CN105818537B - 元件基板及液体喷出头 - Google Patents

元件基板及液体喷出头 Download PDF

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Publication number
CN105818537B
CN105818537B CN201610045927.6A CN201610045927A CN105818537B CN 105818537 B CN105818537 B CN 105818537B CN 201610045927 A CN201610045927 A CN 201610045927A CN 105818537 B CN105818537 B CN 105818537B
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CN
China
Prior art keywords
electrical wiring
resistance element
heating resistance
wiring layer
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201610045927.6A
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English (en)
Chinese (zh)
Other versions
CN105818537A (zh
Inventor
葛西亮
平山信之
樱井将贵
梅田谦吾
和秀宪
高木诚
乡田达人
佐久间贞好
铃木伸幸
江藤徹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to CN201810154140.2A priority Critical patent/CN108372722B/zh
Publication of CN105818537A publication Critical patent/CN105818537A/zh
Application granted granted Critical
Publication of CN105818537B publication Critical patent/CN105818537B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/05—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers produced by the application of heat
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means

Landscapes

  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
CN201610045927.6A 2015-01-27 2016-01-22 元件基板及液体喷出头 Active CN105818537B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810154140.2A CN108372722B (zh) 2015-01-27 2016-01-22 元件基板及液体喷出头

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2015013197 2015-01-27
JP2015-013197 2015-01-27
JP2015-233689 2015-11-30
JP2015233689A JP6598658B2 (ja) 2015-01-27 2015-11-30 液体吐出ヘッドの素子基板及び液体吐出ヘッド

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN201810154140.2A Division CN108372722B (zh) 2015-01-27 2016-01-22 元件基板及液体喷出头

Publications (2)

Publication Number Publication Date
CN105818537A CN105818537A (zh) 2016-08-03
CN105818537B true CN105818537B (zh) 2018-03-06

Family

ID=56559802

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201610045927.6A Active CN105818537B (zh) 2015-01-27 2016-01-22 元件基板及液体喷出头
CN201810154140.2A Active CN108372722B (zh) 2015-01-27 2016-01-22 元件基板及液体喷出头

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201810154140.2A Active CN108372722B (zh) 2015-01-27 2016-01-22 元件基板及液体喷出头

Country Status (5)

Country Link
JP (1) JP6598658B2 (enExample)
CN (2) CN105818537B (enExample)
RU (1) RU2645565C2 (enExample)
SG (1) SG10201600629QA (enExample)
TW (1) TWI610820B (enExample)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018150830A1 (en) 2017-02-17 2018-08-23 Canon Kabushiki Kaisha Liquid discharge head substrate, method of manufacturing the same, liquid discharge head, and liquid discharge apparatus
JP2018130942A (ja) * 2017-02-17 2018-08-23 キヤノン株式会社 液体吐出ヘッド用基板の製造方法
JP7037334B2 (ja) 2017-02-17 2022-03-16 キヤノン株式会社 液体吐出ヘッド用基板、その製造方法、液体吐出ヘッド及び液体吐出装置
US10300698B2 (en) 2017-06-05 2019-05-28 Canon Kabushiki Kaisha Liquid ejection head
JP6625158B2 (ja) * 2017-06-05 2019-12-25 キヤノン株式会社 液体吐出ヘッド
JP6942537B2 (ja) * 2017-06-29 2021-09-29 キヤノン株式会社 液体吐出ヘッド
EP3470228B1 (en) * 2017-10-11 2021-06-30 Canon Kabushiki Kaisha Element substrate, manufacturing method thereof, printhead, and printing apparatus
JP7005376B2 (ja) 2018-02-15 2022-01-21 キヤノン株式会社 素子基板、記録ヘッド、及び記録装置
JP6701255B2 (ja) * 2018-04-12 2020-05-27 キヤノン株式会社 液体吐出ヘッド基板、液体吐出ヘッド、液体吐出装置、および、液体吐出ヘッド基板の製造方法
JP7114380B2 (ja) * 2018-07-20 2022-08-08 キヤノン株式会社 素子基板および液体吐出ヘッド
EP3857599A4 (en) * 2018-09-24 2022-04-20 Hewlett-Packard Development Company, L.P. RELATED FIELD EFFECT TRANSISTORS
JP7171426B2 (ja) * 2018-12-27 2022-11-15 キヤノン株式会社 液体吐出ヘッドおよびその製造方法と液体吐出装置
JP7344669B2 (ja) * 2019-04-23 2023-09-14 キヤノン株式会社 素子基板、液体吐出ヘッド、及び記録装置
JP7328787B2 (ja) 2019-04-23 2023-08-17 キヤノン株式会社 素子基板、液体吐出ヘッド、及び記録装置
JP7465096B2 (ja) * 2020-01-20 2024-04-10 キヤノン株式会社 素子基板、液体吐出ヘッド、及び記録装置
JP2021187121A (ja) 2020-06-03 2021-12-13 キヤノン株式会社 素子基板、液体吐出ヘッド、及び記録装置
JP2022078883A (ja) 2020-11-13 2022-05-25 キヤノン株式会社 液体吐出ヘッド用基板、及び液体吐出ヘッド
JP7543096B2 (ja) 2020-11-13 2024-09-02 キヤノン株式会社 液体吐出ヘッド用基板、及び液体吐出ヘッド
US12064965B2 (en) 2021-09-03 2024-08-20 Canon Kabushiki Kaisha Element substrate and print head

