CN106053883B - 物理量传感器、电子设备以及移动体 - Google Patents

物理量传感器、电子设备以及移动体 Download PDF

Info

Publication number
CN106053883B
CN106053883B CN201610221727.1A CN201610221727A CN106053883B CN 106053883 B CN106053883 B CN 106053883B CN 201610221727 A CN201610221727 A CN 201610221727A CN 106053883 B CN106053883 B CN 106053883B
Authority
CN
China
Prior art keywords
detection element
angular velocity
signal
acceleration
physical quantity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201610221727.1A
Other languages
English (en)
Chinese (zh)
Other versions
CN106053883A (zh
Inventor
井出次男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to CN202011019596.1A priority Critical patent/CN112162114A/zh
Publication of CN106053883A publication Critical patent/CN106053883A/zh
Application granted granted Critical
Publication of CN106053883B publication Critical patent/CN106053883B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5783—Mountings or housings not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/42—Devices characterised by the use of electric or magnetic means
    • G01P3/44—Devices characterised by the use of electric or magnetic means for measuring angular speed

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
CN201610221727.1A 2015-04-13 2016-04-11 物理量传感器、电子设备以及移动体 Active CN106053883B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202011019596.1A CN112162114A (zh) 2015-04-13 2016-04-11 物理量传感器、电子设备以及移动体

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015-081499 2015-04-13
JP2015081499A JP6572603B2 (ja) 2015-04-13 2015-04-13 物理量センサー、電子機器および移動体

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN202011019596.1A Division CN112162114A (zh) 2015-04-13 2016-04-11 物理量传感器、电子设备以及移动体

Publications (2)

Publication Number Publication Date
CN106053883A CN106053883A (zh) 2016-10-26
CN106053883B true CN106053883B (zh) 2020-10-20

Family

ID=57111759

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201610221727.1A Active CN106053883B (zh) 2015-04-13 2016-04-11 物理量传感器、电子设备以及移动体
CN202011019596.1A Pending CN112162114A (zh) 2015-04-13 2016-04-11 物理量传感器、电子设备以及移动体

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN202011019596.1A Pending CN112162114A (zh) 2015-04-13 2016-04-11 物理量传感器、电子设备以及移动体

Country Status (3)

Country Link
US (1) US10563983B2 (enExample)
JP (1) JP6572603B2 (enExample)
CN (2) CN106053883B (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6372450B2 (ja) * 2015-08-21 2018-08-15 株式会社デンソー 複合センサ
JP6641878B2 (ja) 2015-10-21 2020-02-05 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
CN111108413A (zh) * 2017-08-25 2020-05-05 尹迪泰特有限责任公司 具有传感器的移动设备
JP2019128304A (ja) * 2018-01-26 2019-08-01 セイコーエプソン株式会社 物理量センサー、慣性計測ユニット、電子機器、携帯型電子機器、および移動体
WO2020195386A1 (ja) * 2019-03-27 2020-10-01 パナソニックＩｐマネジメント株式会社 物理量センサ
JP7251385B2 (ja) * 2019-07-30 2023-04-04 セイコーエプソン株式会社 振動デバイス、電子機器および移動体

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10239064A (ja) * 1997-02-27 1998-09-11 Matsushita Electric Ind Co Ltd 角速度と加速度の複合センサ
WO2003001150A1 (en) * 2001-06-25 2003-01-03 Matsushita Electric Industrial Co., Ltd. Composite sensor for detecting angular velocity and acceleration
CN1908790A (zh) * 2005-08-05 2007-02-07 精工爱普生株式会社 电光装置及具备该装置的电子设备
CN101806812A (zh) * 2009-02-17 2010-08-18 精工爱普生株式会社 复合传感器、电子设备
CN102315199A (zh) * 2010-07-08 2012-01-11 索尼公司 模块和便携式终端
JP2012168097A (ja) * 2011-02-16 2012-09-06 Hitachi Automotive Systems Ltd 複合センサ
CN102954806A (zh) * 2011-08-17 2013-03-06 精工爱普生株式会社 物理量传感器及电子设备
JP2014006182A (ja) * 2012-06-26 2014-01-16 Hitachi Automotive Systems Ltd 慣性センサ
CN104121935A (zh) * 2013-04-23 2014-10-29 精工爱普生株式会社 物理量传感器、电子设备以及移动体

