TWI730806B - Vertical probe card having cantilever probe - Google Patents

Abstract

The present invention provides a vertical probe card and a cantilever probe thereof. The cantilever probe includes a main segment, two wing segments respectively extending from two opposite sides of the main segment, and a detection segment and a fixing segment that respectively extend from two opposite ends of the main segment in a height direction. The detection segment includes a suspended contact portion and a cantilever that connects the contact portion and the main segment. The detection segment has an arm length in a longitudinal direction perpendicular to the height direction. The contact portion is spaced apart from the main segment by a distance along the height direction, and the distance is less than the arm length.

Description

Vertical probe card with cantilever probe

The invention relates to a probe card, in particular to a vertical probe card and a cantilever probe.

Existing cantilever probes are mainly used in peripheral chip testing. However, the existing cantilever probes have a complicated needle planting method (such as manual soldering needles) and require fan-out design. Accordingly, the existing cantilever probe is not easy to implant and maintain the needle, which makes it difficult to reduce the production and maintenance costs.

Therefore, the inventor believes that the above-mentioned shortcomings can be improved, and with great concentration of research and the application of scientific principles, we finally propose an invention with reasonable design and effective improvement of the above-mentioned shortcomings.

The embodiment of the present invention provides a vertical probe card and its cantilever probe, which can effectively improve the defects that may occur in the existing cantilever probe.

The embodiment of the present invention discloses a vertical probe card, which includes: a plurality of guide plates stacked on each other along a height direction; and a plurality of cantilever probes positioned on the plurality of guide plates, and each of the guide plates The cantilever probe includes: a main body section that penetrates through a plurality of the guide plates; two side wing sections are formed by extending from opposite sides of the main body section respectively, and the two side wing sections are clamped in At least two of the plurality of guide plates; and a needle measuring section and a fixed section, respectively from the The main body section is formed by extending both ends in the height direction; the needle measuring section includes an abutting portion in a suspended shape and a needle measuring cantilever connecting the abutting portion and the main body section; wherein, more The abutting portion of each of the cantilever probes is used to detachably abut against an object to be tested; wherein, the needle test section has a lever length in a length direction perpendicular to the height direction, In addition, the abutting portion is separated from the main body section in the height direction by a distance smaller than the length of the lever arm.

The embodiment of the present invention also discloses a cantilever probe of a vertical probe card, which includes: a main body section; two side wing sections formed by extending from opposite sides of the main body section; and a needle measuring section and A fixed section is formed by extending from both ends of the main body section in a height direction; the needle measuring section includes an abutting portion in a suspended shape and an abutting portion connecting the abutting portion and the main body section Needle test cantilever; wherein the needle test section has a lever arm length in a length direction perpendicular to the height direction, and the abutment portion is less than the distance from the main body section in the height direction A gap in the length of the arm.

In summary, the vertical probe card disclosed in the embodiment of the present invention is designed through the structure of the cantilever probe, so that the cantilever probe can be applied to the vertical probe card, which is beneficial to the cantilever probe. Needle implantation, maintenance and replacement of type probes, and reduce production and maintenance costs.

In order to further understand the features and technical content of the present invention, please refer to the following detailed descriptions and drawings about the present invention, but these descriptions and drawings are only used to illustrate the present invention, and do not make any claims about the scope of the present invention limit.

1000: Vertical probe card

100: Probe head

1: guide plate

1a: The first guide plate

10a: The first elongated hole

1b: Second guide plate

10b: The second elongated hole

1c: Third guide plate

10c: The third elongated hole

2: Cantilever probe

21: Main section

211: Trapezoidal structure

22: Flanking section

23: fixed segment

231: Connection

232: buffer cantilever

24: Needle test section

241: Abutment Department

242: Needle Test Cantilever

2421: slit

200: adapter board

H: height direction

L: length direction

D: width direction

L24: arm length

G: Spacing

L100: Dislocation distance

FIG. 1 is a three-dimensional schematic diagram of a vertical probe card according to the first embodiment of the present invention.

Fig. 2 is a three-dimensional exploded schematic view of the probe head according to the first embodiment of the present invention.

3 is a schematic cross-sectional view of a vertical probe card according to the first embodiment of the present invention.

