1377350 九、發明說明： 【發明所屬之技術頜威】 特別是關於一種多指探針及 本發明係有關一種探斜 其製造方法。 【先前技術】 傳統的探針卡將分離式的探針一一固定在電路板 上，這種裝㈣探針針臂及相距(piteh)皆較寬。如果要 縮小針間距，可以則精密加卫技術在—塊絕緣板上佈 針，再將祕緣板接合料路板上，仙日本㈣特許編 號特開平6，刚82。然㈣㈣的方式製作探針卡，製作 精度較難控制，佈針方向受限，難以進行複雜佈針、大面 積或南集毅之探針切計。為了因賴小化的需求，微 影製程被用來製作探針。例如等人的美國專利第 4961〇52 5虎利用微影製程在絕緣底板p㈣上形成 才曰部（fmgers) ’把接觸導體沉積在指部的自由端的表面 上。然而這㈣置的絕緣底板只作為指部的岐基座使 '、不會提供私部任何的彈性所以探針缺少良好的 性結構。1377350 IX. Description of the invention: [Technology of the invention] The invention relates to a multi-finger probe and a method for manufacturing the same. [Prior Art] A conventional probe card has a separate probe fixed to a circuit board, and the (4) probe arm and the pitch are wide. If you want to reduce the needle spacing, you can fine-tune the technology on the insulation board, and then use the secret edge board to join the material board. Xian Japan (4) is licensed to open the special 6 and just 82. However, in the method of (4) (4), the probe card is made, the precision of production is difficult to control, the direction of the needle is limited, and it is difficult to carry out the probe cutting of the complicated cloth needle, large area or Nanji Yi. In order to meet the needs of Xiaohua, the lithography process was used to make probes. For example, U.S. Patent No. 4,961, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5 However, the insulating base plate of this (4) is only used as the base of the finger to make ', does not provide any flexibility of the private part, so the probe lacks a good sexual structure.
GntterS的美國專射請公開第20070296433號提出 種具有彈性結構的探針，分離式的探針固定在平台 (platform)上平台的延伸臂（extenti〇n arm)固定在基板上 形成扭轉、结構。然而這種裝置不易製作成細針間距的產 品’而且由於延伸臂的關係，這種裝置具有較寬的尺寸， Ϊ377350 不利於微小化。扭轉結構佔面積大，使探針佈針受 轉結構也會增加結構應力，降低產品壽命。 又'^扭GntterS, U.S. Patent No. 20070296433, discloses a probe having a resilient structure, and a separate probe is fixed on a platform and an extension arm of the platform is fixed on the substrate to form a twist and structure. However, such a device is not easy to manufacture as a fine needle pitch product' and due to the extension arm, the device has a wide size, and the Ϊ377350 is not conducive to miniaturization. The torsional structure occupies a large area, so that the probe cloth needle is transferred to the structure, which also increases structural stress and reduces product life. '^Twist
Mathieu等人的美國專利第6672875號 iXJ 雖臂U.S. Patent No. 6,672,875 to Mathieu et al.
樑探針。懸臂樑係微機電元件常用的結構，已經有成=的 製造技術，而且和微影製程相容。然而懸臂樑探針係^一 結構，探針本身除了傳遞電性的功能之外，同時提供承受 測試應力的彈性及支撐力，因此會受到尺寸及材料的2 制。圖1顯示一個一般的細針間距懸臂樑探針設計，依現 行產品規格看來，最小針間距約為10~30μηι，針體長度為 500〜1500μπι，常用針體材質為鎳合金，依產品需求針 重範圍為〇. 1〜4g/mil。對此類懸臂樑丨〇施加應力測試，結 果顯示最大應力發生在靠近固定端12附近的端部14，越 接近自由端16,應力越小。因材質降伏強度(yidds她抑) 限制’以常用之鎳合金為例，最大降伏強度約 900MPa〜1.4GPa 左右， 在·有限的針間距與針體長度限制 下’田自由端16的向下達最大彈性位移時(―般產品設定 為3〜4mil)、1構的最大應力值已逼近或超過材質降伏強 度’㈣《 1〇將永久變形’探針的使用壽命也會縮短。 依矩形截面之懸臂樑公式推導，針重、最大應力值與 針體尺寸的關係式如下： K 〇c WT3/L σ 〇c T/L2 1377350 其中K是針重（spring constant)，W是針體寬度，T是針體 厚度，L是針體長度，σ是懸臂樑針體固定端應力值。 在不增加針體寬度以及維持相同的針重的情況下，增 加針體長度及縮小針體厚度可以降低固定端12附近的應 力值，然而，未來的針型發展驅勢是將針間距以及針體長 度縮短，換言之，習知針型若繼續往縮小針間距及針體尺 寸的方向發展的話，探針固定端12附近將承受更高的最 大應力，探針的使用壽命必然縮短。 【發明内容】 本發明的目的之一，在於提出一種多指探針。 本發明的目的之一，在於提出一種多指探針的製造方 法。 根據本發明，一種多指探針係將探針的電路功能與結 構功能分別獨立設計，該探針所需的彈性結構由一懸臂樑 共用彈性部及多個指部共同提供，導電的功能另由一導線 提供。在一實施例中，該多個指部從該懸臂樑共用彈性部 的自由端延伸出來，與該懸臂樑共用彈性部是一體的。在 另一實施例中，多個導電指部搭接在該導線上。在又一實 施例中，該多個指部搭接在該懸臂樑共用彈性部上。 相較於傳統單一懸臂樑探針，本發明有效利用過去單 一懸臂樑探針之間的剩餘空間，在不增加製程複雜性、不 犧牲佈針集積度（無需放大針間距與針體長度尺寸）與不降 低針體剛性的前提下，有效降低針體承受的最大結構應 1377350 . 力，提高產品使用壽命，克服細針間距產品容易側向短路 的缺點。由於本發明之多指探針係直接以微影、電鑄、钮 _ 刻方式在電路基板上製作，因此定位精度高，特別適合針 間距微小化、住意方向進針、高集積度佈針、大面積測試 卡等需求。 【實施方式】 本發明將多指探針的電路功能與結構功能分別獨立 • 設計，圖2係本發明之結構功能部份，即彈性結構的一個 實施例，包括懸臂樑共用彈性部20及指部22兩個部份。 如前所述，K 〇c WT3/L3，因此，在不增加針體長度L，不 改變針重K的前提下，若懸臂樑固定端附近之針體寬度W 增加，則針體厚度T得以縮減來維持相同的針重K，此時 因σ 〇c T/L2，則結構最大應力值得以降低。