CN107923045A - 化学镀银液及其使用方法 - Google Patents

化学镀银液及其使用方法 Download PDF

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CN107923045A
CN107923045A CN201680047658.5A CN201680047658A CN107923045A CN 107923045 A CN107923045 A CN 107923045A CN 201680047658 A CN201680047658 A CN 201680047658A CN 107923045 A CN107923045 A CN 107923045A
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plating
composition
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stabilizer
chemical silvering
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J·克罗齐
L·金
E·朗
A·科恩法尔
W·闫
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MacDermid Acumen Inc
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Abstract

本发明提供了化学镀银液及其使用方法。将化学镀银液设计为仅在所需的金属底材上进行镀敷,同时防止在除了要镀敷的区域之外的区域进行镀敷。本发明在化学镀银液中使用基于重金属的稳定剂来防止渗镀。控制镀液中存在的稳定剂的量的能力允许消除渗镀并且允许稳定的镀液。化学镀银液非常稳定,但仍能以可接受的速率进行镀敷。通过使用本文所述的稳定剂,防止化学镀银液对镀敷的底层金属的腐蚀。本文提供的镀银液可用于各种应用,包括在电子封装、集成电路(IC)和发光二极管(LEDs)制造中的应用。

Description

化学镀银液及其使用方法
技术领域
本发明通常涉及即稳定又防止渗镀的化学镀银组合物。本发明使用在溶液中即可测量又可控制的基于重金属的稳定剂。使用本文所述的本发明在底材上进行镀敷的工艺基本上防止在除了需要镀敷的金属表面以外的区域进行镀敷。与通常在银和待镀金属之间发生的电化学反应相反,本发明提供了自催化反应。
背景技术
有几种众所周知的镀金属的方法,如电镀、浸镀和自催化化学镀。在所有的镀敷方法中,自催化化学镀具有将基本上均匀的金属涂层镀在具有不规则形状的底材上的能力。化学镀涂层实际上也是无孔的,与电镀底材或浸镀底材相比,这可以提供更好的耐腐蚀性。因此,化学镀方法广泛用于印刷电路板(PCB)、集成电路(IC)和发光二极管(LED)行业。最常见的镀敷方法涉及化学镀镍、化学镀铜和化学镀金。
用化学镀镍浸金(ENIG)镀铜或铜合金表面是通常产生用于各种应用的可靠沉积物的行业标准。尽管ENIG证明是非常可靠的,但其并非没有问题。镀金步骤可能对镍沉积物过分腐蚀,导致晶界处镍的劣化,这损害了沉积物的完整性。此外,与其他镀敷步骤相比,镀金步骤非常昂贵。由于成本的限制以及希望减少在镍表面上发现的晶界处的潜在腐蚀,化学镀银已经成为在镀镍表面上浸镀金的理想替代方案。当使用传统的ENIG涂层时,黑线镍是行业内众所周知的问题。银不仅是相对于黄金的经济合理的选择,而且通过化学镀机制(非浸入/交换反应)完全镀敷的银镀液制剂对底层金属表面的腐蚀小得多。另外,化学镀银表面可用于诸如表面反射率重要的LED等应用中。
化学镀银是众所周知的工艺。但是,由于这个工艺的几个基本问题,化学镀银在诸如PCB、IC和LED制造等行业中的应用是有限的。其中一些问题是:
a)镀液倾向于自发分解,从而在整个溶液中形成银颗粒。这种分解导致松散粘附,在沉积物上有非常细的银金属颗粒和镀液寿命短。
b)由于Ag与金属底材如铜和镍之间的还原电位差,在镀敷期间发生浸入反应。这种反应会导致严重的金属底材腐蚀(见图1),这会带来一些问题,如附着力损失、可焊性差以及引线键合失效。
c)不期望的银渗镀是一个常见的问题(见图3)。众所周知,化学镀银工艺具有这样的倾向,即银不仅镀在所需的金属底材线和金属底材衬垫上,而且还沉积在位于底材线和底材衬垫之间的绝缘底材或绝缘体的一部分上。这个问题在处理间隔很小的非常细的底材线时特别明显,造成桥接和短路。控制不希望的渗镀是一个重要的问题。
尽管化学镀银技术是众所周知的,但由于上述问题,化学镀银尚未成为广泛使用的商业技术。
已经尝试解决渗镀问题,同时保持稳定的镀银液,如美国专利第5,322,553号、美国专利申请第2012/0061698 A1号和国际公开第WO 2006/065221 A1号所述,这些专利或专利申请通过引用整体并入本文。
在US 5,322,553中,发明人发现在化学镀银溶液中与亚硫酸盐组合的硫代硫酸盐允许均匀沉积。通过使用这种氧化还原系统,不需要任何额外的还原剂类型,并且镀液(bath)不含有氨离子或氰离子。虽然发明人证明,可以将合理的银沉积物镀在镍上,但是镀液被认为对银浓度敏感,使得如果浓度超出期望的范围,则镀液难以控制,并且可能在容纳溶液的容器中或在不需要镀敷的底材区域发生不受控制的镀敷。这可能是由于使用难以控制、使得镀敷溶液非常敏感并且经常不稳定的硫稳定作用所致。
在US2012/0061698A1中,发明人已经在化学镍上使用银浸镀液来提高电子封装应用中的可焊性。虽然该方法是有用的,但由于浸入式反应,银厚度受到限制,并且如果待镀物品留在镀敷溶液中较长时间,镍表面的腐蚀仍然是一个问题。
国际公开WO2006/065221A1描述了一种化学镀银液,其必须在存在两相的情况下进行操作以沉积均匀的银沉积物。基于使用非离子表面活性剂的多相方法使镀液稳定,其中在表面活性剂的浊点以上操作镀液。尽管该发明的方法产生理想的沉积物,但镀液控制是关键的。应该使镀液保温以防止分解和不必要的沉积,当考虑商业上可行的选择时,这是不实际的。
发明内容
在本发明中,将含有重金属离子的稳定剂引入到化学镀银溶液中,这令人惊讶地解决了现有技术中发现的问题,因此使得可以向商业化工艺发展。
基于重金属的稳定剂允许精确确定其在镀敷溶液中的浓度、防止渗镀并降低底层金属表面上的腐蚀量。
因此,本发明的目的是提供改良的在具有暴露的铜或铜合金的物品上进行化学镀银的方法,在化学镀银中镀敷所述物品之前,所述物品已经镀有阻挡金属层。本发明人已经惊奇地发现,通过在化学镀银液中使用基于重金属例如基于铅的稳定剂,底层镍层不被腐蚀并且消除了渗镀。这是一个重大的进步,因为渗镀会导致间距微小的迹线之间的桥接和电短路。在化学镀银液中使用这种基于金属的稳定剂被认为是消除任何渗镀的原因,如图4所示。历史上,当使用基于硫的稳定剂时,渗镀是普遍的,如图3所示。另外,本发明人已经发现,通过使用基于硫的稳定剂,银和底材之间的电化学腐蚀得到增强。向银沉积物中引入硫也能够加速涂层的玷污。
除了使用基于金属的稳定剂所发现的明显优点之外,与典型的基于硫的稳定剂相比还有其他优点。可以在溶液中分析和测量基于金属的稳定剂,当使用基于硫的稳定剂时,由于低浓度的镀液稳定剂以及其他干扰性有机组分,这通常是不可能的。因此,使用基于重金属的稳定剂可以实现更严格的工艺控制和更好的镀液稳定性。
本发明的另一个目的是提供用于化学镀镍沉积物的化学镀银液,其中镍的腐蚀被最小化或消除。
本发明的另一个目的是控制化学镀银液中稳定剂的浓度。
本发明的还一个目的是提供在化学镀银液中使用重金属基稳定剂来防止在不希望镀敷的区域渗镀的方法。