FIG. 4 is a three-dimensional schematic diagram of the cantilever probe according to the first embodiment of the present invention.

FIG. 5 is a schematic plan view of the first aspect of the cantilever probe of FIG. 4.

FIG. 6 is a schematic plan view of a second aspect of the cantilever probe of FIG. 4.

FIG. 7 is a schematic plan view of a third aspect of the cantilever probe of FIG. 4.

Fig. 8 is a three-dimensional exploded schematic diagram of the probe head according to the second embodiment of the present invention.

9 is a schematic cross-sectional view of a vertical probe card according to the third embodiment of the present invention.

10 is a schematic cross-sectional view of a vertical probe card according to the fourth embodiment of the present invention.

FIG. 11 is a schematic diagram of the cantilever probe of FIG. 10 pressing against the side object with the needle side section.

FIG. 12 is a schematic cross-sectional view of another aspect of the vertical probe card of FIG. 10.

Fig. 13 is a schematic diagram of the cantilever probe of Fig. 12 pressing against the side object with the needle side section.

FIG. 14 is a three-dimensional schematic diagram of a vertical probe card according to the fifth embodiment of the present invention.

FIG. 15 is a schematic top view of the vertical probe card of FIG. 14. FIG.

FIG. 16 is a three-dimensional schematic diagram of another aspect of the cantilever probe according to the first embodiment of the present invention.

The following is a specific embodiment to illustrate the implementation of the "vertical probe card and its cantilever probe" disclosed in the present invention. Those skilled in the art can understand the advantages and effects of the present invention from the content disclosed in this specification. . The present invention can be implemented or applied through other different specific embodiments, and various details in this specification can also be based on different viewpoints and applications, and various modifications and changes can be made without departing from the concept of the present invention. In addition, the drawings of the present invention are merely schematic illustrations, and are not drawn according to actual dimensions, and are stated in advance. The following embodiments will further describe the related technical content of the present invention in detail, but the disclosed content is not intended to limit the protection scope of the present invention.

It should be understood that although terms such as "first", "second", and "third" may be used herein to describe various elements or signals, these elements or signals should not Subject to these terms. These terms are mainly used to distinguish one element from another, or one signal from another signal. In addition, the term "or" used in this document may include any one or a combination of more of the associated listed items depending on the actual situation.

[Example 1]

Please refer to FIG. 1 to FIG. 7 and FIG. 16, which are the first embodiment of the present invention. The present embodiment discloses a vertical probe card 1000, which includes a probe head 100 and a turn abutting on one side of the above-mentioned probe head 100 (for example, the top side of the probe head 100 in FIG. 1) The connecting board 200 (space transformer), and the other side of the probe head 100 (the bottom side of the probe head 100 in FIG. 1) can be used to test a DUT (device under test, DUT) (Figure 1). Not shown, such as: semiconductor wafer).

It should be noted that, in order to facilitate the understanding of this embodiment, the drawings only show a partial structure of the vertical probe card 1000, so as to clearly show the structure and connection relationship of each component of the vertical probe card 1000. , But the present invention is not limited to the drawings. The structure of each element of the probe head 100 and its connection relationship will be introduced below.

The probe head 100 includes a plurality of guide plates 1 stacked on each other in a height direction H, and a plurality of cantilever probes 2 positioned on the plurality of guide plates 1. In detail, for ease of description, the plurality of guide plates 1 in this embodiment are respectively named a first guide plate 1a, a second guide plate 1b, and a third guide plate 1c, and a plurality of the guide plates 1 The second guide plate 1b, the third guide plate 1c, and the first guide plate 1a are stacked in order from bottom to top along the height direction H. In addition, in order to facilitate the construction of the following elements, this embodiment further defines a length direction L perpendicular to the height direction H, and a width direction D perpendicular to the height direction H and the length direction L.

It should be noted that the plurality of guide plates 1 are arranged corresponding to each other in this embodiment, and the probe head 100 excludes the aspect that only includes a single guide plate 1. Furthermore, the cantilever probe 2 in this embodiment is described as being matched with the above-mentioned elements (such as a plurality of the guide plates 1), but this is not the case in the present invention. In other illustrated embodiments, the cantilever probe 2 can also be used with other components or used separately (eg, sold).