將圖2之彈性 結構以和圖1相同之鎳鈷合金實現，並以有限單元法加以 驗證時，在針體寬度及針間距皆為ΙΟμηι，針體長度為 鲁 1500μιη，指部22長度為800μιη的情況下，針體厚度由圖 1之單一懸臂樑的厚度115μηι降低至ΙΟΟμιη且仍維持相同 • 的剛性。對圖2之實施例做有限單元分析模擬可以得知， • 最大應力將發生在懸臂樑共用彈性部20的固定端22a附 ' 近，指部22越遠離懸臂樑共用彈性部20的部份，承受的 - 應力越小。當指部22的自由端向下位移ΙΟΟμιη時，出現 的最大應力為663MPa，比圖1之懸臂樑結構承受自由端 向下位移ΙΟΟμιη時之最大應力值降低21%。此外，因為懸 ^77350 . 臂樑共用彈性部20的厚度減少，降低結構的深寬比， • 此製程的實施也會比較容易。 - 圖3係本實施例提供彈性的示意圖，當下靨 y- 龙刀F施加 ' 曰邛22末端時，懸臂樑共用彈性部2〇提供 έΜ 曰j 1 t 羊又彈性 /里dl，私部22提供第二段彈性變形量d2，分散承為 下壓力F，指部22末端可提供的總彈性變形量又 =分散結構受力，降低最大結構應力，因此在^=2材 ’、承欠強度下，懸臂樑共用彈性部20及指部22可以提供 ^大的彈性變形量、降低潛變程度、增加探針的使用壽 命，換言之，在相同應力承受能力與使用相同製程的條: 二本實施例提供之彈性結構可以達成更小針間距的多指 圖4係應用圖2之彈性結構的第一實施例，圖5為其 ^體圖。在本實施例中’懸臂樑共用彈性部20❼立柱20a 乂端固著在基板18上，形成懸臂樑共用彈性部20的固 ·=端，懸臂樑共用彈性部2〇的自由端延伸出多個指部 二指部22上方有一針尖24及一導線仏彼此電性連接， ’ 26的第-部份從針尖24延伸經過指部u及懸臂標 、用彈性部20的上方，其第二部份施向下延伸至基板 冑&連接基板18内的線路。由於懸臂樑共用彈性部 只提供結構功能’因此不必電性連接基板18内的線路。 :臂樑共用彈性部2G與導線26是兩個不同的(distinct)元 在本實施例中，懸臂樑共用彈性部20與指部22是一 體的’懸臂樑共用彈性部2〇提供共用的第一段彈性變形 1377350 里給各個指部22，減輕各指部22的 分離的構造使得每—指部22 力各^ 22彼此 二段彈性變形，靜每_熟 因應外力而提供第 丘W 物之間的高度差異。縣臂檸 共用彈性部2〇充分利用了各導線％ 心⑽ •供結構設計，與單一懸臂樑設計相比較，較薄的^ ^ 即可達到相同的針重，同時增加 變开旱= 指探針承受測試應力所需的彈性主要二f；:: 的限制’其寬度及厚度也可以自由調整。 選用導電性高的材質，也可以使用細線，得 限考量’機械規格符合導線本身材料強度 性變妒旦及#邻:2外力時’有懸臂樑共用彈性部20的彈 士 kA里及LP22的彈性變形量兩部份。指部a長度設Beam probe. The commonly used structure of the cantilever beam MEMS element has been manufactured with the manufacturing technology and is compatible with the lithography process. However, the cantilever beam probe system is a structure in which the probe itself provides the elasticity and supporting force to withstand the test stress, and is subject to the size and material. Figure 1 shows a general fine needle spacing cantilever probe design. According to current product specifications, the minimum needle spacing is about 10~30μηι, the length of the needle is 500~1500μπι, and the commonly used needle body is made of nickel alloy. The needle weight range is 〇. 1~4g/mil. A stress test was applied to such a cantilever beam, and the results showed that the maximum stress occurred at the end portion 14 near the fixed end 12, and the closer to the free end 16, the smaller the stress. Due to the material's strength of fall (yidds she), the limit is 'in the case of the commonly used nickel alloy, the maximum drop strength is about 900 MPa~1.4GPa. Under the limited needle spacing and the length of the needle body, the maximum free end of the field is 16 When the elastic displacement ("the general product is set to 3~4mil"), the maximum stress value of the 1 structure has approached or exceeded the material drop strength" (4) "1〇 will be permanently deformed" the service life of the probe will also be shortened. According to the cantilever beam formula of the rectangular section, the relationship between the needle weight and the maximum stress value and the needle size is as follows: K 〇c WT3/L σ 〇c T/L2 1377350 where K is the spring constant and W is the needle Body width, T is the thickness of the needle body, L is the length of the needle body, and σ is the stress value of the fixed end of the cantilever beam. Increasing the length of the needle and reducing the thickness of the needle can reduce the stress value near the fixed end 12 without increasing the width of the needle and maintaining the same needle weight. However, the future development of the needle type is the needle spacing and the needle. The length of the body is shortened. In other words, if the conventional needle type continues to develop in the direction of narrowing the needle spacing and the needle size, the probe will be subjected to a higher maximum stress in the vicinity of the fixed end 12, and the service life of the probe is necessarily shortened. SUMMARY OF THE INVENTION One object of the present invention is to provide a multi-finger probe. One of the objects of the present invention is to provide a method of manufacturing a