110之间及走线层140上分别设有一层绝缘层(未图示)。
具体地,所述柔性基板110的材料可以但不限于为聚酰亚胺(PI)、聚醚酰亚胺(PEI)、聚苯硫醚(PPS)及聚芳酯(PAR)中的一种或多种的组合。
具体地,所述TFT阵列层120包括多个TFT,所述多个TFT可以为铟镓锌氧化物半导体(IGZO)TFT,也可以为低温多晶硅TFT,当然,也可采用其他现有技术中常用的TFT。
具体地,请参阅图3,所述柔性显示面板100还包括覆盖OLED器件层130的薄膜封装层150,用于阻隔水氧侵入OLED器件层130。
具体地,所述步骤S1还包括在薄膜封装层150远离柔性衬底110的一侧依次制作触控模组400、圆偏光片500及保护盖板600。
具体地,请参阅图3,所述触控模组400包括设置在薄膜封装层150上的触控层410以及与触控层410连接的触控柔性电路板420。
具体地,所述触控模组400用于实现柔性显示装置的触控功能,圆偏光片500用于减少外部入射光线的反射,保护盖板600用于对柔性显示装置整体进行保护。
具体地,触控模组400与柔性显示面板100之间、触控模组400与圆偏光片500之间以及圆偏光片500与保护盖板600之间刻通过包括透明光学胶(OCA)在内的各类胶材粘合在一起。
具体地,所述柔性显示面板100的背面设有支撑板700,所述支撑板700覆盖柔性显示面板100除弯折区101以外的区域,用于对柔性基板110进行支撑和保护。
步骤S2、请参阅图3,提供柔性电路板200,将所述柔性电路板200与柔性显示面板100的弯折区101绑定。
步骤S3、请参阅图4,将柔性显示面板100的弯折区101向柔性显示面板100的背面弯曲。
具体地,所述步骤S3之前还包括在支撑板700远离柔性显示面板100的侧面或柔性电路板200与柔性显示面板100的背面位于同侧的侧面设置双面胶800的步骤,所述步骤S3将柔性显示面板100的弯折区101向柔性显示面板100的背面弯曲后,双面胶800将柔性电路板200与支撑板700贴附。通过将柔性显示面板100的弯折区101向柔性显示面板100的背面弯曲,有效地减小显示装置的边界宽度,提升屏占比。
步骤S4、在柔性显示面板100上涂布胶材,形成位于柔性显示面板100的正面对应弯折区101设置的第一保护胶层310。
具体地,所述第一保护胶层310设于所述走线层140上。进一步地,所述第一保护胶层310设于走线层140上的绝缘层上。
具体地,请参阅图5,在本发明的柔性显示装置的制作方法的第一实施例中,所述步骤S4具体为:在柔性显示面板100的正面对应弯折区101喷涂胶材,形成位于柔性显示面板100的正面对应弯折区101设置的第一保护胶层310,利用第一保护胶层310对柔性显示面板100的弯折区101进行支撑及保护。
具体地,请参阅图6,在本发明的柔性显示装置的制作方法的第二实施例中,所述步骤S4具体为:将柔性显示面板100的弯折区101浸泡在胶材中,使胶材对应弯折区101涂布在柔性显示面板100的正面及背面,形成位于柔性显示面板100的正面对应弯折区101设置的第一保护胶层310,同时形成位于柔性显示面板100的背面对应弯折区101设置的第二保护胶层320,利用第一保护胶层310及第二保护胶层320同时对柔性显示面板100的弯折区101的正面及背面均进行支撑及保护,支撑及保护效果更好。
具体地,所述胶材可以但不限于为紫外光(UV)固化胶、热固化胶或常温固化胶,所述步骤S4还包括在柔性显示面板100上涂布胶材后对胶材进行固化的步骤,以形成坚固的第一保护胶层310或第一保护胶层310与第二保护胶层320。
需要说明的是,本发明的柔性显示装置的制作方法中,先将柔性显示面板100的弯折区101与柔性电路板200绑定,而后将柔性显示面板100的弯折区101向柔性显示面板100的背面弯曲,之后在柔性显示面板100上制作位于柔性显示面板100的正面对应弯折区101设置的第一保护胶层310,进一步还可制作位于柔性显示面板100的背面对应弯折区101设置的第二保护胶层320,利用第一保护胶层310及第二保护胶层320对弯折区101进行保护及支撑,防止由于弯折导致弯折区101内的走线层140断裂,同时由于第一保护层310及第二保护层320形成在弯折区101弯曲之后,相比于现有技术,降低了将柔性显示面板100的弯折区101弯曲的难度,减小柔性显示面板100的弯折区101在弯曲时所受的应力,提升产品品质。
基于同一发明构思,本发明还提供一种采用上述的柔性显示装置的制作方法制得的柔性显示装置,请参阅图5,为本发明的柔性显示装置的第一实施例,该柔性显示装置包括:柔性显示面板100、与柔性显示面板100绑定的柔性电路板200以及设置在柔性显示面板100上的第一保护胶层310;