Wherein, the third guide plate 1c is clamped between the first guide plate 1a and the second guide plate 1b. The first guide plate 1a is formed with a first elongated hole 10a, and the (long axis direction of) the first elongated hole 10a is formed perpendicular to the width direction D. In this embodiment, the shape of the first elongated hole 10a is substantially rectangular, but the present invention is not limited to this. For example, in other embodiments not shown in the present invention, a plurality of the first elongated holes 10a can also be formed on the first guide plate 1a, and the plurality of first elongated holes 10a The width direction D is formed by being recessed respectively.

The second guide plate 1b is formed with a second elongated hole 10b, and the position of the second elongated hole 10b along the height direction H corresponds to the first elongated hole 10a (e.g., the second elongated hole 10a). The shaped hole 10b is correspondingly located directly below the first elongated hole 10a in this embodiment). However, in other embodiments not shown in the present invention, a plurality of the second elongated holes 10b can be formed on the second guide plate 1b, and a plurality of first holes 10b can also be formed on the first guide plate 1a. The elongated holes 10a, and the positions of the plurality of second elongated holes 10b respectively correspond to the plurality of first elongated holes 10a, but the present invention is not limited to this.

The third guide plate 1c is formed with a plurality of third elongated holes 10c, and each of the third elongated holes 10c (the direction of the long axis) is parallel to the length direction L, and is respectively along the width direction D. Recessed. More specifically, a plurality of the third elongated holes 10c are respectively located between the first elongated hole 10a and the second elongated hole 10b along the height direction H, and the third elongated hole 10c The length of the elongated hole 10c in the longitudinal direction L is greater than the length of the first elongated hole 10a and the second elongated hole 10b in the longitudinal direction thereof. In this embodiment, the shape of any of the third elongated holes 10c is rectangular, but the present invention is not limited to this.

Wherein, the third guide plate 1c can be adjusted according to user needs. For example, in other embodiments not shown in the present invention, the second guide plate 1b can be adjacent to the first guide plate One side surface of 1a is protruding and abuts against the first guide plate 1a, thereby replacing the third guide plate 1c. according to Here, the third guide plate 1c of the probe head 100 can also be omitted or replaced with other components, but the present invention is not limited thereto.

One ends of the plurality of cantilever probes 2 respectively pass through the first elongated hole 10a of the first guide plate 1a, and the other ends of the plurality of cantilever probes 2 respectively pass through the first elongated hole 10a. The second long hole 10b of the second guide plate 1b. Furthermore, a part of each of the cantilever probes 2 (such as the following main body section 21) is located in the first guide plate 1a, the second guide plate 1b, and the third guide plate 1c . Wherein, the cantilever probe 2 is a single piece structure that is conductive and integrally formed in this embodiment, and the cantilever probe 2 may be manufactured by micro-electromechanical system (MEMS) technology, but the present invention Not limited to this.

It should be additionally noted that a plurality of the cantilever probes 2 are illustrated in FIG. 1 in this embodiment by being arranged in a row along one side of the probe head 100, but they are not shown in this embodiment In the position, the plurality of cantilever probes 2 may be arranged along at least two sides of the probe head 100, and the plurality of cantilever probes 2 arranged along either side of the probe head 100 may also be It can be arranged in at least two rows. In other words, the arrangement of the multiple cantilever probes in the probe head 100 can be adjusted according to design requirements, and is not limited to this embodiment.

Since the structures of the multiple cantilever probes 2 of the probe head 100 are substantially the same in this embodiment, the following description takes a single cantilever probe 2 as an example, but the present invention is not limited Here. For example, in other embodiments not shown in the present invention, the plurality of cantilever probes 2 of the probe head 100 may also have different structures. Furthermore, in order to facilitate the understanding of the structure of the cantilever probe 2, the following will introduce the cantilever probe 2 when the probe head 100 is in the needle implant position.

The cantilever probe 2 includes a main body section 21, two side wing sections 22 extending from opposite sides of the main body section 21, and a fixing section 23 extending from the top edge of the main body section 21. , And a needle measuring section 24 extending from the bottom edge of the main body section 21. In detail, so The main body section 21 passes through the corresponding first elongated hole 10a, the second elongated hole 10b, and the third elongated hole 10c, and the fixed section 23 is exposed to the first guide On the upper surface of the board 1a, the probe section 24 is exposed on the lower surface of the second guide plate 1b, and the two side wing sections 22 are correspondingly arranged on the third guide plate 1c.

From another perspective, one end edge of the fixed section 23 facing the first guide plate 1a (for example, the top edge of the fixed section 23 in FIG. 3) in this embodiment sequentially extends to form the main body The section 21 and the two side wing sections 22 (such as the left and right sides of the main body section 21 in FIG. 3 ), and the needle measuring section 24.

Furthermore, the main body section 21 penetrates through a plurality of the guide plates 1 (for example, the first guide plate 1a, the second guide plate 1b, and the third guide plate 1c), and two One of the side wing segments 22 is clamped to at least two of the guide plates 1 of the plurality of guide plates 1 (eg, clamped between the first guide plate 1a and the second guide plate 1b and Fixed to the third guide plate 1c). Accordingly, the plurality of guide plates 1 can hold the two side wing sections 22 corresponding to each other to stably fix the cantilever probe 2 and then move or turn over the probe head 100. At this time, the cantilever probe 2 is not easy to fall out.

In this embodiment, the shape of the main body section 21 perpendicular to the width direction D is generally trapezoidal, and the cross section of the main body section 21 perpendicular to the height direction H is generally rectangular, but the present invention is not limited Here. For example, in other embodiments not shown in the present invention, the shape of the main body section 21 perpendicular to the width direction D may be non-trapezoidal (eg, rectangular).

The two side wing sections 22 extend from the main body section 21 along opposite sides of the length direction L, and any one of the side wing sections 22 perpendicular to the height direction H is roughly rectangular in cross section, and two Each of the side wing sections 22 is substantially connected to the center position of the main body section 21 (left and right sides) in the height direction H. The length of any one of the side wing sections 22 in the length direction L is approximately 1/10 to 1/20 of the length of the main body section 21 in the length direction L. The thickness of the two side wing sections 22 along the width direction D is substantially equal to the thickness of the main body section 21, but the present invention is not limited to this. For example, in other embodiments not shown in the present invention, the thickness of the side wing section 22 may not be equal to the thickness of the main body section 21.

It should be additionally noted that the two side wing sections 22 of the cantilever probe 2 are formed according to their use, and accordingly the cantilever probe 2 is relatively stably clamped on one of the plurality of guide plates 1. Therefore, the cantilever probe 2 excludes the aspect that only includes the single wing section 22.

The fixing section 23 is formed by extending from the top edge of the main body section 21 in the direction away from the main body section 21 along the height direction H. Wherein, the fixing section 23 is exposed on the surface of a plurality of guide plates 1 (for example, the first guide plate 1a in FIG. 3).

The fixed section 23 includes a connecting portion 231 in a suspended shape and a buffer cantilever 232 connecting the connecting portion 231 and the main body section 21. The connecting portion 231 is substantially trapezoidal in a shape perpendicular to the width direction D, and the cross section of the connecting portion 231 perpendicular to the height direction H is substantially rectangular, but the present invention is not limited to this. For example, as shown in FIG. 16, the fixing section 23 may only be formed with a connecting portion 231, and the connecting portion 231 is directly formed on the main body section 21; or, in other embodiments not shown in the present invention In an example, the shape of the connecting portion 231 perpendicular to the width direction D may be a non-trapezoidal shape (such as a rectangle).

In this embodiment, the buffer cantilever 232 is substantially in-line in a shape perpendicular to the width direction D (as shown in FIG. 4), and one of the two ends of the buffer cantilever 232 is connected to the main body Section 21 (the top edge), the other end of the buffer cantilever 232 is connected to the connecting portion 231. In more detail, the buffer cantilever 232 can be deformed by force to continue a resilient force. The cross section of the buffer cantilever 232 perpendicular to the height direction H is substantially rectangular, but the present invention is not limited to this. For example, in other embodiments not shown in the present invention, the buffer cantilever 232 may have an arc-shaped structure.

That is to say, the connecting portion 231 is arranged on the main body section 21 at intervals by the buffer cantilever 232, so that the connecting portion 231 can be arranged on the top side of the plurality of guide plates 1 (For example, above the first guide plate 1a in FIG. 3), and the top end of the connecting portion 231 is used to fix the adapter plate 200.