本发明的还一个目的是提供稳定且不易在发生镀敷的容器上渗出(plate out)的化学镀银液。
为此,在一个实施方案中,本发明通常涉及化学镀银液及其使用方法,或者使用这种化学镀银液来生产预先镀有化学镀镍或化学镀钴的物品,其中防止了渗透,且镀液保持稳定,所述方法依次包括以下步骤:
a)用化学镀金属阻挡层(electroless metal barrier layer)镀敷物品;
b)任选地在所述阻挡层的上面镀敷浸银冲击层(immersion silver strikelayer);
c)在包含基于重金属的稳定剂或其组合的化学镀银组合物中镀敷所述物品。
附图说明
图1是铜垫的SEM图像,所述铜垫镀有化学镀镍,接着浸银冲击层镀敷,然后在包含基于硫的稳定剂的化学镀银中镀敷。银已经被剥离以分析镍表面的腐蚀量。
图2是铜垫的SEM图像,所述铜垫已经镀有化学镀镍,随后浸银冲击层进行镀敷,然后在包含基于重金属的稳定剂的化学镀银中镀敷。银已经被剥离以分析镍表面的腐蚀量。
图3是陶瓷LED测试面板的显微镜图像,所述陶瓷LED测试面板镀有化学镀镍,随后用包含基于硫的稳定剂的化学镀银镀敷。渗镀存在于沟槽区域(迹线之间的空间)。
图4是陶瓷LED测试面板的显微镜图像,所述陶瓷LED测试面板镀有化学镀镍,接着用包含基于重金属的稳定剂的化学镀银镀敷。沟槽中不存在渗镀。
具体实施方式
优选实施方案的详细描述
本发明的发明人已经发现,在化学镀银组合物中使用基于重金属的稳定剂可以用于防止渗镀、控制镀敷率,并且减少底层金属表面的腐蚀。因此,本文所述的化学镀银组合物允许在暴露于物品上的金属表面上进行受控制的化学镀,而不在所述物品表面的其他区域上进行镀敷,同时保持稳定的镀液并且不在容纳镀液的容器壁上渗出。另外,本文描述的方法可以用于在多个行业中的各种应用中进行镀敷。
为此,在一个实施方案中,本发明通常涉及能够用于先前已镀有阻挡金属例如镍或钴的化学镀金属表面的化学镀银液,所述化学镀银液防止渗透,且维持镀液稳定。所述方法包括以下步骤:
a)镀敷化学镀金属阻挡层;
b)任选地在所述阻挡层的上面镀敷浸银冲击层;
c)使用含有基于重金属的稳定剂或其混合物的化学镀银液在所述金属阻挡层和任选的银冲击层上进行镀敷。
本发明的发明人已经发现,在化学镀金属阻挡层和任选的浸银冲击层镀敷之后,在化学镀银中包括重金属稳定剂可消除渗镀并提供镀液稳定性。尽管不希望受理论束缚,但发明人相信这可能是由于使用了防止渗镀的基于重金属的稳定剂之故。重金属离子有助于镀液稳定性和防止渗镀的能力是令人惊讶和意外的。
通过使用基于重金属的稳定剂或它们的组合,有效地消除了在化学镀银液中使用硫稳定剂时常见的渗镀和镀液渗出的问题。本发明提供了用于在化学镀金属阻挡层和可选的浸银冲击层上进行镀敷的化学镀银液制剂。化学镀银沉积物提供了所需的特性,从而可以实现良好的引线键合、良好的可焊性和高反射率,所有这些对底层化学镀金属阻挡层的腐蚀都很少或没有腐蚀,如图2所示。
表1显示了由发明人产生的镀敷率曲线,其中通化学镀镍液处理具有暴露的铜区域的陶瓷LED试片(coupon),随后进行浸银冲击,然后在本发明的化学镀银组合物中镀敷。随着在化学镀银溶液中镀敷时间的增加,厚度继续线性增加。这表明镀液正通过化学镀机制进行镀敷。使用本发明,随着镀敷时间的增加,厚度继续增加,而如果镀液正通过浸入反应进行镀敷,则厚度不会继续线性增长。当随着时间作图时,浸入反应将显示出一个平台。
表1
制备用于化学镀的具有暴露的铜或铜合金的物品的典型工艺循环包括任选地清洁和/或微蚀刻暴露的铜或铜合金,使用贵金属催化剂活化,在活化后将物品浸入基于酸的溶液,然后对暴露的铜或铜合金的区域进行化学镀。使用第一化学镀液产生金属阻挡层,然后使用随后的化学镀银液赋予最终沉积物期望的性质。
金属阻挡层可以是被化学镀敷在已经如上所述制备的铜或铜合金上的镍或钴。任何典型的化学镀镍或镀钴溶液都适用于本发明。金属阻挡层的厚度可以是10-400微英寸的任何厚度。