multi-finger probe. According to the present invention, a multi-finger probe system independently designs the circuit function and the structure function of the probe, and the elastic structure required by the probe is jointly provided by a cantilever beam sharing elastic portion and a plurality of fingers, and the conductive function is additionally Provided by a wire. In one embodiment, the plurality of fingers extend from the free end of the cantilever beam sharing resilient portion and are integral with the cantilever beam sharing resilient portion. In another embodiment, a plurality of conductive fingers are lapped over the wire. In still another embodiment, the plurality of fingers overlap the common beam of the cantilever beam. Compared with the conventional single cantilever beam probe, the present invention effectively utilizes the remaining space between the single cantilever probes in the past without increasing the process complexity and sacrificing the needle needle accumulation degree (no need to enlarge the needle spacing and the needle length dimension). Under the premise of not reducing the rigidity of the needle body, the maximum structure that the needle body can bear is effectively reduced by 1377350. The service life of the product is improved, and the shortcomings of the product of the fine needle spacing are easily overcome. Since the multi-finger probe of the present invention is directly fabricated on a circuit board by lithography, electroforming, or button-cutting, the positioning accuracy is high, and it is particularly suitable for miniaturization of the needle pitch, needle orientation in the direction of the needle, and high-concentration cloth needle. , large area test card and other needs. [Embodiment] The present invention separates the circuit function and the structural function of the multi-finger probe from the design, and FIG. 2 is a structural functional part of the present invention, that is, an embodiment of the elastic structure, including the cantilever beam sharing elastic portion 20 and the finger Department 22 two parts. As mentioned above, K 〇c WT3/L3, therefore, without increasing the needle length L and without changing the needle weight K, if the needle width W near the fixed end of the cantilever beam increases, the needle thickness T can be Reduced to maintain the same needle weight K, at this time due to σ 〇 c T / L2, the maximum structural stress is worth to reduce. The elastic structure of Fig. 2 is realized by the same nickel-cobalt alloy as that of Fig. 1, and when verified by the finite element method, the needle width and the needle spacing are both ΙΟμηι, the needle length is 1500 μm, and the length of the finger 22 is 800 μm. In the case of the needle, the thickness of the needle body is reduced from the thickness 115μη of the single cantilever beam of Fig. 1 to ΙΟΟμιη and remains the same rigidity. It can be seen from the finite element analysis simulation of the embodiment of Fig. 2 that the maximum stress will occur near the fixed end 22a of the cantilever beam common elastic portion 20, and the finger portion 22 is farther away from the portion of the cantilever beam sharing the elastic portion 20. Withstand - the lower the stress. When the free end of the finger 22 is displaced downward by ΙΟΟμιη, the maximum stress occurring is 663 MPa, which is 21% lower than the maximum stress value of the cantilever beam structure of Fig. 1 when subjected to the free end downward displacement ΙΟΟμηη. In addition, because the thickness of the arm beam common elastic portion 20 is reduced, the aspect ratio of the structure is lowered, and the implementation of the process is relatively easy. - Figure 3 is a schematic view showing the elasticity provided by the present