The needle measuring section 24 is formed along the height direction H and extending from the bottom edge of the main body section 21 in a direction away from the main body section 21, and the needle measuring section 24 exposes a plurality of the guide plates 1 (such as: the second guide plate 1b in Figure 3) on the surface.

The probe section 24 includes an abutting portion 241 in a suspended shape and a probe cantilever 242 connecting the abutting portion 241 and the main body section 21. The shape of the abutting portion 241 perpendicular to the width direction D is substantially trapezoidal (as shown in FIG. 4) or convex shape (as shown in FIG. 5), and the abutting portion 241 is vertically positioned. The cross section in the height direction H is substantially rectangular, but the present invention is not limited to this. For example, in other embodiments not shown in the present invention, the shape of the abutting portion 241 perpendicular to the width direction D may be a non-trapezoidal shape (such as a rectangle).

In this embodiment, the probe cantilever 242 has a substantially in-line structure (as shown in FIG. 4) or a stepped structure (as shown in FIG. 6) in a shape perpendicular to the width direction D. ), and one end of the two ends of the needle cantilever 242 is connected to the main body section 21 (the bottom edge), and the other end of the needle cantilever 242 is connected to the abutting portion 241. In more detail, the needle cantilever 242 can be deformed by force and continue to have a resilient force, thereby providing the stroke required by the cantilever probe 2 during operation. The cross section of the needle cantilever 242 perpendicular to the height direction H is substantially rectangular, but the present invention is not limited to this. For example, in other embodiments not shown in the present invention, the probe cantilever 242 may have an arc-shaped structure.

In addition, the needle cantilever 242 can also be adjusted and changed according to design requirements; for example, please refer to FIG. 7, the needle cantilever 242 is on a surface perpendicular to the width direction H, and the needle cantilever The cantilever 242 may be concavely formed with a slit 2421 along the length direction L. The slit 2421 is substantially rectangular in a shape perpendicular to the width direction D, and the slit 2421 penetrates the needle test cantilever. 242 along both sides of the width direction D. In addition, other implementations not shown in the present invention In an example, the needle cantilever 242 may also be recessed along the length direction L to form a plurality of the slits 2421, but the present invention is not limited to this.

Furthermore, the abutting portion 241 is disposed on the main body section 21 by the needle cantilever 242, so that the abutting portion 241 can be arranged on the bottom side of the plurality of guide plates 1 at intervals ( For example, below the second guide plate 1b in FIG. 3), and the abutting portion 241 is used to detachably abut the object to be measured.

Wherein, the needle measuring section 24 has a moment arm length L24 in the length direction L. That is to say, the length of the needle cantilever 242 in the length direction L is approximately equal to the length of the moment arm L24, and the abutting portion 241 is connected to the main body section 21 in the height direction H ( The bottom side) has a distance G that is less than the length L24 of the force arm. In this embodiment, the distance G is approximately 1/5 to 1/10 of the length L24 of the force arm, but the present invention is not limited to this.

The cantilever probe 2 is sequentially arranged on the first guide plate 1a, the third guide plate 1c, and the second guide plate 1b. The main body section 21 is fixed to the corresponding first elongated hole 10a and the second elongated hole 10b, and the two side wing sections 22 are correspondingly disposed in the third elongated hole 10c, according to So that the two side wing sections 22 are clamped between the first guide plate 1a and the second guide plate 1b.

The fixing section 23 passes through the first elongated hole 10a, and the connecting portion 231 of the fixing section 23 is exposed on the surface of the first guide plate 1a. The needle test section 24 passes through the second elongated hole 10b, and the contact portion 241 of the needle test section 24 is exposed on the surface of the second guide plate 1b.

In this embodiment, the needle measuring section 24 and the fixing section 23 in each of the cantilever probes 2 are located within a projection area formed by the orthographic projection of the main body section 21 along the height direction H Inside, so that each of the cantilever probes 2 is arranged on the plurality of guide plates 1 along the height direction H.

When the abutting portion 241 of each cantilever probe 2 abuts against the object to be tested, the needle cantilever 242 provides elasticity, so that the abutting portion 241 does indeed contact the object to be tested. According to this, the connection between the abutting portion 241 and the object to be measured can be more stable.

