CN106086787A - Ti‑TiN+MoS2/Ti叠层复合涂层刀具及其制备工艺 - Google Patents
Ti‑TiN+MoS2/Ti叠层复合涂层刀具及其制备工艺 Download PDFInfo
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- CN106086787A CN106086787A CN201610422788.4A CN201610422788A CN106086787A CN 106086787 A CN106086787 A CN 106086787A CN 201610422788 A CN201610422788 A CN 201610422788A CN 106086787 A CN106086787 A CN 106086787A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0617—AIII BV compounds, where A is Al, Ga, In or Tl and B is N, P, As, Sb or Bi
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0623—Sulfides, selenides or tellurides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
- C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
- C23C28/322—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer only coatings of metal elements only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
- C23C28/347—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with layers adapted for cutting tools or wear applications
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
Abstract
Description
Claims (3)
Priority Applications (1)
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CN201610422788.4A CN106086787B (zh) | 2016-06-15 | 2016-06-15 | Ti-TiN+MoS2/Ti叠层复合涂层刀具及其制备工艺 |
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CN201610422788.4A CN106086787B (zh) | 2016-06-15 | 2016-06-15 | Ti-TiN+MoS2/Ti叠层复合涂层刀具及其制备工艺 |
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CN106086787A true CN106086787A (zh) | 2016-11-09 |
CN106086787B CN106086787B (zh) | 2018-09-28 |
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CN201610422788.4A Active CN106086787B (zh) | 2016-06-15 | 2016-06-15 | Ti-TiN+MoS2/Ti叠层复合涂层刀具及其制备工艺 |
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Cited By (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106893975A (zh) * | 2017-04-27 | 2017-06-27 | 济宁学院 | AlC/AlCN叠层涂层刀具及其制备工艺 |
CN107058951A (zh) * | 2017-04-27 | 2017-08-18 | 济宁学院 | ZrAlC/ZrAlCN叠层复合涂层刀具及其制备工艺 |
CN107119276A (zh) * | 2017-04-27 | 2017-09-01 | 济宁学院 | TiMoC/TiMoCN叠层涂层刀具及其制备方法 |
CN107119275A (zh) * | 2017-04-27 | 2017-09-01 | 济宁学院 | ZrCrC/ZrCrCN叠层复合涂层刀具及其制备工艺 |
CN107119255A (zh) * | 2017-04-27 | 2017-09-01 | 济宁学院 | SiZrC/SiZrCN叠层涂层刀具及其制备工艺 |
CN107177829A (zh) * | 2017-07-03 | 2017-09-19 | 济宁学院 | AlNbC/AlNbCN叠层复合涂层刀具及其制备工艺 |
CN107177828A (zh) * | 2017-07-03 | 2017-09-19 | 济宁学院 | SiZrCN梯度复合涂层刀具及其制备方法 |
CN107177826A (zh) * | 2017-07-03 | 2017-09-19 | 济宁学院 | MoNbC/MoNbCN叠层复合涂层刀具及其制备工艺 |
CN107177825A (zh) * | 2017-07-03 | 2017-09-19 | 济宁学院 | ZrNbC/ZrNbCN叠层涂层刀具及其制备工艺 |
CN107177827A (zh) * | 2017-07-03 | 2017-09-19 | 济宁学院 | SiNbC/SiNbCN叠层复合涂层刀具及其制备工艺 |
CN107338412A (zh) * | 2017-07-03 | 2017-11-10 | 济宁学院 | CrNbC/CrNbCN叠层复合涂层刀具及其制备工艺 |
CN107400866A (zh) * | 2017-07-03 | 2017-11-28 | 济宁学院 | ZrMoC/ZrMoCN叠层涂层刀具及其制备工艺 |
CN107400864A (zh) * | 2017-07-03 | 2017-11-28 | 济宁学院 | AlMoC/AlMoCN叠层涂层刀具及其制备工艺 |
CN107419229A (zh) * | 2017-07-03 | 2017-12-01 | 济宁学院 | CrMoC/CrMoCN叠层涂层刀具及其制备工艺 |
CN108754425A (zh) * | 2018-06-06 | 2018-11-06 | 西安交通大学 | 一种新型防水蚀复合涂层结构 |