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0924080A2 (en) * 1997-12-22 1999-06-23 Canon Kabushiki Kaisha Ink jet recording head, substrate used for such a head, ink jet head cartridge, and ink jet recording apparatus
US6382782B1 (en) * 2000-12-29 2002-05-07 Eastman Kodak Company CMOS/MEMS integrated ink jet print head with oxide based lateral flow nozzle architecture and method of forming same
CN1863676A (zh) * 2003-08-28 2006-11-15 索尼株式会社 液体喷射头、液体喷射装置以及液体喷射头的制造方法
US20080309731A1 (en) * 2007-06-15 2008-12-18 Canon Kabushiki Kaisha Ink jet printing head
US20100149280A1 (en) * 2008-12-15 2010-06-17 Canon Kabushiki Kaisha Substrate for ink ejection heads, ink ejection head, method ofmanufacturing substrate, and method of manufacturing ink ejection head
CN101844442A (zh) * 2009-03-25 2010-09-29 佳能株式会社 记录元件基板、制造该记录元件基板的方法和液体喷射头
CN102009527A (zh) * 2009-09-04 2011-04-13 佳能株式会社 制造液体排出头基材的方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2708557B2 (ja) * 1988-07-26 1998-02-04 キヤノン株式会社 液体噴射記録ヘッド用素子基板，液体噴射記録ヘッド，ヘッドカートリッジおよび記録装置
JP2005205891A (ja) * 2003-12-26 2005-08-04 Canon Inc インクジェットヘッド用の基体、インクジェットヘッド、該インクジェットヘッドの駆動方法およびインクジェット記録装置
KR100553914B1 (ko) * 2004-01-29 2006-02-24 삼성전자주식회사 잉크젯 프린트헤드 및 그 제조방법
KR100717023B1 (ko) * 2005-08-27 2007-05-10 삼성전자주식회사 잉크젯 프린트헤드 및 그 제조방법
JP2010023397A (ja) * 2008-07-23 2010-02-04 Canon Finetech Inc 液体吐出ヘッド
JP6222968B2 (ja) * 2013-04-09 2017-11-01 キヤノン株式会社 液体吐出ヘッド、液体吐出ヘッドのクリーニング方法、液体吐出装置
JP6289234B2 (ja) * 2014-04-15 2018-03-07 キヤノン株式会社 記録素子基板及び液体吐出装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0924080A2 (en) * 1997-12-22 1999-06-23 Canon Kabushiki Kaisha Ink jet recording head, substrate used for such a head, ink jet head cartridge, and ink jet recording apparatus
US6382782B1 (en) * 2000-12-29 2002-05-07 Eastman Kodak Company CMOS/MEMS integrated ink jet print head with oxide based lateral flow nozzle architecture and method of forming same
CN1863676A (zh) * 2003-08-28 2006-11-15 索尼株式会社 液体喷射头、液体喷射装置以及液体喷射头的制造方法
US20080309731A1 (en) * 2007-06-15 2008-12-18 Canon Kabushiki Kaisha Ink jet printing head
US20100149280A1 (en) * 2008-12-15 2010-06-17 Canon Kabushiki Kaisha Substrate for ink ejection heads, ink ejection head, method ofmanufacturing substrate, and method of manufacturing ink ejection head
CN101844442A (zh) * 2009-03-25 2010-09-29 佳能株式会社 记录元件基板、制造该记录元件基板的方法和液体喷射头
CN102009527A (zh) * 2009-09-04 2011-04-13 佳能株式会社 制造液体排出头基材的方法

Also Published As

Publication number Publication date
CN108372722B (zh) 2020-04-21
RU2016102322A (ru) 2017-08-01
SG10201600629QA (en) 2016-08-30
RU2645565C2 (ru) 2018-02-21
CN108372722A (zh) 2018-08-07
TWI610820B (zh) 2018-01-11
JP6598658B2 (ja) 2019-10-30
CN105818537A (zh) 2016-08-03
JP2016137705A (ja) 2016-08-04
TW201632362A (zh) 2016-09-16

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