在镀敷化学镀金属阻挡层之后,可以在阻挡层上镀敷浸银冲击层。这将确保在化学镀银之前,可能存在于阻挡层中的任何间隙或孔隙将被银敷盖。如果使用的话,银冲击层在金属阻挡层的上面沉积的银将少于10微英寸。
本发明人已经发现基于重金属的稳定剂或这类化合物的组合,所述化合物包括具有IIIA族、IVA族、VA族、VIA族和镧系金属离子的化合物,可用于化学镀银组合物中。
在本发明中可单独或组合使用的这些基于重金属的稳定剂的实例如下:氯化铅、乙酸铅、乳酸铅、柠檬酸铅、柠檬酸铋、硫酸锡、硝酸铊、碲酸、氯化锑、酒石酸锑(III)钾、硝酸镧(III)、硝酸铕(III)、硝酸铟(III)、亚硒酸(seleneous acid)和亚硒酸钠。
基于重金属的稳定剂或这些化合物的组合存在于本发明的化学镀银组合物中,使得金属离子以至少0.1mg/L的浓度存在。基于重金属的稳定剂化合物或化合物的组合的金属离子总计可以以0.1mg/L-1,000mg/L的任何浓度存在。基于重金属的稳定剂化合物或化合物的组合的金属离子优选以0.5mg/L-100mg/L,最优选以1mg/L-10mg/L的任何浓度存在。
除了如上文所述的稳定剂化合物之外,化学镀银液包含至少一种银离子源、缓冲剂、表面活性剂、还原剂和络合剂。其他成分可以根据需要加入,这对于本领域技术人员而言是熟悉的。银离子以0.1-10g/L存在于化学镀银组合物,缓冲剂以0.1-5g/L存在,表面活性剂以0.1-5g/L存在,还原剂以0.1-5g/L存在,络合剂以0.1-5g/L存在。
化学镀银液可以在30℃和80℃之间的温度下操作。镀液优选在40℃和70℃之间的操作温度下运行,最优选在50℃和60℃之间运行。镀敷时间取决于所需的厚度。银沉积物的厚度将随着在镀敷组合物中的浸入时间线性增加。典型的沉积物可以在5-50微英寸的范围变动,其中可以实现良好的可焊性、良好的引线键合和高反射率。
化学镀银液的pH值应该保持在9-11之间,更优选在9.5-10.5之间。最优选pH保持在10.1-10.4之间。
化学镀银组合物可以在有或没有空气源鼓泡通过溶液的情况下使用。
可以通过简单的分析技术如滴定、使用极谱分析或通过原子吸收光谱容易地分析溶液中稳定剂的量。与含有基于硫的稳定剂的化学镀银液相比,这是一个明显的优势。基于硫的稳定剂由于其浓度低和与其他有机化合物的干扰,它们一旦在溶液中时经常难以分析和控制。进而含有基于硫的稳定剂的溶液往往变得太稳定而不能镀敷或不稳定,从而不能控制镀敷率,并发生镀敷溶液的分解。通过使用基于重金属的稳定剂,镀液非常稳定,镀敷率变得可以可靠地控制。
本文所述的本发明是新型的化学镀银组合物和使用所述组合物的方法。本文所述的发明被认为可用于各种应用,其中能够沉积最后的银层以提供优异的引线键合、可焊性和反射率。现在,由于本发明已经克服了镀液稳定性和渗镀这些长期存在的问题(图4),现在认为化学镀银可用于商业应用。此外,这种镀液对底层基底金属表面的腐蚀很少或没有(见图2)。传统上使用ENIG工艺进行镀敷的应用有很多,现在ENIG工艺可以用本发明的成本有效且腐蚀性较小的工艺来代替。不应将本发明的描述解释为限于本文包括的具体实施例,而是应当将所述范围理解为体现本发明的范围和精神,因为它可用于许多应用中。

Claims (28)

1.一种化学镀银组合物,其包含:
a)银离子源;
b)包含重金属离子的稳定剂;
c)表面活性剂;
d)络合剂;
e)以及缓冲剂。
2.如权利要求1所述的组合物,其中所述稳定剂由选自以下的重金属离子构成:IIIA族金属、IVA族金属、VA族金属、VIA族金属、镧系及其组合。
3.如权利要求2所述的组合物,其中所述稳定剂选自氯化铅、乙酸铅、乳酸铅、柠檬酸铅、柠檬酸铋、硫酸锡、硝酸铊、碲酸、氯化锑、酒石酸锑(III)钾、硝酸镧(III)、硝酸铕(III)、硝酸铟(III)、亚硒酸、亚硒酸钠及其组合。
4.如权利要求3所述的组合物,其中所述稳定剂或其组合包含铅。
5.如权利要求3所述的组合物,其中所述稳定剂或其组合包含铋。
6.如权利要求3所述的组合物,其中所述稳定剂或其组合包含锑。
7.如权利要求1所述的组合物,其中在所述化学镀银组合物中所述重金属离子的浓度为0.1mg/L至1,000mg/L。
8.如权利要求7所述的组合物,其中在所述化学镀银组合物中所述重金属离子的浓度为0.5mg/L至100mg/L。
9.如权利要求8所述的组合物,其中在所述化学镀银组合物中的所述重金属离子浓度为1mg/L至10mg/L。
10.如权利要求1所述的组合物,其中pH介于9-11。
11.如权利要求10所述的组合物,其中所述pH介于9.5-10.5。
12.如权利要求11所述的组合物,其中所述pH介于10.1-10.4。
13.在金属阻挡层上进行化学镀银的方法,包括以下步骤:
a)任选地制备用于镀敷的铜或铜合金;
b)利用化学镀镍或化学镀钴,用金属阻挡层镀敷铜或铜合金,
c)任选地在所述金属阻挡层上提供浸银冲击层;然后
d)使用化学镀银组合物在所述金属阻挡层和任选的冲击层上进行化学镀银;
其中所述化学镀银组合物含有包含重金属离子的稳定剂。
14.如权利要求13所述的方法,其中所述稳定剂由选自以下的重金属离子构成:IIIA族金属、IVA族金属、VA族金属、VIA族金属、镧系及其组合。
15.如权利要求14所述的方法,其中所述稳定剂选自氯化铅、乙酸铅、乳酸铅、柠檬酸铅、柠檬酸铋、硫酸锡、硝酸铊、碲酸、氯化锑、酒石酸锑(III)钾、硝酸镧(III)、硝酸铕(III)、硝酸铟(III)、亚硒酸、亚硒酸钠及其组合。
16.如权利要求15所述的方法,其中所述稳定剂或其组合包含铅。
17.如权利要求15所述的方法,其中所述稳定剂或其组合包含铋。
18.如权利要求15所述的方法,其中所述稳定剂或其组合包含锑。
19.如权利要求13所述的方法,其中在所述化学镀银组合物中所述重金属离子的浓度为0.1mg/L至1,000mg/L。
20.如权利要求19所述的方法,其中在所述化学镀银组合物中所述重金属离子的浓度为0.5mg/L至100mg/L。
21.如权利要求20所述的方法,其中在所述化学镀银组合物中所述重金属离子的浓度为1mg/L至10mg/L。
22.如权利要求13所述的方法,其中所述阻挡层金属是镍。
23.如权利要求13所述的方法,其中所述化学镀银组合物不引起渗镀。
24.如权利要求13所述的方法,其中所述化学镀银镀敷率随着浸入时间线性增加。
25.如权利要求13所述的方法,其中所述化学镀银组合物的pH介于9-11。
26.如权利要求25所述的方法,其中所述化学镀银组合物的pH介于9.5-10.5。
27.如权利要求26所述的方法,其中所述化学镀银组合物的pH介于10.1至10.4。
28.利用化学镀银组合物对暴露于物品上的铜或铜合金进行镀敷的方法,包括以下步骤:
a)任选地清洁、蚀刻以及活化暴露的铜或铜合金;
b)使用包含镍或钴的化学镀液,使暴露的铜或铜合金镀敷有阻挡层;
c)任选地在所述阻挡层的上面镀敷浸银冲击层;
d)在所述阻挡层和任选的浸银冲击层的上面镀敷化学镀银沉积物;
其中所述化学镀银组合物包含重金属离子。
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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009059917A3 (de) * 2007-11-07 2009-07-02 Nanogate Ag Silberhaltige nickelschicht
US20100040773A1 (en) * 2009-09-07 2010-02-18 Grunwald John J Method and Composition to Repair Pinholes and Microvoids in Immersion Silver Plated PWB's Thereby Relieving Creep Corrosion

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3915718A (en) * 1972-10-04 1975-10-28 Schering Ag Chemical silver bath
US4600609A (en) * 1985-05-03 1986-07-15 Macdermid, Incorporated Method and composition for electroless nickel deposition
JPH05287543A (ja) * 1992-04-08 1993-11-02 Mitsubishi Paper Mills Ltd 無電解銀メッキ方法
US5322553A (en) * 1993-02-22 1994-06-21 Applied Electroless Concepts Electroless silver plating composition
DE10246453A1 (de) * 2002-10-04 2004-04-15 Enthone Inc., West Haven Verfahren zur stromlosen Abscheidung von Nickel
SE0403042D0 (sv) * 2004-12-14 2004-12-14 Polymer Kompositer I Goeteborg Improved stabilization and performance of autocatalytic electroless process
TW200636094A (en) * 2005-04-08 2006-10-16 Chung Cheng Inst Of Technology Method of preparing metal microstructure
US20080035489A1 (en) * 2006-06-05 2008-02-14 Rohm And Haas Electronic Materials Llc Plating process
KR100773272B1 (ko) * 2006-09-22 2007-11-09 와이엠티 주식회사 중금속이온을 포함한 은도금 용액 및 그로부터 제조된인쇄회로기판
US20120061698A1 (en) * 2010-09-10 2012-03-15 Toscano Lenora M Method for Treating Metal Surfaces
JP5840454B2 (ja) * 2011-10-27 2016-01-06 上村工業株式会社 還元型無電解銀めっき液及び還元型無電解銀めっき方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009059917A3 (de) * 2007-11-07 2009-07-02 Nanogate Ag Silberhaltige nickelschicht
US20100040773A1 (en) * 2009-09-07 2010-02-18 Grunwald John J Method and Composition to Repair Pinholes and Microvoids in Immersion Silver Plated PWB's Thereby Relieving Creep Corrosion

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