所述柔性显示面板100具有位于其一端的弯折区101,所述柔性电路板200与柔性显示面板100的弯折区101绑定;所述柔性显示面板100的弯折区101向柔性显示面板100的背面弯曲;所述第一保护胶层310位于柔性显示面板100的正面对应所述弯折区101设置。
具体地,请参阅图5,所述柔性显示面板100包括柔性基板110、于柔性基板110一侧依次设置的TFT(薄膜晶体管)阵列层120及OLED器件层130以及设于柔性基板110设有TFT阵列层120的一侧且位于弯折区101内的走线层140,所述柔性显示面板100的背面为柔性基板110远离TFT阵列层120的一侧,柔性显示面板100的正面为与背面相对的一侧。
具体地,所述走线层140可与TFT阵列层120的源漏极层位于同层,所述走线层140与柔性基板110之间及走线层140上分别设有一层绝缘层(未图示)。
具体地,所述第一保护胶层310设于所述走线层140上,进一步地,所述第一保护胶层310设于走线层140上的绝缘层上。
具体地,所述柔性基板110的材料可以但不限于为聚酰亚胺(PI)、聚醚酰亚胺(PEI)、聚苯硫醚(PPS)及聚芳酯(PAR)中的一种或多种的组合。
具体地,所述TFT阵列层120包括多个TFT,所述多个TFT可以为铟镓锌氧化物半导体(IGZO)TFT,也可以为低温多晶硅TFT,当然,也可采用其他现有技术中常用的TFT。
具体地,请参阅图5,所述柔性显示面板100还包括覆盖OLED器件层130的薄膜封装层150,用于阻隔水氧侵入OLED器件层130。
具体地,请参阅图5,所述柔性显示装置还包括设于薄膜封装层150远离柔性衬底110的一侧依次制作触控模组400、圆偏光片500及保护盖板600。
具体地,请参阅图5,所述触控模组400包括设置在薄膜封装层150上的触控层410以及与触控层410连接的触控柔性电路板420。
具体地,所述触控模组400用于实现柔性显示装置的触控功能,圆偏光片500用于减少外部入射光线的反射,保护盖板600用于对柔性显示装置整体进行保护。
具体地,触控模组400与柔性显示面板100之间、触控模组400与圆偏光片500之间以及圆偏光片500与保护盖板600之间刻通过包括透明光学胶(OCA)在内的各类胶材粘合在一起。
具体地,所述柔性显示面板100的背面设有支撑板700,所述支撑板700覆盖柔性显示面板100除弯折区101以外的区域,用于对柔性基板110进行支撑和保护。
具体地,所述柔性显示面板100还包括将柔性电路板200与支撑板700贴附的双面胶800,用以将柔性电路板200固定。
具体地,本发明中第一保护胶层310在柔性显示面板100的弯折部101弯曲之后制作形成。在本发明的柔性显示装置的第一实施例中,所述第一保护胶层310的具体制作方式为:在柔性显示面板100的正面对应弯折区101喷涂胶材,形成位于柔性显示面板100的正面对应弯折区101设置的第一保护胶层310。
具体地,所述第一保护胶层310的材料可以但不限于为紫外光(UV)固化胶、热固化胶或常温固化胶。
需要说明的是,本发明的柔性显示装置在柔性显示面板100的弯折部101弯曲之后制作形成第一保护胶层310。利用第一保护胶层310对弯折区101进行保护及支撑,防止由于弯折导致弯折区101内的走线层140断裂,同时由于第一保护层310形成在弯折区101弯曲之后,相比于现有技术,降低了将柔性显示面板100的弯折区101弯曲的难度,减小柔性显示面板100的弯折区101在弯曲时所受的应力,提升产品品质。
请参阅图6,为本发明的柔性显示装置的第二实施例,该第二实施例与上述第一实施例的区别在于,所述柔性显示装置还包括设置在柔性显示面板100的背面与弯折区101对应的第二保护胶层320,该第二保护胶层320与第一保护胶层310同时制作,具体的制作方法为:将柔性显示面板100的弯折区101浸泡在胶材中,使胶材对应弯折区101涂布在柔性显示面板100的正面及背面面,形成位于柔性显示面板100的正面对应弯折区101设置的第一保护胶层310,同时形成位于柔性显示面板100的背面对应弯折区101设置的第二保护胶层320。
需要说明的是,本发明的柔性显示装置的第二实施例,利用第一保护胶层310及第二保护胶层320同时对柔性显示面板100的弯折区101的正面及背面均进行支撑及保护,支撑及保护效果更好,进一步地提升了产品的品质。
综上所述,本发明的柔性显示装置的制作方法中,先将柔性显示面板的弯折区与柔性电路板绑定,而后将柔性显示面板的弯折区向柔性显示面板的背面弯曲,之后在柔性显示面板上制作位于柔性显示面板的正面对应弯折区设置的第一保护胶层。利用第一保护胶层对弯折区内的走线进行保护,同时由于第一保护层形成在弯折区弯曲之后,相比于现有技术,降低了将柔性显示面板的弯折区弯曲的难度,减小柔性显示面板的弯折区在弯曲时所受的应力,提升产品品质。本发明的柔性显示装置采用上述的柔性显示装置的制作方法制得,能够对柔性显示面板的弯折区进行保护,降低将柔性显示面板的弯折区弯曲的难度,防止柔性显示面板的弯折区在弯曲时受到较大的应力。
以上所述,对于本领域的普通技术人员来说,可以根据本发明的技术方案和技术构思作出其他各种相应的改变和变形,而所有这些改变和变形都应属于本发明权利要求的保护范围。
Claims (8)
1.一种柔性显示装置的制作方法,其特征在于,包括如下步骤:
步骤S1、提供柔性显示面板(100);
所述柔性显示面板(100)具有位于其一端的弯折区(101);
步骤S2、提供柔性电路板(200),将所述柔性电路板(200)与柔性显示面板(100)的弯折区(101)绑定;
步骤S3、将柔性显示面板(100)的弯折区(101)向柔性显示面板(100)的背面弯曲;
步骤S4、在柔性显示面板(100)上涂布胶材,形成位于柔性显示面板(100)的正面对应弯折区(101)设置的第一保护胶层(310);
所述步骤S4具体为:将柔性显示面板(100)的弯折区(101)浸泡在胶材中,使胶材对应弯折区(101)涂布在柔性显示面板(100)的正面及背面,形成位于柔性显示面板(100)的正面对应弯折区(101)设置的第一保护胶层(310),同时形成位于柔性显示面板(100)的背面对应弯折区(101)设置的第二保护胶层(320)。
2.如权利要求1所述的柔性显示装置的制作方法,其特征在于,所述柔性显示面板(100)包括柔性基板(110)、于柔性基板(110)一侧依次设置的TFT阵列层(120)及OLED器件层(130)以及设于柔性基板(110)设有TFT阵列层(120)的一侧且位于弯折区(101)内的走线层(140),所述柔性显示面板(100)的背面为柔性基板(110)远离TFT阵列层(120)的一侧,所述第一保护胶层(310)设于所述走线层(140)上。
3.如权利要求2所述的柔性显示装置的制作方法,其特征在于,所述柔性基板(110)的材料为聚酰亚胺、聚醚酰亚胺、聚苯硫醚及聚芳酯中的一种或多种的组合。
4.如权利要求2所述的柔性显示装置的制作方法,其特征在于,所述柔性显示面板(100)还包括覆盖OLED器件层(130)的薄膜封装层(150);
所述步骤S1还包括,在薄膜封装层(150)远离柔性衬底(110)的一侧依次制作触控模组(400)、圆偏光片(500)及保护盖板(600)。
5.如权利要求1所述的柔性显示装置的制作方法,其特征在于,所述胶材为紫外光固化胶、热固化胶或常温固化胶,所述步骤S4还包括在柔性显示面板(100)上涂布胶材后对胶材进行固化的步骤。
6.如权利要求1所述的柔性显示装置的制作方法,其特征在于,所述柔性显示面板(100)的背面设有支撑板(700),所述支撑板(700)覆盖柔性显示面板(100)除弯折区(101)以外的区域。
7.如权利要求6所述的柔性显示装置的制作方法,其特征在于,所述步骤S3之前还包括在支撑板(700)远离柔性显示面板(100)的侧面或柔性电路板(200)与柔性显示面板(100)的背面位于同侧的侧面设置双面胶(800)的步骤,所述步骤S3将柔性显示面板(100)的弯折区(101)向柔性显示面板(100)的背面弯曲后,双面胶(800)将柔性电路板(200)与支撑板(700)贴附。
8.一种柔性显示装置,其特征在于,采用如权利要求1-7任一项所述的柔性显示装置的制作方法制得,该柔性显示装置包括:柔性显示面板(100)、与柔性显示面板(100)绑定的柔性电路板(200)以及设置在柔性显示面板(100)上的第一保护胶层(310);
所述柔性显示面板(100)具有位于其一端的弯折区(101),所述柔性电路板(200)与柔性显示面板(100)的弯折区(101)绑定;所述柔性显示面板(100)的弯折区(101)向柔性显示面板(100)的背面弯曲;所述第一保护胶层(310)于柔性显示面板(100)的正面对应所述弯折区(101)设置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810065169.3A CN108281387B (zh) | 2018-01-23 | 2018-01-23 | 柔性显示装置的制作方法及柔性显示装置 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810065169.3A CN108281387B (zh) | 2018-01-23 | 2018-01-23 | 柔性显示装置的制作方法及柔性显示装置 |
