CN105683064B - 物品的支承装置以及向支承装置载置两种物品的载置方法 - Google Patents
物品的支承装置以及向支承装置载置两种物品的载置方法 Download PDFInfo
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Abstract
本发明提供能够一并定位并载置大小不同的两种物品的支承装置。在支承装置的载置面载置第一物品(20)、以及底部比第一物品(20)大的第二物品(30)。设置有从载置面突出对第一物品(20)的底部进行定位的第一定位部件(10)、以及从载置面突出对第二物品(30)进行定位的第二定位部件(12)。第一定位部件(10)配置于在利用第二定位部件(12)将第二物品(30)定位于载置面上时不与第二物品(30)发生干涉的位置,第二定位部件(12)配置于在利用第一定位部件(10)将第一物品(20)定位于载置面上时不与第一物品(20)发生干涉的位置。
Description
技术领域
本发明涉及能够一并定位大小不同的两种物品并且将其向支承装置上载置。
背景技术
针对大小不同的两种物品,若能够共用支承装置,则很便利。例如在处理大小不同的两种半导体晶圆的工厂中,与晶圆对应地产生两种容器,若能够通过相同的支承装置支承它们,则很便利。这些容器在底部的三个位置具备剖面呈V字状的槽,通常,使设置于支承装置的三根销与槽耦合而进行定位。若使用该槽定位容器,则只能够定位一方的物品。因此,与容器相配合需要两种支承装置,没有效率。
对相关的现有技术进行表示。专利文献1(日本特开2007-287877)提出了一种搬运系统,其通过将小的物品的容器收纳于大的物品的容器内进行搬运从而能够搬运大小两种物品。
专利文献1:日本特开2007-287877
发明内容
本发明的课题在于提供能够一并定位并载置大小不同的两种物品的支承装置与载置方法。
本发明的物品的支承装置,是载置多种物品的支承装置,
其特征在于,具备:
载置面,其能够一并载置第一物品、以及底部比上述第一物品大的第二物品;
第一定位部件,其从上述载置面突出,对上述第一物品的底部进行定位;以及
第二定位部件,其从上述载置面突出,对上述第二物品进行定位,
上述第一定位部件配置于在利用上述第二定位部件将上述第二物品定位于载置面上时不与上述第二物品发生干涉的位置,
上述第二定位部件配置于在利用上述第一定位部件将上述第一物品定位于载置面上时不与上述第一物品发生干涉的位置。
本发明的两种物品的载置方法,是在支承装置上载置多种物品的方法,
其特征在于,
上述支承装置具备:载置面,其能够一并载置第一物品、以及底部比上述第一物品大的第二物品;以及第一定位部件与第二定位部件,它们均从上述载置面突出,
进行避免第二定位部件与第一物品发生干涉同时利用第一定位部件定位第一物品而将第一物品载置于载置面上的步骤、以及避免第一定位部件与第二物品发生干涉同时利用第二定位部件定位第二物品而将第二物品载置于载置面上的步骤。
本发明的第一定位部件避免与第二物品的接触同时定位第一物品。另外,第二定位部件避免与第一物品的接触同时定位第二物品。因此,能够将一个支承装置共用于第一物品的支承与第二物品的支承。第一物品与第二物品例如均是收纳半导体晶圆的容器,与第一物品相比,第二物品收纳直径更大的半导体晶圆。
优选,上述第一定位部件为从载置面突出的至少一对销,且与上述第一物品的底部的孔卡合,并且进入上述第二物品的底部的凹部内而不与第二物品接触。这样的话,能够不妨碍第二物品的定位地简单地定位并载置第一物品。
另外,优选,上述第二定位部件为从载置面突出的至少一对引导部件,且构成为引导上述第二物品的底部的外周。由于第二物品的底部比第一物品大,所以若以引导底部的外周的方式设置第二定位部件,则不会与第一物品发生干涉。而且,通过利用至少一对引导部件进行引导,能够可靠地定位第二物品。例如一对引导部件构成为分别具备倾斜方向不同的一对锥形面,并且利用一对锥形面来引导第二物品的底部外周的角部。
