CN106206613A - 一种柔性显示基板及其制备方法 - Google Patents

一种柔性显示基板及其制备方法 Download PDF

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CN106206613A
CN106206613A CN201610715972.8A CN201610715972A CN106206613A CN 106206613 A CN106206613 A CN 106206613A CN 201610715972 A CN201610715972 A CN 201610715972A CN 106206613 A CN106206613 A CN 106206613A
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metal
contact hole
wire sections
metal wire
insulating barrier
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CN106206613B (zh
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袁波
刘玉成
高胜
徐琳
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Kunshan New Flat Panel Display Technology Center Co Ltd
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Kunshan New Flat Panel Display Technology Center Co Ltd
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Priority to EP17842814.0A priority patent/EP3477702B1/en
Priority to JP2019503725A priority patent/JP6824384B2/ja
Priority to PCT/CN2017/097007 priority patent/WO2018036391A1/zh
Priority to KR1020197002234A priority patent/KR102258467B1/ko
Priority to TW106128063A priority patent/TWI638589B/zh
Priority to US16/317,417 priority patent/US11152401B2/en
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Abstract

本发明提供了一种柔性显示基板，能够有效地释放累积在金属线和绝缘层中的应力，减小了柔性屏体弯曲过程中金属线和绝缘层断裂的几率；本发明还提供了一种柔性显示基板的制备方法，能够防止柔性显示屏的老化，延长其寿命。本发明提供的柔性显示基板包括柔性衬底，所述柔性衬底上交替设置绝缘层和金属层，所述金属层包括相同或相近延伸方向分隔设置的金属线段，相邻金属层间的绝缘层上开设接触孔，相邻金属层的金属线段通过接触孔中的金属交替连接，形成连续的金属导线。