embodiment. When the lower jaw y-long knife F is applied to the end of the '22', the cantilever beam shares the elastic portion 2 to provide έΜ 1 j 1 t sheep and elastic/li dl, private part 22 The second elastic deformation amount d2 is provided, and the dispersion is the downward pressure F. The total elastic deformation amount that can be provided at the end of the finger 22 is again = the force of the dispersion structure is reduced, and the maximum structural stress is reduced, so the ^=2 material', the underweight strength Next, the cantilever beam sharing elastic portion 20 and the finger portion 22 can provide a large amount of elastic deformation, reduce the degree of creep, and increase the service life of the probe, in other words, the same stress bearing capacity and the same process using the strip: The elastic structure provided by the example can achieve a smaller pin spacing. FIG. 4 is a first embodiment of the elastic structure of FIG. 2, and FIG. In the present embodiment, the 'cantilever beam common elastic portion 20' is fixed to the base plate 18 at its rear end to form a solid/= end of the cantilever beam common elastic portion 20, and the free end of the cantilever beam common elastic portion 2〇 extends out A finger tip 24 and a wire 仏 are electrically connected to each other above the finger finger portion 22, and a first portion of the '26 extends from the needle tip 24 through the finger u and the cantilever target, above the elastic portion 20, and the second portion thereof The lines extending down to the substrate 胄 & connection substrate 18 are applied. Since the cantilever beam shares the elastic portion to provide only the structural function', it is not necessary to electrically connect the lines within the substrate 18. The arm beam common elastic portion 2G and the wire 26 are two distinct elements. In the present embodiment, the cantilever beam sharing elastic portion 20 and the finger portion 22 are integrated, and the cantilever beam sharing elastic portion 2 provides a common A portion of the elastic deformation 1377350 is given to each of the fingers 22, and the separated structure of the fingers 22 is lightened so that each of the fingers 22 is elastically deformed by two segments, and each of the legs is provided with an external force to provide a second hill. The difference in height between the two. County armor nutrient shared elastic part 2〇 Make full use of each wire% core (10) • For structural design, compared with single cantilever beam design, the thinner ^ ^ can reach the same needle weight, and increase the open drought = finger exploration The elasticity required for the needle to withstand the test stress is mainly two f;:: the limit 'its width and thickness can also be freely adjusted. If you choose a material with high conductivity, you can also use a thin wire. You can limit the amount of mechanical specifications to the strength of the material of the wire itself. #邻: 2 When the external force is used, the cantilever beam has the elastic portion 20 of the warrior kA and the LP22. The amount of elastic deformation is two parts. Finger length a
=選擇性可以讓最大應力值最佳化，也可以控制指部U 物之彈性變形幅度，使指部22各自具有順應待測 2面起伏的能力。與傳統單—懸臂樑探針相比，指部22 =長度較短’因此側向結構彈性較強，在針間距小的時候 ^ 22較傳統單一懸臂樑探針更不易因側向擾動力偏移 造成相鄰的指部22之間的摩擦。傳統單-懸臂樑探針若 因側向擾動力與相鄰探針接觸，將造成短路，嚴重時會造 成待測物或探針損壞。根據本發明，進一步地，由於多指 探針的電路功能與結構功能分職立設計，因此導線26 的寬度可以設計的比指苦"2更窄，如此一來，即使各指 部22因異常擾動而相互接觸，也不會造成導線％之間的 " 提供自我短路保護的功能。在本實施例中，懸臂樑 "用彈11# 20為絕緣體’因&導線26直接沉積在其上表 面β雖然:在本實施例中顯示針尖24在導線26上方，但是 也1以是針尖24直接銜接指部22。針尖24和導線26可 二疋-體的’例如在導線26上電鑄或沉積金屬後形成針 尖24。針尖24和導線26也可以是獨立的，例如單獨製作 針尖24後再接合在導線26上。 圖6及圖7顯示本發明的第二實施例，係在第一實施 ，上增加介電質固定座28包住立柱20a和導線26的第二 部份26a，以強化立柱結構。 _圖8係本發明的第三實施例，其構造與第一實施例相 同但疋懸臂樑共用彈性部20及指部22的材質為導體。 如果不同的針尖24之間需要電性隔離的話，在導線26與 懸臂樑共用彈性部20及指部22之間增設一介電層3〇。