It should be noted that, in this embodiment, one of the guide plates 1 (such as the first guide plate 1a) far away from the plurality of needle test sections 24 can pass through a plurality of guide plates along the height direction H. The cantilever probe 2 is pressed against the two side wing sections 22 of each cantilever probe 2, so that the first elongated hole 10a accommodates each of the main body sections 21 ( Adjacent to the side of the fixed section 23). In detail, the two side wing sections 22 of each cantilever probe 2 are pressed against the first guide plate 1a, so that the main body of each cantilever probe 2 The section 21 is fixed in a plurality of the guide plates 1.

As described above, the cantilever probe 2 of the vertical probe card 1000 can be positioned between the first guide plate 1a and the second guide plate 1b through the two side wing sections 22 , And the needle measuring section 24 can provide the stroke required by the cantilever probe 2 to detect the force without being misaligned, thereby providing a vertical probe card and its cantilever probe that are different from the conventional vertical probe card. Furthermore, since a plurality of the guide plates 1 (such as the first guide plate 1a, the second guide plate 1b, and the third guide plate 1c) do not need to be positioned in a staggered arrangement to position the cantilever probe Needle 2, so the length of the cantilever probe 2 can be effectively shortened, so that the cantilever probe 2 can effectively improve the test performance results, and help to improve the efficiency of needle implantation or facilitate the maintenance and replacement of the Cantilever probe 2.

[Example 2]

Please refer to FIG. 8, which is the second embodiment of the present invention. Since this embodiment is similar to the above-mentioned embodiment one, the similarities between the two embodiments will not be repeated. However, this embodiment is different from the above-mentioned embodiment one. The difference is roughly explained as follows: In the vertical probe card 1000 of this embodiment, the first elongated hole 10a is recessed along the width direction D, and the first guide plate 1a is formed along the The plurality of cantilever probes 2 pass through the width direction D, so that the first elongated hole 10a can pass through the plurality of cantilever probes 2 along the width direction D, and the first An elongated hole 10a accommodating part of each of the main body sections 21 (The side adjacent to the fixed section 23), and the first guide plate 1a is pressed against the two side wing sections 22 of each of the cantilever probes 2.

In detail, the two side wing sections 22 of each cantilever probe 2 are pressed against by the first guide plate 1a, so that the main body section of each cantilever probe 2 21 is fixed in a plurality of the guide plates 1.

As mentioned above, when the cantilever probe 2 of the vertical probe card 1000 is set on the second guide plate 1b and the third guide plate 1c, the first guide plate 1a can The plurality of cantilever probes 2 pass through the width direction D. Wherein, the arrangement of the first guide plate 1a can be adjusted according to design requirements, so that the cantilever probe 2 can help improve the efficiency of needle implantation or facilitate maintenance and replacement of the cantilever probe 2.

[Example Three]

Please refer to FIG. 9, which is the third embodiment of the present invention. Since this embodiment is similar to the above-mentioned embodiment one, the similarities between the two embodiments will not be repeated. However, this embodiment is different from the above-mentioned embodiment one. The difference is roughly explained as follows: in the vertical probe card 1000 of this embodiment, the abutting portion 241 and the connecting portion 231 of the cantilever probe 2 are not both located in the height direction H. In other words, the probe cantilever 242 of the probe section 24 and the buffer cantilever 232 of the fixed section 23 extend in different directions in the length direction L, and the abutment portion 241 There is an offset distance L100 greater than the gap G from the connecting portion 231 in the longitudinal direction L, but the present invention is not limited to this. For example, in other embodiments not shown in the present invention, the offset distance L100 is spaced in the length direction L not greater than the interval G, but the present invention is not limited to this.

As described above, the abutting portion 241 and the connecting portion 231 of one of the cantilever probes 2 of the vertical probe card 1000 are not both located in the height direction H, so that the The connecting portion 231 of the cantilever probe 2 can be matched with different adapter plates 200, thereby increasing the The scope of application of the cantilever probe 2.