Description

一种柔性显示基板及其制备方法
技术领域
本发明涉及显示技术领域，具体涉及一种柔性显示基板及其制备方法。
背景技术
柔性显示器作为新一代的显示产品，由于其具有超轻、超薄、清晰度高、响应快、可弯曲、携带方便等优点，受到人们越来越多的广泛关注。
柔性显示器在使用时需要卷起或者弯曲，甚至频繁弯折，这样其发生形变产生的应力会累积和叠加到显示基板内的金属线和绝缘层上，就会出现金属线断裂的现象，同时多次弯曲之后也会使得绝缘层面临断裂的危险，导致无法正常显示，严重影响柔性显示器的使用寿命。
为解决上述技术问题，业内主要是通过在金属线上设置一些孔洞或是改变金属线的图形(如矩形、波浪形等)等方法以释放应力。这些方法虽能够增加金属线的使用次数，延长显示器的使用寿命，但由于在金属线打孔或是改变金属线的图形对于光刻设备的要求都比较高，加大了工艺难度。
现有技术中有些也公开了采用柔性较好、易于弯曲的材料(例如石墨烯或纳米银等)来替代金属层的钼、钛或铜的方法，来形成显示基板的金属线。该方法虽能够延长金属线的使用次数，提高显示器的可靠性，但由于材料的限制，成本较高，而且替代材料的使用也会使得柔性基板的结构和制备工艺等都会发生明显的变化，无法通过现有的设备和工艺实现。
另外，上述方法都只是针对金属线断裂采取的改进措施，采用这些措施后，由于绝缘层仍是连续的，所以上述方法并不能有效地释放累积在绝缘层中的应力以解决绝缘层易断裂的技术问题。
发明内容
有鉴于此，本发明实施例提供了一种柔性显示基板，能够有效地释放累积在金属线和绝缘层中的应力，减小了柔性屏体弯曲过程中金属线和绝缘层断裂的几率；本发明还提供了一种柔性显示基板的制备方法，能够防止柔性显示屏的老化，延长其寿命。
本发明实施例提供的一种柔性显示基板，包括柔性衬底，所述柔性衬底上交替设置绝缘层和金属层，所述金属层包括相同或相近延伸方向分隔设置的金属线段，相邻金属层间的绝缘层上开设接触孔，相邻金属层的金属线段通过接触孔中的金属交替连接，形成连续的金属导线；
其中，所述相邻金属层包括第一金属层和第二金属层，所述接触孔中的金属一端连接在第一金属层的金属线段的头部或尾部，所述接触孔中的金属另一端连接在第二金属层的金属线段的尾部或头部；
其中，所述相邻金属层包括第一金属层、第二金属层和第三金属层，其中，所述第二金属层中的金属线段包括间隔设置的第一金属线段和第三金属线段；第一金属层和第二金属层间的接触孔中的金属一端连接在第一金属层的金属线段的头部或尾部，接触孔中的金属另一端连接在第二金属层的第一金属线段的尾部或头部；第三金属层和第二金属层间的接触孔中的金属一端连接在第三金属层的金属线段的头部或尾部，接触孔中的金属另一端连接在第二金属层的第三金属线段的尾部或头部；
其中，所述相邻金属层包括第一金属层、第二金属层和第三金属层；第一金属层和第二金属层间的接触孔中的金属一端连接在第一金属层的金属线段的头部或尾部，接触孔中的金属另一端连接在第二金属层的金属线段的尾部或头部；第二金属层和第三金属层间的接触孔中的金属一端连接在第二金属层的金属线段的头部或尾部，接触孔中的金属另一端连接在第三金属层的金属线段的尾部或头部；
其中，所述连续的金属导线用作数据线或栅极线；
其中，所述金属线由铝、钛、钼或者铝合金、钛合金、钼合金中的一种材料制成；
其中，所述绝缘层由氮化硅或者氧化硅制成；
其中，所述柔性衬底的材料为聚酰亚胺、聚碳酸酯、聚丙烯酸酯、聚醚酰亚胺、聚醚砜或聚对苯二甲酸乙二醇酯中的至少一种。
本发明实施例提供的一种柔性显示基板的制备方法，包括：制备柔性衬底；在所述柔性衬底上交替设置绝缘层和金属层；在相邻金属层间的绝缘层上设置接触孔，接触孔中容纳金属；在所述金属层分隔设置相同或相近延伸方向的金属线段；接触孔中的金属将相邻金属层的金属线段进行交替连接，形成连续的金属导线；
其中，所述的柔性显示基板的制备方法，包括：制备柔性衬底；在所述柔性衬底上形成第一绝缘层；在所述第一绝缘层上形成第一金属层，在所述第一金属层分隔设置相同或相近延伸方向的金属线段；在所述第一金属层上形成第二绝缘层，在所述第二绝缘层上设置接触孔，接触孔中容纳金属；在所述第二绝缘层上形成第二金属层，在所述第二金属层分隔设置相同或相近延伸方向的金属线段，将接触孔中的金属一端连接在第一金属层的金属线段的头部或尾部，所述接触孔中的金属另一端连接在第二金属层的金属线段的尾部或头部。
本发明实施例提供的柔性显示基板，不同金属层中的金属线段相互交替连接，形成排布在多层金属层中、具有折线结构的连续金属导线和多个相对独立的绝缘层块，有效地释放了累积在金属线中的应力，减小了柔性屏体弯曲过程中金属线和绝缘层断裂的几率；本发明实施例提供的柔性显示基板的制备方法，利用接触孔将多层金属层中的金属线段进行交替连接，形成排布在多层金属层中、具有折线结构的连续金属导线和多个相对独立的绝缘层块，防止了柔性显示屏的老化，延长了其使用寿命。
附图说明
图1所示为本发明一实施例提供的一种柔性显示基板的结构示意图。
图2所示为本发明另一实施例提供的一种柔性显示基板的结构示意图。
图3所示为本发明再一实施例提供的一种柔性显示基板的结构示意图。
图4所示为本发明一实施例提供的一种柔性显示基板的制备方法的流程示意图。
图5所示为本发明另一实施例提供的一种柔性显示基板的制备方法的流程示意图。
具体实施方式
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
如图1～2所示，本发明实施例提供的柔性显示基板，包括柔性衬底1，在该柔性衬底1上交替设有绝缘层和金属层，金属层包括相同或相近延伸方向分隔设置的金属线段，相邻金属层间的绝缘层上开设接触孔6，相邻金属层的金属线段通过接触孔6中的金属交替连接，形成连续的金属导线。