對 於不需要電性隔離的針尖24，則讓該對應的導線26直接 接觸懸臂樑共用彈性部20及指部22。如果需要的話，也 可以將懸臂樑共用彈性部20及指部22接地，以習知的高 頻設計配置適當的導線、介電層與接地層尺寸，以達成良 好的訊號傳輸品質。 由於將多指探針的電路功能與結構功能分別獨立設 計’因此設計彈性變大了，懸臂樑共用彈性部2〇及指部 22可以有各種形狀或構造的變化。例如圖9所示，各指部 22的長短、間距以及寬度都可以隨著需要而變化；懸臂樑 共用彈性部20上也可以增加開孔32或其他小結構，以調 11 m編f物L心方向也可 視示二本針設置在電路基板18上的俯 .較傳統探針更有彈性的#2統探針更自由，可以提供 .集度之探針：计空間’特別適用大面積或高積 圖η係多層多指探針的實施例。在同— 再提高針尖二亦4需求。增加多指探針的層數可以 圖心層二 上設置互相異向的多指探針的另如圖=:在穴基板18 及36互相交錯，滿足多方向的探針需求r a探針34 二二的二=導:臂樑共用彈性部 上，且向]·㈣山 如# 22係導體，搭接在導線26 的结構設計的一力針尖24。由於指部22是提供彈性功能 能的口導二6 /份’因此其厚度設計較單純提供導電功 I ] ' *限’唯指部所需分擔的彈性力較輕，無需 施=述因此設計上仍保有彈性。如同前面的實 二加-：電層V懸臂樑共用彈性部20是導體的話，可以 曰V: 14懸臂樑共用彈性部20與導線26之間。 部2〇 ，二去^例中’指部22搭接在懸臂樑共用彈性 ° 一疋一體的。針尖24在指部22上，導線26 .電性f接針尖24到基板18的内部線路。指部22搭接的 •冋度疋可以邊化的。如同前面的實施例所述，如果懸臂樑 用彈|±。[5 2G疋導體的^，可以增加一介電層在懸臂襟 共用彈性部20及指部22與針尖24及導線％之間。 圖15係與圖13同類型的實施例，指部22搭接在導 線26上，其答接南度較高。葉片38從懸臂樑共用彈性部 2〇的自由端延伸出來，與指部22之間有一空隙。在針尖 24欠力較小時(F1+F2)，僅由懸臂樑共用彈性部汕及指部 # 22提供力F2及F1以吸收應力。當針尖24受力較大，為 FI +F2 +F3’時’葉# 38也提供支樓力F3,以協助分散整 體釔構的爻力。葉片38與懸臂樑共用彈性部2〇是一體 的。葉片38可以和懸臂樑共用彈性部2〇 一樣是一整片 的，如圖16所示，也可以是指狀分離的，如圖17所示。 如圖18所不，也可以使用具多層結構的葉片％。葉 片38與懸臂樑共用彈性部2〇是一體的。 籲圖19顯示多指探針的製造流程的實施例。步驟工以 微衫製程形威遮罩40在基板18上，步驟2形成金屬42、 44及犧牲層46。金屬42和基板18内的線路電性連接。 .步驟2可藉由分區電鑄/電鍍、分區化學鍍、電著、濺鍍或 蒸鍍搭配遮罩做區域性沈積，填充導電材料等等方式達 成必要時於沈積後研磨平坦化上表面。步驟3形成遮罩 48，步驟4繼續沈積金屬42、44，步驟5沉積介電層5〇 覆蓋金屬44。步驟6形成遮罩52並再度沈積金屬42，步 驟7形成遮罩54並繼續沈積金屬56，步驟8蝕刻金屬56, 13 1377350 二=部分，以化學_、電化學 除二= 電加工等等方式製造針尖。在步驟9 在=ΐΓ、52、48及犧牲層46以後，即完成多指探針。 ，金屬44 .提供懸臂樑共用彈性部及指 屬2提供導線，金屬56提供針尖，介電層 ： 4二與懸臂樑共用彈性部及指料，留下的遮罩4。當:： 二m中的錢罩及犧牲層的材料可以選用光阻、 二=之金屬或高分子材料，且各層不-定要相同，可視 此製程若使用需舖設種子層之電鑄，可 ^沈積⑽鍍、_、化鍍等）、微影、_等方 2需之種子層，此部份為習知的半導體製程。步驟8之 部:亦可仿照步驟7的製程直接電铸成型-針 大，取代以蝕刻方式成型針尖。 τ ，=係多指探針的製造流程的另—實施例。步驟i 二:在基板18上形成遮罩40’步驟2形成金屬42、44後， ==rr4G。金屬42和基板㈣的線路電i =步驟4沉積犧牲層58’步驟5繼續以步驟2〜4的製程 覆、44及犧牲層％，步驟6沉積介電層5。 沉積金屬仏步驟7形成遮罩60並繼 8㈣金屬56°在㈣9除去遮罩 及犧牲層58以後，即完成多指探針。 襟共用彈性部及指部，金屬42提供導線金 =k供針尖，針尖製作方式與前一實施例相 電層50隔離導線42與懸臂樑共用彈性部及指部44。 ^377350 圖19及20所示之製程可互相組合應用，反覆施作微 衫與沉積材料等步驟完成各種根據本發明的多指探針。若 懸臂樑共用彈性部係由填充或電著絕緣材料形成且符合 需要之絕緣規格’則可省略施作㈣樑制彈性部二 之間的介電層50。 ” '' 在不同的實施例中，也可以利用前述製程製作懸臂樑 共用彈性部、指部及導線，再把單獨成㈣針尖接合在導 線上。單獨成型針尖及將之接合在導線上皆係習知技術。 以上對於本發明之較佳實施例所作的敘述係為闡明 之目的，而無意限定本發明精確地為所揭露的形式，基於 以上的教導或從本發明的實施例學習而作修改或變化是 可能的，實施例係為解說本發明的原理以及讓熟習該項技 術者以各種實施例利用本發明在實際應用上而選擇及敘 过本發明的技術思想企圖由以下的申請專利範圍及其均 4來決定。 【圖式簡單說明】 圖1係習知的細針間距懸臂樑探針； 圖2係本發明之彈性結構的實施例； 圖3係圖2之實施例提供彈性的示意圖； 圖4係本發明的第一實施例的剖面圖及上視圖； 圖5係本發明的第一實施例的立體圖； 圖6係本發明的第二實施例的剖面圖及上視圖； 圖7係本發明的第二實施例的立體圖； 15 1377350 . 圖8係本發明的第三實施例的剖面圖； - 圖9繪示懸臂樑共用彈性部及指部的許多變化； -圖1G係本發明的多指探針設置在電路基板上的俯視 不意圖； 圖11係多層探針的實施例的剖面圖及上視圖； 圖12係在一基板上設計多組多指探針的示意圖； 圖13係本發明的第五實施例的剖面圖及上視圖； 圖14係本發明的第六實施例的剖面圖及上視圖； _ 圖15係本發明的第七實施例的剖面圖； 圖16顯示一整片式的葉片； . 圖17顯示具有指狀結構的葉片； 圖18顯示多層結構的葉片； 圖19係本發明之多指探針的製造流程的第一實施 例；以及 圖20係係本發明之多指探針的製造流程的第二實施 例。 【主要元件符號說明】 10 懸臂樑探針 12 固定端 14 懸臂樑端部 16 自由端 18 基板 20 懸臂樑共用彈性部 1377350 . 20a 22 24 26 26a 28 30 32 ❿ 34 . 36 . 38 40 42 44 46 48 籲 50 52 54 56 58 60 立柱 指部 針尖 導線 導線的第二部份 固定座 介電層 孔洞 多指探針 多指探針 葉片 遮罩 金屬 金屬 犧牲層 遮罩 介電層 遮罩 遮罩 金屬 犧牲層 遮罩 17= Selectivity optimizes the maximum stress value, and also controls the elastic deformation amplitude of the finger U, so that the fingers 22 each have the ability to conform to the 2 surface undulations to be tested. Compared with the traditional single-cantilever probe, the finger 22 = shorter length 'so the lateral structure is more elastic. When the needle spacing is small, the 22 is less likely to be laterally disturbed than the traditional single cantilever probe. The movement causes friction between adjacent fingers 22. Conventional single-cantilever probes, if they are in contact with adjacent probes due to lateral turbulence, will cause a short circuit, which can cause damage to the analyte or probe. According to the present invention, further, since the circuit function and the structural function of the multi-finger probe are separately designed, the width of the wire 26 can be designed to be narrower than the