尤其是优选,上述第一定位部件为从载置面突出的至少一对销,且与上述第一物品的底部的孔卡合,并且进入呈放射状设置于上述第二物品的底部的例如3个定位用的槽内而不与第二物品接触。在第二物品具备定位用的槽的情况下,能够在进入该槽的位置并且以与第一物品的底部的孔卡合的方式设置销。因此,能够不与第二物品发生干涉地可靠地定位第一物品。尤其是优选,上述第一物品在底部呈放射状地具备例如3个定位用的槽,支承装置构成为以既不与上述第一物品的定位用的槽接触也不与上述第二物品的定位用的槽接触的方式,定位上述第一物品的底部和上述第二物品的底部。
附图说明
图1是表示排列有实施例的支承装置的状态的俯视图。
图2是沿着图1的II-II方向剖面表示在支承装置上载置有第一物品的状态的主要部分的剖视图。
图3是沿着图1的III-III方向剖面表示在支承装置上载置有第二物品的状态的主要部分的剖视图。
图4是表示第二物体的定位的局部俯视图。
图5是使用了实施例的支承装置的储料器的俯视图。
具体实施方式
以下表示用于实施本发明的最优实施例。本发明的范围应基于权利要求书的记载,参考说明书的记载与本领域的公知技术,根据本领域技术人员的理解来确定。
图1~图5表示实施例的支承装置2与使用了支承装置2的储料器50。图1表示排列于储料器内的支承装置2,支承装置2安装于储料器50的支柱4,并且沿上下左右排列。支承装置2为板状,具备与支柱4相反的一侧的开口6、开口6的两侧的载置面8、8、以及靠近支柱4的载置面9。在载置面8、8设置有销10与锥形片12,支承装置2具备一对销10、10与一对锥形片12、12。此外,在本说明书中,从支承装置2观察,将支柱4侧称为里侧,将开口6的前端侧称为近前,销10处于比锥形片12靠近里侧的位置,并且处于接近开口6的位置。此外,也可以将销10、锥形片12各设置三个以上。特别是若除了将锥形片12设置于支承装置2的近前侧的两个位置之外还设置于里侧的两个位置,而利用锥形片12将物品30的角落定位于四个位置,则物品30的定位精度提高。但是,也可以如实施例那样将锥形片12仅设置于支承装置2的近前侧的两个位置。
20为第一物品,30为第二物品,第一物品20(以下简单地称为物品20)例如为收纳半导体用的300mm晶圆的容器,第二物品30(以下简单地称为物品30)例如为收纳半导体用的450mm晶圆的容器。此外,物品20、30的种类任意,物品30的底部比物品20大,并且物品20只要能够不与锥形片12、12发生干涉地利用销10、10定位即可,物品20只要能够不与销10、10发生干涉地利用锥形片12、12定位即可。21、31为物品20、30的头部,用于供桥式吊车等把持物品20、30。22、32为门,用于相对于物品20、30存取晶圆。
物品20、30具备定位槽24、34,在本来的规格中,使支承装置侧的未图示的销运动耦合而定位于槽24、34,槽24、34的与槽的长边方向成直角的剖面呈V字形。然而,若利用槽24、34进行定位,则只能够将物品20、30中的一方载置于支承装置2上。因此,使载置面8、8上的销10卡合于设置在物品20的底部的孔,来对物品20进行定位。另外,对于物品30,利用载置面8、8上的锥形片12来定位物品30的角部36。
图2表示物品20的定位。通常,在作为300mm晶圆用的容器的物品20设置有一对孔26用于与被称为叉车销(forklift pin)的销进行卡合。而且,以与该孔26、26卡合的方式设置销10、10。若选择设置销10的位置与在支承装置2上载置物品30的位置,则能够将销10配置在物品30的定位槽34内,而不与物品30发生干涉。图3表示该状况。此外,25、35为物品20、30内的支架,W1、W2为载置于支架25、30的半导体晶圆。
由于使用物品30的定位槽34以避免与销10发生干涉,所以利用锥形片12、12定位物品30的门32侧的一对角部36、36。图4表示该状况,锥形片12具备沿左右方向倾斜的锥形面14、与从近前侧向里侧下降的锥形面15。通过利用左右一对锥形片12、12引导一对角部36、36,能够定位物品30。此外,并不限定于角部36,能够将物品30的底部外周的任意凹凸用于定位。