其中，图1所示为本发明一实施例提供的柔性显示基板的结构示意图。如图1所示，该柔性显示基板包括柔性衬底1，在柔性衬底1上依次设置有第一绝缘层2、第一金属层3、第二绝缘层4以及第二金属层5，第一金属层3和第二金属层5中分别包括相同或相近延伸方向的分隔设置的金属线段，接触孔6中的金属一端连接在第一金属层3的金属线段的头部或尾部，接触孔6中的金属另一端连接在第二金属层5的金属线段的尾部或头部。
本实施例提供的柔性显示基板，分布在两层金属层中的金属线段通过接触孔交替连接，形成排布在上下两层金属层中、具有折线结构的连续金属导线，同时完整的第二绝缘层4也被用于连接上下金属层的接触孔6分成若干相对独立的绝缘层块，能够有效地释放累积在金属线中的应力，减小了柔性屏体弯曲过程中金属线和绝缘层断裂的几率。
图2所示为本发明另一实施例提供的柔性显示基板的结构示意图。如图2所示，该柔性显示基板在柔性衬底1上依次设置有第一绝缘层2、第一金属层3、第二绝缘层4、第二金属层5、第三绝缘层7以及第三金属层8，第一金属层3、第二金属层5和第三金属层8中均包括相同或相近延伸方向分隔设置的金属线段，其中，第二金属层5中的金属线段包括间隔设置的第一金属线段9和第三金属线段10；第二绝缘层4的接触孔6中的金属一端连接在第一金属层3的金属线段的头部或尾部，接触孔6中的金属另一端连接在第一金属线段9的尾部或头部；第三绝缘层7的接触孔6中的金属一端连接在第三金属层8的金属线段的头部或尾部，接触孔6中的金属另一端连接在第三金属线段10的尾部或头部。
本实施例提供的柔性显示基板，第二金属层5中的一部分金属线段与第一金属层3中的金属线段连接，形成交替排布在中下两层金属层中、具有折线结构的连续金属导线，第二金属层5中的另一部分金属线段与第三金属层8中的金属线段连接，形成交替排布在上中两层金属层中、具有折线结构的连续金属导线，同时第二绝缘层4与第三绝缘层7也被分成若干相对独立的绝缘层块，减小了柔性屏体弯曲过程中金属线和绝缘层断裂的几率。
图3所示为本发明再一实施例提供的柔性显示基板的结构示意图。如图3所示，本实施例的柔性显示基板，同样地，在柔性衬底1上依次设置有第一绝缘层2、第一金属层3、第二绝缘层4、第二金属层5、第三绝缘层7以及第三金属层8，第一金属层3、第二金属层5和第三金属层8中均包括相同或相近延伸方向分隔设置的金属线段，与上述实施例不同的是金属线段的连接方式，本实施例中，第一金属层3与第三金属层8中的金属线段通过第二金属层5中的金属线段也形成连接，即：第二绝缘层4的接触孔6中的金属一端连接在第一金属层3的金属线段的头部或尾部，接触孔6中的金属另一端连接在第二金属层5的金属线段的尾部或头部，第三绝缘层7的接触孔6中的金属一端连接在第二金属层5的金属线段的头部或尾部，接触孔6中的金属另一端连接在第三金属层8的金属线段的尾部或头部，整体便形成了交替排布在上中下三层金属层中、具有折线结构的连续金属导线和多个相对独立的绝缘层块。
本领域的技术人员不难理解，上述实施例只是本发明所列举的示例而已，操作人员可根据对分辨率或者其他方面的实际需求，来设计不同数目的绝缘层、金属层以及金属线段，也可以选择不同的金属线段连接方式，本发明对此不做具体限定。
在本发明一实施例中，连续的金属导线可用作数据线或栅极线，当然，金属线也可用作承载其他信息的信号线，其材料可以为铝、钛、钼等金属，也可以为铝合金、钛合金、钼合金等合金中的一种，本发明对此不做具体限定。
在本发明一实施例中，绝缘层为氮化硅或者氧化硅中的一种，本发明对此不作具体限定。
在本发明一实施例中，柔性衬底1的材料可以为聚酰亚胺、聚碳酸酯、聚丙烯酸酯、聚醚酰亚胺、聚醚砜或聚对苯二甲酸乙二醇酯中的至少一种，本发明对此不作具体限定。
本发明实施例还提供了一种柔性显示基板的制备方法。图4所示为本实施例提供的柔性显示基板制备方法的流程图，如图4所示，该方法包括如下步骤：
步骤101：制备柔性衬底1；
其中，柔性衬底1的材料可以为聚酰亚胺、聚碳酸酯、聚丙烯酸酯、聚醚酰亚胺、聚醚砜或聚对苯二甲酸乙二醇酯中的至少一种，本发明对此不作具体限定。
步骤102：在柔性衬底1上交替设置绝缘层和金属层。
步骤103：在相邻金属层间的绝缘层上设置接触孔6，接触孔6中容纳金属。
步骤104：在金属层分隔设置相同或相近延伸方向的金属线段。
步骤105：接触孔6中的金属将相邻金属层的金属线段进行交替连接，形成连续的金属导线。
图5所示为本发明另一实施例提供的柔性显示基板制备方法的流程图，如图5所示，该方法包括如下步骤：
步骤201：制备柔性衬底1。
步骤202：在柔性衬底1上形成第一绝缘层2。
步骤203：在第一绝缘层2上形成第一金属层3，在第一金属层3分隔设置相同或相近延伸方向的金属线段。
步骤204：在第一金属层3上形成第二绝缘层4，在第二绝缘层4上设置接触孔6，接触孔6中容纳金属。
步骤205：在第二绝缘层4上形成第二金属层5，在第二金属层4分隔设置相同或相近延伸方向的金属线段，将接触孔6中的金属一端连接在第一金属层3的金属线段的头部或尾部，接触孔6中的金属另一端连接在第二金属层5的金属线段的尾部或头部。
在本发明一实施例中，金属层通过光刻刻蚀工艺形成，在另一实施例中，金属层还可通过打印、喷墨、物理气相沉积法等工艺形成，本发明对此不作具体限定。
很显然，本领域的技术人员在此制备方法的基础上，结合上述柔性显示基板的实施例，能够推导出采用更多金属层及选用不同连接方式时的制备方法，本发明对此不进行赘述。
本发明实施例提供的柔性显示基板，不同金属层中的金属线段相互交替连接，形成排布在多层金属层中、具有折线结构的连续金属导线和多个相对独立的绝缘层块，能够有效地释放累积在金属线中的应力，减小了柔性屏体弯曲过程中金属线和绝缘层断裂的几率；本发明实施例提供的柔性显示基板的制备方法，利用接触孔将多层金属层中的金属线段交替连接，形成排布在多层金属层中、具有折线结构的连续金属导线和多个相对独立的绝缘层块，防止了柔性显示屏的老化，延长了其使用寿命。
以上所述仅为本发明的较佳实施例而已，并不用以限制本发明，凡在本发明的精神和原则之内，所作的任何修改、等同替换等，均应包含在本发明的保护范围之内。

Claims (10)

1.一种柔性显示基板，包括柔性衬底，其特征在于，所述柔性衬底上交替设置绝缘层和金属层，所述金属层包括相同或相近延伸方向分隔设置的金属线段，相邻金属层间的绝缘层上开设接触孔，相邻金属层的金属线段通过接触孔中的金属交替连接，形成连续的金属导线。
2.根据权利要求1所述的柔性显示基板，其特征在于，所述相邻金属层包括第一金属层和第二金属层，所述接触孔中的金属一端连接在第一金属层的金属线段的头部或尾部，所述接触孔中的金属另一端连接在第二金属层的金属线段的尾部或头部。
3.根据权利要求1所述的柔性显示基板，其特征在于，所述相邻金属层包括第一金属层、第二金属层和第三金属层，其中，所述第二金属层中的金属线段包括间隔设置的第一金属线段和第三金属线段；
第一金属层和第二金属层间的接触孔中的金属一端连接在第一金属层的金属线段的头部或尾部，接触孔中的金属另一端连接在第二金属层的第一金属线段的尾部或头部；
第三金属层和第二金属层间的接触孔中的金属一端连接在第三金属层的金属线段的头部或尾部，接触孔中的金属另一端连接在第二金属层的第三金属线段的尾部或头部。
4.根据权利要求1所述的柔性显示基板，其特征在于，所述相邻金属层包括第一金属层、第二金属层和第三金属层；
第一金属层和第二金属层间的接触孔中的金属一端连接在第一金属层的金属线段的头部或尾部，接触孔中的金属另一端连接在第二金属层的金属线段的尾部或头部；
第二金属层和第三金属层间的接触孔中的金属一端连接在第二金属层的金属线段的头部或尾部，接触孔中的金属另一端连接在第三金属层的金属线段的尾部或头部。
5.根据权利要求1所述的柔性显示基板，其特征在于，所述连续的金属导线用作数据线或栅极线。
6.根据权利要求1所述的柔性显示基板，其特征在于，所述金属线由铝、钛、钼或者铝合金、钛合金、钼合金中的一种材料制成。
7.根据权利要求1所述的柔性显示基板，其特征在于，所述绝缘层由氮化硅或者氧化硅制成。
8.根据权利要求1所述的柔性显示基板，其特征在于，所述柔性衬底的材料为聚酰亚胺、聚碳酸酯、聚丙烯酸酯、聚醚酰亚胺、聚醚砜或聚对苯二甲酸乙二醇酯中的至少一种。
9.一种柔性显示基板的制备方法，其特征在于，包括：
制备柔性衬底；
在所述柔性衬底上交替设置绝缘层和金属层；
在相邻金属层间的绝缘层上设置接触孔，接触孔中容纳金属；
在所述金属层分隔设置相同或相近延伸方向的金属线段；
接触孔中的金属将相邻金属层的金属线段进行交替连接，形成连续的金属导线。
10.根据权利要求9所述的柔性显示基板，其特征在于，包括：
制备柔性衬底；
在所述柔性衬底上形成第一绝缘层；
在所述第一绝缘层上形成第一金属层，在所述第一金属层分隔设置相同或相近延伸方向的金属线段；
在所述第一金属层上形成第二绝缘层，在所述第二绝缘层上设置接触孔，接触孔中容纳金属；
在所述第二绝缘层上形成第二金属层，在所述第二金属层分隔设置相同或相近延伸方向的金属线段，将接触孔中的金属一端连接在第一金属层的金属线段的头部或尾部，所述接触孔中的金属另一端连接在第二金属层的金属线段的尾部或头部。
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CN114188387A (zh) * 2021-12-09 2022-03-15 深圳市华星光电半导体显示技术有限公司 柔性显示面板
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