bitterness, so that even if the fingers 22 are Abnormal disturbances and mutual contact, will not cause the function of "self-short-circuit protection" between the wires. In the present embodiment, the cantilever beam "uses the bomb 11# 20 as an insulator" because the & wire 26 is directly deposited on its upper surface β. Although the needle tip 24 is shown above the wire 26 in this embodiment, it is also The tip 24 directly engages the finger 22. The tip 24 and the wire 26 can be formed into a needle tip 24, for example, by electroforming or depositing metal on the wire 26. The tip 24 and lead 26 can also be separate, such as by separately forming the tip 24 and then engaging the lead 26. Figures 6 and 7 show a second embodiment of the present invention in which a dielectric spacer 28 is added to enclose the post 20a and the second portion 26a of the wire 26 to strengthen the post structure. Fig. 8 is a third embodiment of the present invention, the construction of which is the same as that of the first embodiment, but the material of the cantilever beam sharing elastic portion 20 and the finger portion 22 is a conductor. If electrical separation between the different needle tips 24 is required, a dielectric layer 3 is added between the conductor 26 and the cantilever beam sharing elastic portion 20 and the fingers 22. For the tip 24 that does not require electrical isolation, the corresponding wire 26 is brought into direct contact with the cantilever beam sharing elastic portion 20 and the finger portion 22. If desired, the cantilever beam sharing elastic portion 20 and the finger portion 22 can also be grounded, and appropriate wire, dielectric layer and ground layer dimensions can be configured at a conventional high frequency design to achieve good signal transmission quality. Since the circuit function and the structural function of the multi-finger probe are separately designed, the design flexibility becomes large, and the cantilever beam sharing elastic portion 2 and the finger portion 22 can have various shapes or configurations. For example, as shown in FIG. 9, the length, the pitch, and the width of each of the fingers 22 may be changed as needed; the cantilever beam sharing elastic portion 20 may also be provided with an opening 32 or other small structure to adjust the 11 m to the object L. The direction of the heart also shows that the two pins are placed on the circuit board 18. The #2 system probe is more flexible than the conventional probe. It is more free to provide the probe of the set: the space is 'suitable for large areas or An example of a high-product graph η-based multilayer multi-finger probe. In the same - to increase the needle tip 2 also 4 demand. Increasing the number of layers of the multi-finger probe can be set on the second layer of the multi-finger probes of the opposite direction of the image layer: the interlacing of the hole substrates 18 and 36 to meet the multi-directional probe requirements ra probe 34 II Two of the two = guide: the arm beam is shared with the elastic portion, and a force pin tip 24 is attached to the structural design of the wire 26 to the (4) mountain such as the #22 series conductor. Since the finger 22 is a mouthpiece that provides elastic functional energy, it is 6/part of the mouth. Therefore, the thickness design is simpler than that of providing the conductive work. I] '*limit' is only required to share the elastic force of the finger, so it is not necessary to apply Still retaining flexibility. As in the previous real two-plus-: electrical layer V cantilever beam shared elastic portion 20 is a conductor, the :V: 14 cantilever beam can be shared between the elastic portion 20 and the wire 26. In the second part, the second part of the 'final part' overlaps