[Example Four]

Please refer to FIG. 10 to FIG. 13, which are the fourth embodiment of the present invention. Since this embodiment is similar to the above-mentioned first embodiment, the similarities between the two embodiments will not be repeated. However, this embodiment is different from the above-mentioned embodiment. The difference of Example 1 is roughly explained as follows: As shown in FIG. 10 and FIG. 11, in the vertical probe card 1000 of this embodiment, the abutment portion 241 of the cantilever probe 2 is connected to the connection The portions 231 are all located in the height direction H, and the connecting portion 231 of the buffer cantilever 232 abuts against the main body section 21. Furthermore, when the abutting portion 241 is used to abut against the object to be measured, the needle test cantilever 242 is elastically bent so that the abutting portion 241 abuts on both sides of the main body section 21 .

In detail, the main body section 21 may protrude and form a trapezoidal structure 211 at a portion adjacent to the abutting portion 241 and the connecting portion 231 along the height direction H. Accordingly, when the cantilever probe 2 abuts the object to be measured with the abutting portion 241, the abutting portion 241 abuts the adjacent trapezoidal structure 211. For example, in other embodiments not shown in the present invention, one of the abutting portion 241 and the connecting portion 231 may also be the trapezoidal structure 211 that does not abut the main body section 21, but this The invention is not limited to this.

In addition, please refer to FIGS. 12 and 13, one of the two trapezoidal structures 211 may also be formed on the side of the abutting portion 241 adjacent to (the bottom side of the main body section) 21, and the other The trapezoidal structure 211 may be formed on the side of the connecting portion 231 adjacent to (the top side of the main body section 21), but the present invention is not limited to this. For example, in other embodiments not shown in the present invention, one of the two trapezoidal structures 211 may be formed on the abutting portion 241 or the connecting portion 231 adjacent to the main body section 21, and The other trapezoidal structure 211 is formed on the main section 21, but the present invention is not limited to this.

As mentioned above, one of the cantilever probes 2 of the vertical probe card 1000 The abutting portion 241 and the connecting portion 231 respectively abut on both sides of the main body section 21, so that the cantilever probe 2 can shorten the transmission path, so that the cantilever probe 2 helps Improve the transmission effect.

[Example 5]

Please refer to FIG. 14 and FIG. 15, which is the fifth embodiment of the present invention. Since this embodiment is similar to the above-mentioned first embodiment, the similarities between the two embodiments will not be described again. However, this embodiment is different from the above-mentioned embodiment. The difference of Example 1 is roughly explained as follows: In the vertical probe card 1000 of this embodiment, two adjacent cantilever probes 2 of the plurality of cantilever probes 2 along the width direction D Wherein, the abutting portion 241 and the connecting portion 231 of one of the cantilever probes 2 are not both located in the height direction H, and the abutting portion of the other cantilever probe 2 The portion 241 and the connecting portion 231 are both located in the height direction H.

Accordingly, the plurality of cantilever probes 2 of the vertical probe card 1000 are distributed as described above, so that the connecting portion 231 can cooperate with different adapter boards 200, thereby increasing the cantilever The scope of application of type probe 2. Furthermore, the probe head 100 can effectively expand the distance between two adjacent connecting parts 231 through the arrangement of a plurality of the connecting parts 231 (as shown in FIG. 14), thereby influencing the The spacing of the adapter plate 200 is set. For example, as shown in FIG. 14, the probe head 100 only needs to be further equipped with a circuit board, so as to improve the electrical quality and reduce the manufacturing cost.

[Technical Effects of Embodiments of the Invention]

In summary, the vertical probe card disclosed in the embodiment of the present invention is designed through the structure of the cantilever probe, so that the cantilever probe can be applied to the vertical probe card, which is beneficial to the cantilever probe. Needle implantation, maintenance and replacement of type probes, and reduce production and maintenance costs.

In addition, the vertical probe card disclosed in the embodiment of the present invention can move and fix the cantilever type through holes or slots in the guide plate (such as the first guide plate). Probe, so that the cantilever probe does not need to be misaligned to provide the needle measuring section in the force Therefore, the length of the cantilever probe can be effectively shortened to effectively improve the test performance. In addition, each cantilever probe can be straight up and down along the height direction, which facilitates the cantilever probe needle implantation, maintenance and replacement of the vertical probe card, and reduces production and maintenance costs.