支承装置2能够用于载置物品20、30的任意用途,例如若作为储料器50的托架来使用,则能够获得共用于300mm晶圆与450mm晶圆的储料器50。搬运装置52在中央的搬运空间51移动,并在其与支承装置2之间交接物品。另外,支承装置2遍及多层排列于搬运空间51的两侧。搬运装置52的种类任意,例如在台车53上设置杆56,使移载用的手部(hand)54的驱动装置升降。手部54可以共用于物品20、30,还可以对物品20、30的每一个分别设置专用的手部。并且,也可以对物品20、30的每一个分别设置其他搬运装置。
附图标记说明:
2…支承装置;4…支柱;6…开口;8、9…载置面;10…销;12…锥形片;14、15…锥形面;20…第一物品;30…第二物品;21、31…头部;22、32…门;24、34…定位槽;25、35…支架;26…孔;36…角部;50…储料器;51…搬运空间;52…搬运装置;53…台车;54…手部;56…杆;W1、W2…半导体晶圆。
Claims (5)
1.一种物品的支承装置,其是载置多种物品的支承装置,
其特征在于,具备:
载置面,其能够一并载置第一物品、以及底部比所述第一物品大的第二物品;
第一定位部件,其由从所述载置面突出的一对销构成,通过与所述第一物品的底部的一对孔卡合而定位所述第一物品的底部,并且在将所述第二物品定位于载置面上时,进入呈放射状设置于所述第二物品的底部的一对定位用的槽内,而不与第二物品发生干涉;
第二定位部件,其从所述载置面突出,对所述第二物品进行定位,
所述第二定位部件配置于在利用所述第一定位部件将所述第一物品定位于载置面上时不与所述第一物品发生干涉的位置,
所述第二定位部件为从载置面突出的至少一对引导部件,且构成为引导所述第二物品的底部的外周,
在对所述第一物品定位时与所述一对孔卡合的一对销,在对第二物品定位时,与所述第二物品被一对引导部件定位的状态下的所述一对定位用的槽在俯视视角中一致,
并且所述一对定位用的槽的深度尺寸比所述一对销的高度尺寸大,所述一对定位用的槽的宽度尺寸比所述一对销的宽度尺寸大。
2.根据权利要求1所述的物品的支承装置,其特征在于,
所述一对引导部件构成为分别具备倾斜方向不同的一对锥形面,并且利用一对锥形面来引导所述第二物品的底部外周的角部。
3.根据权利要求2所述的物品的支承装置,其特征在于,
所述第一物品与所述第二物品均为收纳半导体晶圆的容器,与所述第一物品相比,所述第二物品收纳直径更大的半导体晶圆。
4.根据权利要求3所述的物品的支承装置,其特征在于,
所述第一物品在底部呈放射状地具备定位用的槽,
构成为以既不与所述第一物品的定位用的槽接触也不与所述第二物品的定位用的槽接触的方式,定位所述第一物品的底部和所述第二物品的底部。
5.一种向支承装置载置两种物品的载置方法,其是在支承装置上载置多种物品的方法,
其特征在于,
所述支承装置具备:载置面,其能够一并载置第一物品、以及底部比所述第一物品大的第二物品;以及第一定位部件与第二定位部件,它们均从所述载置面突出,
所述第一定位部件由从载置面突出的一对销构成,与所述第一物品的底部的一对孔卡合,并且在将所述第二物品定位于载置面上时,进入呈放射状设置于所述第二物品的底部的一对定位用的槽内,而不与第二物品发生干涉,
进行避免第二定位部件与第一物品发生干涉同时利用第一定位部件定位第一物品而将第一物品载置于载置面上的步骤、以及避免第一定位部件与第二物品发生干涉同时利用第二定位部件定位第二物品而将第二物品载置于载置面上的步骤,
所述第二定位部件由从载置面突出的至少一对引导部件构成,且构成为引导所述第二物品的底部的外周,
在对第一物品定位时与一对孔卡合的一对销,在对第二物品定位时,与所述第二物品被一对引导部件定位的状态下的所述一对定位用的槽在俯视视角中一致,
并且所述一对定位用的槽的深度尺寸比所述一对销的高度尺寸大,所述一对定位用的槽的宽度尺寸比所述一对销的宽度尺寸大。
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