CN107238733B - 扫描型探针显微镜及其探针接触检测方法 - Google Patents

扫描型探针显微镜及其探针接触检测方法 Download PDF

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Publication number
CN107238733B
CN107238733B CN201710178412.8A CN201710178412A CN107238733B CN 107238733 B CN107238733 B CN 107238733B CN 201710178412 A CN201710178412 A CN 201710178412A CN 107238733 B CN107238733 B CN 107238733B
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probe
sample
contact
cantilever
amount
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CN107238733A (zh
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繁野雅次
渡边和俊
渡边将史
山本浩令
茅根一夫
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Hitachi High Tech Analysis Co ltd
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Hitachi High Tech Science Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/02—Coarse scanning or positioning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G01Q10/065—Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/30—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
CN201710178412.8A 2016-03-29 2017-03-23 扫描型探针显微镜及其探针接触检测方法 Active CN107238733B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016-065007 2016-03-29
JP2016065007A JP2017181135A (ja) 2016-03-29 2016-03-29 走査型プローブ顕微鏡及びそのプローブ接触検出方法

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CN107238733A CN107238733A (zh) 2017-10-10
CN107238733B true CN107238733B (zh) 2020-07-03

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US (1) US10151773B2 (https=)
EP (1) EP3226009A1 (https=)
JP (1) JP2017181135A (https=)
KR (1) KR102427580B1 (https=)
CN (1) CN107238733B (https=)
TW (1) TWI719119B (https=)

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JP6848640B2 (ja) * 2017-04-17 2021-03-24 株式会社島津製作所 走査型プローブ顕微鏡
JP2019128302A (ja) * 2018-01-26 2019-08-01 株式会社日立ハイテクサイエンス 走査プローブ顕微鏡
JP7048964B2 (ja) * 2018-03-26 2022-04-06 株式会社日立ハイテクサイエンス 走査型プローブ顕微鏡及びその走査方法
JP6939686B2 (ja) * 2018-04-16 2021-09-22 株式会社島津製作所 走査型プローブ顕微鏡及びカンチレバー移動方法
JP6631650B2 (ja) * 2018-04-18 2020-01-15 株式会社島津製作所 走査型プローブ顕微鏡
EP3591410A1 (en) 2018-07-06 2020-01-08 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Probe chip, scan head, scanning probe microscopy device and use of a probe chip
JP6631674B1 (ja) * 2018-10-16 2020-01-15 株式会社島津製作所 表面分析装置
CN110736715B (zh) * 2019-10-25 2022-05-24 深圳市太赫兹科技创新研究院有限公司 探针防误触方法、装置及系统
CN110907663B (zh) * 2019-12-18 2021-12-21 哈尔滨工业大学 基于t状悬臂梁探针的开尔文探针力显微镜测量方法
JP7351778B2 (ja) * 2020-03-18 2023-09-27 株式会社日立ハイテクサイエンス 走査型プローブ顕微鏡及び設定方法
KR102382918B1 (ko) * 2020-10-16 2022-04-06 서울과학기술대학교 산학협력단 전도식 원자현미경과 횡력현미경의 동시 신호측정을 통한 ZnO 나노선의 압전 전위 특성 측정 방법 및 장치
US12253539B2 (en) 2021-07-13 2025-03-18 Ceske Vysoke Uceni Technicke V Praze Method of examining a sample in an atomic force microscope using attractive tip-to-sample interaction

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JPH07248334A (ja) * 1994-03-10 1995-09-26 Nikon Corp 原子間力顕微鏡
CN1490606A (zh) * 2003-09-15 2004-04-21 北京中科奥纳科技有限公司 扫描探针显微镜
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Publication number Publication date
KR102427580B1 (ko) 2022-07-29
US10151773B2 (en) 2018-12-11
CN107238733A (zh) 2017-10-10
JP2017181135A (ja) 2017-10-05
TW201800757A (zh) 2018-01-01
TWI719119B (zh) 2021-02-21
KR20170113160A (ko) 2017-10-12
EP3226009A1 (en) 2017-10-04
US20170285067A1 (en) 2017-10-05

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