Furthermore, in the vertical probe card disclosed in the embodiment of the present invention, the abutting portion and the connecting portion of the cantilever probe may not both be located in the height direction, so that the cantilever probe is The connection part can be matched with different adapter boards, thereby increasing the application range of the cantilever probe.

In addition, during the detection process of the vertical probe card disclosed in the embodiment of the present invention, the abutting portion and the connecting portion of the cantilever probe can abut against both sides of the main body section respectively, so that the The cantilever probe can shorten the transmission path, and the cantilever probe helps to improve the transmission effect.

In addition, the vertical probe card disclosed in the embodiment of the present invention is clamped in two adjacent cantilever probes along the width direction, and the abutting portion and the connecting portion of one of the cantilever probes may not be located at all In the height direction, the abutting portion and the connecting portion of the other cantilever probe are all located in the height direction, so that the connecting portion can achieve the effect of cross-arrangement, and thus the fixed section can be The space between the connecting parts of the two cantilever probes can be enlarged when fitted to different adapter plates.

The content disclosed above is only the preferred and feasible embodiments of the present invention, and does not limit the patent scope of the present invention. Therefore, all equivalent technical changes made by using the description and drawings of the present invention are included in the patent scope of the present invention. Inside.

2: Cantilever probe

21: Main section

22: Flanking section

23: fixed segment

231: Connection

232: buffer cantilever

24: Needle test section

241: Abutment Department

242: Needle Test Cantilever

H: height direction

L: length direction

D: width direction

Claims (8)

A vertical probe card with cantilever probes, comprising: a plurality of guide plates stacked on each other in a height direction; and a plurality of cantilever probes positioned on the plurality of guide plates, and each of the guide plates The cantilever probe includes: a main body section that penetrates through a plurality of the guide plates; two side wing sections are formed by extending from opposite sides of the main body section respectively, and the two side wing sections are clamped At least two of the guide plates among the plurality of guide plates; and a needle measuring section and a fixing section, respectively formed by extending from both ends of the main body section in the height direction; the needle measuring The section includes an abutting portion in a suspended shape and a needle cantilever connecting the abutting portion and the main body section; wherein the abutting portions of the plurality of cantilever probes are used to detachably top Against an object to be tested; wherein, the needle test section has a lever arm length in a length direction perpendicular to the height direction, and the abutting portion is spaced apart from the main body section in the height direction An interval smaller than the length of the force arm. The vertical probe card with cantilever probes according to claim 1, wherein one of the guide plates away from the plurality of probe sections can be along the height direction or along the vertical direction A width direction with the length direction passes through the plurality of cantilever probes, and is pressed against the two side wing sections of each of the cantilever probes. The vertical probe card with cantilever probes according to claim 1, wherein, in each of the cantilever probes, the fixing section includes a connecting portion in a suspended shape and connecting the connecting portion Part and a buffer cantilever of the main body section; Wherein, the vertical probe card with cantilever probes includes a space transformer, and the connecting portions of a plurality of cantilever probes are fixed to the adaptor plate. The vertical probe card having a cantilever probe according to claim 3, wherein, in at least one of the cantilever probes of the plurality of cantilever probes, the abutting portion is connected to the cantilever probe The portions are not all located in the height direction, and the abutting portion and the connecting portion are spaced apart in the length direction by an offset distance greater than the pitch. The vertical probe card having a cantilever probe according to claim 3, wherein, in at least one of the cantilever probes of the plurality of cantilever probes, the abutting portion is connected to the cantilever probe Parts are located in the height direction, and when the connecting part abuts against the object to be measured, the probe cantilever and the buffer cantilever are elastically bent, so that the abutting part and the The connecting portion abuts against the main body section. The vertical probe card with cantilever probes according to claim 3, wherein among the two adjacent cantilever probes of the plurality of cantilever probes, one of the cantilever probes The abutting portion and the connecting portion of the needle are not all located in the height direction, and the abutting portion and the connecting portion of the other cantilever probe are all located in the height direction on. The vertical probe card with a cantilever probe according to claim 1, wherein, in each of the cantilever probes, the probe cantilever is recessed and formed with at least one slit along the length direction . The vertical probe card with cantilever probes according to claim 1, wherein, in each of the cantilever probes, the probe section and the fixed section are located along the main body section. Within a projection area formed by orthographic projection in the height direction.

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