PCT/CN2018/076944 WO2019144452A1 (zh) | 2018-01-23 | 2018-02-22 | 柔性显示装置的制作方法及柔性显示装置 |
US16/069,279 US10637007B1 (en) | 2018-01-23 | 2018-02-22 | Method for manufacturing flexible display device and flexible display device |
Publications (2)
Publication Number | Publication Date |
---|---|
CN108281387A CN108281387A (zh) | 2018-07-13 |
CN108281387B true CN108281387B (zh) | 2019-09-24 |
Family
ID=62804667
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201810065169.3A CN108281387B (zh) | 2018-01-23 | 2018-01-23 | 柔性显示装置的制作方法及柔性显示装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US10637007B1 (zh) |
CN (1) | CN108281387B (zh) |
WO (1) | WO2019144452A1 (zh) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109065570A (zh) * | 2018-07-18 | 2018-12-21 | 昆山国显光电有限公司 | 显示面板及显示装置 |
CN108962030A (zh) * | 2018-07-18 | 2018-12-07 | 昆山国显光电有限公司 | 柔性显示屏、其制备方法以及显示装置 |
CN108962029B (zh) * | 2018-07-18 | 2020-09-22 | 广州国显科技有限公司 | 柔性显示屏、其制备方法以及显示装置 |
CN109062439A (zh) * | 2018-08-09 | 2018-12-21 | 武汉华星光电半导体显示技术有限公司 | 显示面板及显示装置 |
CN109148380B (zh) * | 2018-08-21 | 2021-02-02 | 武汉华星光电半导体显示技术有限公司 | 显示面板、显示模组以及电子装置 |
CN109148722B (zh) | 2018-08-28 | 2020-05-08 | 京东方科技集团股份有限公司 | 一种有机发光显示面板、其制作方法及显示装置 |
CN109118964A (zh) * | 2018-09-18 | 2019-01-01 | 京东方科技集团股份有限公司 | 一种柔性显示装置 |
US10833135B2 (en) | 2018-10-16 | 2020-11-10 | Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | Flexible organic light emitting diode display device and method of fabricating same |
CN109494315A (zh) * | 2018-10-16 | 2019-03-19 | 武汉华星光电半导体显示技术有限公司 | 柔性oled显示装置及制备方法 |
CN109272874A (zh) * | 2018-11-23 | 2019-01-25 | 云谷(固安)科技有限公司 | 显示装置和显示装置的制作方法 |
CN109559639A (zh) * | 2018-11-29 | 2019-04-02 | 昆山国显光电有限公司 | 一种显示面板和显示装置 |
CN109360832A (zh) * | 2018-11-30 | 2019-02-19 | 云谷(固安)科技有限公司 | 一种柔性显示面板及柔性显示装置 |
CN109461381A (zh) * | 2018-11-30 | 2019-03-12 | 云谷(固安)科技有限公司 | 一种显示面板、显示装置及显示面板的制作方法 |