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10040511A1 (de) * 2000-03-09 2001-09-20 Continental Teves Ag & Co Ohg Anordnung und Vorrichtung zur Erfassung von Gierbewegungen
WO2001066395A1 (de) 2000-03-09 2001-09-13 Continental Teves Ag & Co. Ohg Anordnung und vorrichtung zur erfassung von gierbewegungen mittels redundanter messkanäle
US6935011B2 (en) * 2002-08-05 2005-08-30 Visteon Global Technologies, Inc. Method of forming a stator for a brushless motor
JP4238724B2 (ja) * 2003-03-27 2009-03-18 株式会社デンソー 半導体装置
JP2008076264A (ja) * 2006-09-22 2008-04-03 Matsushita Electric Ind Co Ltd 複合センサ
EP2187168A4 (en) 2007-09-03 2013-04-03 Panasonic Corp INERTIA FORCE SENSOR
US8080925B2 (en) * 2008-09-23 2011-12-20 Custom Sensors & Technologies, Inc. Inertial sensor with dual cavity package and method of fabrication
US8095191B2 (en) * 2009-07-06 2012-01-10 Motorola Mobility, Inc. Detection and function of seven self-supported orientations in a portable device
US8936959B1 (en) * 2010-02-27 2015-01-20 MCube Inc. Integrated rf MEMS, control systems and methods
JP6167474B2 (ja) * 2012-04-11 2017-07-26 セイコーエプソン株式会社 センサーデバイスおよび電子機器
JP6476869B2 (ja) * 2015-01-06 2019-03-06 セイコーエプソン株式会社 電子デバイス、電子機器および移動体

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10239064A (ja) * 1997-02-27 1998-09-11 Matsushita Electric Ind Co Ltd 角速度と加速度の複合センサ
WO2003001150A1 (en) * 2001-06-25 2003-01-03 Matsushita Electric Industrial Co., Ltd. Composite sensor for detecting angular velocity and acceleration
CN1908790A (zh) * 2005-08-05 2007-02-07 精工爱普生株式会社 电光装置及具备该装置的电子设备
CN101806812A (zh) * 2009-02-17 2010-08-18 精工爱普生株式会社 复合传感器、电子设备
CN102315199A (zh) * 2010-07-08 2012-01-11 索尼公司 模块和便携式终端
JP2012168097A (ja) * 2011-02-16 2012-09-06 Hitachi Automotive Systems Ltd 複合センサ
CN102954806A (zh) * 2011-08-17 2013-03-06 精工爱普生株式会社 物理量传感器及电子设备
JP2014006182A (ja) * 2012-06-26 2014-01-16 Hitachi Automotive Systems Ltd 慣性センサ
CN104121935A (zh) * 2013-04-23 2014-10-29 精工爱普生株式会社 物理量传感器、电子设备以及移动体

Also Published As

Publication number Publication date
US20160298964A1 (en) 2016-10-13
CN112162114A (zh) 2021-01-01
CN106053883A (zh) 2016-10-26
JP2016200526A (ja) 2016-12-01
US10563983B2 (en) 2020-02-18
JP6572603B2 (ja) 2019-09-11

Similar Documents

Publication Publication Date Title
CN107010588B (zh) 物理量传感器以及物理量传感器的制造方法
CN105758395B (zh) 物理量传感器、电子设备以及移动体
CN106338620B (zh) 物理量传感器、物理量传感器装置、电子设备以及移动体
US20170199217A1 (en) Electronic device, method for manufacturing electronic device, and physical-quantity sensor
CN110082565B (zh) 物理量传感器、电子设备以及移动体
CN107063313A (zh) 物理量传感器、传感器器件、电子设备以及移动体
CN107063335B (zh) 物理量传感器、电子设备以及移动体
US10563983B2 (en) Physical quantity sensor, electronic apparatus, and moving object
JP2019035589A (ja) 物理量センサー、慣性計測ユニット、電子機器、および移動体
JP2021032831A (ja) 振動デバイス、電子機器および移動体
CN106352861A (zh) 电子装置、电子设备以及移动体
CN112311348A (zh) 振动器件、电子设备以及移动体
US10073114B2 (en) Physical quantity sensor, physical quantity sensor apparatus, electronic device, and mobile body
US9243908B2 (en) Gyro sensor and electronic apparatus
JP6167474B2 (ja) センサーデバイスおよび電子機器
JP2013181957A (ja) ジャイロセンサーおよび電子機器
JP6922325B2 (ja) 物理量センサー、物理量センサーデバイス、電子機器および移動体
JP6398730B2 (ja) 物理量センサー、物理量センサーの製造方法、電子機器および移動体
JP6488639B2 (ja) 電子デバイス、電子機器および移動体
JP2021021687A (ja) 振動デバイス、電子機器および移動体
JP6488640B2 (ja) 電子デバイス、電子機器および移動体
JP6443058B2 (ja) 物理量センサー、電子機器および移動体
JP2016170002A (ja) ジャイロモジュール、電子機器及び移動体
JP6492535B2 (ja) 物理量センサー、電子機器および移動体
JP2016044977A (ja) センサー素子、センサーデバイス、電子機器および移動体

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant