CN106794944B - 真空处理装置 - Google Patents

真空处理装置 Download PDF

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Publication number
CN106794944B
CN106794944B CN201580048885.5A CN201580048885A CN106794944B CN 106794944 B CN106794944 B CN 106794944B CN 201580048885 A CN201580048885 A CN 201580048885A CN 106794944 B CN106794944 B CN 106794944B
Authority
CN
China
Prior art keywords
loading device
slot
interconnecting piece
vacuum
straight line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201580048885.5A
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English (en)
Chinese (zh)
Other versions
CN106794944A (zh
Inventor
益山纯一
胁田伸市
内山丰司
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Publication of CN106794944A publication Critical patent/CN106794944A/zh
Application granted granted Critical
Publication of CN106794944B publication Critical patent/CN106794944B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G9/00—Apparatus for assisting manual handling having suspended load-carriers movable by hand or gravity
    • B65G9/002—Load-carriers, rollers therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G9/00—Apparatus for assisting manual handling having suspended load-carriers movable by hand or gravity
    • B65G9/008—Rails or switches
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0235—Containers
CN201580048885.5A 2014-09-12 2015-09-04 真空处理装置 Active CN106794944B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2014-187038 2014-09-12
JP2014187038 2014-09-12
PCT/JP2015/075177 WO2016039261A1 (ja) 2014-09-12 2015-09-04 真空処理装置

Publications (2)

Publication Number Publication Date
CN106794944A CN106794944A (zh) 2017-05-31
CN106794944B true CN106794944B (zh) 2019-07-09

Family

ID=55459009

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201580048885.5A Active CN106794944B (zh) 2014-09-12 2015-09-04 真空处理装置

Country Status (4)

Country Link
JP (1) JP6322716B2 (ko)
KR (1) KR101931039B1 (ko)
CN (1) CN106794944B (ko)
WO (1) WO2016039261A1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106369955B (zh) * 2016-08-31 2019-08-16 武汉华星光电技术有限公司 薄膜烘干机支架及薄膜烘干机

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH588408A5 (en) * 1975-01-13 1977-05-31 Machinery And Lifts Establishm Forklift truck frame - has lockable supports on lifting fork swinging downwards allowing truck to travel
US5016541A (en) * 1989-12-14 1991-05-21 Feaster Jr William L Greenhouse transport system
KR200171865Y1 (ko) * 1999-09-29 2000-03-15 나인수 비닐 하우스용 운반장치
CN101417734A (zh) * 2008-08-28 2009-04-29 上海三禾服装机械制造有限公司 一种物品出入装置
JP2011131985A (ja) * 2009-12-24 2011-07-07 Tsuryo Technica Corp 自動搬送装置およびそれを利用したメッキ処理装置、並びに搬送ロボット
CN201964735U (zh) * 2010-12-21 2011-09-07 石狮市广汇龙环保设备有限公司 一种具有循环输送装置的烘干设备
JP4850289B2 (ja) * 2007-11-05 2012-01-11 孝夫 百瀬 重力式接離動機構付フリーズドライ装置およびこれを用いるフリーズドライ方法
JP4961268B2 (ja) * 2007-06-05 2012-06-27 石川島建材工業株式会社 プレキャスト床版の搬送方法及び搬送機構
CN202869170U (zh) * 2012-10-22 2013-04-10 邵阳阳光发品有限公司 一种假发烘干装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003534216A (ja) 2000-05-22 2003-11-18 ウルバッフ，ディーター 車載方法およびシステム
JP4298136B2 (ja) * 2000-06-02 2009-07-15 東京エレクトロン株式会社 ウェハ移載ロボット着脱用台車
JP3794964B2 (ja) * 2002-02-06 2006-07-12 三菱重工業株式会社 クラスタ型真空処理装置
JP5422908B2 (ja) 2008-04-15 2014-02-19 株式会社Ｉｈｉ 昇降台車
US8201501B2 (en) * 2009-09-04 2012-06-19 Tinsley Douglas M Dual path kiln improvement
JP5159743B2 (ja) * 2009-10-15 2013-03-13 株式会社カネカ Ｃｖｄ装置
JP5545498B2 (ja) 2011-12-21 2014-07-09 株式会社ダイフク 物品保管設備及び物品保管設備におけるメンテナンス方法

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH588408A5 (en) * 1975-01-13 1977-05-31 Machinery And Lifts Establishm Forklift truck frame - has lockable supports on lifting fork swinging downwards allowing truck to travel
US5016541A (en) * 1989-12-14 1991-05-21 Feaster Jr William L Greenhouse transport system
KR200171865Y1 (ko) * 1999-09-29 2000-03-15 나인수 비닐 하우스용 운반장치
JP4961268B2 (ja) * 2007-06-05 2012-06-27 石川島建材工業株式会社 プレキャスト床版の搬送方法及び搬送機構
JP4850289B2 (ja) * 2007-11-05 2012-01-11 孝夫 百瀬 重力式接離動機構付フリーズドライ装置およびこれを用いるフリーズドライ方法
CN101417734A (zh) * 2008-08-28 2009-04-29 上海三禾服装机械制造有限公司 一种物品出入装置
JP2011131985A (ja) * 2009-12-24 2011-07-07 Tsuryo Technica Corp 自動搬送装置およびそれを利用したメッキ処理装置、並びに搬送ロボット
CN201964735U (zh) * 2010-12-21 2011-09-07 石狮市广汇龙环保设备有限公司 一种具有循环输送装置的烘干设备
CN202869170U (zh) * 2012-10-22 2013-04-10 邵阳阳光发品有限公司 一种假发烘干装置

Also Published As

Publication number Publication date
WO2016039261A1 (ja) 2016-03-17
KR101931039B1 (ko) 2018-12-19
CN106794944A (zh) 2017-05-31
KR20170041875A (ko) 2017-04-17
JP6322716B2 (ja) 2018-05-09
JPWO2016039261A1 (ja) 2017-07-06

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