CN109285461B (zh) * | 2018-11-30 | 2020-07-17 | 云谷(固安)科技有限公司 | 一种显示面板和显示装置 |
CN109461382B (zh) * | 2018-12-03 | 2020-08-11 | 武汉华星光电半导体显示技术有限公司 | 可弯折面板及其制作方法 |
CN109860414A (zh) * | 2018-12-06 | 2019-06-07 | 武汉华星光电半导体显示技术有限公司 | 一种有源矩阵有机发光二极管面板 |
CN109637382A (zh) * | 2018-12-12 | 2019-04-16 | 武汉华星光电半导体显示技术有限公司 | 显示面板及显示装置 |
CN109410767A (zh) * | 2018-12-19 | 2019-03-01 | 武汉华星光电半导体显示技术有限公司 | 显示装置和显示装置的制作方法 |
CN109638058B (zh) * | 2018-12-20 | 2020-06-16 | 武汉华星光电半导体显示技术有限公司 | 柔性显示装置的制作方法及柔性显示装置 |
CN109710107A (zh) * | 2018-12-24 | 2019-05-03 | 武汉华星光电技术有限公司 | 一种显示装置 |
CN109712530A (zh) * | 2018-12-28 | 2019-05-03 | 武汉天马微电子有限公司 | 柔性显示装置及其制备方法 |
CN109616021A (zh) * | 2019-01-30 | 2019-04-12 | 武汉华星光电半导体显示技术有限公司 | 显示装置 |
CN109785754A (zh) * | 2019-02-01 | 2019-05-21 | 京东方科技集团股份有限公司 | 一种柔性显示模组、柔性显示装置 |
CN109859632A (zh) * | 2019-03-15 | 2019-06-07 | 武汉华星光电半导体显示技术有限公司 | 显示屏 |
CN109979327A (zh) * | 2019-04-22 | 2019-07-05 | 武汉华星光电半导体显示技术有限公司 | 一种柔性显示器 |
CN110335544B (zh) * | 2019-06-18 | 2020-12-25 | 武汉华星光电半导体显示技术有限公司 | Oled显示面板及显示装置 |
CN110426877B (zh) * | 2019-07-08 | 2020-10-27 | 深圳市华星光电技术有限公司 | 一种窄边框显示面板及其制备方法、窄边框显示装置 |
CN110610904A (zh) * | 2019-08-29 | 2019-12-24 | 武汉华星光电半导体显示技术有限公司 | 显示面板及其制作方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106252380A (zh) * | 2016-08-31 | 2016-12-21 | 上海天马有机发光显示技术有限公司 | 柔性显示面板及装置 |
CN107204357A (zh) * | 2017-07-05 | 2017-09-26 | 武汉华星光电半导体显示技术有限公司 | 一种柔性显示面板及其制备方法、柔性显示装置 |
US9837634B2 (en) * | 2015-07-20 | 2017-12-05 | Apple Inc. | Electronic device display with multi-layer flexible encapsulation |
CN107491221A (zh) * | 2017-08-31 | 2017-12-19 | 京东方科技集团股份有限公司 | 显示基板及制备方法、显示装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102076666B1 (ko) * | 2013-04-11 | 2020-02-12 | 엘지디스플레이 주식회사 | 플렉서블 표시패널 |
US9773853B2 (en) * | 2015-01-09 | 2017-09-26 | Apple Inc. | Organic light-emitting diode display with bent substrate |
-
2018
- 2018-01-23 CN CN201810065169.3A patent/CN108281387B/zh active IP Right Grant