CN110735111A (zh) * | 2019-08-16 | 2020-01-31 | 缙云县先锋工具有限公司 | 一种可实现圆锯片干切削的高硬度复合涂层及其制备方法 |
CN111254392A (zh) * | 2019-10-10 | 2020-06-09 | 东南大学 | 一种梯度原位自润滑硬质涂层刀具 |
CN112628381A (zh) * | 2020-12-02 | 2021-04-09 | 东南大学 | 一种温度自适应润滑齿轮及其制备方法 |
CN114101725A (zh) * | 2021-10-20 | 2022-03-01 | 广东工业大学 | 散热金刚石涂层刀具及其制造方法 |
CN115287610A (zh) * | 2022-05-30 | 2022-11-04 | 昆明理工大学 | 一种自润滑涂层及其制备方法和应用 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102161106A (zh) * | 2011-04-01 | 2011-08-24 | 山推工程机械股份有限公司 | Ti-TiN&Ti-MoS2/Ti双刀面涂层刀具及其制备工艺 |
CN102277554A (zh) * | 2011-07-29 | 2011-12-14 | 山推工程机械股份有限公司 | 梯度叠层涂层刀具及其制备方法 |
-
2016
- 2016-06-15 CN CN201610422788.4A patent/CN106086787B/zh active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102161106A (zh) * | 2011-04-01 | 2011-08-24 | 山推工程机械股份有限公司 | Ti-TiN&Ti-MoS2/Ti双刀面涂层刀具及其制备工艺 |
CN102277554A (zh) * | 2011-07-29 | 2011-12-14 | 山推工程机械股份有限公司 | 梯度叠层涂层刀具及其制备方法 |
Cited By (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106893975A (zh) * | 2017-04-27 | 2017-06-27 | 济宁学院 | AlC/AlCN叠层涂层刀具及其制备工艺 |
CN107058951A (zh) * | 2017-04-27 | 2017-08-18 | 济宁学院 | ZrAlC/ZrAlCN叠层复合涂层刀具及其制备工艺 |
CN107119276A (zh) * | 2017-04-27 | 2017-09-01 | 济宁学院 | TiMoC/TiMoCN叠层涂层刀具及其制备方法 |
CN107119275A (zh) * | 2017-04-27 | 2017-09-01 | 济宁学院 | ZrCrC/ZrCrCN叠层复合涂层刀具及其制备工艺 |
CN107119255A (zh) * | 2017-04-27 | 2017-09-01 | 济宁学院 | SiZrC/SiZrCN叠层涂层刀具及其制备工艺 |
CN106893975B (zh) * | 2017-04-27 | 2019-04-19 | 济宁学院 | AlC/AlCN叠层涂层刀具及其制备工艺 |
CN107400864A (zh) * | 2017-07-03 | 2017-11-28 | 济宁学院 | AlMoC/AlMoCN叠层涂层刀具及其制备工艺 |
CN107177829A (zh) * | 2017-07-03 | 2017-09-19 | 济宁学院 | AlNbC/AlNbCN叠层复合涂层刀具及其制备工艺 |
CN107177825A (zh) * | 2017-07-03 | 2017-09-19 | 济宁学院 | ZrNbC/ZrNbCN叠层涂层刀具及其制备工艺 |
CN107177827A (zh) * | 2017-07-03 | 2017-09-19 | 济宁学院 | SiNbC/SiNbCN叠层复合涂层刀具及其制备工艺 |
CN107338412A (zh) * | 2017-07-03 | 2017-11-10 | 济宁学院 | CrNbC/CrNbCN叠层复合涂层刀具及其制备工艺 |
CN107400866A (zh) * | 2017-07-03 | 2017-11-28 | 济宁学院 | ZrMoC/ZrMoCN叠层涂层刀具及其制备工艺 |
CN107177828A (zh) * | 2017-07-03 | 2017-09-19 | 济宁学院 | SiZrCN梯度复合涂层刀具及其制备方法 |
CN107419229A (zh) * | 2017-07-03 | 2017-12-01 | 济宁学院 | CrMoC/CrMoCN叠层涂层刀具及其制备工艺 |
CN107177829B (zh) * | 2017-07-03 | 2019-08-06 | 济宁学院 | AlNbC/AlNbCN叠层复合涂层刀具及其制备工艺 |
CN107177826A (zh) * | 2017-07-03 | 2017-09-19 | 济宁学院 | MoNbC/MoNbCN叠层复合涂层刀具及其制备工艺 |
CN107177826B (zh) * | 2017-07-03 | 2019-05-24 | 济宁学院 | MoNbC/MoNbCN叠层复合涂层刀具及其制备工艺 |
CN108754425A (zh) * | 2018-06-06 | 2018-11-06 | 西安交通大学 | 一种新型防水蚀复合涂层结构 |
CN110735111A (zh) * | 2019-08-16 | 2020-01-31 | 缙云县先锋工具有限公司 | 一种可实现圆锯片干切削的高硬度复合涂层及其制备方法 |
CN110735111B (zh) * | 2019-08-16 | 2021-12-31 | 缙云县先锋工具有限公司 | 一种可实现圆锯片干切削的高硬度复合涂层及其制备方法 |
CN111254392A (zh) * | 2019-10-10 | 2020-06-09 | 东南大学 | 一种梯度原位自润滑硬质涂层刀具 |
CN112628381A (zh) * | 2020-12-02 | 2021-04-09 | 东南大学 | 一种温度自适应润滑齿轮及其制备方法 |
CN114101725A (zh) * | 2021-10-20 | 2022-03-01 | 广东工业大学 | 散热金刚石涂层刀具及其制造方法 |
CN115287610A (zh) * | 2022-05-30 | 2022-11-04 | 昆明理工大学 | 一种自润滑涂层及其制备方法和应用 |
CN115287610B (zh) * | 2022-05-30 | 2023-09-08 | 昆明理工大学 | 一种自润滑涂层及其制备方法和应用 |
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