CN106591945A - 一种多晶硅复投方法 - Google Patents
一种多晶硅复投方法 Download PDFInfo
- Publication number
- CN106591945A CN106591945A CN201611083427.8A CN201611083427A CN106591945A CN 106591945 A CN106591945 A CN 106591945A CN 201611083427 A CN201611083427 A CN 201611083427A CN 106591945 A CN106591945 A CN 106591945A
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- CN
- China
- Prior art keywords
- flashboard
- polycrystalline silicon
- single crystal
- polysilicon
- throws
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/002—Continuous growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
Description
Claims (3)
Priority Applications (1)
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CN201611083427.8A CN106591945B (zh) | 2016-11-30 | 2016-11-30 | 一种多晶硅复投方法 |
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CN201611083427.8A CN106591945B (zh) | 2016-11-30 | 2016-11-30 | 一种多晶硅复投方法 |
Publications (2)
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CN106591945A true CN106591945A (zh) | 2017-04-26 |
CN106591945B CN106591945B (zh) | 2019-03-19 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108728902A (zh) * | 2017-04-18 | 2018-11-02 | 上海新昇半导体科技有限公司 | 一种多晶硅自动进料系统及其进料方法 |
CN109972200A (zh) * | 2019-04-18 | 2019-07-05 | 邢台晶龙电子材料有限公司 | 连续提拉单晶硅生长方法 |
CN110396715A (zh) * | 2019-09-04 | 2019-11-01 | 内蒙古中环光伏材料有限公司 | 一种直拉单晶多次复投工艺 |
Citations (11)
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JPH0412085A (ja) * | 1990-04-27 | 1992-01-16 | Nkk Corp | シリコン単結晶の製造装置 |
CN101435106A (zh) * | 2008-11-21 | 2009-05-20 | 浙江瑞迪硅谷新能源科技有限公司 | 一种单晶硅棒的生产工艺及设备 |
CN201372325Y (zh) * | 2008-08-22 | 2009-12-30 | 昆山中辰矽晶有限公司 | 多晶成长炉连续加料器 |
CN102181917A (zh) * | 2011-05-17 | 2011-09-14 | 山东大学 | 一种人工晶体自动控制生长连续加料装置 |
CN202131400U (zh) * | 2011-06-10 | 2012-02-01 | 徐忠龙 | 复合式连续加料器 |
CN102345157A (zh) * | 2011-10-09 | 2012-02-08 | 内蒙古中环光伏材料有限公司 | 一种太阳能级直拉单晶硅的连续复投的生产方法 |
CN202202013U (zh) * | 2011-07-04 | 2012-04-25 | 浙江晶盛机电股份有限公司 | 用于单晶炉的外部连续投料机构 |
CN102677158A (zh) * | 2011-03-15 | 2012-09-19 | 上海晨安电炉制造有限公司 | 一种带副室结构的泡生法晶体生长炉 |
CN202450186U (zh) * | 2012-01-19 | 2012-09-26 | 宁夏日晶新能源装备股份有限公司 | 单晶炉二次加料漏斗装置 |
CN204370040U (zh) * | 2015-01-06 | 2015-06-03 | 湖北菲利华石英玻璃股份有限公司 | 一种蓝宝石制锭下料装置 |
CN105133010A (zh) * | 2015-08-31 | 2015-12-09 | 中卫市银阳新能源有限公司 | 一种单晶炉复投料装置 |
-
2016
- 2016-11-30 CN CN201611083427.8A patent/CN106591945B/zh active Active
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0412085A (ja) * | 1990-04-27 | 1992-01-16 | Nkk Corp | シリコン単結晶の製造装置 |
CN201372325Y (zh) * | 2008-08-22 | 2009-12-30 | 昆山中辰矽晶有限公司 | 多晶成长炉连续加料器 |
CN101435106A (zh) * | 2008-11-21 | 2009-05-20 | 浙江瑞迪硅谷新能源科技有限公司 | 一种单晶硅棒的生产工艺及设备 |
CN102677158A (zh) * | 2011-03-15 | 2012-09-19 | 上海晨安电炉制造有限公司 | 一种带副室结构的泡生法晶体生长炉 |
CN102181917A (zh) * | 2011-05-17 | 2011-09-14 | 山东大学 | 一种人工晶体自动控制生长连续加料装置 |
CN202131400U (zh) * | 2011-06-10 | 2012-02-01 | 徐忠龙 | 复合式连续加料器 |
CN202202013U (zh) * | 2011-07-04 | 2012-04-25 | 浙江晶盛机电股份有限公司 | 用于单晶炉的外部连续投料机构 |
CN102345157A (zh) * | 2011-10-09 | 2012-02-08 | 内蒙古中环光伏材料有限公司 | 一种太阳能级直拉单晶硅的连续复投的生产方法 |
CN202450186U (zh) * | 2012-01-19 | 2012-09-26 | 宁夏日晶新能源装备股份有限公司 | 单晶炉二次加料漏斗装置 |
CN204370040U (zh) * | 2015-01-06 | 2015-06-03 | 湖北菲利华石英玻璃股份有限公司 | 一种蓝宝石制锭下料装置 |
CN105133010A (zh) * | 2015-08-31 | 2015-12-09 | 中卫市银阳新能源有限公司 | 一种单晶炉复投料装置 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108728902A (zh) * | 2017-04-18 | 2018-11-02 | 上海新昇半导体科技有限公司 | 一种多晶硅自动进料系统及其进料方法 |
CN109972200A (zh) * | 2019-04-18 | 2019-07-05 | 邢台晶龙电子材料有限公司 | 连续提拉单晶硅生长方法 |
CN110396715A (zh) * | 2019-09-04 | 2019-11-01 | 内蒙古中环光伏材料有限公司 | 一种直拉单晶多次复投工艺 |
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CN106591945B (zh) | 2019-03-19 |
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Denomination of invention: A method of polysilicon multiple input Effective date of registration: 20210421 Granted publication date: 20190319 Pledgee: Hefei Binhu fountainhead financing Company limited by guarantee Pledgor: ANHUI ELECTRIC GROUP SHARES Co.,Ltd. Registration number: Y2021980002832 |
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Date of cancellation: 20220401 Granted publication date: 20190319 Pledgee: Hefei Binhu fountainhead financing Company limited by guarantee Pledgor: ANHUI ELECTRIC GROUP SHARES Co.,Ltd. Registration number: Y2021980002832 |
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