- 2018-02-22 WO PCT/CN2018/076944 patent/WO2019144452A1/zh active Application Filing
- 2018-02-22 US US16/069,279 patent/US10637007B1/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9837634B2 (en) * | 2015-07-20 | 2017-12-05 | Apple Inc. | Electronic device display with multi-layer flexible encapsulation |
CN106252380A (zh) * | 2016-08-31 | 2016-12-21 | 上海天马有机发光显示技术有限公司 | 柔性显示面板及装置 |
CN107204357A (zh) * | 2017-07-05 | 2017-09-26 | 武汉华星光电半导体显示技术有限公司 | 一种柔性显示面板及其制备方法、柔性显示装置 |
CN107491221A (zh) * | 2017-08-31 | 2017-12-19 | 京东方科技集团股份有限公司 | 显示基板及制备方法、显示装置 |
Also Published As
Publication number | Publication date |
---|---|
US10637007B1 (en) | 2020-04-28 |
WO2019144452A1 (zh) | 2019-08-01 |
CN108281387A (zh) | 2018-07-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6817378B2 (ja) | トランジスタ及び表示装置 | |
JP6767344B2 (ja) | 表示装置 | |
US9632381B2 (en) | Display panel and display device | |
US9933870B2 (en) | Back plate member for flexible display, display apparatus including the same, and method of manufacturing the same | |
US9876194B2 (en) | Organic light emitting display apparatus | |
JP5987083B2 (ja) | 液晶表示装置 | |
CN103325337B (zh) | 平板显示装置及其制造方法 | |
JP2020167417A (ja) | 表示装置 | |
CN103178083B (zh) | 发光装置以及其制造方法 | |
CN102576738B (zh) | 逻辑电路和半导体器件 | |
CN106356380B (zh) | 柔性tft基板及其制作方法 | |
CN103400838B (zh) | 显示装置 | |
CN101728434B (zh) | 半导体器件及其制造方法 | |
US6949825B1 (en) | Laminates for encapsulating devices | |
JP2014187373A (ja) | 半導体装置 | |
KR102212242B1 (ko) | 반도체 장치 및 그 제작 방법 | |
US8142249B2 (en) | Manufacturing method of display device | |
CN104465479B (zh) | 柔性显示基板母板及柔性显示基板的制备方法 | |
CN100502610C (zh) | 双面显示器及其形成方法 | |
CN104659062B (zh) | 显示装置 | |
WO2016179876A1 (zh) | 窄边框柔性显示装置及其制作方法 | |
TWI228941B (en) | Active matrix organic light emitting diode display and fabricating method thereof | |
CN103426904B (zh) | 一种柔性有机发光二极管显示器及其制备方法 | |
CN103985718B (zh) | 显示装置 | |
CN105870200B (zh) | 半导体装置及其制造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |