CN106862216A - 一种针对3d光学玻璃、蓝宝石半导体的高精清洗工艺 - Google Patents
一种针对3d光学玻璃、蓝宝石半导体的高精清洗工艺 Download PDFInfo
- Publication number
- CN106862216A CN106862216A CN201710221624.XA CN201710221624A CN106862216A CN 106862216 A CN106862216 A CN 106862216A CN 201710221624 A CN201710221624 A CN 201710221624A CN 106862216 A CN106862216 A CN 106862216A
- Authority
- CN
- China
- Prior art keywords
- vacuum
- cleaning
- agent
- ultrasonic
- hydrocarbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/04—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by a combination of operations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B2230/00—Other cleaning aspects applicable to all B08B range
- B08B2230/01—Cleaning with steam
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
Description
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710221624.XA CN106862216A (zh) | 2017-04-06 | 2017-04-06 | 一种针对3d光学玻璃、蓝宝石半导体的高精清洗工艺 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710221624.XA CN106862216A (zh) | 2017-04-06 | 2017-04-06 | 一种针对3d光学玻璃、蓝宝石半导体的高精清洗工艺 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN106862216A true CN106862216A (zh) | 2017-06-20 |
Family
ID=59160094
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201710221624.XA Pending CN106862216A (zh) | 2017-04-06 | 2017-04-06 | 一种针对3d光学玻璃、蓝宝石半导体的高精清洗工艺 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN106862216A (zh) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107470253A (zh) * | 2017-07-17 | 2017-12-15 | 深圳市鑫承诺环保产业股份有限公司 | 复合组件pvd镀膜前超精清洗工艺 |
CN110184614A (zh) * | 2019-06-11 | 2019-08-30 | 深圳市鑫承诺环保产业股份有限公司 | 胚饼高精清洗设备及清洗方法 |
CN113053723A (zh) * | 2019-12-26 | 2021-06-29 | 苏州富怡达超声波有限公司 | 一种基于超声波-等离子体复合清洗晶圆的方法和装置 |
CN114308847A (zh) * | 2021-12-30 | 2022-04-12 | 广东新球清洗科技股份有限公司 | 一种碳氢清洗剂除乳化油工艺 |
CN114643218A (zh) * | 2022-02-28 | 2022-06-21 | 中环领先半导体材料有限公司 | 一种大直径硅片片盒清洗工艺 |
CN114920465A (zh) * | 2022-06-08 | 2022-08-19 | 安徽光智科技有限公司 | 光学硫系玻璃镜片清洗后表面印迹的处理方法 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06296941A (ja) * | 1993-04-14 | 1994-10-25 | Kenseishiya:Kk | 精密洗浄方法及びその装置 |
CN102505133A (zh) * | 2011-09-29 | 2012-06-20 | 东莞市新球清洗科技有限公司 | 一种改性碳氢清洗剂真空清洗除油除蜡工艺 |
TWM497996U (zh) * | 2014-12-01 | 2015-04-01 | Huang Liang Biomedical Technology Co Ltd | 人工牙根之鈦基支檯體構造 |
JP2015113480A (ja) * | 2013-12-10 | 2015-06-22 | アクトファイブ株式会社 | 洗浄方法及び洗浄装置 |
CN105543860A (zh) * | 2015-12-29 | 2016-05-04 | 深圳市鑫承诺环保产业股份有限公司 | 一种高光精洗复合清洗工艺 |
CN105970153A (zh) * | 2016-05-20 | 2016-09-28 | 深圳市鑫承诺环保产业股份有限公司 | 一种pvd镀膜件、电镀件的高精清洗工艺 |
CN105970242A (zh) * | 2016-05-20 | 2016-09-28 | 深圳市鑫承诺环保产业股份有限公司 | 一种改变金属表面活性的清洗工艺 |
CN105970244A (zh) * | 2016-05-20 | 2016-09-28 | 深圳市鑫承诺环保产业股份有限公司 | 一种金银币母件高精清洗工艺 |
CN106319545A (zh) * | 2016-09-29 | 2017-01-11 | 深圳市鑫承诺环保产业股份有限公司 | 一种新能源电池壳清洗工艺 |
-
2017
- 2017-04-06 CN CN201710221624.XA patent/CN106862216A/zh active Pending
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06296941A (ja) * | 1993-04-14 | 1994-10-25 | Kenseishiya:Kk | 精密洗浄方法及びその装置 |
CN102505133A (zh) * | 2011-09-29 | 2012-06-20 | 东莞市新球清洗科技有限公司 | 一种改性碳氢清洗剂真空清洗除油除蜡工艺 |
JP2015113480A (ja) * | 2013-12-10 | 2015-06-22 | アクトファイブ株式会社 | 洗浄方法及び洗浄装置 |
TWM497996U (zh) * | 2014-12-01 | 2015-04-01 | Huang Liang Biomedical Technology Co Ltd | 人工牙根之鈦基支檯體構造 |
CN105543860A (zh) * | 2015-12-29 | 2016-05-04 | 深圳市鑫承诺环保产业股份有限公司 | 一种高光精洗复合清洗工艺 |
CN105970153A (zh) * | 2016-05-20 | 2016-09-28 | 深圳市鑫承诺环保产业股份有限公司 | 一种pvd镀膜件、电镀件的高精清洗工艺 |
CN105970242A (zh) * | 2016-05-20 | 2016-09-28 | 深圳市鑫承诺环保产业股份有限公司 | 一种改变金属表面活性的清洗工艺 |
CN105970244A (zh) * | 2016-05-20 | 2016-09-28 | 深圳市鑫承诺环保产业股份有限公司 | 一种金银币母件高精清洗工艺 |
CN106319545A (zh) * | 2016-09-29 | 2017-01-11 | 深圳市鑫承诺环保产业股份有限公司 | 一种新能源电池壳清洗工艺 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107470253A (zh) * | 2017-07-17 | 2017-12-15 | 深圳市鑫承诺环保产业股份有限公司 | 复合组件pvd镀膜前超精清洗工艺 |
CN110184614A (zh) * | 2019-06-11 | 2019-08-30 | 深圳市鑫承诺环保产业股份有限公司 | 胚饼高精清洗设备及清洗方法 |
CN113053723A (zh) * | 2019-12-26 | 2021-06-29 | 苏州富怡达超声波有限公司 | 一种基于超声波-等离子体复合清洗晶圆的方法和装置 |
CN114308847A (zh) * | 2021-12-30 | 2022-04-12 | 广东新球清洗科技股份有限公司 | 一种碳氢清洗剂除乳化油工艺 |
CN114643218A (zh) * | 2022-02-28 | 2022-06-21 | 中环领先半导体材料有限公司 | 一种大直径硅片片盒清洗工艺 |
CN114920465A (zh) * | 2022-06-08 | 2022-08-19 | 安徽光智科技有限公司 | 光学硫系玻璃镜片清洗后表面印迹的处理方法 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN106862216A (zh) | 一种针对3d光学玻璃、蓝宝石半导体的高精清洗工艺 | |
CN107020272A (zh) | 一种碳氢液皂化清洗工艺 | |
CN107051967A (zh) | 一种有颗粒物要求的高精清洗工艺 | |
WO2017198232A1 (zh) | 一种金银币坯饼高精清洗工艺 | |
CN102294332B (zh) | 金刚石线切割硅晶片的清洗方法 | |
CN101695696B (zh) | 一种硅片清洗方法 | |
CN111446188A (zh) | 一种半导体硅片表面清洗机构及其清洗工艺 | |
CN105280477A (zh) | 一种蓝宝石晶片的清洗工艺 | |
CN105970242A (zh) | 一种改变金属表面活性的清洗工艺 | |
CN1967788A (zh) | 钨cmp后的清洗方法 | |
CN107470253A (zh) | 复合组件pvd镀膜前超精清洗工艺 | |
CN105642608A (zh) | 一种铜件碳氢清洗工艺 | |
CN107721196A (zh) | 熔石英元件表面化学结构缺陷的去除方法 | |
CN107030060A (zh) | 一种洗浴用品的除蜡清洗工艺 | |
KR100597656B1 (ko) | 반도체의 제조를 위한 세정방법 및 세정장치 | |
CN207413874U (zh) | 精密刀具清洗系统 | |
CN105970153A (zh) | 一种pvd镀膜件、电镀件的高精清洗工艺 | |
CN109772108A (zh) | 一种电子气体尾气的回收方法及装置 | |
CN106277814A (zh) | 一种熔石英光学元件表面的处理方法 | |
CN102212832A (zh) | 一种硅料清洗工艺 | |
CN107096744A (zh) | 一种金属塑胶组件高精清洗工艺 | |
CN106653560B (zh) | 硅片的清洗方法 | |
CN117209160A (zh) | 一种半导体石英环及其制备方法 | |
CN106964625A (zh) | 手机平板玻璃清洗机 | |
CN211929444U (zh) | 一种半导体硅片表面清洗机构 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
CB03 | Change of inventor or designer information |
Inventor after: Ding Yuqing Inventor after: Li Hui Inventor after: Kuang Wenxuan Inventor after: Hu Jun Inventor after: Zhang Yuandong Inventor after: Liu Zhanbo Inventor after: Zhang Wenlu Inventor after: Xiao Bo Inventor before: Li Hui Inventor before: Ding Yuqing Inventor before: Kuang Wenxuan Inventor before: Hu Jun Inventor before: Zhang Yuandong Inventor before: Liu Zhanbo Inventor before: Zhang Wenlu Inventor before: Xiao Bo |
|
CB03 | Change of inventor or designer information | ||
WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20170620 |
|
WD01 | Invention patent application deemed withdrawn after publication |