the cantilever beam with a common elasticity. The tip 24 is on the finger 22, and the wire 26 is electrically connected to the internal line of the substrate 18. The 冋 疋 of the finger 22 can be edged. As described in the previous embodiment, if the cantilever beam is used, it is ±±. [5 2G 疋 conductor ^, can add a dielectric layer between the cantilever 共用 shared elastic portion 20 and the finger 22 and the tip 24 and the wire %. Figure 15 is an embodiment of the same type as Figure 13 with the fingers 22 lapped over the wires 26 with a higher degree of south. The vanes 38 extend from the free end of the cantilever beam sharing elastic portion 2, with a gap between the fingers 22. When the undershoot of the needle tip 24 is small (F1 + F2), the force F2 and F1 are supplied only by the cantilever beam common elastic portion 汕 and the finger portion #22 to absorb the stress. When the needle tip 24 is subjected to a large force, FI + F2 + F3', the leaf #38 also provides a branching force F3 to assist in dispersing the force of the entire structure. The blade 38 and the cantilever beam share the elastic portion 2〇 in one piece. The vanes 38 may be a single piece like the cantilever beam sharing elastic portion 2, as shown in Fig. 16, or may be finger-separated as shown in Fig. 17. As shown in Fig. 18, the blade % having a multilayer structure can also be used. The blade 38 and the cantilever beam share the elastic portion 2〇 in one piece. Figure 19 shows an embodiment of the manufacturing flow of the multi-finger probe. The steps are performed on the substrate 18 by a micro-shirt process, and the steps 42 form the metal 42, 44 and the sacrificial layer 46. The metal 42 and the wires within the substrate 18 are electrically connected. Step 2 can be planarized by zone electroforming/electroplating, zoned electroless plating, electroplating, sputtering or vapor deposition with a mask, filled with a conductive material, etc., if necessary, to planarize the upper surface after deposition. Step 3 forms a mask 48, step 4 continues to deposit metal 42, 44, and step 5 deposits a dielectric layer 5 覆盖 covering metal 44. Step 6 forms the mask 52 and deposits the metal 42 again, step 7 forms the mask 54 and continues to deposit the metal 56, step 8 etches the metal 56, 13 1377350 = part, chemical _, electrochemical division 2 = electrical processing, etc. Make a needle tip. After step 9 at =ΐΓ, 52, 48 and sacrificial layer 46, the multi-finger probe is completed. The metal 44 provides a cantilever beam common elastic portion and the finger 2 provides a wire, the metal 56 provides a needle tip, and the dielectric layer: 4 2 shares the elastic portion and the finger with the cantilever beam, leaving the mask 4. When:: The material of the money cover and the sacrificial layer in the second m can be selected from photoresist, two metal or polymer materials, and the layers are not the same. It can be seen that if the process requires the electroforming of the seed layer, ^ Deposition (10) plating, _, plating, etc.), lithography, _, etc. 2 required seed layer, this part is a conventional semiconductor process. Part 8: It can also be directly electroformed according to the process of step 7 - the needle is large instead of forming the needle tip by etching. τ , = is another embodiment of the manufacturing process of the multi-finger probe. Step i: Forming a mask 40 on the substrate 18 Step 2 After forming the metal 42, 44, == rr4G. The line of the metal 42 and the substrate (4) is electrically i = step 4 deposits the sacrificial layer 58'. Step 5 continues with the process of steps 2 through 4, 44 and sacrificial layer %, and the dielectric layer 5 is deposited in step 6. The deposition of the metal crucible step 7 forms the mask 60 and the 8 (tetra) metal 56° after the (4) 9 removal of the mask and the sacrificial layer 58, the multi-finger probe is completed. The common elastic portion and the finger portion are shared, and the metal 42 is provided with a wire gold = k for the tip of the needle. The needle tip is formed in the same manner as the previous embodiment. The electrical layer 50 is separated from the wire 42 and the cantilever beam by the elastic portion and the finger portion 44. ^377350 The processes shown in Figures 19 and 20 can be used in combination with one another, and the steps of applying a micro-shirt and a deposition material are repeated to complete various multi-finger probes in accordance with the present invention. If the cantilever beam common elastic portion is formed of a filled or electrically insulating material and conforms to the required insulation specifications, the dielectric layer 50 between the (4) beam elastic portions 2 may be omitted. In different embodiments, the cantilever beam can also be used to make the cantilever beam common elastic portion, the finger portion and the wire, and the separate (four) needle tip can be joined to the wire. The needle tip is separately formed and bonded to the wire. The above description of the preferred embodiments of the present invention is intended to be illustrative, and is not intended to limit the scope of the invention to the disclosed embodiments. Or a change is possible, and the embodiments are intended to illustrate the principles of the present invention and to enable those skilled in the art to use the present invention in various embodiments to select and describe the technical idea of the present invention in the practical application. Figure 1 is a conventional fine needle spacing cantilever probe; Figure 2 is an embodiment of the elastic structure of the present invention; Figure 3 is an embodiment of Figure 2 providing flexibility Figure 4 is a cross-sectional view and a top view of a first embodiment of the present invention; Figure 5 is a perspective view of a first embodiment of the present invention; Figure 6 is a cross-sectional view of a second embodiment of the present invention; Figure 7 is a perspective view of a second embodiment of the present invention; 15 1377350. Figure 8 is a cross-sectional view of a third embodiment of the present invention; - Figure 9 is a view of the cantilever beam sharing the elastic portion and the finger portion Figure 1G is a plan view of a multi-finger probe of the present invention disposed on a circuit substrate; Figure 11 is a cross-sectional view and a top view of an embodiment of a multilayer probe; Figure 12 is a plurality of sets designed on a substrate Figure 13 is a cross-sectional view and a top view of a fifth embodiment of the present invention; Figure 14 is a cross-sectional view and a top view of a sixth embodiment of the present invention; Figure 15 is a seventh embodiment of the present invention Figure 16 shows a one-piece blade; Figure 17 shows a blade with a finger structure; Figure 18 shows a blade of a multilayer structure; Figure 19 shows the manufacturing process of the multi-finger probe of the present invention An embodiment; and Fig. 20 is a second embodiment of the manufacturing flow of the multi-finger probe of the present invention. [Main component symbol description] 10 Cantilever probe 12 Fixed end 14 Cantilever beam end 16 Free end 18 Substrate 20 Cantilever beam sharing elastic part 1377350 . 20a 22 24 26 26a 28 30 32 ❿ 34 . 36 . 38 40 42 44 46 48 50 50 52 54 56 58 60 Column finger tip wire conductor second part fixing seat dielectric layer hole multi-finger probe multi-finger probe blade Mask metal metal sacrificial layer mask dielectric layer mask mask metal sacrificial layer mask 17